JP4419620B2 - ガスセンサ - Google Patents
ガスセンサ Download PDFInfo
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- JP4419620B2 JP4419620B2 JP2004076874A JP2004076874A JP4419620B2 JP 4419620 B2 JP4419620 B2 JP 4419620B2 JP 2004076874 A JP2004076874 A JP 2004076874A JP 2004076874 A JP2004076874 A JP 2004076874A JP 4419620 B2 JP4419620 B2 JP 4419620B2
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- thin film
- temperature
- gas
- film
- resistor thin
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- 239000007789 gas Substances 0.000 claims description 202
- 239000000463 material Substances 0.000 claims description 163
- 238000001514 detection method Methods 0.000 claims description 147
- 239000010408 film Substances 0.000 claims description 115
- 239000010409 thin film Substances 0.000 claims description 113
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 claims description 68
- 239000000758 substrate Substances 0.000 claims description 44
- 239000011787 zinc oxide Substances 0.000 claims description 34
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 33
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 29
- 239000002245 particle Substances 0.000 claims description 28
- 238000009792 diffusion process Methods 0.000 claims description 25
- 150000001805 chlorine compounds Chemical class 0.000 claims description 16
- 230000002265 prevention Effects 0.000 claims description 16
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 claims description 14
- 239000000377 silicon dioxide Substances 0.000 claims description 14
- 229910052751 metal Inorganic materials 0.000 claims description 10
- 239000002184 metal Substances 0.000 claims description 10
- 239000004065 semiconductor Substances 0.000 claims description 10
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims description 8
- 229910010271 silicon carbide Inorganic materials 0.000 claims description 8
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims description 7
- 239000005388 borosilicate glass Substances 0.000 claims description 6
- KZHJGOXRZJKJNY-UHFFFAOYSA-N dioxosilane;oxo(oxoalumanyloxy)alumane Chemical compound O=[Si]=O.O=[Si]=O.O=[Al]O[Al]=O.O=[Al]O[Al]=O.O=[Al]O[Al]=O KZHJGOXRZJKJNY-UHFFFAOYSA-N 0.000 claims description 6
- 229910052602 gypsum Inorganic materials 0.000 claims description 6
- 239000010440 gypsum Substances 0.000 claims description 6
- 229910052863 mullite Inorganic materials 0.000 claims description 6
- 150000004767 nitrides Chemical class 0.000 claims description 6
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims description 6
- 229910021332 silicide Inorganic materials 0.000 claims description 6
- 239000004568 cement Substances 0.000 claims description 5
- 239000011195 cermet Substances 0.000 claims description 5
- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical compound [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 claims description 5
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 4
- 229920005591 polysilicon Polymers 0.000 claims description 4
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 4
- 239000003575 carbonaceous material Substances 0.000 claims 2
- 239000010410 layer Substances 0.000 description 88
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Substances [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 19
- 238000010438 heat treatment Methods 0.000 description 17
- 230000004044 response Effects 0.000 description 16
- 238000000034 method Methods 0.000 description 15
- 229910052721 tungsten Inorganic materials 0.000 description 15
- NLXLAEXVIDQMFP-UHFFFAOYSA-N Ammonia chloride Chemical compound [NH4+].[Cl-] NLXLAEXVIDQMFP-UHFFFAOYSA-N 0.000 description 14
- 238000004544 sputter deposition Methods 0.000 description 14
- 239000010937 tungsten Substances 0.000 description 12
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 12
- 230000008859 change Effects 0.000 description 10
- 229910052697 platinum Inorganic materials 0.000 description 10
- 239000007864 aqueous solution Substances 0.000 description 9
- XEEYBQQBJWHFJM-UHFFFAOYSA-N iron Substances [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 9
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 9
- PQZSQOYXZGDGQW-UHFFFAOYSA-N [W].[Pb] Chemical compound [W].[Pb] PQZSQOYXZGDGQW-UHFFFAOYSA-N 0.000 description 8
- 229910052801 chlorine Inorganic materials 0.000 description 8
- 238000004519 manufacturing process Methods 0.000 description 8
- -1 tungsten nitride Chemical class 0.000 description 8
- JIAARYAFYJHUJI-UHFFFAOYSA-L zinc dichloride Chemical compound [Cl-].[Cl-].[Zn+2] JIAARYAFYJHUJI-UHFFFAOYSA-L 0.000 description 8
- 235000019270 ammonium chloride Nutrition 0.000 description 7
- 238000009413 insulation Methods 0.000 description 7
- 229910052750 molybdenum Inorganic materials 0.000 description 7
- QGZKDVFQNNGYKY-UHFFFAOYSA-N ammonia Natural products N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 6
- 239000000460 chlorine Substances 0.000 description 6
- 230000006870 function Effects 0.000 description 6
- 230000020169 heat generation Effects 0.000 description 6
- 239000012535 impurity Substances 0.000 description 6
- 229910052742 iron Inorganic materials 0.000 description 6
- 239000002244 precipitate Substances 0.000 description 6
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 5
- 125000001309 chloro group Chemical group Cl* 0.000 description 5
- 229910044991 metal oxide Inorganic materials 0.000 description 5
- 150000004706 metal oxides Chemical class 0.000 description 5
- 239000011733 molybdenum Substances 0.000 description 5
- 238000000206 photolithography Methods 0.000 description 5
- VHUUQVKOLVNVRT-UHFFFAOYSA-N Ammonium hydroxide Chemical compound [NH4+].[OH-] VHUUQVKOLVNVRT-UHFFFAOYSA-N 0.000 description 4
- 229910052582 BN Inorganic materials 0.000 description 4
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 description 4
- 235000011114 ammonium hydroxide Nutrition 0.000 description 4
- 150000001875 compounds Chemical class 0.000 description 4
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 239000000203 mixture Substances 0.000 description 4
- 229910052718 tin Inorganic materials 0.000 description 4
- 239000011135 tin Substances 0.000 description 4
- 239000011592 zinc chloride Substances 0.000 description 4
- 235000005074 zinc chloride Nutrition 0.000 description 4
- FRWYFWZENXDZMU-UHFFFAOYSA-N 2-iodoquinoline Chemical compound C1=CC=CC2=NC(I)=CC=C21 FRWYFWZENXDZMU-UHFFFAOYSA-N 0.000 description 3
- 230000001464 adherent effect Effects 0.000 description 3
- LTPBRCUWZOMYOC-UHFFFAOYSA-N beryllium oxide Inorganic materials O=[Be] LTPBRCUWZOMYOC-UHFFFAOYSA-N 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 3
- 229910052802 copper Inorganic materials 0.000 description 3
- 239000010949 copper Substances 0.000 description 3
- 238000003618 dip coating Methods 0.000 description 3
- 229910052759 nickel Inorganic materials 0.000 description 3
- PXHVJJICTQNCMI-UHFFFAOYSA-N nickel Substances [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 230000035945 sensitivity Effects 0.000 description 3
- 239000000243 solution Substances 0.000 description 3
- 229910001220 stainless steel Inorganic materials 0.000 description 3
- UONOETXJSWQNOL-UHFFFAOYSA-N tungsten carbide Chemical compound [W+]#[C-] UONOETXJSWQNOL-UHFFFAOYSA-N 0.000 description 3
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 2
- 229910019974 CrSi Inorganic materials 0.000 description 2
- 229910002060 Fe-Cr-Al alloy Inorganic materials 0.000 description 2
- 229910016006 MoSi Inorganic materials 0.000 description 2
- 229910018487 Ni—Cr Inorganic materials 0.000 description 2
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- 229910052796 boron Inorganic materials 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 230000006866 deterioration Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 229910052739 hydrogen Inorganic materials 0.000 description 2
- 239000001257 hydrogen Substances 0.000 description 2
- 229910052741 iridium Inorganic materials 0.000 description 2
- 229910052748 manganese Inorganic materials 0.000 description 2
- 239000011572 manganese Substances 0.000 description 2
- 230000000873 masking effect Effects 0.000 description 2
- 230000007246 mechanism Effects 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 230000007935 neutral effect Effects 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 238000007639 printing Methods 0.000 description 2
- 239000002994 raw material Substances 0.000 description 2
- 229910052702 rhenium Inorganic materials 0.000 description 2
- 229910052703 rhodium Inorganic materials 0.000 description 2
- 239000010948 rhodium Substances 0.000 description 2
- 239000011540 sensing material Substances 0.000 description 2
- 239000010935 stainless steel Substances 0.000 description 2
- 229910052715 tantalum Inorganic materials 0.000 description 2
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 description 2
- 229910001887 tin oxide Inorganic materials 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- 229910052725 zinc Inorganic materials 0.000 description 2
- 239000011701 zinc Substances 0.000 description 2
- 229910052845 zircon Inorganic materials 0.000 description 2
- GFQYVLUOOAAOGM-UHFFFAOYSA-N zirconium(iv) silicate Chemical compound [Zr+4].[O-][Si]([O-])([O-])[O-] GFQYVLUOOAAOGM-UHFFFAOYSA-N 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- UGFAIRIUMAVXCW-UHFFFAOYSA-N Carbon monoxide Chemical compound [O+]#[C-] UGFAIRIUMAVXCW-UHFFFAOYSA-N 0.000 description 1
- VEXZGXHMUGYJMC-UHFFFAOYSA-M Chloride anion Chemical compound [Cl-] VEXZGXHMUGYJMC-UHFFFAOYSA-M 0.000 description 1
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 1
- 229910052691 Erbium Inorganic materials 0.000 description 1
- 229910052689 Holmium Inorganic materials 0.000 description 1
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 1
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 1
- 238000002441 X-ray diffraction Methods 0.000 description 1
- 229910052769 Ytterbium Inorganic materials 0.000 description 1
- PTFCDOFLOPIGGS-UHFFFAOYSA-N Zinc dication Chemical compound [Zn+2] PTFCDOFLOPIGGS-UHFFFAOYSA-N 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- 230000000996 additive effect Effects 0.000 description 1
- 150000001298 alcohols Chemical class 0.000 description 1
- 150000001335 aliphatic alkanes Chemical class 0.000 description 1
- 230000004075 alteration Effects 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910021529 ammonia Inorganic materials 0.000 description 1
- 125000004429 atom Chemical group 0.000 description 1
- 239000011324 bead Substances 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 229910002091 carbon monoxide Inorganic materials 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000011651 chromium Substances 0.000 description 1
- 239000011247 coating layer Substances 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 239000006260 foam Substances 0.000 description 1
- 229910052735 hafnium Inorganic materials 0.000 description 1
- 150000002431 hydrogen Chemical class 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- GKOZUEZYRPOHIO-UHFFFAOYSA-N iridium atom Chemical compound [Ir] GKOZUEZYRPOHIO-UHFFFAOYSA-N 0.000 description 1
- 150000002576 ketones Chemical class 0.000 description 1
- 229910052746 lanthanum Inorganic materials 0.000 description 1
- 238000004518 low pressure chemical vapour deposition Methods 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 229910021645 metal ion Inorganic materials 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 230000005012 migration Effects 0.000 description 1
- 238000013508 migration Methods 0.000 description 1
- 239000011259 mixed solution Substances 0.000 description 1
- 229910003465 moissanite Inorganic materials 0.000 description 1
- 229910052758 niobium Inorganic materials 0.000 description 1
- JMANVNJQNLATNU-UHFFFAOYSA-N oxalonitrile Chemical compound N#CC#N JMANVNJQNLATNU-UHFFFAOYSA-N 0.000 description 1
- 229910052763 palladium Inorganic materials 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 230000004043 responsiveness Effects 0.000 description 1
- MHOVAHRLVXNVSD-UHFFFAOYSA-N rhodium atom Chemical compound [Rh] MHOVAHRLVXNVSD-UHFFFAOYSA-N 0.000 description 1
- 229910000077 silane Inorganic materials 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 238000005549 size reduction Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000001694 spray drying Methods 0.000 description 1
- 230000009897 systematic effect Effects 0.000 description 1
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 1
- UGZADUVQMDAIAO-UHFFFAOYSA-L zinc hydroxide Chemical compound [OH-].[OH-].[Zn+2] UGZADUVQMDAIAO-UHFFFAOYSA-L 0.000 description 1
- 229940007718 zinc hydroxide Drugs 0.000 description 1
- 229910021511 zinc hydroxide Inorganic materials 0.000 description 1
- 229910052726 zirconium Inorganic materials 0.000 description 1
Images
Description
純度99%の石英製基板(縦横:2×2mm、厚さ:0.5mm)の片面の全面に、シリカからなる絶縁層(膜厚:1μm)をスパッタ法により形成した。次いで、形成した絶縁層の上面に、ソースとしてのシラン(日本酸素社製)及びジボラン(日本酸素社製)と、ホウ素とを用い、減圧CVD法(温度:650℃、圧力:1Pa)により、ホウ素を1モル%含有する多結晶シリコン薄膜(膜厚:5μm)を成膜して抵抗体薄膜を形成した。
Claims (9)
- 抵抗体薄膜が形成された電気絶縁性基板の一方面に、ガス検出材料膜を備え、
前記ガス検出材料膜の温度を検出する温度検出手段と、
前記温度検出手段の温度情報に基づいて前記抵抗体薄膜の温度を制御する制御手段と、
を更に備え、
前記温度検出手段が、前記ガス検出材料膜の一方の面に設けられた絶縁層に隣接して形成され、前記絶縁層を介して前記ガス検出材料膜と積層構造をなす、膜厚50〜1000nmの酸化物半導体膜であり、
前記ガス検出材料膜を、前記電気絶縁性基板の前記抵抗体薄膜が形成された面と異なる面に備え、
前記抵抗体薄膜を被覆する保温層を備え、
前記抵抗体薄膜と、前記保温層との間に、拡散防止層を備えることを特徴とするガスセンサ。 - 前記拡散防止層が、シリカ、窒化ケイ素及びアルミナからなる群より選択される少なくとも1種からなることを特徴とする請求項1に記載のガスセンサ。
- 前記ガス検出材料膜が、酸化亜鉛粒子と、該酸化亜鉛粒子の表面に存在する塩素化合物と、を含む水素ガス検出材料膜であることを特徴とする請求項1又は2に記載のガスセンサ。
- 前記抵抗体薄膜が、金属、窒化物、サーメット、シリサイド、ポリシリコン、炭化ケイ素、又は炭素材料からなることを特徴とする請求項1〜3のいずれか1項に記載のガスセンサ。
- 前記保温層が、耐火セメント、石膏、シリカ、ムライト、ジルコニア及びホウケイ酸ガラスからなる群より選択される少なくとも1種からなることを特徴とする請求項1又は2に記載のガスセンサ。
- 抵抗体薄膜が形成された電気絶縁性基板の一方面に、ガス検出材料膜を備え、
前記ガス検出材料膜の温度を検出する温度検出手段と、
前記温度検出手段の温度情報に基づいて前記抵抗体薄膜の温度を制御する制御手段と、
を更に備え、
前記温度検出手段が、前記ガス検出材料膜の一方の面に設けられた絶縁層に隣接して形成され、前記絶縁層を介して前記ガス検出材料膜と積層構造をなす、膜厚50〜1000nmの酸化物半導体膜であり、
前記ガス検出材料膜が、酸化亜鉛粒子と、該酸化亜鉛粒子の表面に存在する塩素化合物と、を含む水素ガス検出材料膜であることを特徴とするガスセンサ。 - 前記ガスセンサが、前記ガス検出材料膜を、前記電気絶縁性基板の前記抵抗体薄膜が形成された面と異なる面に備え、
前記抵抗体薄膜を被覆する保温層をさらに備えることを特徴とする請求項6に記載のガスセンサ。 - 前記ガスセンサが、前記ガス検出材料膜を、前記電気絶縁性基板の前記抵抗体薄膜が形成された面と同一面に備え、
前記電気絶縁性基板の前記抵抗体薄膜が形成された面と異なる面に保温層をさらに備えることを特徴とする請求項6に記載のガスセンサ。 - 前記抵抗体薄膜が、金属、窒化物、サーメット、シリサイド、ポリシリコン、炭化ケイ素、又は炭素材料からなることを特徴とする請求項6〜8のいずれか1項に記載のガスセンサ。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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JP2004076874A JP4419620B2 (ja) | 2004-03-17 | 2004-03-17 | ガスセンサ |
Applications Claiming Priority (1)
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JP2004076874A JP4419620B2 (ja) | 2004-03-17 | 2004-03-17 | ガスセンサ |
Publications (2)
Publication Number | Publication Date |
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JP2005265548A JP2005265548A (ja) | 2005-09-29 |
JP4419620B2 true JP4419620B2 (ja) | 2010-02-24 |
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JP2004076874A Expired - Lifetime JP4419620B2 (ja) | 2004-03-17 | 2004-03-17 | ガスセンサ |
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Families Citing this family (1)
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US8739604B2 (en) * | 2007-12-20 | 2014-06-03 | Amphenol Thermometrics, Inc. | Gas sensor and method of making |
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JPS6293653A (ja) * | 1985-10-18 | 1987-04-30 | Ngk Insulators Ltd | 加熱センサ |
JPH0367160A (ja) * | 1989-08-04 | 1991-03-22 | Toyota Motor Corp | 酸素センサの製造方法 |
DE4006085A1 (de) * | 1990-02-27 | 1991-08-29 | Bosch Gmbh Robert | Sensor zur gleichzeitigen bestimmung der zusammensetzung von gasgemischen und der gasgeschwindigkeit |
JPH0458144A (ja) * | 1990-06-27 | 1992-02-25 | Toshiba Corp | ガスセンサ |
JP2524176Y2 (ja) * | 1990-12-28 | 1997-01-29 | 横河電機株式会社 | ガスセンサ |
JP2993156B2 (ja) * | 1991-02-28 | 1999-12-20 | エヌオーケー株式会社 | ガスセンサ |
JPH06288952A (ja) * | 1993-04-01 | 1994-10-18 | Mitsubishi Materials Corp | ガスセンサ |
US5605612A (en) * | 1993-11-11 | 1997-02-25 | Goldstar Electron Co., Ltd. | Gas sensor and manufacturing method of the same |
JP2582343B2 (ja) * | 1993-12-04 | 1997-02-19 | エルジー電子株式会社 | 低消費電力型薄膜ガスセンサ及びその製造方法 |
KR960002673A (ko) * | 1994-06-22 | 1996-01-26 | 이헌조 | 반도체소자의 금속박막 형성방법 |
JP3366117B2 (ja) * | 1994-06-28 | 2003-01-14 | 株式会社ニチレイ | 食品の品質検知用ガスセンサ |
US5635628A (en) * | 1995-05-19 | 1997-06-03 | Siemens Aktiengesellschaft | Method for detecting methane in a gas mixture |
JP2983502B2 (ja) * | 1996-11-22 | 1999-11-29 | 松下電器産業株式会社 | 温度センサ素子および同素子を備えた温度センサ |
JPH11201929A (ja) * | 1998-01-16 | 1999-07-30 | Fuji Electric Co Ltd | 薄膜ガスセンサ |
JPH11233305A (ja) * | 1998-02-16 | 1999-08-27 | Matsushita Electric Ind Co Ltd | Ptcサーミスタ薄膜素子 |
JP3933500B2 (ja) * | 2002-03-13 | 2007-06-20 | 新コスモス電機株式会社 | 半導体式ガス検知素子 |
JP2004037402A (ja) * | 2002-07-08 | 2004-02-05 | Fuji Electric Holdings Co Ltd | 薄膜ガスセンサ |
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