JP4470315B2 - 感光性ポリイミド前駆体組成物 - Google Patents

感光性ポリイミド前駆体組成物 Download PDF

Info

Publication number
JP4470315B2
JP4470315B2 JP2000325032A JP2000325032A JP4470315B2 JP 4470315 B2 JP4470315 B2 JP 4470315B2 JP 2000325032 A JP2000325032 A JP 2000325032A JP 2000325032 A JP2000325032 A JP 2000325032A JP 4470315 B2 JP4470315 B2 JP 4470315B2
Authority
JP
Japan
Prior art keywords
synthesis example
group
mol
organic group
varnish
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2000325032A
Other languages
English (en)
Japanese (ja)
Other versions
JP2001194784A (ja
JP2001194784A5 (enExample
Inventor
智之 弓場
真佐夫 富川
利夫 吉村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toray Industries Inc
Original Assignee
Toray Industries Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toray Industries Inc filed Critical Toray Industries Inc
Priority to JP2000325032A priority Critical patent/JP4470315B2/ja
Publication of JP2001194784A publication Critical patent/JP2001194784A/ja
Publication of JP2001194784A5 publication Critical patent/JP2001194784A5/ja
Application granted granted Critical
Publication of JP4470315B2 publication Critical patent/JP4470315B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Images

Landscapes

  • Materials For Photolithography (AREA)
  • Compositions Of Macromolecular Compounds (AREA)
  • Macromolecular Compounds Obtained By Forming Nitrogen-Containing Linkages In General (AREA)
JP2000325032A 1999-10-28 2000-10-25 感光性ポリイミド前駆体組成物 Expired - Fee Related JP4470315B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2000325032A JP4470315B2 (ja) 1999-10-28 2000-10-25 感光性ポリイミド前駆体組成物

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP11-306779 1999-10-28
JP30677999 1999-10-28
JP2000325032A JP4470315B2 (ja) 1999-10-28 2000-10-25 感光性ポリイミド前駆体組成物

Publications (3)

Publication Number Publication Date
JP2001194784A JP2001194784A (ja) 2001-07-19
JP2001194784A5 JP2001194784A5 (enExample) 2007-12-06
JP4470315B2 true JP4470315B2 (ja) 2010-06-02

Family

ID=26564862

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000325032A Expired - Fee Related JP4470315B2 (ja) 1999-10-28 2000-10-25 感光性ポリイミド前駆体組成物

Country Status (1)

Country Link
JP (1) JP4470315B2 (enExample)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4175837B2 (ja) * 2002-07-02 2008-11-05 株式会社日本触媒 画像形成用感光性樹脂組成物
US8071273B2 (en) 2008-03-31 2011-12-06 Dai Nippon Printing Co., Ltd. Polyimide precursor, resin composition comprising the polyimide precursor, pattern forming method using the resin composition, and articles produced by using the resin composition
JP5428442B2 (ja) * 2008-03-31 2014-02-26 大日本印刷株式会社 ポリイミド前駆体、ポリイミド前駆体樹脂組成物、及び電子部品
JP5428181B2 (ja) * 2008-03-31 2014-02-26 大日本印刷株式会社 ポリイミド前駆体の製造方法、及びそれを用いたポリイミドの製造方法
JP5428179B2 (ja) * 2008-03-31 2014-02-26 大日本印刷株式会社 ポリイミド前駆体樹脂組成物、及び電子部品
JP5428180B2 (ja) * 2008-03-31 2014-02-26 大日本印刷株式会社 ポリイミド前駆体樹脂組成物、及び電子部品
JP7761420B2 (ja) * 2020-09-25 2025-10-28 旭化成株式会社 感光性樹脂組成物
JP2023113573A (ja) * 2022-02-03 2023-08-16 Jfeケミカル株式会社 ポリイミド前駆体

Also Published As

Publication number Publication date
JP2001194784A (ja) 2001-07-19

Similar Documents

Publication Publication Date Title
JP3526829B2 (ja) ポリアミド酸エステル
JP6935982B2 (ja) 樹脂組成物、硬化レリーフパターンの製造方法、及び半導体装置
JP4470315B2 (ja) 感光性ポリイミド前駆体組成物
JP2002121382A (ja) ポリイミド前駆体組成物
US6090525A (en) Actinic radiation sensitive polymer composition
JP2004091572A (ja) ポリアミド酸エステル組成物
CN117186403B (zh) 一种负性光敏性树脂、树脂组合物及其制备方法与应用
JPH0540339A (ja) ポリイミドのパターン形成方法
GB2216532A (en) Heat resistant and photosensitive aromatic polyamide resins and method of preparing same
JP4051759B2 (ja) 化学線感応性重合体組成物
JPH06332178A (ja) 感光性ポリイミド前駆体組成物
JP4164974B2 (ja) アルカリ現像可能な感光性ポリイミド前駆体組成物
JP2003121997A (ja) ネガ型感光性樹脂組成物
JPH0990629A (ja) 感光性樹脂組成物及びこれを用いた半導体装置の製造法
JP3855365B2 (ja) ポリイミドコーティング剤組成物及びポリイミドコーティング膜
JPH03115461A (ja) 感光性樹脂組成物
JPS61238809A (ja) 感光性ポリイミドの樹脂液組成物
JPH06301209A (ja) 感光性ポリイミド前駆体組成物
JP2002122990A (ja) 感光性ポリイミド前駆体組成物
JPH10316855A (ja) 化学線感応性重合体組成物
JPH10301281A (ja) 感光性ポリイミド前駆体組成物
JP2003241371A (ja) 感光性樹脂組成物およびその製造方法
JP2001089563A (ja) ポリイミド前駆体組成物
JPH10239841A (ja) 感光性ポリイミド前駆体組成物
JPH05224419A (ja) ポリイミド微細パターンの形成方法

Legal Events

Date Code Title Description
A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20071019

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20071019

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20100120

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20100209

A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20100222

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20130312

Year of fee payment: 3

R151 Written notification of patent or utility model registration

Ref document number: 4470315

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R151

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20130312

Year of fee payment: 3

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20130312

Year of fee payment: 3

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20140312

Year of fee payment: 4

LAPS Cancellation because of no payment of annual fees