JPS5892946A - Gas component detector - Google Patents
Gas component detectorInfo
- Publication number
- JPS5892946A JPS5892946A JP19247781A JP19247781A JPS5892946A JP S5892946 A JPS5892946 A JP S5892946A JP 19247781 A JP19247781 A JP 19247781A JP 19247781 A JP19247781 A JP 19247781A JP S5892946 A JPS5892946 A JP S5892946A
- Authority
- JP
- Japan
- Prior art keywords
- temperature
- gas component
- fuel ratio
- detecting element
- detector
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
- G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
- G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
- G01N27/122—Circuits particularly adapted therefor, e.g. linearising circuits
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- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
Abstract
Description
【発明の詳細な説明】
本発明はガス成分検出器、特に内燃機関の排気ガス中の
酸素濃度を検出し空燃比を測定するためのガス成分検出
器に関するものである。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a gas component detector, particularly to a gas component detector for detecting oxygen concentration in exhaust gas of an internal combustion engine and measuring air-fuel ratio.
近年、排気ガス中の有害成分を低減させるため、また燃
費を向上させる等の目的で内燃機間管理論空燃比よりも
薄−空燃比で運転させる、いわゆる希薄燃焼方式が提案
されて−る。この方式にお−て轄薄−飯域での空燃比を
精確に検出する手段が必要である。In recent years, a so-called lean combustion system has been proposed in which internal combustion engines are operated at a leaner air-fuel ratio than the theoretical air-fuel ratio in order to reduce harmful components in exhaust gas and improve fuel efficiency. This method requires means for accurately detecting the air-fuel ratio in the low-low range.
この聰の手段としてれ、特公昭８６−６６０８号、特開
昭６１！−８６８９６８に記載の検知装置がある。これ
等は、素子として一酸化コバルト（ＯｏＯ）もしくは−
酸化コバルトと酸化マグネシウム（ＭｇＯ）との合金を
用−１−酸化コバルトが四三酸化コパル）（００１０４
）へ変化するのを防止するとともに温度補償のため、素
子ｔある一定の温度、例えば９００℃に加熱保持して使
用する構成となっている。Be the means of this man, Special Publication No. 86-6608, Japanese Patent Application Publication No. 61 of 1983! There is a detection device described in -868968. These are cobalt monoxide (OoO) or -
When using an alloy of cobalt oxide and magnesium oxide (MgO), -1-cobalt oxide is copal tetroxide) (00104
), and for temperature compensation, the element t is heated and maintained at a certain temperature, for example, 900°C.
これ等装置の検出原理は、第１１ＩＫ示すようにＣｏｏ
等よりなる素子の電気抵抗値が空燃比が薄くなるにつれ
て低下するのを利用するものである。The detection principle of these devices is as shown in the 11th IK.
This method takes advantage of the fact that the electrical resistance value of the element consisting of the above decreases as the air-fuel ratio becomes leaner.
しかしながら、ＯｏＯ等は金属鹸化物半導体であシ、電
気抵抗値は温度によっても大きく変化すゐ０例えば第１
図に示すように温度ｔｏから温度＄１へ素子の温度が低
下すると、温度“ｔ・のとき空燃比１８での電気抵抗値
凰・が温ｔＬ＊ ｌではｌＬｌと高くな夛、この値は温
度ｔ・のと古の空燃比纜は１６に相当し空燃比て約３変
化してしまうことに＆る。このため自動車等の如く非常
に広い温度範囲でかつ温度変化の大１１−場合には精ｉ
１ｔ’を空燃比の検出が困離である。また、ヒータを用
−た場合でも、大１１一温度変化の雰囲気下で所定温度
に保持するに祉その制御回路が複雑で高価にならざるを
得ない。However, OoO etc. are metal saponide semiconductors, and the electrical resistance value varies greatly depending on the temperature.
As shown in the figure, when the temperature of the element decreases from the temperature to to the temperature $1, the electrical resistance value 凰・ at the air-fuel ratio 18 at the temperature "t" becomes as high as lLl at the temperature tL*l, and this value is The old air-fuel ratio at temperature t is equivalent to 16, which means that the air-fuel ratio changes by about 3.For this reason, in cases such as automobiles, which have a very wide temperature range and large temperature changes, Ha Sei I
It is difficult to detect the air-fuel ratio at 1t'. Furthermore, even if a heater is used, the control circuit must be complicated and expensive in order to maintain a predetermined temperature in an atmosphere with large temperature changes.
本発明社、上記の＠題を解決して広一温度範囲で精ＳＫ
空燃比を検出できるガス成分検出器１ｍ供することを目
的とするもので、ガス成分検出素子と温度検出素子加熱
手段との構成によシ、温度制御なしもしくは簡単′Ｉｋ
ｉｌｌｌ！ｌＩＩ御で精確な空燃比の検出を可能とする
ものである。The present invention company solved the above @problem and achieved precision SK in a wide temperature range.
The purpose is to provide a 1m gas component detector capable of detecting the air-fuel ratio, and depending on the configuration of the gas component detection element and the temperature detection element heating means, there is no temperature control or simple temperature control.
Illll! This makes it possible to accurately detect the air-fuel ratio by controlling the air-fuel ratio.
以下、本発＠を実施例により説明する。先ず第Ｓ図にお
−て、ｌはアルミナよりなる板状の基体で、後記するガ
ス成分検出素子および電極を保持するとともに、内部に
温度検出素子と電極およびヒータが埋設しである。また
上端には６本のり−ドＩ［６を有している。この基体１
社排気ガスを導入する孔？ｌＴｈ有する耐熱性金属より
なる保護カバー７およびこれと結合した耐熱性金属のパ
イプ８の内部に収納されている。保護カバー７とパイプ
８の結合部には排気管Ｋｌ定するための７ランジ９が取
付けである。基体ｌはパイプ８内において、アル之す等
の焼結体よりなる保持部材１０により支持されている。The present invention will be explained below using examples. First, in FIG. S, reference numeral 1 denotes a plate-shaped base made of alumina, which holds a gas component detection element and an electrode, which will be described later, and has a temperature detection element, an electrode, and a heater embedded therein. Moreover, it has six boards I[6 at the upper end. This base 1
A hole to introduce company exhaust gas? It is housed inside a protective cover 7 made of a heat-resistant metal with lTh and a pipe 8 made of a heat-resistant metal connected thereto. A 7-lunge 9 is attached to the joint between the protective cover 7 and the pipe 8 for fixing the exhaust pipe Kl. The base 1 is supported within the pipe 8 by a holding member 10 made of a sintered body such as aluminum.
基体１の上部、リード線６およびこれに接続したステン
レス等の耐熱性金属よシなるサブリード線１１ｔｊ無機
接着剤１ｍによりパイプ８内に固定されている。パイプ
８にはパイプ１８が、パイプ１８には更にパイプ１４ｍ
結合されており、これ等の内部に設置したアルミナ等よ
りなる絶縁管１ｉｔ、７ツ素ゴム等よ〉なるブツシュ１
６、シリコ１ンゴム等の耐熱性ゴム部材ｌＩＦに上記サ
ブリード！１１＃挿通され、外部に導出されたサブリー
ド線１１ｔｊカバ一部材１８により被覆されて−る。The upper part of the base 1, the lead wire 6, and a sub-lead wire 11t made of a heat-resistant metal such as stainless steel connected thereto are fixed in the pipe 8 with 1 m of inorganic adhesive. Pipe 8 has a pipe 18, and pipe 18 has a further 14 m of pipe.
1 piece of insulating tube made of alumina etc. installed inside these, 1 bushing made of 7-piece rubber etc.
6. Add the above sub-lead to the heat-resistant rubber member lIF such as silicone rubber! The sub-lead wire 11tj is inserted through the sub-lead wire 11# and is covered with a cover member 18.
次Ｋ、基体ｌの部分ｏｐｓｉｗ＊ならびにその製造方法
Ｋ”）−で第８図な−し第す図により説明する。゛
ｌａｘ ｘｂＳｔｅａ基体ｌを構成すべきアルミナグリ
ーンシーシである。一方のグリーンシーシｌ＆にはその
中央に１対の白金、白金−ロジウム等の耐熱金属よりな
る膜状の電極４ｍ、４ｂが互１／ＡＫ離間してスクリー
ン印刷される。またこの電極＊ａ、ａｈＦｉグリーンシ
ー）１１＆の貫通孔１１１、Ｉｌｍの内向にも形成され
て−る。更にグリーンシー）１＆に＃ｉその外周部に沿
って白金、白金−ロジウム、タングステン、モリブデン
−マンｌン等の金属よりなる膜状のヒータ６ａがスクリ
ーン印刷され、またこのヒータ５１は貫通孔１１Ｂ、１
１４の内面にも及んで−る。一方グリーンシート１ｂＫ
は上記と同様のヒータ５ｂが、外周部および−ｖＬカ上
勢電１［ｉ ４ ａ ％ ４ ｂと対応する位置に印刷
される。また、グリーンシー）１ｃ６ｃａｘ対の白金、
白金−ロジウム等の耐熱金属よりなる膜状の電極５ａｓ
ａｂが互−に−間してスクリーン印刷される。さらに醸
化、セリウム（Ｃ・０倉 ）よ＃Ｊ″Ｉｋる膜状温度検
出素子８が印刷される。 。Next, the part opsiw* of the base l and its manufacturing method K") will be explained with reference to FIGS. A pair of film-like electrodes 4m and 4b made of a heat-resistant metal such as platinum or platinum-rhodium are screen-printed at the center of the l& with a distance of 1/AK from each other.Also, this electrode *a, ahFi Green Sea) A through hole 111 of 11& is also formed inward of Ilm.Furthermore, a film made of metal such as platinum, platinum-rhodium, tungsten, molybdenum-manganese, etc. is formed along the outer periphery of 1&. A shaped heater 6a is screen printed, and this heater 51 has through holes 11B, 1
It also extends to the inner world of 14. On the other hand, green sheet 1bK
A heater 5b similar to the above is printed on the outer periphery and at a position corresponding to the −vL power supply voltage 1[i 4 a % 4 b. Also, green sea) 1c6cax pairs of platinum,
Membrane electrode 5as made of heat-resistant metal such as platinum-rhodium
ab are screen printed between each other. Furthermore, a film-like temperature detection element 8 made of cerium (C・0) is printed.
そして上記グリーンシー）１１、Ｉｂ、Ｉｃ社重ね合さ
れる。この際、グリーンシー）！Ｎ％ｌｂの端部間には
、シー）１％の貫通孔１１２゜１１８．１１４と対応す
る位置にリード線６ｂ。Then, the above Green Sea) 11, Ib, and Ic companies are superimposed. At this time, Green Sea)! Between the ends of the N%lb, lead wires 6b are located at positions corresponding to the through holes 112°, 118, and 114 of the 1%.
６ｅ、６ｍの一端が、またグリーンシー） １ ｂ。6e, one end of 6m is also a green sea) 1b.
１．６の端部間にはシー）ｌｂの貫通孔１１＆とシー）
１０の貫通孔１１６と対応する位置にリード線６ｄ１６
・の一端がそれぞれセットされる。1.6) lb through hole 11& and sea)
A lead wire 6d16 is placed at a position corresponding to the through hole 116 of No. 10.
・One end of each is set.
そして重ね合せたシー）１％％ １に＋、ｌｅｔ加熱し
つつ加圧接着後、電気炉で。１６００℃〜１６００℃、
約す時間焼成する。これＫよりシー）１ａＳｌｂ１１０
祉焼結して一体化し、内部Ｋｊｉｉ状電極６ａ。Then, superimpose the sheet) 1%% 1 +, let it be heated and pressurized and bonded, then in an electric furnace. 1600℃～1600℃,
Bake for approx. This is from K) 1aSlb110
The internal Kjii-shaped electrode 6a is integrated by sintering.
ｓｂ、膜状温度検出素子８、膜状ヒータ６ｂが、表面に
膜状電＠６＊Ｓ４ｂと膜状ヒータ５８が形成される。同
時にリード！！６＆、６ｂｓ６ａｓ６ｄ、６ｅもシー）
１８％ ｌｂｓ １０間に焼結時の収縮作用により強固
に固着される。sb, the film-like temperature detection element 8, and the film-like heater 6b, and the film-like electrode @6*S4b and the film-like heater 58 are formed on the surface. Lead at the same time! ! 6&, 6bs6as6d, 6e also see)
18% lbs It is firmly fixed by the shrinkage effect during sintering.
次にＭｇＯ１ＮｉＯｔ園溶させたペースト状のに示すよ
うに、ｔｌｉ＊ａ、ｉｂ上にガス成分検出素子ｇ＊、電
極＠ａ、Ｂｂ上に温度検出素子３が形成され、この素子
ｓｉｔ基体基体忙中設されている。Next, as shown in FIG. 1, a gas component detection element g* is formed on tli*a and ib, and a temperature detection element 3 is formed on electrodes @a and Bb of the MgO1NiOt dissolved paste. It is set up.
このようにして製作したガス成分検出素子３と、温度補
償素子８との抵抗一温度特性を電気炉中で昇温しつつ測
定した結果管筒６図に示す。Ｃ＠ｏ。The resistance-temperature characteristics of the thus manufactured gas component detection element 3 and temperature compensation element 8 were measured while the temperature was being raised in an electric furnace, and the results are shown in Figure 6 of the tube cylinder. C@o.
特性は６ｂＯ℃〜９５０℃で良く一致している。The characteristics are in good agreement between 6bO<0>C and 950<0>C.
第７図は上記ガス威分検出器の検出回路例を示すもので
、ガス成分検出！！５−ｂ−らの出力電圧管ｊ＆珊して
内燃機関の吸気系の燃料制御装置に信号管送る。１中１
９は電源、ＩＯは制御囲路で、これは検出器からの電気
信号を所定値と比較して制御信号管出すものである。図
示のようにガス成分検出素子露と温度検出素子３と紘直
列に接続され、端子６ｅ（リード線）に祉ガス成分検出
素子露と温度検出素子８の電気抵抗値に応じた出力電圧
が発生する。また、ヒータ６、ａ、５ｂは端子５ｍ（リ
ード線）で並列に接続され接地されている。ここで温度
検出素子８は基体ｌの中に埋設されて−るので、温度検
出素子８の電気抵抗値は排気ガスのガス成分によらず温
度のみによシはば決まシ、かつガス成分検出素子３と温
度検出素子３とは第６５４に示したように電気抵抗値の
温度依存性はほぼ同じである。従って、第８図に示すよ
うに温＆が例えば７００℃、フ７０℃、８６０℃と変化
しても、ガス成分検出素子２（図中ａ）と温度検出素子
８（図中ｂ）の電気抵抗値の交点社同−空燃比（１７゜
８）てほとんど変化せず、従って端子６ｅに発生する出
力電圧も変化せず、温度変化にかかわらず精密に空燃比
を検出できる。Figure 7 shows an example of the detection circuit of the above-mentioned gas component detector, which detects gas components! ! The output voltage tubes of 5-b and the like are sent to a signal tube to the fuel control device of the intake system of the internal combustion engine. 1 out of 1
9 is a power supply, and IO is a control circuit, which compares the electric signal from the detector with a predetermined value and outputs a control signal tube. As shown in the figure, the gas component detection element dew and temperature detection element 3 are connected in series, and an output voltage corresponding to the electrical resistance value of the gas component detection element dew and temperature detection element 8 is generated at the terminal 6e (lead wire). do. Further, the heaters 6, a, and 5b are connected in parallel through a terminal 5m (lead wire) and grounded. Since the temperature detection element 8 is embedded in the base 1, the electrical resistance value of the temperature detection element 8 is determined only by the temperature and not by the gas components of the exhaust gas. As shown in No. 654, the element 3 and the temperature detection element 3 have almost the same temperature dependence of the electrical resistance value. Therefore, as shown in Fig. 8, even if temperature & changes from 700°C to 70°C to 860°C, the electric current of gas component detection element 2 (a in the figure) and temperature detection element 8 (b in the figure) The intersection point of the resistance values is almost unchanged at 17.degree. 8, and therefore the output voltage generated at the terminal 6e also does not change, making it possible to accurately detect the air-fuel ratio regardless of temperature changes.
また、ガス成分検出−子急と温度検出素子８との電気抵
抗値の温度依存性は、第６図より約６５０’−９５０℃
と非常に広い温度範囲であるので、ヒータ６ｍ−，５ｂ
はある一定電圧を印加するか、もしくｋｉｓｏｏ℃土ｌ
暴Ｏ″ＣＫ単純な０Ｎ−ＯＦＦ制御て充分である。Moreover, the temperature dependence of the electrical resistance value of the gas component detection element 8 and the temperature detection element 8 is approximately 650'-950°C from FIG.
Since the temperature range is very wide, heaters 6m-, 5b
Apply a certain voltage or
A simple ON-OFF control is sufficient.
ガス成分検出素子の組成として酸化コパルＦ（Ｃｏｄ）
、酸化！ダネシウム（ＭｇＯ）固溶体、温度検出素子と
して酸化ニオブ（Ｎｂｍ Ｏｓ ）を１０七ルー添加
したジルコニア（Ｚ ｒ Ｏｓ ）を用い、第９図およ
び第１Ｏ図に示すように、基体ｌ上に電＊ＩａＳ４ａｓ
会すを形成し、電極Ｂｍ。Copal oxide (Cod) as the composition of the gas component detection element
, oxidation! Using a Danesium (MgO) solid solution and zirconia (ZrOs) doped with 107 niobium oxide (NbmOs) as a temperature sensing element, as shown in Fig. 9 and Fig.
and form an electrode Bm.
４ ｂｆ［Ｋ温度検出素子３、電極４に一４ａ間にガス
成分検出素子８を形成し、温度検出素子８の表面をガス
シールするために緻密構造にしたアルミナ膜１０１で被
覆した。又、基体ｌ内にヒータｈｂを形成した。製造方
法社、先の実施例とほぼ同じであるが温度検出素子８と
その表面をＩＩ＆覆したアルえす＊１Ｏ１ｔｊ同時Ｋｍ
威し、アルミナ膜１ｏｌｋ緻密に焼結する。A gas component detection element 8 was formed between the temperature detection element 3 and the electrode 4, and the surface of the temperature detection element 8 was covered with an alumina film 101 having a dense structure for gas sealing. Furthermore, a heater hb was formed within the base l. Manufacturing Method Co., Ltd., which is almost the same as the previous example, but the temperature detection element 8 and its surface are replaced with II & reversed.
The alumina film is 1olk densely sintered.
１１１１図に示すようにこの実施例によって得られたガ
ス威分検出素子愈と温度検出素子３との電気抵抗値を示
すが、両者の電気抵抗値の温度依存性状良く一致して−
た。As shown in Fig. 1111, the electrical resistance values of the gas temperature detection element 3 and the temperature detection element 3 obtained in this example are shown, and the temperature dependence characteristics of the electrical resistance values of both are in good agreement.
Ta.
なお、本発明にお―て、画素子８．３の材料は前述した
ごとくであるが、要するに画素子の電気抵抗値の温度依
存性（抵抗温度係数）が同一もしくは同等である材料を
用−れｄよい。故に、前述の材料における量的割合ある
いは第８成分の添加は、その条件を満足するように設定
すればよい。In the present invention, the material of the pixel element 8.3 is as described above, but in short, a material having the same or equivalent temperature dependence (resistance temperature coefficient) of the electrical resistance value of the pixel element is used. It's good. Therefore, the quantitative proportion of the above-mentioned materials or the addition of the eighth component may be set so as to satisfy the conditions.
以上述べたごとく、本発明によれば、比較的広一温度範
囲で正確に空燃比を検出でき、その実用上の効果は大き
い。As described above, according to the present invention, the air-fuel ratio can be detected accurately over a relatively wide temperature range, and its practical effects are significant.
第１図社従来の検出器における空燃比と電気抵抗値との
関係を示す図、第８図は本発明の一実施例を示す縦断面
図、第３図社第１図の要部の正向図、第４図社第８図の
ムーム断面図、第６図は第８図に示す要部の分解斜視図
、１１６図は本発明実施例における温度と電気抵抗値の
関係を示す図、第７図は検出回路例を示す図、第８図は
本発明実施例における空燃比と電気抵抗値の関係を示す
図、第９図は本発明の他の実施例における要部を示す図
、第１Ｏ図轄第９ＷＪのムーム断面図、第１１図辻本発
明の他の実施例における温度と電気抵抗値の関係を示す
図である０
１−・基体、Ｓ−ガス成分検出素子、８・一温度検出素
子、６ｍ、６ｂ−・・七−タ。
代理人弁理士 岡 部 隆
Ｉｌｌ ■
１に３ 面
第 ４ 図
＠５図
＠６［１
ｉ度 （°Ｃ）
晶１！Ｌ各（１ひＫ）
１ｉ７図
ｑ
＠ ８ 図
空 ガ＆ｒヒ
ｆｉ９ 図
第１１図Fig. 1 is a diagram showing the relationship between the air-fuel ratio and the electrical resistance value in a conventional detector; Fig. 8 is a vertical sectional view showing an embodiment of the present invention; Fig. 3 is a diagram showing the main parts of Fig. 1. Figure 4 is a cross-sectional view of Moom in Figure 8, Figure 6 is an exploded perspective view of the main parts shown in Figure 8, Figure 116 is a diagram showing the relationship between temperature and electrical resistance value in the embodiment of the present invention, FIG. 7 is a diagram showing an example of a detection circuit, FIG. 8 is a diagram showing the relationship between air-fuel ratio and electrical resistance value in an embodiment of the present invention, and FIG. 9 is a diagram showing main parts in another embodiment of the present invention. FIG. 11 is a diagram showing the relationship between temperature and electrical resistance value in another embodiment of the present invention. Temperature detection element, 6m, 6b-...7-ta. Representative Patent Attorney Takashi Okabe Ill ■ 1 to 3 Page 4 Figure @ 5 Figure @ 6 [1 degree (°C) Akira 1! L each (1hiK) 1i7 figure q @ 8 figure sky G & rhi fi9 figure 11 figure
Claims (1)
−ＭｇＯ系もしく社（３ｏＯ−ＮｉＯ−Ｍ ｇ Ｏ系よ
りなる膜状ガス成分検出素子と、この素子の示す電気抵
抗値を取出す電極と、温度に応じた電気信号を示し主成
分がＣ・Ｏｓもしく社！ｒＯ，よりなる膜状温度検出素
子と、この素子の示す電気抵抗値を取出す電極と、前記
雨検出素子を加熱する加熱手段とを有し、これらを耐熱
電気絶縁材より成る基体に設け、前記膜状温度検出素子
を、耐熱電気絶縁材よ！１１にるガス不浸透性の腰で被
覆もしくは前記基体内Ｋｌｌ設したこと全特徴とするガ
ス成分検出器。OoO indicates the electrical resistance value depending on the gas component in the detected gas
-MgO system or company (3oO-NiO-M g A film-like temperature detection element made of Os or Sha!rO, an electrode for extracting the electrical resistance value shown by this element, and a heating means for heating the rain detection element, and these are made of a heat-resistant electrical insulating material. 1. A gas component detector, which is provided on a base body, and the film-like temperature detecting element is covered with a gas-impermeable material made of a heat-resistant electrical insulating material, or is disposed within the base body.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19247781A JPS5892946A (en) | 1981-11-30 | 1981-11-30 | Gas component detector |
| US06/354,794 US4453397A (en) | 1981-08-17 | 1982-03-04 | Gas detecting sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19247781A JPS5892946A (en) | 1981-11-30 | 1981-11-30 | Gas component detector |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5892946A true JPS5892946A (en) | 1983-06-02 |
Family
ID=16291936
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19247781A Pending JPS5892946A (en) | 1981-08-17 | 1981-11-30 | Gas component detector |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5892946A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60115837A (en) * | 1983-11-29 | 1985-06-22 | Ngk Spark Plug Co Ltd | Gas sensor with heater and its manufacture |
| JPS60117140A (en) * | 1983-11-30 | 1985-06-24 | Ngk Spark Plug Co Ltd | Gas sensor with heater |
| WO2004003536A1 (en) * | 2002-06-27 | 2004-01-08 | National Institute Of Advanced Industrial Science And Technology | Resistance type oxygen sensor and oxygen sensor device using it and air/fuel ratio control system |
| WO2005003749A1 (en) * | 2003-07-03 | 2005-01-13 | National Institute Of Advanced Industrial Science And Technology | Oxygen sensor employing oxide semiconductor |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5693038A (en) * | 1979-12-27 | 1981-07-28 | Nec Corp | Semiconductor gas sensor |
-
1981
- 1981-11-30 JP JP19247781A patent/JPS5892946A/en active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5693038A (en) * | 1979-12-27 | 1981-07-28 | Nec Corp | Semiconductor gas sensor |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60115837A (en) * | 1983-11-29 | 1985-06-22 | Ngk Spark Plug Co Ltd | Gas sensor with heater and its manufacture |
| JPH0330815B2 (en) * | 1983-11-29 | 1991-05-01 | Ngk Spark Plug Co | |
| JPS60117140A (en) * | 1983-11-30 | 1985-06-24 | Ngk Spark Plug Co Ltd | Gas sensor with heater |
| JPH0221744B2 (en) * | 1983-11-30 | 1990-05-16 | Ngk Spark Plug Co | |
| WO2004003536A1 (en) * | 2002-06-27 | 2004-01-08 | National Institute Of Advanced Industrial Science And Technology | Resistance type oxygen sensor and oxygen sensor device using it and air/fuel ratio control system |
| CN1299110C (en) * | 2002-06-27 | 2007-02-07 | 独立行政法人产业技术综合研究所 | Resistance type oxygen sensor and oxygen sensor device using it and air/fuel ratio control system |
| US7236083B2 (en) | 2002-06-27 | 2007-06-26 | National Institute Of Advanced Industrial Science And Technology | Resistance type oxygen sensor and oxygen sensor device using it and air/fuel ratio control system |
| WO2005003749A1 (en) * | 2003-07-03 | 2005-01-13 | National Institute Of Advanced Industrial Science And Technology | Oxygen sensor employing oxide semiconductor |
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