JP4529237B2 - 振動アクチュエータ - Google Patents

振動アクチュエータ Download PDF

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Publication number
JP4529237B2
JP4529237B2 JP2000162714A JP2000162714A JP4529237B2 JP 4529237 B2 JP4529237 B2 JP 4529237B2 JP 2000162714 A JP2000162714 A JP 2000162714A JP 2000162714 A JP2000162714 A JP 2000162714A JP 4529237 B2 JP4529237 B2 JP 4529237B2
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JP
Japan
Prior art keywords
vibration
vibrator
drive
driving
vibration detection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
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JP2000162714A
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English (en)
Japanese (ja)
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JP2001346386A5 (enExample
JP2001346386A (ja
Inventor
常躬 権田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
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Nikon Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by Nikon Corp filed Critical Nikon Corp
Priority to JP2000162714A priority Critical patent/JP4529237B2/ja
Publication of JP2001346386A publication Critical patent/JP2001346386A/ja
Publication of JP2001346386A5 publication Critical patent/JP2001346386A5/ja
Application granted granted Critical
Publication of JP4529237B2 publication Critical patent/JP4529237B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
JP2000162714A 2000-05-31 2000-05-31 振動アクチュエータ Expired - Lifetime JP4529237B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2000162714A JP4529237B2 (ja) 2000-05-31 2000-05-31 振動アクチュエータ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000162714A JP4529237B2 (ja) 2000-05-31 2000-05-31 振動アクチュエータ

Publications (3)

Publication Number Publication Date
JP2001346386A JP2001346386A (ja) 2001-12-14
JP2001346386A5 JP2001346386A5 (enExample) 2007-05-31
JP4529237B2 true JP4529237B2 (ja) 2010-08-25

Family

ID=18666579

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000162714A Expired - Lifetime JP4529237B2 (ja) 2000-05-31 2000-05-31 振動アクチュエータ

Country Status (1)

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JP (1) JP4529237B2 (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2019030091A (ja) 2017-07-28 2019-02-21 セイコーエプソン株式会社 圧電駆動装置、圧電駆動装置の駆動方法、ロボット、電子部品搬送装置、プリンター、及び、プロジェクター
JP7559499B2 (ja) 2020-10-27 2024-10-02 セイコーエプソン株式会社 圧電駆動装置及びロボット

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH072022B2 (ja) * 1984-11-19 1995-01-11 松下電器産業株式会社 超音波モータ駆動方法
JPH07100552B2 (ja) * 1989-02-08 1995-11-01 松下電器産業株式会社 紙送り装置
JP2874796B2 (ja) * 1990-10-25 1999-03-24 キヤノン株式会社 振動アクチュエータのための制御装置
JP2723121B2 (ja) * 1994-04-22 1998-03-09 株式会社ニコン 超音波モータ
JP3055414B2 (ja) * 1994-12-16 2000-06-26 株式会社田村電機製作所 超音波アクチュエータ
JPH0919172A (ja) * 1995-06-30 1997-01-17 Tamura Electric Works Ltd リニア型超音波アクチュエータ

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Publication number Publication date
JP2001346386A (ja) 2001-12-14

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