JPS5693038A - Semiconductor gas sensor - Google Patents

Semiconductor gas sensor

Info

Publication number
JPS5693038A
JPS5693038A JP17072679A JP17072679A JPS5693038A JP S5693038 A JPS5693038 A JP S5693038A JP 17072679 A JP17072679 A JP 17072679A JP 17072679 A JP17072679 A JP 17072679A JP S5693038 A JPS5693038 A JP S5693038A
Authority
JP
Japan
Prior art keywords
gas
temperature
bridge
sensitive body
sensitive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP17072679A
Other languages
Japanese (ja)
Inventor
Toshisuke Hishii
Koichi Saito
Tokuo Takeuchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP17072679A priority Critical patent/JPS5693038A/en
Priority to US06/220,712 priority patent/US4377944A/en
Publication of JPS5693038A publication Critical patent/JPS5693038A/en
Pending legal-status Critical Current

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  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)

Abstract

PURPOSE: To prevent misdetection due to temperature change of a sensor by setting a gas in sensitive temperature compensating body to one side of a bridge circuit for detecting the condition of a gas sensitive body having the same coefficient of resistance temperature as that of the sensitive body.
CONSTITUTION: When a gas sensor is used in the air at the room temperature with the bridge balanced, a heater 21 is energized to retain a gas sensitive body 26a at the optimal detection temperature. On the other hand, heat from the heater also heats a temperature compensating body 28 and thick film resistors 27a and 27b, causing a change in the resistance to break the bridge. But, as the temperature compensating body 28 made of the same material as the sensitive body 26b is arranged on the side adjacent to the bridge corresponding to the sensitive body 26b, the multiplied product of resistances between the bridges is equal thereby maintaining the balance thereof. When gas is present, change in the resistance is caused in the sensitive body 26a alone to shift the bridge. An unbalanced voltage is led out across detection electrode terminals 25a and 25b to detect gas.
COPYRIGHT: (C)1981,JPO&Japio
JP17072679A 1979-12-27 1979-12-27 Semiconductor gas sensor Pending JPS5693038A (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP17072679A JPS5693038A (en) 1979-12-27 1979-12-27 Semiconductor gas sensor
US06/220,712 US4377944A (en) 1979-12-27 1980-12-29 Integrated gas sensitive unit comprising a gas sensitive semiconductor element and a resistor for gas concentration measurement

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17072679A JPS5693038A (en) 1979-12-27 1979-12-27 Semiconductor gas sensor

Publications (1)

Publication Number Publication Date
JPS5693038A true JPS5693038A (en) 1981-07-28

Family

ID=15910246

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17072679A Pending JPS5693038A (en) 1979-12-27 1979-12-27 Semiconductor gas sensor

Country Status (1)

Country Link
JP (1) JPS5693038A (en)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5824850A (en) * 1981-08-07 1983-02-14 Toyota Central Res & Dev Lab Inc Film type oxygen sensor with heater and oxygen detector employing said sensor
JPS5830649A (en) * 1981-08-17 1983-02-23 Nippon Soken Inc Detector for gas component
JPS5892946A (en) * 1981-11-30 1983-06-02 Nippon Soken Inc Gas component detector
JPS59155747A (en) * 1983-02-24 1984-09-04 Nippon Soken Inc Gas sensor
JPS6088356A (en) * 1983-10-19 1985-05-18 Riken Keiki Kk Semiconductor type gas detecting bridge
KR19990054775A (en) * 1997-12-26 1999-07-15 조희재 Manufacturing Method of Thick Film Printed Gas Sensor
CN107748185A (en) * 2017-09-01 2018-03-02 兰州空间技术物理研究所 A kind of elemental oxygen fluence measuring method and atomic oxygen sensor

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5824850A (en) * 1981-08-07 1983-02-14 Toyota Central Res & Dev Lab Inc Film type oxygen sensor with heater and oxygen detector employing said sensor
JPS6332134B2 (en) * 1981-08-07 1988-06-28 Toyoda Chuo Kenkyusho Kk
JPS5830649A (en) * 1981-08-17 1983-02-23 Nippon Soken Inc Detector for gas component
JPS5892946A (en) * 1981-11-30 1983-06-02 Nippon Soken Inc Gas component detector
JPS59155747A (en) * 1983-02-24 1984-09-04 Nippon Soken Inc Gas sensor
JPS6088356A (en) * 1983-10-19 1985-05-18 Riken Keiki Kk Semiconductor type gas detecting bridge
KR19990054775A (en) * 1997-12-26 1999-07-15 조희재 Manufacturing Method of Thick Film Printed Gas Sensor
CN107748185A (en) * 2017-09-01 2018-03-02 兰州空间技术物理研究所 A kind of elemental oxygen fluence measuring method and atomic oxygen sensor

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