JP4470315B2 - 感光性ポリイミド前駆体組成物 - Google Patents

感光性ポリイミド前駆体組成物 Download PDF

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Publication number
JP4470315B2
JP4470315B2 JP2000325032A JP2000325032A JP4470315B2 JP 4470315 B2 JP4470315 B2 JP 4470315B2 JP 2000325032 A JP2000325032 A JP 2000325032A JP 2000325032 A JP2000325032 A JP 2000325032A JP 4470315 B2 JP4470315 B2 JP 4470315B2
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synthesis example
group
mol
organic group
varnish
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JP2001194784A (ja
JP2001194784A5 (https=
Inventor
智之 弓場
真佐夫 富川
利夫 吉村
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Toray Industries Inc
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Toray Industries Inc
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  • Macromolecular Compounds Obtained By Forming Nitrogen-Containing Linkages In General (AREA)
  • Materials For Photolithography (AREA)
  • Compositions Of Macromolecular Compounds (AREA)
JP2000325032A 1999-10-28 2000-10-25 感光性ポリイミド前駆体組成物 Expired - Fee Related JP4470315B2 (ja)

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JP2000325032A JP4470315B2 (ja) 1999-10-28 2000-10-25 感光性ポリイミド前駆体組成物

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP30677999 1999-10-28
JP11-306779 1999-10-28
JP2000325032A JP4470315B2 (ja) 1999-10-28 2000-10-25 感光性ポリイミド前駆体組成物

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JP2001194784A JP2001194784A (ja) 2001-07-19
JP2001194784A5 JP2001194784A5 (https=) 2007-12-06
JP4470315B2 true JP4470315B2 (ja) 2010-06-02

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JP2000325032A Expired - Fee Related JP4470315B2 (ja) 1999-10-28 2000-10-25 感光性ポリイミド前駆体組成物

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JP (1) JP4470315B2 (https=)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4175837B2 (ja) * 2002-07-02 2008-11-05 株式会社日本触媒 画像形成用感光性樹脂組成物
JP5428180B2 (ja) * 2008-03-31 2014-02-26 大日本印刷株式会社 ポリイミド前駆体樹脂組成物、及び電子部品
JP5428442B2 (ja) * 2008-03-31 2014-02-26 大日本印刷株式会社 ポリイミド前駆体、ポリイミド前駆体樹脂組成物、及び電子部品
US8071273B2 (en) 2008-03-31 2011-12-06 Dai Nippon Printing Co., Ltd. Polyimide precursor, resin composition comprising the polyimide precursor, pattern forming method using the resin composition, and articles produced by using the resin composition
JP5428181B2 (ja) * 2008-03-31 2014-02-26 大日本印刷株式会社 ポリイミド前駆体の製造方法、及びそれを用いたポリイミドの製造方法
JP5428179B2 (ja) * 2008-03-31 2014-02-26 大日本印刷株式会社 ポリイミド前駆体樹脂組成物、及び電子部品
JP7761420B2 (ja) * 2020-09-25 2025-10-28 旭化成株式会社 感光性樹脂組成物
JP7834635B2 (ja) * 2022-02-03 2026-03-24 Ｊｆｅケミカル株式会社 ポリイミド前駆体

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JP2001194784A (ja) 2001-07-19

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