JP4338150B2 - 発泡ポリウレタンおよびその製造方法 - Google Patents
発泡ポリウレタンおよびその製造方法 Download PDFInfo
- Publication number
- JP4338150B2 JP4338150B2 JP2003357387A JP2003357387A JP4338150B2 JP 4338150 B2 JP4338150 B2 JP 4338150B2 JP 2003357387 A JP2003357387 A JP 2003357387A JP 2003357387 A JP2003357387 A JP 2003357387A JP 4338150 B2 JP4338150 B2 JP 4338150B2
- Authority
- JP
- Japan
- Prior art keywords
- polishing
- raw material
- polyol
- foamed polyurethane
- polishing pad
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 13
- 229920005830 Polyurethane Foam Polymers 0.000 title description 23
- 239000011496 polyurethane foam Substances 0.000 title description 23
- 239000002994 raw material Substances 0.000 claims description 31
- 229920002635 polyurethane Polymers 0.000 claims description 30
- 239000004814 polyurethane Substances 0.000 claims description 30
- 229920005862 polyol Polymers 0.000 claims description 23
- 150000003077 polyols Chemical class 0.000 claims description 23
- 238000010107 reaction injection moulding Methods 0.000 claims description 12
- 239000007789 gas Substances 0.000 claims description 11
- 150000001875 compounds Chemical class 0.000 claims description 10
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 10
- 229920001296 polysiloxane Polymers 0.000 claims description 9
- 238000000465 moulding Methods 0.000 claims description 8
- 239000012948 isocyanate Substances 0.000 claims description 7
- 239000011261 inert gas Substances 0.000 claims description 6
- 150000002513 isocyanates Chemical class 0.000 claims description 6
- 239000000203 mixture Substances 0.000 claims 1
- 238000005498 polishing Methods 0.000 description 142
- 235000012431 wafers Nutrition 0.000 description 16
- 238000000034 method Methods 0.000 description 13
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 12
- -1 acrylic polyol Chemical class 0.000 description 12
- 239000007788 liquid Substances 0.000 description 9
- 239000000463 material Substances 0.000 description 9
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 8
- 229910052710 silicon Inorganic materials 0.000 description 8
- 239000010703 silicon Substances 0.000 description 8
- 239000000758 substrate Substances 0.000 description 8
- 230000003287 optical effect Effects 0.000 description 7
- 229920000642 polymer Polymers 0.000 description 7
- 239000004065 semiconductor Substances 0.000 description 7
- 150000001412 amines Chemical class 0.000 description 6
- 239000003054 catalyst Substances 0.000 description 6
- 238000011156 evaluation Methods 0.000 description 6
- 239000004088 foaming agent Substances 0.000 description 6
- 229910052757 nitrogen Inorganic materials 0.000 description 6
- 239000004745 nonwoven fabric Substances 0.000 description 6
- LYCAIKOWRPUZTN-UHFFFAOYSA-N Ethylene glycol Chemical compound OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 description 5
- 239000000853 adhesive Substances 0.000 description 5
- 230000001070 adhesive effect Effects 0.000 description 5
- 239000002390 adhesive tape Substances 0.000 description 5
- 239000006260 foam Substances 0.000 description 5
- 239000002002 slurry Substances 0.000 description 5
- 239000004721 Polyphenylene oxide Substances 0.000 description 4
- 239000012776 electronic material Substances 0.000 description 4
- 229920000570 polyether Polymers 0.000 description 4
- 239000000126 substance Substances 0.000 description 4
- 239000004970 Chain extender Substances 0.000 description 3
- 230000000052 comparative effect Effects 0.000 description 3
- 230000006835 compression Effects 0.000 description 3
- 238000007906 compression Methods 0.000 description 3
- 238000005187 foaming Methods 0.000 description 3
- 239000000178 monomer Substances 0.000 description 3
- 230000000704 physical effect Effects 0.000 description 3
- 239000005056 polyisocyanate Substances 0.000 description 3
- 229920001228 polyisocyanate Polymers 0.000 description 3
- 238000012545 processing Methods 0.000 description 3
- 239000011347 resin Substances 0.000 description 3
- 229920005989 resin Polymers 0.000 description 3
- 239000003381 stabilizer Substances 0.000 description 3
- 238000003756 stirring Methods 0.000 description 3
- GTEXIOINCJRBIO-UHFFFAOYSA-N 2-[2-(dimethylamino)ethoxy]-n,n-dimethylethanamine Chemical compound CN(C)CCOCCN(C)C GTEXIOINCJRBIO-UHFFFAOYSA-N 0.000 description 2
- IBOFVQJTBBUKMU-UHFFFAOYSA-N 4,4'-methylene-bis-(2-chloroaniline) Chemical compound C1=C(Cl)C(N)=CC=C1CC1=CC=C(N)C(Cl)=C1 IBOFVQJTBBUKMU-UHFFFAOYSA-N 0.000 description 2
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- YMWUJEATGCHHMB-UHFFFAOYSA-N Dichloromethane Chemical compound ClCCl YMWUJEATGCHHMB-UHFFFAOYSA-N 0.000 description 2
- 239000004593 Epoxy Substances 0.000 description 2
- PEDCQBHIVMGVHV-UHFFFAOYSA-N Glycerine Chemical compound OCC(O)CO PEDCQBHIVMGVHV-UHFFFAOYSA-N 0.000 description 2
- OFBQJSOFQDEBGM-UHFFFAOYSA-N Pentane Chemical compound CCCCC OFBQJSOFQDEBGM-UHFFFAOYSA-N 0.000 description 2
- 239000004698 Polyethylene Substances 0.000 description 2
- 239000004372 Polyvinyl alcohol Substances 0.000 description 2
- 229920002323 Silicone foam Polymers 0.000 description 2
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 2
- 230000002411 adverse Effects 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 238000007599 discharging Methods 0.000 description 2
- 238000004090 dissolution Methods 0.000 description 2
- 239000004744 fabric Substances 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 230000014759 maintenance of location Effects 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000011325 microbead Substances 0.000 description 2
- 229920000573 polyethylene Polymers 0.000 description 2
- 229920000139 polyethylene terephthalate Polymers 0.000 description 2
- 239000005020 polyethylene terephthalate Substances 0.000 description 2
- 238000006116 polymerization reaction Methods 0.000 description 2
- 229920002451 polyvinyl alcohol Polymers 0.000 description 2
- 230000001105 regulatory effect Effects 0.000 description 2
- 239000013514 silicone foam Substances 0.000 description 2
- 239000000243 solution Substances 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- IMNIMPAHZVJRPE-UHFFFAOYSA-N triethylenediamine Chemical compound C1CN2CCN1CC2 IMNIMPAHZVJRPE-UHFFFAOYSA-N 0.000 description 2
- FKTHNVSLHLHISI-UHFFFAOYSA-N 1,2-bis(isocyanatomethyl)benzene Chemical compound O=C=NCC1=CC=CC=C1CN=C=O FKTHNVSLHLHISI-UHFFFAOYSA-N 0.000 description 1
- SBJCUZQNHOLYMD-UHFFFAOYSA-N 1,5-Naphthalene diisocyanate Chemical compound C1=CC=C2C(N=C=O)=CC=CC2=C1N=C=O SBJCUZQNHOLYMD-UHFFFAOYSA-N 0.000 description 1
- UPMLOUAZCHDJJD-UHFFFAOYSA-N 4,4'-Diphenylmethane Diisocyanate Chemical compound C1=CC(N=C=O)=CC=C1CC1=CC=C(N=C=O)C=C1 UPMLOUAZCHDJJD-UHFFFAOYSA-N 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- JOYRKODLDBILNP-UHFFFAOYSA-N Ethyl urethane Chemical compound CCOC(N)=O JOYRKODLDBILNP-UHFFFAOYSA-N 0.000 description 1
- 239000005057 Hexamethylene diisocyanate Substances 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 239000005058 Isophorone diisocyanate Substances 0.000 description 1
- 239000005062 Polybutadiene Chemical class 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- 239000004743 Polypropylene Substances 0.000 description 1
- 239000004820 Pressure-sensitive adhesive Substances 0.000 description 1
- 239000004433 Thermoplastic polyurethane Substances 0.000 description 1
- BZHJMEDXRYGGRV-UHFFFAOYSA-N Vinyl chloride Chemical compound ClC=C BZHJMEDXRYGGRV-UHFFFAOYSA-N 0.000 description 1
- ISKQADXMHQSTHK-UHFFFAOYSA-N [4-(aminomethyl)phenyl]methanamine Chemical compound NCC1=CC=C(CN)C=C1 ISKQADXMHQSTHK-UHFFFAOYSA-N 0.000 description 1
- UKLDJPRMSDWDSL-UHFFFAOYSA-L [dibutyl(dodecanoyloxy)stannyl] dodecanoate Chemical compound CCCCCCCCCCCC(=O)O[Sn](CCCC)(CCCC)OC(=O)CCCCCCCCCCC UKLDJPRMSDWDSL-UHFFFAOYSA-L 0.000 description 1
- 239000003082 abrasive agent Substances 0.000 description 1
- 239000006061 abrasive grain Substances 0.000 description 1
- 239000011358 absorbing material Substances 0.000 description 1
- 238000012644 addition polymerization Methods 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- 125000002947 alkylene group Chemical group 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 125000003277 amino group Chemical group 0.000 description 1
- 239000003963 antioxidant agent Substances 0.000 description 1
- 239000002216 antistatic agent Substances 0.000 description 1
- 239000007864 aqueous solution Substances 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 125000000751 azo group Chemical group [*]N=N[*] 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000000872 buffer Substances 0.000 description 1
- 239000007809 chemical reaction catalyst Substances 0.000 description 1
- KYKAJFCTULSVSH-UHFFFAOYSA-N chloro(fluoro)methane Chemical compound F[C]Cl KYKAJFCTULSVSH-UHFFFAOYSA-N 0.000 description 1
- 238000009833 condensation Methods 0.000 description 1
- 230000005494 condensation Effects 0.000 description 1
- 229920001577 copolymer Polymers 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 239000003431 cross linking reagent Substances 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 150000004985 diamines Chemical class 0.000 description 1
- 239000012975 dibutyltin dilaurate Substances 0.000 description 1
- 150000001991 dicarboxylic acids Chemical class 0.000 description 1
- 125000005442 diisocyanate group Chemical group 0.000 description 1
- 239000000975 dye Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 229920001971 elastomer Polymers 0.000 description 1
- RTZKZFJDLAIYFH-UHFFFAOYSA-N ether Substances CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- 239000011888 foil Substances 0.000 description 1
- 235000011187 glycerol Nutrition 0.000 description 1
- 238000009499 grossing Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- RRAMGCGOFNQTLD-UHFFFAOYSA-N hexamethylene diisocyanate Chemical compound O=C=NCCCCCCN=C=O RRAMGCGOFNQTLD-UHFFFAOYSA-N 0.000 description 1
- 239000012510 hollow fiber Substances 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 125000002887 hydroxy group Chemical group [H]O* 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- NIMLQBUJDJZYEJ-UHFFFAOYSA-N isophorone diisocyanate Chemical compound CC1(C)CC(N=C=O)CC(C)(CN=C=O)C1 NIMLQBUJDJZYEJ-UHFFFAOYSA-N 0.000 description 1
- 239000000314 lubricant Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- AYLRODJJLADBOB-QMMMGPOBSA-N methyl (2s)-2,6-diisocyanatohexanoate Chemical compound COC(=O)[C@@H](N=C=O)CCCCN=C=O AYLRODJJLADBOB-QMMMGPOBSA-N 0.000 description 1
- 239000004005 microsphere Substances 0.000 description 1
- 239000011259 mixed solution Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 125000002524 organometallic group Chemical group 0.000 description 1
- 239000000123 paper Substances 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 230000035515 penetration Effects 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 229920002857 polybutadiene Chemical class 0.000 description 1
- 238000006068 polycondensation reaction Methods 0.000 description 1
- 229920000728 polyester Polymers 0.000 description 1
- 229920005906 polyester polyol Chemical class 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 229920001155 polypropylene Polymers 0.000 description 1
- 229920001343 polytetrafluoroethylene Polymers 0.000 description 1
- 239000004810 polytetrafluoroethylene Substances 0.000 description 1
- 229920000909 polytetrahydrofuran Polymers 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 238000004080 punching Methods 0.000 description 1
- 238000007151 ring opening polymerisation reaction Methods 0.000 description 1
- 239000005060 rubber Substances 0.000 description 1
- 230000000087 stabilizing effect Effects 0.000 description 1
- 150000005846 sugar alcohols Polymers 0.000 description 1
- 229920002803 thermoplastic polyurethane Polymers 0.000 description 1
- DVKJHBMWWAPEIU-UHFFFAOYSA-N toluene 2,4-diisocyanate Chemical compound CC1=CC=C(N=C=O)C=C1N=C=O DVKJHBMWWAPEIU-UHFFFAOYSA-N 0.000 description 1
- 125000000391 vinyl group Chemical class [H]C([*])=C([H])[H] 0.000 description 1
- 239000011800 void material Substances 0.000 description 1
Landscapes
- Polyurethanes Or Polyureas (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2003357387A JP4338150B2 (ja) | 2003-10-17 | 2003-10-17 | 発泡ポリウレタンおよびその製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2003357387A JP4338150B2 (ja) | 2003-10-17 | 2003-10-17 | 発泡ポリウレタンおよびその製造方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2005120253A JP2005120253A (ja) | 2005-05-12 |
| JP2005120253A5 JP2005120253A5 (enExample) | 2006-09-14 |
| JP4338150B2 true JP4338150B2 (ja) | 2009-10-07 |
Family
ID=34614289
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2003357387A Expired - Fee Related JP4338150B2 (ja) | 2003-10-17 | 2003-10-17 | 発泡ポリウレタンおよびその製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4338150B2 (enExample) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2012141329A1 (ja) | 2011-04-15 | 2012-10-18 | 富士紡ホールディングス株式会社 | 研磨パッド及びその製造方法 |
| WO2012141328A1 (ja) | 2011-04-15 | 2012-10-18 | 富士紡ホールディングス株式会社 | 研磨パッド及びその製造方法 |
| WO2012141327A1 (ja) | 2011-04-15 | 2012-10-18 | 富士紡ホールディングス株式会社 | 研磨パッド及びその製造方法 |
| WO2013058183A1 (ja) | 2011-10-18 | 2013-04-25 | 富士紡ホールディングス株式会社 | 研磨パッド及びその製造方法 |
| KR101779546B1 (ko) * | 2016-06-22 | 2017-09-18 | 에스케이씨 주식회사 | 연마패드 및 이의 제조방법 |
Families Citing this family (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007044858A (ja) * | 2005-08-12 | 2007-02-22 | Nitta Haas Inc | 研磨布の製造方法および研磨布 |
| JP5145683B2 (ja) * | 2006-07-20 | 2013-02-20 | 東レ株式会社 | 研磨方法、研磨パッド、研磨パッドの製造方法 |
| KR101276962B1 (ko) | 2006-07-28 | 2013-06-19 | 도레이 카부시키가이샤 | 상호 침입 고분자 그물형 구조체의 제조 방법 및 이를 이용한 연마 패드의 제조 방법 |
| JP5371251B2 (ja) * | 2007-01-30 | 2013-12-18 | 東レ株式会社 | 研磨パッド |
| JP5184200B2 (ja) * | 2007-07-06 | 2013-04-17 | 東洋ゴム工業株式会社 | 研磨パッド |
| JP5100241B2 (ja) * | 2007-08-01 | 2012-12-19 | 東洋ゴム工業株式会社 | 研磨パッド及びその製造方法 |
| DE102007049811B4 (de) * | 2007-10-17 | 2016-07-28 | Peter Wolters Gmbh | Läuferscheibe, Verfahren zur Beschichtung einer Läuferscheibe sowie Verfahren zur gleichzeitigen beidseitigen Material abtragenden Bearbeitung von Halbleiterscheiben |
| JP5251877B2 (ja) | 2008-01-30 | 2013-07-31 | 旭硝子株式会社 | 磁気ディスク用ガラス基板の製造方法 |
| JP5233621B2 (ja) | 2008-12-02 | 2013-07-10 | 旭硝子株式会社 | 磁気ディスク用ガラス基板及びその製造方法。 |
| JP5521243B2 (ja) * | 2009-07-03 | 2014-06-11 | 日本発條株式会社 | 研磨保持用パッド |
| KR101485073B1 (ko) | 2010-09-15 | 2015-01-22 | 주식회사 엘지화학 | 지지 패드용 폴리우레탄 수지 조성물 및 이를 이용한 폴리우레탄 지지 패드 |
| KR102625059B1 (ko) * | 2017-12-27 | 2024-01-12 | 니타 듀폰 가부시키가이샤 | 연마 패드 |
| JP6971839B2 (ja) * | 2017-12-27 | 2021-11-24 | ニッタ・デュポン株式会社 | 研磨パッド |
| JP7734485B2 (ja) * | 2020-12-24 | 2025-09-05 | ニッタ・デュポン株式会社 | 研磨布 |
| WO2023012940A1 (ja) * | 2021-08-04 | 2023-02-09 | ユニヴァーサル フォトニクス ファーイースト インク | 研磨パッド |
-
2003
- 2003-10-17 JP JP2003357387A patent/JP4338150B2/ja not_active Expired - Fee Related
Cited By (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2012141329A1 (ja) | 2011-04-15 | 2012-10-18 | 富士紡ホールディングス株式会社 | 研磨パッド及びその製造方法 |
| WO2012141328A1 (ja) | 2011-04-15 | 2012-10-18 | 富士紡ホールディングス株式会社 | 研磨パッド及びその製造方法 |
| WO2012141327A1 (ja) | 2011-04-15 | 2012-10-18 | 富士紡ホールディングス株式会社 | 研磨パッド及びその製造方法 |
| KR20140035375A (ko) | 2011-04-15 | 2014-03-21 | 후지보홀딩스가부시끼가이샤 | 연마 패드 및 그의 제조 방법 |
| KR20140035374A (ko) | 2011-04-15 | 2014-03-21 | 후지보홀딩스가부시끼가이샤 | 연마 패드 및 그의 제조 방법 |
| US9011212B2 (en) | 2011-04-15 | 2015-04-21 | Fujibo Holdings, Inc. | Polishing pad and manufacturing method therefor |
| US9381612B2 (en) | 2011-04-15 | 2016-07-05 | Fujibo Holdings, Inc. | Polishing pad and manufacturing method therefor |
| US10065286B2 (en) | 2011-04-15 | 2018-09-04 | Fujibo Holdings, Inc. | Polishing pad and manufacturing method therefor |
| WO2013058183A1 (ja) | 2011-10-18 | 2013-04-25 | 富士紡ホールディングス株式会社 | 研磨パッド及びその製造方法 |
| KR20140075795A (ko) | 2011-10-18 | 2014-06-19 | 후지보홀딩스가부시끼가이샤 | 연마 패드 및 그의 제조 방법 |
| US9149905B2 (en) | 2011-10-18 | 2015-10-06 | Fujibo Holdings, Inc. | Polishing pad and method for producing same |
| KR101779546B1 (ko) * | 2016-06-22 | 2017-09-18 | 에스케이씨 주식회사 | 연마패드 및 이의 제조방법 |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2005120253A (ja) | 2005-05-12 |
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