JPS6332134B2 - - Google Patents
Info
- Publication number
- JPS6332134B2 JPS6332134B2 JP56123122A JP12312281A JPS6332134B2 JP S6332134 B2 JPS6332134 B2 JP S6332134B2 JP 56123122 A JP56123122 A JP 56123122A JP 12312281 A JP12312281 A JP 12312281A JP S6332134 B2 JPS6332134 B2 JP S6332134B2
- Authority
- JP
- Japan
- Prior art keywords
- heater
- temperature
- sensor
- thin film
- resistance
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 229910052760 oxygen Inorganic materials 0.000 claims description 72
- 239000001301 oxygen Substances 0.000 claims description 72
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 71
- 239000010409 thin film Substances 0.000 claims description 32
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 claims description 31
- 239000004065 semiconductor Substances 0.000 claims description 26
- 239000000758 substrate Substances 0.000 claims description 16
- 238000001514 detection method Methods 0.000 claims description 15
- 239000003054 catalyst Substances 0.000 claims description 12
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical group [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 claims description 11
- 239000010948 rhodium Substances 0.000 claims description 11
- 229910052697 platinum Inorganic materials 0.000 claims description 7
- 239000000203 mixture Substances 0.000 claims description 5
- 229910052763 palladium Inorganic materials 0.000 claims description 5
- ZKATWMILCYLAPD-UHFFFAOYSA-N niobium pentoxide Inorganic materials O=[Nb](=O)O[Nb](=O)=O ZKATWMILCYLAPD-UHFFFAOYSA-N 0.000 claims description 3
- URLJKFSTXLNXLG-UHFFFAOYSA-N niobium(5+);oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Nb+5].[Nb+5] URLJKFSTXLNXLG-UHFFFAOYSA-N 0.000 claims description 3
- 229910052703 rhodium Inorganic materials 0.000 claims description 3
- MHOVAHRLVXNVSD-UHFFFAOYSA-N rhodium atom Chemical compound [Rh] MHOVAHRLVXNVSD-UHFFFAOYSA-N 0.000 claims description 3
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 claims 2
- 229910000420 cerium oxide Inorganic materials 0.000 claims 2
- BMMGVYCKOGBVEV-UHFFFAOYSA-N oxo(oxoceriooxy)cerium Chemical compound [Ce]=O.O=[Ce]=O BMMGVYCKOGBVEV-UHFFFAOYSA-N 0.000 claims 2
- 239000000446 fuel Substances 0.000 description 42
- 239000007789 gas Substances 0.000 description 34
- 230000008859 change Effects 0.000 description 26
- 238000010586 diagram Methods 0.000 description 24
- 230000004044 response Effects 0.000 description 18
- 229910010413 TiO 2 Inorganic materials 0.000 description 17
- 238000006243 chemical reaction Methods 0.000 description 17
- 239000010408 film Substances 0.000 description 16
- 238000010438 heat treatment Methods 0.000 description 16
- 238000000034 method Methods 0.000 description 16
- 239000000463 material Substances 0.000 description 13
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 11
- 230000007423 decrease Effects 0.000 description 9
- 239000010410 layer Substances 0.000 description 9
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 8
- 238000004544 sputter deposition Methods 0.000 description 8
- 125000004430 oxygen atom Chemical group O* 0.000 description 7
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 7
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 6
- CPLXHLVBOLITMK-UHFFFAOYSA-N Magnesium oxide Chemical compound [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 description 6
- 229910052799 carbon Inorganic materials 0.000 description 6
- 238000002485 combustion reaction Methods 0.000 description 6
- 229910052596 spinel Inorganic materials 0.000 description 6
- 239000011029 spinel Substances 0.000 description 6
- 239000002772 conduction electron Substances 0.000 description 5
- 230000007547 defect Effects 0.000 description 5
- 239000007788 liquid Substances 0.000 description 5
- 230000003746 surface roughness Effects 0.000 description 5
- 229910004298 SiO 2 Inorganic materials 0.000 description 4
- 230000008901 benefit Effects 0.000 description 4
- 239000011247 coating layer Substances 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 238000005259 measurement Methods 0.000 description 4
- 238000001556 precipitation Methods 0.000 description 4
- 238000005070 sampling Methods 0.000 description 4
- 230000035945 sensitivity Effects 0.000 description 4
- 230000001052 transient effect Effects 0.000 description 4
- 238000011109 contamination Methods 0.000 description 3
- 230000001934 delay Effects 0.000 description 3
- 238000009792 diffusion process Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 239000000395 magnesium oxide Substances 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 3
- 238000007750 plasma spraying Methods 0.000 description 3
- 230000001737 promoting effect Effects 0.000 description 3
- 239000000377 silicon dioxide Substances 0.000 description 3
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 2
- 230000001133 acceleration Effects 0.000 description 2
- 125000004429 atom Chemical group 0.000 description 2
- 238000004364 calculation method Methods 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 238000009826 distribution Methods 0.000 description 2
- 230000005611 electricity Effects 0.000 description 2
- 239000010416 ion conductor Substances 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 239000002994 raw material Substances 0.000 description 2
- 239000004071 soot Substances 0.000 description 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000005336 cracking Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000007791 dehumidification Methods 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 229910010272 inorganic material Inorganic materials 0.000 description 1
- 239000011147 inorganic material Substances 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 238000011835 investigation Methods 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 150000002926 oxygen Chemical class 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 230000004043 responsiveness Effects 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
- 229920006395 saturated elastomer Polymers 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 238000013112 stability test Methods 0.000 description 1
- 229910002076 stabilized zirconia Inorganic materials 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000013077 target material Substances 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
- 230000005514 two-phase flow Effects 0.000 description 1
- 230000010356 wave oscillation Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
- G01N27/403—Cells and electrode assemblies
- G01N27/406—Cells and probes with solid electrolytes
- G01N27/407—Cells and probes with solid electrolytes for investigating or analysing gases
- G01N27/4071—Cells and probes with solid electrolytes for investigating or analysing gases using sensor elements of laminated structure
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
- G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
Landscapes
- Chemical & Material Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Health & Medical Sciences (AREA)
- Physics & Mathematics (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Molecular Biology (AREA)
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
Description
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ã³ãµã
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12312281A JPS5824850A (ja) | 1981-08-07 | 1981-08-07 | ããŒã¿ä»èèåé žçŽ ã»ã³ãµ |
US06/404,900 US4500412A (en) | 1981-08-07 | 1982-08-03 | Oxygen sensor with heater |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12312281A JPS5824850A (ja) | 1981-08-07 | 1981-08-07 | ããŒã¿ä»èèåé žçŽ ã»ã³ãµ |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5824850A JPS5824850A (ja) | 1983-02-14 |
JPS6332134B2 true JPS6332134B2 (ja) | 1988-06-28 |
Family
ID=14852725
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP12312281A Granted JPS5824850A (ja) | 1981-08-07 | 1981-08-07 | ããŒã¿ä»èèåé žçŽ ã»ã³ãµ |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5824850A (ja) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4535316A (en) * | 1984-03-26 | 1985-08-13 | Allied Corporation | Heated titania oxygen sensor |
JPS61155751A (ja) * | 1984-12-28 | 1986-07-15 | Toyota Central Res & Dev Lab Inc | 空çæ¯ã»ã³ãµããã³è£ 眮 |
JP3903181B2 (ja) * | 2002-06-27 | 2007-04-11 | ç¬ç«è¡æ¿æ³äººç£æ¥æè¡ç·åç 究æ | æµæåé žçŽ ã»ã³ãµãšããã䜿ã£ãé žçŽ ã»ã³ãµè£ 眮åã³ç©ºçæ¯å¶åŸ¡ã·ã¹ãã |
AU2003244059A1 (en) * | 2002-06-27 | 2004-01-19 | National Institute Of Advanced Industrial Science And Technology | Resistance type oxygen sensor and oxygen sensor device using it and air/fuel ratio control system |
JP6995307B2 (ja) * | 2017-08-04 | 2022-01-14 | åºå èç£æ ªåŒäŒç€Ÿ | åå°äœè£ 眮åã³åå°äœè£ 眮ã®è£œé æ¹æ³ |
CN108732212B (zh) * | 2018-05-23 | 2020-12-15 | åå°æ»šå·¥çšå€§åŠ | äžç§å€æåºæ£æµéææ°äœäŒ æåšå¶é æ¹æ³çå¶é æ¹æ³ãäŒ æåšåå ¶åºçš |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4888997A (ja) * | 1972-02-23 | 1973-11-21 | ||
JPS51100796A (ja) * | 1975-03-03 | 1976-09-06 | Nippon Soken | Gasuseibunkenshutsuki |
JPS549996A (en) * | 1977-06-24 | 1979-01-25 | Figaro Eng | Improvement for gas sensitivity of gas detecting element |
JPS55124059A (en) * | 1979-03-07 | 1980-09-24 | Bosch Gmbh Robert | Resistance measuring sensor for detecting oxygen content of gas and method of making said sensor |
JPS5693038A (en) * | 1979-12-27 | 1981-07-28 | Nec Corp | Semiconductor gas sensor |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5699467U (ja) * | 1979-12-28 | 1981-08-05 |
-
1981
- 1981-08-07 JP JP12312281A patent/JPS5824850A/ja active Granted
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4888997A (ja) * | 1972-02-23 | 1973-11-21 | ||
JPS51100796A (ja) * | 1975-03-03 | 1976-09-06 | Nippon Soken | Gasuseibunkenshutsuki |
JPS549996A (en) * | 1977-06-24 | 1979-01-25 | Figaro Eng | Improvement for gas sensitivity of gas detecting element |
JPS55124059A (en) * | 1979-03-07 | 1980-09-24 | Bosch Gmbh Robert | Resistance measuring sensor for detecting oxygen content of gas and method of making said sensor |
JPS5693038A (en) * | 1979-12-27 | 1981-07-28 | Nec Corp | Semiconductor gas sensor |
Also Published As
Publication number | Publication date |
---|---|
JPS5824850A (ja) | 1983-02-14 |
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