JP4536409B2 - 確実な読み取りシステム - Google Patents
確実な読み取りシステム Download PDFInfo
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- JP4536409B2 JP4536409B2 JP2004111383A JP2004111383A JP4536409B2 JP 4536409 B2 JP4536409 B2 JP 4536409B2 JP 2004111383 A JP2004111383 A JP 2004111383A JP 2004111383 A JP2004111383 A JP 2004111383A JP 4536409 B2 JP4536409 B2 JP 4536409B2
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- 239000004065 semiconductor Substances 0.000 claims description 28
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- LLHKCFNBLRBOGN-UHFFFAOYSA-N propylene glycol methyl ether acetate Chemical compound COCC(C)OC(C)=O LLHKCFNBLRBOGN-UHFFFAOYSA-N 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 235000012431 wafers Nutrition 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
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- 239000002210 silicon-based material Substances 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 239000013077 target material Substances 0.000 description 1
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/6715—Apparatus for applying a liquid, a resin, an ink or the like
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B67—OPENING, CLOSING OR CLEANING BOTTLES, JARS OR SIMILAR CONTAINERS; LIQUID HANDLING
- B67D—DISPENSING, DELIVERING OR TRANSFERRING LIQUIDS, NOT OTHERWISE PROVIDED FOR
- B67D7/00—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes
- B67D7/02—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes for transferring liquids other than fuel or lubricants
- B67D7/0277—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes for transferring liquids other than fuel or lubricants using negative pressure
- B67D7/0283—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes for transferring liquids other than fuel or lubricants using negative pressure specially adapted for transferring liquids of high purity
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B67—OPENING, CLOSING OR CLEANING BOTTLES, JARS OR SIMILAR CONTAINERS; LIQUID HANDLING
- B67D—DISPENSING, DELIVERING OR TRANSFERRING LIQUIDS, NOT OTHERWISE PROVIDED FOR
- B67D7/00—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes
- B67D7/06—Details or accessories
- B67D7/32—Arrangements of safety or warning devices; Means for preventing unauthorised delivery of liquid
- B67D7/34—Means for preventing unauthorised delivery of liquid
- B67D7/344—Means for preventing unauthorised delivery of liquid by checking a correct coupling or coded information
- B67D7/348—Means for preventing unauthorised delivery of liquid by checking a correct coupling or coded information by interrogating an information transmitter, e.g. a transponder
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06K—GRAPHICAL DATA READING; PRESENTATION OF DATA; RECORD CARRIERS; HANDLING RECORD CARRIERS
- G06K19/00—Record carriers for use with machines and with at least a part designed to carry digital markings
- G06K19/06—Record carriers for use with machines and with at least a part designed to carry digital markings characterised by the kind of the digital marking, e.g. shape, nature, code
- G06K19/067—Record carriers with conductive marks, printed circuits or semiconductor circuit elements, e.g. credit or identity cards also with resonating or responding marks without active components
- G06K19/07—Record carriers with conductive marks, printed circuits or semiconductor circuit elements, e.g. credit or identity cards also with resonating or responding marks without active components with integrated circuit chips
- G06K19/077—Constructional details, e.g. mounting of circuits in the carrier
- G06K19/07749—Constructional details, e.g. mounting of circuits in the carrier the record carrier being capable of non-contact communication, e.g. constructional details of the antenna of a non-contact smart card
- G06K19/07758—Constructional details, e.g. mounting of circuits in the carrier the record carrier being capable of non-contact communication, e.g. constructional details of the antenna of a non-contact smart card arrangements for adhering the record carrier to further objects or living beings, functioning as an identification tag
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06K—GRAPHICAL DATA READING; PRESENTATION OF DATA; RECORD CARRIERS; HANDLING RECORD CARRIERS
- G06K19/00—Record carriers for use with machines and with at least a part designed to carry digital markings
- G06K19/06—Record carriers for use with machines and with at least a part designed to carry digital markings characterised by the kind of the digital marking, e.g. shape, nature, code
- G06K19/067—Record carriers with conductive marks, printed circuits or semiconductor circuit elements, e.g. credit or identity cards also with resonating or responding marks without active components
- G06K19/07—Record carriers with conductive marks, printed circuits or semiconductor circuit elements, e.g. credit or identity cards also with resonating or responding marks without active components with integrated circuit chips
- G06K19/077—Constructional details, e.g. mounting of circuits in the carrier
- G06K19/07749—Constructional details, e.g. mounting of circuits in the carrier the record carrier being capable of non-contact communication, e.g. constructional details of the antenna of a non-contact smart card
- G06K19/07758—Constructional details, e.g. mounting of circuits in the carrier the record carrier being capable of non-contact communication, e.g. constructional details of the antenna of a non-contact smart card arrangements for adhering the record carrier to further objects or living beings, functioning as an identification tag
- G06K19/07762—Constructional details, e.g. mounting of circuits in the carrier the record carrier being capable of non-contact communication, e.g. constructional details of the antenna of a non-contact smart card arrangements for adhering the record carrier to further objects or living beings, functioning as an identification tag the adhering arrangement making the record carrier wearable, e.g. having the form of a ring, watch, glove or bracelet
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67282—Marking devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67294—Apparatus for monitoring, sorting or marking using identification means, e.g. labels on substrates or labels on containers
Landscapes
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Physics & Mathematics (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Physics & Mathematics (AREA)
- Power Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Mechanical Engineering (AREA)
- Theoretical Computer Science (AREA)
- Details Of Rigid Or Semi-Rigid Containers (AREA)
- Arrangements For Transmission Of Measured Signals (AREA)
- Closures For Containers (AREA)
- Coating Apparatus (AREA)
- Conveying Record Carriers (AREA)
- Testing Resistance To Weather, Investigating Materials By Mechanical Methods (AREA)
Description
記載の実施形態は、読み取りまたは追跡システムに関する。特に、実施形態は、確実且つ適正な読み取りを確保にする構成を採用した読み取りシステムに関する。また、実施形態は、1つの読み取りまたは追跡アイテムから別のアイテムへの特性の変化を捕らえる構成に関する。
半導体デバイスの製造において、様々な目的の材料を半導体基板上に堆積する。半導体基板は二酸化シリコンなどの単結晶シリコン材料のウエハであることが多い。その上に堆積した材料には、半導体基板のトレンチ内に金属線または他の回路構成を形成するための銅、アルミニウムおよび他の金属がある。製造プロセス中に半導体基板上にさらに回路構成および材料層を形成する場合もある。
確実な読み取りシステムの特定の構成を参照して、以下に実施形態を説明する。特に、フォトレジスト材料を含む容器アセンブリの信頼性および保全性を確保するのに役立つ構成を説明する。さらに、塗布パラメータの連続的な補正を可能にして、フォトレジスト材料の1つのバッチまたは容器から次のバッチまたは容器へ変わる際に、フォトレジスト材料タイプの特性のいかなる変化にも対応することを確実にする構成を説明する。
Claims (13)
- 液体を保持するように構成され、容器開口部を画定する容器と、
前記容器開口部に隣接して前記容器に固定可能であって、高周波識別タグを備え、前記容器に固定されると前記容器が密封されて内部の液体が封じ込められるように構成されたキャップと、
コネクタアンテナを含むコネクタ本体と、当該コネクタ本体から伸びるコネクタプローブとを備えるコネクタであって、前記プローブは、前記コネクタが前記キャップに係合される際に、前記容器から前記プローブを通って液体の流れを送出するように設けられ、前記コネクタアンテナは、(i)前記コネクタ本体が前記キャップに係合されると、前記高周波識別タグと連通し、かつ、(ii)前記高周波識別タグから当該コネクタアンテナを介して受信した情報に基づいて前記プローブを通じた前記容器からの液体の分配を制御するように構成されたコントローラと連通するように構成されるものである、コネクタと、
前記コネクタを前記キャップと係合すべきかどうかを決定するために用いられる情報を前記高周波識別タグから受信するように構成された確認アンテナを有する確認ツールと、
を備える液体処理システム。 - 前記キャップが、当該キャップに画定されるプローブ受入開口にわたって、あるいはこれに隣接して設けられる破断しやすい密封要素を備える請求項1に記載の液体処理システム。
- 前記破断しやすい密封要素が、破断可能膜を含む請求項2に記載の液体処理システム。
- 前記コネクタアンテナと前記確認アンテナの少なくとも一つが、前記高周波識別タグから情報を読み取り、かつ、前記高周波識別タグに情報を格納するように構成される請求項1に記載の液体処理システム。
- 前記高周波識別タグが、高周波パッシブトランスポンダを備える請求項1に記載の液体処理システム。
- 前記高周波識別タグが、EEPROMを備える請求項1に記載の 液体処理システム。
- 前記容器が剛性の内面を有し、当該内面に接触する液体を保持する請求項1に記載の液体処理システム。
- 前記プローブが一定の長さを有し、前記容器が一定の深さを有し、前記プローブの長さと前記容器の深さは略同一である請求項1に記載の液体処理システム。
- 前記コネクタ本体が前記キャップに係合されると、前記コネクタアンテナと前記高周波識別タグは垂直方向に一列に配列される請求項1に記載の液体処理システム。
- 前記コネクタ本体が前記キャップに係合されると、前記コネクタアンテナは前記高周波識別タグから10ミリメートル未満の距離に位置する請求項1に記載の液体処理システム。
- 前記コントローラとプロセスツールをさらに備え、前記コントローラが、前記プロセスツールと連通するように構成される請求項1に記載の液体処理システム。
- 前記プロセスツールが、集積回路製造プロセスツールを備える請求項11に記載の液体処理システム。
- 前記容器内に配置される半導体処理液をさらに備える、請求項1に記載の液体処理システム。
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/742,125 US7702418B2 (en) | 2001-06-13 | 2003-12-19 | Secure reader system |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2010092395A Division JP5597020B2 (ja) | 2003-12-19 | 2010-04-13 | 液体処理システム及び液体処理方法 |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2005178899A JP2005178899A (ja) | 2005-07-07 |
JP2005178899A5 JP2005178899A5 (ja) | 2007-06-07 |
JP4536409B2 true JP4536409B2 (ja) | 2010-09-01 |
Family
ID=34794627
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2004111383A Expired - Lifetime JP4536409B2 (ja) | 2003-12-19 | 2004-04-05 | 確実な読み取りシステム |
JP2010092395A Expired - Lifetime JP5597020B2 (ja) | 2003-12-19 | 2010-04-13 | 液体処理システム及び液体処理方法 |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2010092395A Expired - Lifetime JP5597020B2 (ja) | 2003-12-19 | 2010-04-13 | 液体処理システム及び液体処理方法 |
Country Status (9)
Country | Link |
---|---|
US (1) | US7702418B2 (ja) |
EP (1) | EP1697856A4 (ja) |
JP (2) | JP4536409B2 (ja) |
KR (1) | KR101123562B1 (ja) |
CN (1) | CN100468387C (ja) |
AU (1) | AU2004313341A1 (ja) |
MY (1) | MY154550A (ja) |
TW (1) | TWI361960B (ja) |
WO (1) | WO2005067516A2 (ja) |
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JP7569659B2 (ja) * | 2020-10-15 | 2024-10-18 | 東京エレクトロン株式会社 | 処理液供給装置、報知方法及び記憶媒体 |
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Also Published As
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EP1697856A4 (en) | 2012-11-14 |
CN1906606A (zh) | 2007-01-31 |
MY154550A (en) | 2015-06-30 |
AU2004313341A1 (en) | 2005-07-28 |
TWI361960B (en) | 2012-04-11 |
WO2005067516A3 (en) | 2005-09-15 |
JP5597020B2 (ja) | 2014-10-01 |
JP2010228813A (ja) | 2010-10-14 |
TW200528946A (en) | 2005-09-01 |
CN100468387C (zh) | 2009-03-11 |
EP1697856A2 (en) | 2006-09-06 |
US7702418B2 (en) | 2010-04-20 |
KR20060113749A (ko) | 2006-11-02 |
WO2005067516A2 (en) | 2005-07-28 |
JP2005178899A (ja) | 2005-07-07 |
US20040172160A1 (en) | 2004-09-02 |
KR101123562B1 (ko) | 2012-03-12 |
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