JPS5830649A - Detector for gas component - Google Patents

Detector for gas component

Info

Publication number
JPS5830649A
JPS5830649A JP12862981A JP12862981A JPS5830649A JP S5830649 A JPS5830649 A JP S5830649A JP 12862981 A JP12862981 A JP 12862981A JP 12862981 A JP12862981 A JP 12862981A JP S5830649 A JPS5830649 A JP S5830649A
Authority
JP
Japan
Prior art keywords
detection element
temperature
electrode
gas component
green sheet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12862981A
Other languages
Japanese (ja)
Inventor
Tomio Kawakami
川上 富男
Minoru Oota
実 太田
Tamotsu Hattori
服部 有
Masatoshi Onoda
真稔 小野田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Soken Inc
Original Assignee
Nippon Soken Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Soken Inc filed Critical Nippon Soken Inc
Priority to JP12862981A priority Critical patent/JPS5830649A/en
Priority to US06/354,794 priority patent/US4453397A/en
Publication of JPS5830649A publication Critical patent/JPS5830649A/en
Pending legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/12Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/12Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
    • G01N27/122Circuits particularly adapted therefor, e.g. linearising circuits

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)

Abstract

PURPOSE:To detect exhaust gas of wide-ranged temperature, by mounting a gas detecting element to a substrate and embedding a temperature detecting element in the substrate. CONSTITUTION:Two filmy electrodes 4a and 4b are formed on an alumina green sheet 1a by printing. A filmy heater 5 is formed on a green sheet 1b by printing, an electrode 4c is formed in a position corresponding to the electrode 4a, and a filmy temperature detecting element 3, comprising zirconia added with niobium oxide, is formed by printing on a part where the heater 5 and the electrode 4c are positioned facing and opposite to each other and in a comb shape. The green sheet 1a with an electrode forming surface up is overlapped with the electrode forming surface of the green sheet 1b. The lamination is burned in a furnace at 1,500-1,600 deg.C. Paste of cobalt monocide is printed on the upper and, where the electrodes 4a and 4b are positioned facing and opposite to each other and in a comb shape, then backed to form a gas component detecting element 2.

Description

【発明の詳細な説明】 本発明はガス成分検出器、特に内燃機関の排気ガス中の
酸素濃度を検出し空燃比を測定するためのガス成分検出
器に関するものである〇遅生、排気ガス中の有害成分を
低減させるため、また燃費を向上させる等の1的で、内
燃機関を理論空燃比よ抄も薄い空燃比で運転さ、せる、
いわゆる希薄燃焼方式が提案されている。この方式にお
いては、薄ψ領域での空燃比を正確に検出する手段が必
要である。
Detailed Description of the Invention The present invention relates to a gas component detector, particularly a gas component detector for detecting the oxygen concentration in the exhaust gas of an internal combustion engine and measuring the air-fuel ratio. In order to reduce the harmful components of the engine and improve fuel efficiency, the internal combustion engine is operated at an air-fuel ratio that is even thinner than the stoichiometric air-fuel ratio.
A so-called lean burn system has been proposed. This method requires means for accurately detecting the air-fuel ratio in the lean ψ region.

この種の手段としては特公昭56−6503号および特
開昭58−88396号記載の検知装置がある。これ等
の装置では素子として一酸化コバルト(Go O)もし
く祉−一化コバルトと酸化マグネシウム(MgO)との
合金をm≠、−酸化コバルトが四三階化コバル) (0
osOa )へ変化するのを防止するとともに温度補償
のため、これ等素子をある一定の温度、例えば900℃
に加熱保持して使用する構成となっている。
As this type of means, there are detection devices described in Japanese Patent Publication No. 56-6503 and Japanese Patent Application Laid-Open No. 58-88396. In these devices, cobalt monoxide (GoO) or an alloy of cobalt monoxide and magnesium oxide (MgO) is used as an element, m≠, -cobalt oxide is trivalent cobal) (0
osOa ) and for temperature compensation, these elements are kept at a certain temperature, for example 900°C.
It is designed to be used while being heated.

しかしながら排気ガス中で、排気ガス温度や排気ガス流
量の貧化にかかわらず素子の温度を一定に保つことは非
常に困難である。素子の温度が変化すると、酸素濃度と
け別にこのtM度変化で電気抵抗パ値が変化するので、
酸素濃度検出の精度が低下して空燃比を精度よくフン)
―−ルすることができなくなる。また、素子の温度保持
を一定に近ずけようとすればピータ制御回路が複雑かつ
高価な亀のとなる。
However, it is very difficult to keep the temperature of the element constant in exhaust gas regardless of the exhaust gas temperature or exhaust gas flow rate. When the temperature of the element changes, the electric resistance value changes due to this tM degree change, apart from the oxygen concentration.
The accuracy of oxygen concentration detection decreases and the air-fuel ratio is not accurate)
--You will not be able to do it. Furthermore, if the temperature of the element is to be kept close to constant, the repeater control circuit becomes complicated and expensive.

本実明社排気ガスの広範囲な温度変化にかかわらず、ま
た酸化、還元算囲気にかかわらず燵素濃度を正確に検出
できるガス成分検出器を提供することを目的とする。
The object of the present invention is to provide a gas component detector that can accurately detect the concentration of phosphorus regardless of the wide range of temperature changes in exhaust gas and regardless of the oxidation or reduction atmosphere.

本発明の検出器は、耐熱耐電気絶縁性の基体に膜状のガ
ス成分検出素子と、該素子と抵抗温度係数が1[等しい
膜状の温度検出素子とを具備せしめ、特に温度検出素子
はこれを基体内に埋設して電気抵抗値変化が雰FM蒐の
影響を受けることなく温度のみに依存するようKなした
ことを特徴とするものである。以下本発明を図示の実施
例により説明する。
The detector of the present invention includes a film-like gas component detection element on a heat-resistant, electrically insulating base, and a film-like temperature detection element whose resistance temperature coefficient is equal to that of the element. It is characterized in that it is embedded in the base so that the change in electrical resistance depends only on temperature without being affected by the atmosphere and FM. The present invention will be explained below with reference to illustrated embodiments.

第1図ないし第1図に示す実施例において、lはアル考
すよシなる板状の基体で、ガス成分検出素子2、温度検
出素子3、電極4&、4−40S ピータS1 リード
線6 & %  @ bs  ” %6dを具備して−
る。これ等の構造の詳細を製造方法を含めて第2図ない
し第4図により説明する。
In the embodiments shown in FIGS. 1 and 1, l is a plate-shaped base body that is different from Al, and includes a gas component detection element 2, a temperature detection element 3, electrodes 4&, 4-40S, Peter S1, lead wires 6& %@bs” with %6d-
Ru. The details of these structures, including the manufacturing method, will be explained with reference to FIGS. 2 to 4.

まず、アルセナグリーンシートよりなる1対の薄片)a
、l’bを準備する。アルミナグリーンシート11上に
は白金、白金−璽ジウム等からなる1対の膜状電極番a
、4kを印刷によ抄形成する。グリーンシート1番には
上記電極番aS4bの端部位萱に貫通孔111.112
が設けてあ抄、この内部にも電$4&、4にと導通する
電極を形成する。
First, a pair of thin pieces made of arsena green sheet) a
, l'b are prepared. On the alumina green sheet 11, a pair of membrane electrodes made of platinum, platinum-platinum, etc.
, 4k is formed by printing. Green sheet No. 1 has through holes 111 and 112 at the end of the electrode number aS4b.
is provided, and an electrode is also formed inside this which is electrically conductive to the voltages 4 and 4.

グリーンシー)Ib上にはその外周に沿って白金、白金
−ロジウム、タングステン、モリブデン−!ンガン等よ
抄なる膜状のピータ器を印刷により形成すれ。更に上記
電極4&と対応する位置に同様の電極40を形成し、ヒ
ータ5と電極40とが櫛状に対向する部分の上に祉潜化
ニオブ(IbmOs )を添加したジルコニヤ(zrO
s)よりなる膜状の温度検出素子Sを印刷により形成す
る。
Green Sea) Ib is lined with platinum, platinum - rhodium, tungsten, molybdenum -! Form a membranous piece of paper by printing. Furthermore, a similar electrode 40 is formed at a position corresponding to the electrode 4&, and a zirconia (zrO
s) A film-like temperature sensing element S is formed by printing.

、 次に上記グリーンシート11を電極形成面を上にし
てグリーンシー)IThの電極形成[FK重ね合せる。
Next, the green sheet 11 is stacked with the electrode forming side facing upward (green sheet) ITh electrode formation [FK].

この場合白金、白金−ロジウム等よ抄なるリード線6&
、6b、6・、6dの一端をグリーンシートla、l′
bの端部間にセットする。リード線6&はグリーンシー
)1&の貫通孔112の電極を介してグリーンシートl
凰の電極4bに、リード線6bはグリーンシート1bの
電極40および貫通孔111の電極を介してグリーンシ
ー)1aの電!14aKq  リード線6d、6oはグ
リーンシート11のヒータ5の両端に1それぞれ接続す
るように位置させる。
In this case, the lead wire 6 and made of platinum, platinum-rhodium, etc.
, 6b, 6., 6d are attached to green sheets la, l'
Set between the ends of b. The lead wire 6& is connected to the green sheet l via the electrode of the through hole 112 of green sheet 1&.
The lead wire 6b is connected to the electrode 4b of the green sheet 1b through the electrode 40 of the green sheet 1b and the electrode of the through hole 111. 14aKq The lead wires 6d and 6o are positioned so as to be connected to both ends of the heater 5 of the green sheet 11, respectively.

このようにしてグリーンシート1&、1bを重ね合せた
ものを電気炉で1500’=1600℃で約5時間焼成
する。これによジグリーンシー)1&、lbq焼結一体
化し、基体1の内部に膜状ヒータ5、温度検出素子3お
よび電極40が埋設され、表面に膜状電極4m、4bが
漸成逼れる。リードl[6&、6b、6(1,6(1は
グリーンシー)1&、1m間に焼結時の収縮作用により
強固に固着される〇 次にペースト状の一酸化コバルトを、電極41.4bの
櫛状に対向する端部の上に印刷し1乾燥後、電気炉中で
約WOO℃で2時間程度焼成L1ガス成分検出素子2を
形成する。
The green sheets 1 & 1b stacked together in this manner are fired in an electric furnace at 1500'=1600° C. for about 5 hours. As a result, the green sea) 1&, lbq are sintered and integrated, the membrane heater 5, the temperature detection element 3, and the electrode 40 are buried inside the base 1, and the membrane electrodes 4m and 4b gradually close to the surface. Lead l[6&, 6b, 6 (1, 6 (1 is Green Sea)) 1&, 1m between the leads is firmly fixed due to shrinkage during sintering Next, paste cobalt monoxide is applied to the electrode 41.4b The L1 gas component detection element 2 is printed on the comb-shaped opposing ends of the L1 gas component detection element 2, and after drying, the L1 gas component detection element 2 is baked in an electric furnace at about WOO° C. for about 2 hours.

第1図に示すように、上記基体1は、排気ガスを導入す
る孔71を有する耐熱金属よりなる保護カバー7および
これに結合したパイプ8の内部に収納される。なお、保
護カバー7およびパイプ8の結合部には排気管に固定す
るための7ランジ9が取付けられる。基体1はパイプB
内においてアルミナ等の焼結体よりなる保持部材10に
より支持されている。また、基体1の上部、リード線6
およびこれに接続したステンレス等の耐熱金属よ抄なる
サブリード線11社無機接着劃12によ抄バイブ8内に
固定されて)いる。バイブロには更に順次パイプ13.
14が結合されており、これ等の内部に配したアル之す
等よ抄なる絶縁管15、フッ素ゴム等よりなるブツシュ
16、シリコンゴム等より゛なる耐熱ゴム部材1フにサ
ブリード線11が挿通され、外部に導出されたサブリー
ドallはカバ一部材18によ艶被覆されている。
As shown in FIG. 1, the base body 1 is housed inside a protective cover 7 made of heat-resistant metal and having a hole 71 for introducing exhaust gas, and a pipe 8 connected thereto. Note that a 7-lunge 9 for fixing to the exhaust pipe is attached to the joint between the protective cover 7 and the pipe 8. Base 1 is pipe B
Inside, it is supported by a holding member 10 made of a sintered body of alumina or the like. In addition, the upper part of the base 1, the lead wire 6
and connected thereto are 11 sub-lead wires made of heat-resistant metal such as stainless steel (fixed in the paper vibrator 8 by an inorganic adhesive 12). Further pipes 13.
14 are connected, and the sub-lead wire 11 is inserted through an insulating tube 15 made of aluminum or the like arranged inside these, a bushing 16 made of fluororubber, etc., and a heat-resistant rubber member 1 made of silicone rubber, etc. The sub-leads all led to the outside are covered with a glossy cover member 18.

第3図祉上記構成のガス成分検出器の検出回路を示すも
ので、ガス成分検出素子亭と温度検出素子5とは直列に
1これ等素子ffi、3とピータSとは並列に電源19
に接続され、素子213間より取出したり−ド@abは
コンパレータおよびフンパレータの出力電圧により@気
系の空燃比を制御するコンビエータを含も制御回路20
に接続されている・ 次に上記検出器の作動について説明すれば、排気ガスの
組成、すなわち空燃比が変化すると、第6図に示すよう
にガス成分検出素子怠の電気抵抗値g1は空燃比がリー
ン側になるにつれて小さくなる。一方、温度検出素子3
1F1基体1に埋設されて排気ガスに実質的に接触しな
いので、その電気抵抗値tzB空燃比の影響を受けずに
温度りのみで決まる一b−zの値となる0氷温度がtl
から1.へと高くガると、それに応じてガス成分検出素
子Bおよび温度検出素子3の電気抵抗値も+さくなる。
Figure 3 shows the detection circuit of the gas component detector having the above configuration, in which the gas component detection element 5 and the temperature detection element 5 are connected in series with 1 these elements ffi, and 3 and Peter S are connected in parallel with the power source 19.
The control circuit 20 is connected to the control circuit 20 and includes a combiator which controls the air-fuel ratio of the air system by the output voltage of the comparator and the fan comparator.
Next, to explain the operation of the above-mentioned detector, when the composition of the exhaust gas, that is, the air-fuel ratio changes, the electrical resistance value g1 of the gas component detection element changes as shown in Fig. 6. becomes smaller as it gets leaner. On the other hand, temperature detection element 3
1F1 Since it is buried in the base 1 and does not substantially come into contact with the exhaust gas, its electrical resistance value tzB is determined only by the temperature without being affected by the air-fuel ratio.
From 1. As the temperature increases, the electrical resistance values of the gas component detection element B and the temperature detection element 3 also decrease accordingly.

しかし、素子it、3、の抵抗温度係数はほぼ等しいの
で温度t1゛、を婁とも両者の電気抵抗値21.22が
交わる空燃比は変化せず、かつ所定の空燃比において電
気抵抗値21,2.1+の比は一定で、第5fllJの
検出回路を#J−た場合、ガス成分検出器の出力は温度
の影響なくほぼ同じ値となる。
However, since the temperature coefficients of resistance of elements it and 3 are almost equal, the air-fuel ratio at which their electrical resistance values of 21.22 intersect does not change even at temperature t1, and at a predetermined air-fuel ratio, the electrical resistance values of 21. The ratio of 2.1+ is constant, and when the fifth fllJ detection circuit is set to #J-, the output of the gas component detector has almost the same value without being affected by temperature.

第7図は他の実施例を示す亀ので、理論空燃比を検出す
るためのガス成分検出器であ〉、ガス成分検出素子2お
よび温度検出素子3と亀にチタニャ(’1’10.)よ
やなる。ヒータ岐設けられていない。アルミナグリーン
シー)1aK#f電極4&、4bおよびガス成分検出素
子8が、グリーンシート1bには電極4o、+6および
温度検出素子3が形成され、これらグリーンシー)11
.1bはリード線6m、61)、6(lをセットした状
態で焼結一体化される。なお、ガス成分検出素子8には
白金、白金−田ジウム等・の触媒を坦持させる。
Figure 7 shows another embodiment, which is a gas component detector for detecting the stoichiometric air-fuel ratio. It's okay. There is no heater branch. Alumina Green Sea) 1aK#f electrodes 4&, 4b and gas component detection element 8 are formed on green sheet 1b, electrodes 4o, +6 and temperature detection element 3 are formed on Green Sea) 11
.. 1b is sintered and integrated with lead wires 6m, 61), and 6(l) set. The gas component detection element 8 supports a catalyst such as platinum, platinum-metal, etc.

ガス成分検出素子2として喧上記各実施例以外に輩10
、ZrO露、S、 O、、Zooを4xることができ、
また温度検出素子3として#′1ooo、MidSZr
O麿、H凰01を用−ることができる。
In addition to the above-mentioned embodiments, as the gas component detection element 2,
, ZrO dew, S, O, , Zoo can be 4x,
In addition, as the temperature detection element 3, #'1ooo, MidSZr
Omaro and Hou01 can be used.

また温度検出素子3の基体1への埋設手段は、例えばア
ルミナグリーンシー)1a、lbを焼成した後に耐熱性
接着剤で両者を接着してもよい。またガス成分検出素子
2および温度検出器≠4同一のアルミナシー)の表面に
設け、温度検出素子Sは別のアルミナグリーンシートに
より被覆し、これ等を同時焼成して一体化して屯よい。
Further, as a means for embedding the temperature detection element 3 in the base 1, for example, alumina green sea) 1a, lb may be baked and then bonded together with a heat-resistant adhesive. Alternatively, the gas component detection element 2 and the temperature detector ≠4 may be provided on the surface of the same alumina sheet, and the temperature detection element S may be covered with another alumina green sheet, and these may be simultaneously fired and integrated.

以上説明した様に本発明では雰囲気の影響を受けない温
度検出素子を用いたので、温度の変化kかかわらず正確
に排気ガス中の酸素濃度を゛検出し、空燃比を所望値に
制御することができる。また、温度検出素子を基体内に
埋設したので、該素子への雰囲気の影響を効果的に阻止
することができる。また、温度検出器を雰囲気から遮断
する手段としてガラス質材料を被覆する手段もあるが、
この場合被覆部材の基体との膨・脹係数の相異から被覆
部材がはがれ、ガスが侵入するおそれがある。本発明の
場合には、か 。
As explained above, since the present invention uses a temperature detection element that is not affected by the atmosphere, it is possible to accurately detect the oxygen concentration in the exhaust gas regardless of temperature changes and control the air-fuel ratio to a desired value. I can do it. Furthermore, since the temperature detection element is embedded within the base, it is possible to effectively prevent the influence of the atmosphere on the element. There is also a method of covering the temperature sensor with a glassy material as a means of shielding it from the atmosphere.
In this case, due to the difference in expansion coefficient between the covering member and the base body, the covering member may peel off and gas may enter. In the case of the present invention,?

かるおそれは全くない。なお、自動車の如き内燃機関で
は検出器の使用温度範囲が極めて広く200@〜900
℃の全域において、ガス成分検出素子と温度検出素子の
組合せによっては抵抗温度係数を一致させることは困難
が生じる。
There is no risk of damage. In addition, in internal combustion engines such as automobiles, the operating temperature range of the detector is extremely wide, from 200 to 900.
Depending on the combination of the gas component detection element and the temperature detection element, it may be difficult to match the resistance temperature coefficients over the entire temperature range.

しかし100°〜′2oO℃の温度変化範囲で抵抗湿度
係数を一致させることは容易である。従って、かかる場
合にはピータを用いればよく、その温度を例えば800
℃±BO@〜10・0℃に制御すればよい。かかる温度
制御は、特定温度に厳格に制御する場合と興り、簡単な
011−0?Fヒ一タ制御回路で容易になし得るもので
あって、種々の運転条件下において、温度検出素子の作
用によ抄検出密の出力をP!埋一定の値にすることがで
きる。
However, it is easy to match the resistance humidity coefficients within a temperature change range of 100 DEG to '200 DEG C. Therefore, in such a case, it is sufficient to use a pipette, and the temperature should be set to 800, for example.
The temperature may be controlled to ℃±BO@~10.0℃. Such temperature control may involve strict control to a specific temperature, or a simple 011-0? This can be easily done with the F heater control circuit, and under various operating conditions, the output of the paper detection density is changed to P! by the action of the temperature detection element. It can be set to a fixed value.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明の一実施例の全体構成を示す断面図、第
2図轄構成主要部の分解斜視図、第3図は第2図の構成
部材を一体化したものの側面図、第4図は第3図のムー
ム纏断面図、第6図は検出回路の一例を示す図、第6図
はガス成分検出素子と温度検出素子の特性を示す図、第
7図は第2の実施例における主要構成部材の分解斜視図
である。 1−−−−−・基体 1&、1b・・・・・・基体構成部材 2・・・・・・ガス成分検出素子 3・・・・・・温度検出素子 4m、4b、番o、4d・・−e・・電極5−−−−−
ヒータ 第1図 第2図 第3図 第4図 第5図 9
Fig. 1 is a sectional view showing the overall configuration of an embodiment of the present invention, Fig. 2 is an exploded perspective view of the main constituent parts, Fig. 3 is a side view of an integrated structure of the constituent members shown in Fig. The figure is a cross-sectional view of the Moom in Figure 3, Figure 6 is a diagram showing an example of the detection circuit, Figure 6 is a diagram showing the characteristics of the gas component detection element and the temperature detection element, and Figure 7 is the second embodiment. FIG. 3 is an exploded perspective view of main components in FIG. 1-----Base 1&, 1b...Base component 2...Gas component detection element 3...Temperature detection element 4m, 4b, number o, 4d.・-e・・Electrode 5------
Heater Fig. 1 Fig. 2 Fig. 3 Fig. 4 Fig. 5 Fig. 9

Claims (1)

【特許請求の範囲】[Claims] 耐熱電気絶縁性の基体に、検出ガス中のガス成分に応じ
た電気信号を示す金属酸化物よ抄なる膜状ガス成分検出
素子と、この素子の示す電気信号を取出す電極と、上記
膜状ガス成分検出素子とfi[等しい抵抗温度係数をも
つ金属酸化物より&る膜状温度検出素子と、この素子の
示す電気信号を取出す電極とを形成し、上記膜状温度検
出素子社これを上記基体内に埋設したことを特徴とする
ガス成分検出器。
A film-like gas component detection element made of a metal oxide that shows an electric signal according to the gas component in the detected gas, an electrode for extracting the electrical signal shown by this element, and a film-like gas component detection element formed on a heat-resistant electrically insulating base, and the film-like gas A component detection element and a film temperature detection element made of a metal oxide having an equal resistance temperature coefficient and an electrode for extracting an electric signal indicated by this element are formed, and the film temperature detection element A gas component detector characterized by being implanted inside the body.
JP12862981A 1981-08-17 1981-08-17 Detector for gas component Pending JPS5830649A (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP12862981A JPS5830649A (en) 1981-08-17 1981-08-17 Detector for gas component
US06/354,794 US4453397A (en) 1981-08-17 1982-03-04 Gas detecting sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12862981A JPS5830649A (en) 1981-08-17 1981-08-17 Detector for gas component

Publications (1)

Publication Number Publication Date
JPS5830649A true JPS5830649A (en) 1983-02-23

Family

ID=14989527

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12862981A Pending JPS5830649A (en) 1981-08-17 1981-08-17 Detector for gas component

Country Status (1)

Country Link
JP (1) JPS5830649A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62267654A (en) * 1986-05-16 1987-11-20 Ngk Spark Plug Co Ltd Gas sensor

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5693038A (en) * 1979-12-27 1981-07-28 Nec Corp Semiconductor gas sensor

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5693038A (en) * 1979-12-27 1981-07-28 Nec Corp Semiconductor gas sensor

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62267654A (en) * 1986-05-16 1987-11-20 Ngk Spark Plug Co Ltd Gas sensor

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