JP4436665B2 - 測定用プローブ及び形状測定方法 - Google Patents

測定用プローブ及び形状測定方法 Download PDF

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Publication number
JP4436665B2
JP4436665B2 JP2003426025A JP2003426025A JP4436665B2 JP 4436665 B2 JP4436665 B2 JP 4436665B2 JP 2003426025 A JP2003426025 A JP 2003426025A JP 2003426025 A JP2003426025 A JP 2003426025A JP 4436665 B2 JP4436665 B2 JP 4436665B2
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JP
Japan
Prior art keywords
movable member
magnetic body
measured
coil
contact
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2003426025A
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English (en)
Japanese (ja)
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JP2005181233A5 (enExample
JP2005181233A (ja
Inventor
孝昭 葛西
圭司 久保
正照 土居
博之 望月
恵一 吉住
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Corp
Panasonic Holdings Corp
Original Assignee
Panasonic Corp
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by Panasonic Corp, Matsushita Electric Industrial Co Ltd filed Critical Panasonic Corp
Priority to JP2003426025A priority Critical patent/JP4436665B2/ja
Priority to US11/014,947 priority patent/US7065893B2/en
Publication of JP2005181233A publication Critical patent/JP2005181233A/ja
Publication of JP2005181233A5 publication Critical patent/JP2005181233A5/ja
Application granted granted Critical
Publication of JP4436665B2 publication Critical patent/JP4436665B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B3/00—Measuring instruments characterised by the use of mechanical techniques
    • G01B3/002—Details
    • G01B3/008—Arrangements for controlling the measuring force
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
    • G01B5/004—Measuring arrangements characterised by the use of mechanical techniques for measuring coordinates of points
    • G01B5/008—Measuring arrangements characterised by the use of mechanical techniques for measuring coordinates of points using coordinate measuring machines
    • G01B5/012—Contact-making feeler heads therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/002—Constructional details of contacts for gauges actuating one or more contacts

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
JP2003426025A 2003-12-24 2003-12-24 測定用プローブ及び形状測定方法 Expired - Fee Related JP4436665B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2003426025A JP4436665B2 (ja) 2003-12-24 2003-12-24 測定用プローブ及び形状測定方法
US11/014,947 US7065893B2 (en) 2003-12-24 2004-12-20 Measurement probe and using method for the same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2003426025A JP4436665B2 (ja) 2003-12-24 2003-12-24 測定用プローブ及び形状測定方法

Publications (3)

Publication Number Publication Date
JP2005181233A JP2005181233A (ja) 2005-07-07
JP2005181233A5 JP2005181233A5 (enExample) 2006-12-21
JP4436665B2 true JP4436665B2 (ja) 2010-03-24

Family

ID=34785666

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2003426025A Expired - Fee Related JP4436665B2 (ja) 2003-12-24 2003-12-24 測定用プローブ及び形状測定方法

Country Status (2)

Country Link
US (1) US7065893B2 (enExample)
JP (1) JP4436665B2 (enExample)

Families Citing this family (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7231959B2 (en) * 2002-05-02 2007-06-19 International Truck Intellectual Property Company, Llc Vehicle energy management system
JP3795008B2 (ja) * 2002-11-28 2006-07-12 アサ電子工業株式会社 タッチセンサ
JP4755429B2 (ja) * 2005-03-04 2011-08-24 株式会社ミツトヨ 検出器駆動装置
JP4909548B2 (ja) * 2005-09-01 2012-04-04 株式会社ミツトヨ 表面形状測定装置
JP4933775B2 (ja) * 2005-12-02 2012-05-16 独立行政法人理化学研究所 微小表面形状測定プローブ
JP2007218881A (ja) * 2006-02-20 2007-08-30 Konica Minolta Opto Inc 形状測定装置
JP4291849B2 (ja) 2006-12-20 2009-07-08 パナソニック株式会社 三次元測定プローブ
JP5154149B2 (ja) * 2007-06-20 2013-02-27 パナソニック株式会社 三次元測定プローブ
CN101339084B (zh) * 2007-07-06 2012-09-19 鸿富锦精密工业（深圳）有限公司 接触式测量装置
JP4611403B2 (ja) * 2008-06-03 2011-01-12 パナソニック株式会社 形状測定装置及び形状測定方法
CN101813471B (zh) * 2009-02-25 2014-03-26 鸿富锦精密工业（深圳）有限公司 接触式测量装置
DE102009020294A1 (de) * 2009-05-07 2010-11-18 Mahr Gmbh Verfahren und Vorrichtung zur Messung eines Oberflächenprofils
US20110099830A1 (en) * 2009-10-30 2011-05-05 Siltronic Corporation Tool positioning system
US8408082B2 (en) * 2009-11-18 2013-04-02 General Electric Company Apparatus to measure fluids in a conduit
JP5143931B2 (ja) * 2010-09-09 2013-02-13 パナソニック株式会社 三次元形状測定装置
WO2012098355A1 (en) 2011-01-19 2012-07-26 Renishaw Plc Analogue measurement probe for a machine tool apparatus
JP5193337B2 (ja) * 2011-06-14 2013-05-08 独立行政法人理化学研究所 微小表面形状測定プローブ
DE202012103951U1 (de) * 2012-07-11 2012-11-15 Buderus Schleiftechnik Gmbh Messmaschine
US10436480B2 (en) 2014-07-29 2019-10-08 Applied Research Associates, Inc. Thermally driven environmental control unit
US9933459B1 (en) * 2016-11-11 2018-04-03 Fluke Corporation Magnetically coupled ground reference probe
DE102017113699B3 (de) * 2017-06-21 2018-06-28 Carl Mahr Holding Gmbh Messsystem mit einer Kugelführungseinheit für ein Messgerät
CN111780654A (zh) * 2020-07-31 2020-10-16 成都双创时代科技有限公司 一种全方向三维精密测量头及其高精度连续测量方法
CN218341807U (zh) * 2022-06-27 2023-01-20 内蒙古中环晶体材料有限公司 一种自动测量磨削后单晶边长的装置
CN116863810B (zh) * 2023-06-12 2025-11-25 惠科股份有限公司 支撑柱、背光模组及显示设备

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH662649A5 (de) * 1983-12-15 1987-10-15 Maag Zahnraeder & Maschinen Ag Zahnmesstaster.
CH674485A5 (enExample) * 1988-03-11 1990-06-15 Saphirwerk Ind Prod
DE3922297A1 (de) * 1989-07-07 1991-01-17 Zeiss Carl Fa Elektromagnetische haltevorrichtung
JP2519823B2 (ja) 1990-08-17 1996-07-31 株式会社東芝 変位測定装置
US5174039A (en) * 1990-08-17 1992-12-29 Kabushiki Kaisha Toshiba Displacement-measuring apparatus, and static-pressure bearing device for use in the displacement-measuring apparatus
JP3000819B2 (ja) * 1993-03-15 2000-01-17 松下電器産業株式会社 三次元測定用プローブ及び形状測定方法
US6480286B1 (en) * 1999-03-31 2002-11-12 Matsushita Electric Inudstrial Co., Ltd. Method and apparatus for measuring thickness variation of a thin sheet material, and probe reflector used in the apparatus
JP3700459B2 (ja) 1999-03-31 2005-09-28 松下電器産業株式会社 触針反射器
GB0228368D0 (en) * 2002-12-05 2003-01-08 Renishaw Plc Probe for high speed scanning
JP3967274B2 (ja) * 2003-02-27 2007-08-29 株式会社ミツトヨ 測定装置

Also Published As

Publication number Publication date
JP2005181233A (ja) 2005-07-07
US20050204573A1 (en) 2005-09-22
US7065893B2 (en) 2006-06-27

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