DE602004011655D1 - Herstellung von mikrostrukturierten elementen - Google Patents
Herstellung von mikrostrukturierten elementenInfo
- Publication number
- DE602004011655D1 DE602004011655D1 DE200460011655 DE602004011655T DE602004011655D1 DE 602004011655 D1 DE602004011655 D1 DE 602004011655D1 DE 200460011655 DE200460011655 DE 200460011655 DE 602004011655 T DE602004011655 T DE 602004011655T DE 602004011655 D1 DE602004011655 D1 DE 602004011655D1
- Authority
- DE
- Germany
- Prior art keywords
- replication
- micro
- preparation
- replication tool
- cured
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 230000010076 replication Effects 0.000 abstract 7
- 238000000034 method Methods 0.000 abstract 4
- 238000004049 embossing Methods 0.000 abstract 2
- 238000000465 moulding Methods 0.000 abstract 2
- 239000004593 Epoxy Substances 0.000 abstract 1
- 239000007788 liquid Substances 0.000 abstract 1
- 230000003362 replicative effect Effects 0.000 abstract 1
- 238000007493 shaping process Methods 0.000 abstract 1
- 125000006850 spacer group Chemical group 0.000 abstract 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/18—Diffraction gratings
- G02B5/1847—Manufacturing methods
- G02B5/1852—Manufacturing methods using mechanical means, e.g. ruling with diamond tool, moulding
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C43/00—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
- B29C43/02—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles
- B29C43/021—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles characterised by the shape of the surface
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C59/00—Surface shaping of articles, e.g. embossing; Apparatus therefor
- B29C59/02—Surface shaping of articles, e.g. embossing; Apparatus therefor by mechanical means, e.g. pressing
- B29C59/022—Surface shaping of articles, e.g. embossing; Apparatus therefor by mechanical means, e.g. pressing characterised by the disposition or the configuration, e.g. dimensions, of the embossments or the shaping tools therefor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29D—PRODUCING PARTICULAR ARTICLES FROM PLASTICS OR FROM SUBSTANCES IN A PLASTIC STATE
- B29D11/00—Producing optical elements, e.g. lenses or prisms
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29D—PRODUCING PARTICULAR ARTICLES FROM PLASTICS OR FROM SUBSTANCES IN A PLASTIC STATE
- B29D11/00—Producing optical elements, e.g. lenses or prisms
- B29D11/00009—Production of simple or compound lenses
- B29D11/00365—Production of microlenses
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29D—PRODUCING PARTICULAR ARTICLES FROM PLASTICS OR FROM SUBSTANCES IN A PLASTIC STATE
- B29D11/00—Producing optical elements, e.g. lenses or prisms
- B29D11/00009—Production of simple or compound lenses
- B29D11/0048—Moulds for lenses
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C59/00—Surface shaping of articles, e.g. embossing; Apparatus therefor
- B29C59/02—Surface shaping of articles, e.g. embossing; Apparatus therefor by mechanical means, e.g. pressing
- B29C59/022—Surface shaping of articles, e.g. embossing; Apparatus therefor by mechanical means, e.g. pressing characterised by the disposition or the configuration, e.g. dimensions, of the embossments or the shaping tools therefor
- B29C2059/023—Microembossing
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29D—PRODUCING PARTICULAR ARTICLES FROM PLASTICS OR FROM SUBSTANCES IN A PLASTIC STATE
- B29D11/00—Producing optical elements, e.g. lenses or prisms
- B29D11/00009—Production of simple or compound lenses
- B29D11/00317—Production of lenses with markings or patterns
- B29D11/00326—Production of lenses with markings or patterns having particular surface properties, e.g. a micropattern
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29L—INDEXING SCHEME ASSOCIATED WITH SUBCLASS B29C, RELATING TO PARTICULAR ARTICLES
- B29L2011/00—Optical elements, e.g. lenses, prisms
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29L—INDEXING SCHEME ASSOCIATED WITH SUBCLASS B29C, RELATING TO PARTICULAR ARTICLES
- B29L2011/00—Optical elements, e.g. lenses, prisms
- B29L2011/0016—Lenses
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Ophthalmology & Optometry (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Moulds For Moulding Plastics Or The Like (AREA)
- Shaping Of Tube Ends By Bending Or Straightening (AREA)
- Semiconductor Lasers (AREA)
- Steroid Compounds (AREA)
- Micromachines (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP20030405038 EP1443344A1 (de) | 2003-01-29 | 2003-01-29 | Herstellung von mikrostrukturierten Teilen |
EP03405038 | 2003-01-29 | ||
PCT/CH2004/000032 WO2004068198A1 (en) | 2003-01-29 | 2004-01-23 | Manufacturing micro-structured elements |
Publications (2)
Publication Number | Publication Date |
---|---|
DE602004011655D1 true DE602004011655D1 (de) | 2008-03-20 |
DE602004011655T2 DE602004011655T2 (de) | 2009-02-05 |
Family
ID=32605476
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE200460011655 Expired - Lifetime DE602004011655T2 (de) | 2003-01-29 | 2004-01-23 | Herstellung von mikrostrukturierten elementen |
Country Status (9)
Country | Link |
---|---|
US (2) | US7658877B2 (de) |
EP (2) | EP1443344A1 (de) |
JP (1) | JP4401383B2 (de) |
CN (1) | CN100437158C (de) |
AT (1) | ATE385577T1 (de) |
DE (1) | DE602004011655T2 (de) |
HK (1) | HK1086071A1 (de) |
TW (1) | TWI290125B (de) |
WO (1) | WO2004068198A1 (de) |
Families Citing this family (50)
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EP1542074A1 (de) * | 2003-12-11 | 2005-06-15 | Heptagon OY | Herstellung eines Werkzeugs zur Vervielfältigung |
US20060228094A1 (en) * | 2005-04-08 | 2006-10-12 | Upstream Engineering Oy | Method for manufacturing beam-shaping components |
US20070023976A1 (en) * | 2005-07-26 | 2007-02-01 | Asml Netherlands B.V. | Imprint lithography |
KR101157966B1 (ko) * | 2005-12-29 | 2012-06-25 | 엘지디스플레이 주식회사 | 액정표시소자의 제조방법 |
EP1872922A1 (de) * | 2006-06-27 | 2008-01-02 | Nederlandse Organisatie voor Toegepast-Natuuurwetenschappelijk Onderzoek TNO | Verfahren und Vorrichtung zur Herstellung eines Kunststoff-Gegenstandes |
US20070216047A1 (en) * | 2006-03-20 | 2007-09-20 | Heptagon Oy | Manufacturing an optical element |
US20070216048A1 (en) * | 2006-03-20 | 2007-09-20 | Heptagon Oy | Manufacturing optical elements |
US20070216046A1 (en) * | 2006-03-20 | 2007-09-20 | Heptagon Oy | Manufacturing miniature structured elements with tool incorporating spacer elements |
JP4915505B2 (ja) * | 2006-05-26 | 2012-04-11 | 凸版印刷株式会社 | 光基板の製造方法 |
US20100072640A1 (en) * | 2006-06-09 | 2010-03-25 | Heptagon Oy | Manufacturing a replication tool, sub-master or replica |
JP6073039B2 (ja) * | 2006-10-31 | 2017-02-01 | モディリス ホールディングス エルエルシー | 複雑な三次元形状をもつ光学製品の製造方法および製造機構 |
JP4833120B2 (ja) * | 2007-03-16 | 2011-12-07 | 株式会社クラレ | 樹脂製マイクロチャネルアレイの製造方法 |
US7692256B2 (en) * | 2007-03-23 | 2010-04-06 | Heptagon Oy | Method of producing a wafer scale package |
EP2147339A1 (de) | 2007-05-14 | 2010-01-27 | Heptagon OY | Beleuchtungssystem |
AU2008269284A1 (en) * | 2007-06-27 | 2008-12-31 | Agency For Science, Technology And Research | A method of making a secondary imprint on an imprinted polymer |
TWI478808B (zh) | 2007-12-19 | 2015-04-01 | Heptagon Micro Optics Pte Ltd | 製造光學元件的方法 |
TWI481496B (zh) * | 2007-12-19 | 2015-04-21 | Heptagon Micro Optics Pte Ltd | 製造光學元件的方法 |
DE102008020645A1 (de) * | 2008-04-24 | 2010-05-12 | Sonopress Gmbh | Verfahren zum justierten Fügen der Flächen von zwei Werkstücken |
JP2010009729A (ja) * | 2008-06-30 | 2010-01-14 | Toshiba Corp | インプリント用スタンパ、インプリント用スタンパの製造方法、磁気記録媒体、磁気記録媒体の製造方法及び磁気ディスク装置 |
FR2942738B1 (fr) * | 2009-03-03 | 2016-04-15 | Commissariat A L'energie Atomique | Procede de fabrication d'un moule pour la lithographie par nano-impression |
JP5158720B2 (ja) * | 2009-03-11 | 2013-03-06 | 富士フイルム株式会社 | 光学モジュールおよびその製造方法、並びに撮像装置 |
JPWO2010143466A1 (ja) | 2009-06-12 | 2012-11-22 | コニカミノルタアドバンストレイヤー株式会社 | ウエハレンズの製造方法、中間型、光学部品、成形型及び成形型の製造方法 |
JP2011098487A (ja) * | 2009-11-05 | 2011-05-19 | Fujifilm Corp | 素子アレイ成形型、及び該成形型を用いて成形された素子アレイ |
KR20130093072A (ko) | 2010-06-14 | 2013-08-21 | 헵타곤 마이크로 옵틱스 피티이. 리미티드 | 복수의 광학 장치를 제조하는 방법 |
TWI547730B (zh) | 2010-08-17 | 2016-09-01 | 新加坡恒立私人有限公司 | 製造用於攝像機之複數光學裝置的方法、包括複數光學裝置之總成及包括複數具有光學裝置的攝像機之總成 |
JP2012192544A (ja) * | 2011-03-15 | 2012-10-11 | Konica Minolta Advanced Layers Inc | インプリント用金型、インプリント方法、及びインプリント装置 |
WO2012161220A1 (ja) * | 2011-05-26 | 2012-11-29 | コニカミノルタアドバンストレイヤー株式会社 | ウェハーレンズの製造方法、ウェハーレンズの製造装置及び光学素子 |
KR102086187B1 (ko) * | 2012-09-11 | 2020-03-06 | 헵타곤 마이크로 옵틱스 피티이. 리미티드 | 절두 렌즈, 절두 렌즈의 쌍 및 상응하는 장치의 제조 |
US8606057B1 (en) | 2012-11-02 | 2013-12-10 | Heptagon Micro Optics Pte. Ltd. | Opto-electronic modules including electrically conductive connections for integration with an electronic device |
JP5949465B2 (ja) * | 2012-11-05 | 2016-07-06 | オムロン株式会社 | 転写成形方法、金型構造、転写成形装置、及び、光学部材 |
SG11201504456YA (en) | 2012-12-27 | 2015-07-30 | Heptagon Micro Optics Pte Ltd | Fabrication of optical elements and modules incorporating the same |
US10677969B2 (en) | 2013-11-27 | 2020-06-09 | Magic Leap, Inc. | Manufacturing for virtual and augmented reality systems and components |
WO2015174930A1 (en) | 2014-05-16 | 2015-11-19 | Heptagon Micro Optics Pte. Ltd. | Wafer-level maufacture of devices, in particular of optical devices |
JP6732735B2 (ja) | 2014-05-16 | 2020-07-29 | ヘプタゴン・マイクロ・オプティクス・プライベート・リミテッドHeptagon Micro Optics Pte. Ltd. | 複製による光学素子の製造および対応する複製ツール並びに光学装置 |
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EP3265853B1 (de) * | 2015-03-05 | 2021-04-21 | Magic Leap, Inc. | Verbesserte herstellung für systeme der virtuellen und erweiterten realität und komponenten |
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JP7137325B2 (ja) * | 2018-03-08 | 2022-09-14 | 株式会社ダイセル | 成型品の離型方法、及び離型装置 |
JP7137324B2 (ja) * | 2018-03-08 | 2022-09-14 | 株式会社ダイセル | 成型品の離型方法、及び離型装置 |
WO2019172387A1 (ja) * | 2018-03-08 | 2019-09-12 | 株式会社ダイセル | 成型品の離型方法、及び離型装置 |
TWI721368B (zh) * | 2018-04-17 | 2021-03-11 | 日商岡本硝子股份有限公司 | 玻璃製光學零件成形用模具及使用該模具的玻璃製光學零件的製造方法 |
DE112020002969T5 (de) * | 2019-06-19 | 2022-03-10 | Ams Sensors Singapore Pte. Ltd. | Replikation optischer elemente auf ein substrat |
CN110923754A (zh) * | 2019-12-04 | 2020-03-27 | 瑞声通讯科技(常州)有限公司 | 一种易于脱模的菲涅尔模具的制造方法 |
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WO2004045858A1 (en) * | 2002-11-21 | 2004-06-03 | Council Of Scientific And Industrial Research | Colored nanolithography on glass and plastic substrates |
US7750059B2 (en) * | 2002-12-04 | 2010-07-06 | Hewlett-Packard Development Company, L.P. | Polymer solution for nanoimprint lithography to reduce imprint temperature and pressure |
JP4386413B2 (ja) * | 2003-08-25 | 2009-12-16 | 株式会社エンプラス | ワイヤーグリッド偏光子の製造方法 |
US7094304B2 (en) * | 2003-10-31 | 2006-08-22 | Agilent Technologies, Inc. | Method for selective area stamping of optical elements on a substrate |
US8025831B2 (en) * | 2004-05-24 | 2011-09-27 | Agency For Science, Technology And Research | Imprinting of supported and free-standing 3-D micro- or nano-structures |
TW200826319A (en) * | 2006-12-14 | 2008-06-16 | Univ Nat Central | LED with micron and nano structure |
TWI427117B (zh) * | 2008-05-30 | 2014-02-21 | Nitto Denko Corp | 光學元件用樹脂組成物、使用其之光學元件及光學鏡片之製造方法 |
US9255002B2 (en) * | 2009-09-22 | 2016-02-09 | Cornell University | Apparatus and method for forming self-assembly arrays |
TWI384636B (zh) * | 2009-12-31 | 2013-02-01 | Nat Univ Tsing Hua | 以液態或凝膠態前驅物形成圖案化金屬氧化物層或圖案化金屬層之製作方法 |
-
2003
- 2003-01-29 EP EP20030405038 patent/EP1443344A1/de not_active Withdrawn
-
2004
- 2004-01-23 US US10/541,008 patent/US7658877B2/en active Active
- 2004-01-23 DE DE200460011655 patent/DE602004011655T2/de not_active Expired - Lifetime
- 2004-01-23 EP EP20040704530 patent/EP1588197B1/de not_active Expired - Lifetime
- 2004-01-23 CN CNB2004800030482A patent/CN100437158C/zh not_active Expired - Lifetime
- 2004-01-23 JP JP2006501441A patent/JP4401383B2/ja not_active Expired - Lifetime
- 2004-01-23 WO PCT/CH2004/000032 patent/WO2004068198A1/en active IP Right Grant
- 2004-01-23 AT AT04704530T patent/ATE385577T1/de not_active IP Right Cessation
- 2004-01-28 TW TW93101878A patent/TWI290125B/zh not_active IP Right Cessation
-
2006
- 2006-04-26 HK HK06105011A patent/HK1086071A1/xx not_active IP Right Cessation
-
2010
- 2010-01-15 US US12/688,401 patent/US9011742B2/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JP4401383B2 (ja) | 2010-01-20 |
TW200416195A (en) | 2004-09-01 |
EP1588197A1 (de) | 2005-10-26 |
CN1745319A (zh) | 2006-03-08 |
HK1086071A1 (en) | 2006-09-08 |
US7658877B2 (en) | 2010-02-09 |
CN100437158C (zh) | 2008-11-26 |
US9011742B2 (en) | 2015-04-21 |
EP1443344A1 (de) | 2004-08-04 |
US20060113701A1 (en) | 2006-06-01 |
ATE385577T1 (de) | 2008-02-15 |
DE602004011655T2 (de) | 2009-02-05 |
TWI290125B (en) | 2007-11-21 |
EP1588197B1 (de) | 2008-02-06 |
JP2006519711A (ja) | 2006-08-31 |
WO2004068198A1 (en) | 2004-08-12 |
US20100183760A1 (en) | 2010-07-22 |
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