CN108732212B - 一种多效应检测集成气体传感器制造方法的制造方法、传感器及其应用 - Google Patents
一种多效应检测集成气体传感器制造方法的制造方法、传感器及其应用 Download PDFInfo
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- CN108732212B CN108732212B CN201810503081.5A CN201810503081A CN108732212B CN 108732212 B CN108732212 B CN 108732212B CN 201810503081 A CN201810503081 A CN 201810503081A CN 108732212 B CN108732212 B CN 108732212B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
- G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
- G01N27/125—Composition of the body, e.g. the composition of its sensitive layer
- G01N27/127—Composition of the body, e.g. the composition of its sensitive layer comprising nanoparticles
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Nanotechnology (AREA)
- Chemical Kinetics & Catalysis (AREA)
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- Physics & Mathematics (AREA)
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- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
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CN109781151B (zh) * | 2019-01-22 | 2021-10-26 | 苏州大学 | 传感元件与弹性敏感元件加工一体化的传感器及其制备 |
Citations (31)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5824850A (ja) * | 1981-08-07 | 1983-02-14 | Toyota Central Res & Dev Lab Inc | ヒータ付薄膜型酸素センサ |
JPH02184749A (ja) * | 1989-01-11 | 1990-07-19 | Yazaki Corp | 接触燃焼式ガスセンサー |
US5644068A (en) * | 1993-11-11 | 1997-07-01 | Nok Corporation | Gas sensor |
CN1175690A (zh) * | 1996-08-31 | 1998-03-11 | Lg电子株式会社 | 可燃气体传感器及其制造方法 |
JP2000009671A (ja) * | 1998-06-26 | 2000-01-14 | Yazaki Corp | ガスセンサ |
JP2000338081A (ja) * | 1999-05-28 | 2000-12-08 | Matsushita Electric Ind Co Ltd | ガスセンサ |
JP2001041924A (ja) * | 1999-07-28 | 2001-02-16 | Matsushita Electric Ind Co Ltd | ガスセンサ |
US6540892B1 (en) * | 1999-09-15 | 2003-04-01 | Robert Bosch Gmbh | Sensor for determining the concentration of gas components in a gas mixture |
CN1431491A (zh) * | 2003-02-28 | 2003-07-23 | 北京青鸟元芯微系统科技有限责任公司 | 一种低功耗化学气体传感器芯片、传感器及其制备方法 |
CN1471637A (zh) * | 2000-10-27 | 2004-01-28 | 矿井安全装置公司 | 催化传感器 |
CN1478201A (zh) * | 2000-12-07 | 2004-02-25 | 松下电器产业株式会社 | 气体传感器、气体浓度的检测方法及装置 |
DE102004060103A1 (de) * | 2004-06-03 | 2005-12-22 | Ust Umweltsensortechnik Gmbh | Verfahren und Anordnung zur Erfassung brennbarer Gase, insbesondere zur Erfassung von Wasserstoff |
JP2007114039A (ja) * | 2005-10-20 | 2007-05-10 | Ngk Spark Plug Co Ltd | ガスセンサ |
CN101021501A (zh) * | 2007-03-28 | 2007-08-22 | 哈尔滨理工大学 | 平板夹心结构的半导体式气体传感器及其制造方法 |
JP2007285841A (ja) * | 2006-04-17 | 2007-11-01 | Yazaki Corp | ガス検知装置およびガス検知方法 |
CN101975806A (zh) * | 2010-08-20 | 2011-02-16 | 郑州炜盛电子科技有限公司 | 复合式气体传感器及其气体检测方法 |
CN102004124A (zh) * | 2009-09-01 | 2011-04-06 | 株式会社堀场制作所 | 气体传感器 |
CN102103106A (zh) * | 2009-12-18 | 2011-06-22 | 中国电子科技集团公司第四十九研究所 | 一种带温度调制的三桥臂催化式微气体传感器制造方法 |
CN102109487A (zh) * | 2009-12-28 | 2011-06-29 | 华瑞科学仪器(上海)有限公司 | 超低浓度气体传感器 |
CN102235989A (zh) * | 2010-05-05 | 2011-11-09 | 哈尔滨佳启科技开发有限公司 | 催化式气体传感器零点自调校方法 |
JP2012063141A (ja) * | 2010-08-18 | 2012-03-29 | Figaro Eng Inc | 接触燃焼式メタン検出装置及びメタン検出方法 |
CN102778479A (zh) * | 2011-05-09 | 2012-11-14 | 中国科学院微电子研究所 | 可集成的非晶态金属氧化物半导体气体传感器 |
CN103698369A (zh) * | 2012-09-27 | 2014-04-02 | 森斯瑞股份公司 | 化学传感器 |
CN104730116A (zh) * | 2015-02-17 | 2015-06-24 | 杭州麦德乐传感科技有限公司 | 复合型气体传感器 |
CN105021303A (zh) * | 2015-07-15 | 2015-11-04 | 哈尔滨工程大学 | 一种铝基敏感材料的温度传感器制造方法 |
CN105074446A (zh) * | 2013-02-27 | 2015-11-18 | 博世株式会社 | 氧传感器预热控制方法及氧传感器驱动控制装置 |
CN105241568A (zh) * | 2015-09-26 | 2016-01-13 | 哈尔滨工程大学 | 一种挠性温度传感器的制造方法 |
CN105992942A (zh) * | 2013-12-19 | 2016-10-05 | 斯姆特尼克斯股份公司 | 气体检测器 |
CN107589217A (zh) * | 2017-08-22 | 2018-01-16 | 中国船舶重工集团公司第七八研究所 | 一种具有合金防护结构的氢气传感器 |
CN107677704A (zh) * | 2017-09-26 | 2018-02-09 | 哈尔滨工程大学 | 一种纳米管材料的气体传感器的制备方法及气体传感器 |
CN107991472A (zh) * | 2017-12-01 | 2018-05-04 | 无锡市尚沃医疗电子股份有限公司 | 复合式呼气检测方法和装置 |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4758145B2 (ja) * | 2005-06-03 | 2011-08-24 | シチズンホールディングス株式会社 | 接触燃焼式ガスセンサ |
KR20140097714A (ko) * | 2013-01-29 | 2014-08-07 | 한국전자통신연구원 | 다공성 멤브레인이 내장된 마이크로히터를 이용한 mems형 접촉연소식 가스 센서 |
-
2018
- 2018-05-23 CN CN201810503081.5A patent/CN108732212B/zh active Active
Patent Citations (32)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5824850A (ja) * | 1981-08-07 | 1983-02-14 | Toyota Central Res & Dev Lab Inc | ヒータ付薄膜型酸素センサ |
JPH02184749A (ja) * | 1989-01-11 | 1990-07-19 | Yazaki Corp | 接触燃焼式ガスセンサー |
US5644068A (en) * | 1993-11-11 | 1997-07-01 | Nok Corporation | Gas sensor |
CN1175690A (zh) * | 1996-08-31 | 1998-03-11 | Lg电子株式会社 | 可燃气体传感器及其制造方法 |
JP2000009671A (ja) * | 1998-06-26 | 2000-01-14 | Yazaki Corp | ガスセンサ |
JP2000338081A (ja) * | 1999-05-28 | 2000-12-08 | Matsushita Electric Ind Co Ltd | ガスセンサ |
JP2001041924A (ja) * | 1999-07-28 | 2001-02-16 | Matsushita Electric Ind Co Ltd | ガスセンサ |
US6540892B1 (en) * | 1999-09-15 | 2003-04-01 | Robert Bosch Gmbh | Sensor for determining the concentration of gas components in a gas mixture |
CN1471637A (zh) * | 2000-10-27 | 2004-01-28 | 矿井安全装置公司 | 催化传感器 |
CN1478201A (zh) * | 2000-12-07 | 2004-02-25 | 松下电器产业株式会社 | 气体传感器、气体浓度的检测方法及装置 |
CN1431491A (zh) * | 2003-02-28 | 2003-07-23 | 北京青鸟元芯微系统科技有限责任公司 | 一种低功耗化学气体传感器芯片、传感器及其制备方法 |
DE102004060103A1 (de) * | 2004-06-03 | 2005-12-22 | Ust Umweltsensortechnik Gmbh | Verfahren und Anordnung zur Erfassung brennbarer Gase, insbesondere zur Erfassung von Wasserstoff |
JP2007114039A (ja) * | 2005-10-20 | 2007-05-10 | Ngk Spark Plug Co Ltd | ガスセンサ |
JP2007285841A (ja) * | 2006-04-17 | 2007-11-01 | Yazaki Corp | ガス検知装置およびガス検知方法 |
CN101021501A (zh) * | 2007-03-28 | 2007-08-22 | 哈尔滨理工大学 | 平板夹心结构的半导体式气体传感器及其制造方法 |
CN102004124A (zh) * | 2009-09-01 | 2011-04-06 | 株式会社堀场制作所 | 气体传感器 |
CN102103106A (zh) * | 2009-12-18 | 2011-06-22 | 中国电子科技集团公司第四十九研究所 | 一种带温度调制的三桥臂催化式微气体传感器制造方法 |
CN102109487A (zh) * | 2009-12-28 | 2011-06-29 | 华瑞科学仪器(上海)有限公司 | 超低浓度气体传感器 |
CN102235989A (zh) * | 2010-05-05 | 2011-11-09 | 哈尔滨佳启科技开发有限公司 | 催化式气体传感器零点自调校方法 |
JP2012063141A (ja) * | 2010-08-18 | 2012-03-29 | Figaro Eng Inc | 接触燃焼式メタン検出装置及びメタン検出方法 |
CN101975806A (zh) * | 2010-08-20 | 2011-02-16 | 郑州炜盛电子科技有限公司 | 复合式气体传感器及其气体检测方法 |
CN102778479A (zh) * | 2011-05-09 | 2012-11-14 | 中国科学院微电子研究所 | 可集成的非晶态金属氧化物半导体气体传感器 |
CN102778479B (zh) * | 2011-05-09 | 2014-03-19 | 中国科学院微电子研究所 | 可集成的非晶态金属氧化物半导体气体传感器 |
CN103698369A (zh) * | 2012-09-27 | 2014-04-02 | 森斯瑞股份公司 | 化学传感器 |
CN105074446A (zh) * | 2013-02-27 | 2015-11-18 | 博世株式会社 | 氧传感器预热控制方法及氧传感器驱动控制装置 |
CN105992942A (zh) * | 2013-12-19 | 2016-10-05 | 斯姆特尼克斯股份公司 | 气体检测器 |
CN104730116A (zh) * | 2015-02-17 | 2015-06-24 | 杭州麦德乐传感科技有限公司 | 复合型气体传感器 |
CN105021303A (zh) * | 2015-07-15 | 2015-11-04 | 哈尔滨工程大学 | 一种铝基敏感材料的温度传感器制造方法 |
CN105241568A (zh) * | 2015-09-26 | 2016-01-13 | 哈尔滨工程大学 | 一种挠性温度传感器的制造方法 |
CN107589217A (zh) * | 2017-08-22 | 2018-01-16 | 中国船舶重工集团公司第七八研究所 | 一种具有合金防护结构的氢气传感器 |
CN107677704A (zh) * | 2017-09-26 | 2018-02-09 | 哈尔滨工程大学 | 一种纳米管材料的气体传感器的制备方法及气体传感器 |
CN107991472A (zh) * | 2017-12-01 | 2018-05-04 | 无锡市尚沃医疗电子股份有限公司 | 复合式呼气检测方法和装置 |
Non-Patent Citations (4)
Title |
---|
MEMS集成甲醛传感器设计及性能检测研究;赵如如;《中国优秀硕士学位论文全文数据库信息科技辑》;20160115;第1140-170页 * |
New technique for the stability of the zero-point of catalytic sensor;Tongminming;《PROCEEDINGS OF SPIE》;20031231;第463-468页 * |
Study on Single Chip Integrated Methane Sensor;Kai Zhang 等;《2019 IEEE 3rd Information Technology,Networking,Electronic and Automation Control Conference》;20190606;第5253卷;第463-468页 * |
传感器温度场零干扰设计;刘英伟 等;《传感技术学报》;20110331;第24卷(第3期);第346-349页 * |
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