JP4401383B2 - 構造化された素子の製造 - Google Patents
構造化された素子の製造 Download PDFInfo
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- JP4401383B2 JP4401383B2 JP2006501441A JP2006501441A JP4401383B2 JP 4401383 B2 JP4401383 B2 JP 4401383B2 JP 2006501441 A JP2006501441 A JP 2006501441A JP 2006501441 A JP2006501441 A JP 2006501441A JP 4401383 B2 JP4401383 B2 JP 4401383B2
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- 238000004519 manufacturing process Methods 0.000 title claims description 35
- 230000010076 replication Effects 0.000 claims abstract description 124
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- 125000006850 spacer group Chemical group 0.000 claims abstract description 79
- 230000008569 process Effects 0.000 claims abstract description 74
- 238000004049 embossing Methods 0.000 claims abstract description 10
- 239000007788 liquid Substances 0.000 claims abstract description 5
- 239000000463 material Substances 0.000 claims description 38
- 239000000758 substrate Substances 0.000 claims description 26
- 230000003287 optical effect Effects 0.000 claims description 22
- 239000011344 liquid material Substances 0.000 claims description 5
- 239000013536 elastomeric material Substances 0.000 claims 1
- 239000003822 epoxy resin Substances 0.000 claims 1
- 229920000647 polyepoxide Polymers 0.000 claims 1
- 239000004593 Epoxy Substances 0.000 abstract description 7
- 238000000465 moulding Methods 0.000 abstract description 7
- 230000003362 replicative effect Effects 0.000 abstract description 4
- 238000007493 shaping process Methods 0.000 abstract description 2
- 239000010410 layer Substances 0.000 description 16
- 230000007246 mechanism Effects 0.000 description 11
- 238000009420 retrofitting Methods 0.000 description 8
- 239000004205 dimethyl polysiloxane Substances 0.000 description 7
- 235000013870 dimethyl polysiloxane Nutrition 0.000 description 7
- CXQXSVUQTKDNFP-UHFFFAOYSA-N octamethyltrisiloxane Chemical compound C[Si](C)(C)O[Si](C)(C)O[Si](C)(C)C CXQXSVUQTKDNFP-UHFFFAOYSA-N 0.000 description 7
- 238000004987 plasma desorption mass spectroscopy Methods 0.000 description 7
- 229920000435 poly(dimethylsiloxane) Polymers 0.000 description 7
- 239000011521 glass Substances 0.000 description 5
- 238000005516 engineering process Methods 0.000 description 4
- 238000005530 etching Methods 0.000 description 4
- 239000011345 viscous material Substances 0.000 description 4
- 238000003848 UV Light-Curing Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 238000000206 photolithography Methods 0.000 description 3
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Images
Classifications
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/18—Diffraction gratings
- G02B5/1847—Manufacturing methods
- G02B5/1852—Manufacturing methods using mechanical means, e.g. ruling with diamond tool, moulding
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C43/00—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
- B29C43/02—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles
- B29C43/021—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles characterised by the shape of the surface
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C59/00—Surface shaping of articles, e.g. embossing; Apparatus therefor
- B29C59/02—Surface shaping of articles, e.g. embossing; Apparatus therefor by mechanical means, e.g. pressing
- B29C59/022—Surface shaping of articles, e.g. embossing; Apparatus therefor by mechanical means, e.g. pressing characterised by the disposition or the configuration, e.g. dimensions, of the embossments or the shaping tools therefor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29D—PRODUCING PARTICULAR ARTICLES FROM PLASTICS OR FROM SUBSTANCES IN A PLASTIC STATE
- B29D11/00—Producing optical elements, e.g. lenses or prisms
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29D—PRODUCING PARTICULAR ARTICLES FROM PLASTICS OR FROM SUBSTANCES IN A PLASTIC STATE
- B29D11/00—Producing optical elements, e.g. lenses or prisms
- B29D11/00009—Production of simple or compound lenses
- B29D11/00365—Production of microlenses
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29D—PRODUCING PARTICULAR ARTICLES FROM PLASTICS OR FROM SUBSTANCES IN A PLASTIC STATE
- B29D11/00—Producing optical elements, e.g. lenses or prisms
- B29D11/00009—Production of simple or compound lenses
- B29D11/0048—Moulds for lenses
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C59/00—Surface shaping of articles, e.g. embossing; Apparatus therefor
- B29C59/02—Surface shaping of articles, e.g. embossing; Apparatus therefor by mechanical means, e.g. pressing
- B29C59/022—Surface shaping of articles, e.g. embossing; Apparatus therefor by mechanical means, e.g. pressing characterised by the disposition or the configuration, e.g. dimensions, of the embossments or the shaping tools therefor
- B29C2059/023—Microembossing
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29D—PRODUCING PARTICULAR ARTICLES FROM PLASTICS OR FROM SUBSTANCES IN A PLASTIC STATE
- B29D11/00—Producing optical elements, e.g. lenses or prisms
- B29D11/00009—Production of simple or compound lenses
- B29D11/00317—Production of lenses with markings or patterns
- B29D11/00326—Production of lenses with markings or patterns having particular surface properties, e.g. a micropattern
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29L—INDEXING SCHEME ASSOCIATED WITH SUBCLASS B29C, RELATING TO PARTICULAR ARTICLES
- B29L2011/00—Optical elements, e.g. lenses, prisms
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29L—INDEXING SCHEME ASSOCIATED WITH SUBCLASS B29C, RELATING TO PARTICULAR ARTICLES
- B29L2011/00—Optical elements, e.g. lenses, prisms
- B29L2011/0016—Lenses
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
Description
、十分な加工を保証するよう適合されるであろう。
、たとえば、構造化されたレジスト層22,23を用いたフォトリソグラフィプロセスと、ネガ形マスタまたはツール材料21を攻撃しないエッチングステップとによってなされ得る。
的機能を含む)はつながっているが、スペーサ部分は複数の離散的なスペーサ1cを含む。
(スタンプ加工およびUV硬化)が基板の上面側で実行される。次に、基板は上下逆にされ、基板の第2面側において複製が繰返される。各複製プロセス中に、第2の複製は第1の複製と位置合せされなければならない。このようなプロセスは、マスクアライメントにおいて現在実行され得るものに極めて類似している。
Claims (10)
- 構造的機構を伴う構造化された表面を有する複数の光学素子(3)を製造するためのプロセスであって、プロセスは、
a.複製表面(1a,1a′,101a)上に、少なくともいくつかの前記構造的機構のネガ形であるネガ形構造的機構を有し、前記複製表面から突出する少なくとも1つのスペーサ部分(1c,1c′,101c)をさらに有し、前記スペーサ部分が、複製表面の内部から突出するように配置された複数の部分を含むと共に異なる光学素子に対応する複数の構造的機構の間に配置された、複製ツール(1,101)を与えるステップと、
b.前記複製表面に対向する第1の表面を備えた基板、および、可塑的に変形可能な、または粘性もしくは液体の状態にある材料構成要素を与えるステップと、
c.前記スペーサ部分が基板の第1の表面に当接し材料構成要素が複製ツールと基板との間に存在する状態で前記材料構成要素を前記複製表面に接触させるようにし、前記複製表面から複数の光学素子を複製するステップと、
d.前記材料構成要素を硬化させるステップと、
e.前記複製ツールを取り外すステップと、とを含み、
f.前記基板の第1の表面に付着した硬化した前記材料構成要素が複数の光学素子を構成する、プロセス。 - 前記材料構成要素はエポキシ樹脂である、請求項1に記載のプロセス。
- ステップb.およびステップc.において、材料構成要素が基板と複製ツールとの間にある状態で、前記複製ツール(1,101)は前記基板に対して動かされ、前記複製ツールは前記スペーサが前記第1の表面に当接するまで前記基板に対してプレスされ、前記複製プロセスはエンボス加工プロセスである、請求項1または2に記載のプロセス。
- ステップb.およびステップc.において、前記複製ツール(1,101)は第1の表面の上または下に置かれて、前記スペーサ部分は前記第1の表面に当接し、次に前記材料構成要素は、前記複製ツールおよび前記第1の表面の間に粘性または液体の状態で注入される、請求項1または2に記載のプロセス。
- 前記スペーサ部分(1c)は、規則的パターンに配置された複数のスペーサを含む、請求項1から4のいずれかに記載のプロセス。
- 前記スペーサ部分はつながっている、請求項1から5のいずれかに記載のプロセス。
- 前記複製ツールはエラストマ材料構成要素を含む、請求項1から6のいずれかに記載のプロセス。
- 前記複製ツールが剛性バックプレート(33)をさらに含む、請求項7に記載のプロセス。
- 前記複製ツールはアライメントピン(1f)をさらに含む、請求項1から8のいずれかに記載のプロセス。
- 前記スペーサ部分は、スペーサ部分の境界が少なくとも部分的に複製領域を境界する態様で、少なくとも1つのスペーサ部分の境界が複製領域のまわりに形成される態様で配置され、複製プロセス中に液体材料の流れの停止を形成し、または導き直す、請求項1から9のいずれかに記載のプロセス。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP20030405038 EP1443344A1 (en) | 2003-01-29 | 2003-01-29 | Manufacturing micro-structured elements |
PCT/CH2004/000032 WO2004068198A1 (en) | 2003-01-29 | 2004-01-23 | Manufacturing micro-structured elements |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2006519711A JP2006519711A (ja) | 2006-08-31 |
JP4401383B2 true JP4401383B2 (ja) | 2010-01-20 |
Family
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2006501441A Expired - Lifetime JP4401383B2 (ja) | 2003-01-29 | 2004-01-23 | 構造化された素子の製造 |
Country Status (9)
Country | Link |
---|---|
US (2) | US7658877B2 (ja) |
EP (2) | EP1443344A1 (ja) |
JP (1) | JP4401383B2 (ja) |
CN (1) | CN100437158C (ja) |
AT (1) | ATE385577T1 (ja) |
DE (1) | DE602004011655T2 (ja) |
HK (1) | HK1086071A1 (ja) |
TW (1) | TWI290125B (ja) |
WO (1) | WO2004068198A1 (ja) |
Families Citing this family (50)
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EP1542074A1 (en) * | 2003-12-11 | 2005-06-15 | Heptagon OY | Manufacturing a replication tool, sub-master or replica |
US20060228094A1 (en) * | 2005-04-08 | 2006-10-12 | Upstream Engineering Oy | Method for manufacturing beam-shaping components |
US20070023976A1 (en) * | 2005-07-26 | 2007-02-01 | Asml Netherlands B.V. | Imprint lithography |
KR101157966B1 (ko) * | 2005-12-29 | 2012-06-25 | 엘지디스플레이 주식회사 | 액정표시소자의 제조방법 |
EP1872922A1 (en) * | 2006-06-27 | 2008-01-02 | Nederlandse Organisatie voor Toegepast-Natuuurwetenschappelijk Onderzoek TNO | Method and apparatus for manufacturing a polymeric article |
US20070216046A1 (en) * | 2006-03-20 | 2007-09-20 | Heptagon Oy | Manufacturing miniature structured elements with tool incorporating spacer elements |
US20070216048A1 (en) * | 2006-03-20 | 2007-09-20 | Heptagon Oy | Manufacturing optical elements |
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EP1443344A1 (en) | 2004-08-04 |
US9011742B2 (en) | 2015-04-21 |
DE602004011655D1 (de) | 2008-03-20 |
EP1588197A1 (en) | 2005-10-26 |
JP2006519711A (ja) | 2006-08-31 |
TWI290125B (en) | 2007-11-21 |
CN100437158C (zh) | 2008-11-26 |
CN1745319A (zh) | 2006-03-08 |
US20060113701A1 (en) | 2006-06-01 |
WO2004068198A1 (en) | 2004-08-12 |
DE602004011655T2 (de) | 2009-02-05 |
HK1086071A1 (en) | 2006-09-08 |
ATE385577T1 (de) | 2008-02-15 |
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