JP4231967B2 - 酸化物焼結体、その製造方法、透明導電膜、およびそれを用いて得られる太陽電池 - Google Patents

酸化物焼結体、その製造方法、透明導電膜、およびそれを用いて得られる太陽電池 Download PDF

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JP4231967B2
JP4231967B2 JP2007233826A JP2007233826A JP4231967B2 JP 4231967 B2 JP4231967 B2 JP 4231967B2 JP 2007233826 A JP2007233826 A JP 2007233826A JP 2007233826 A JP2007233826 A JP 2007233826A JP 4231967 B2 JP4231967 B2 JP 4231967B2
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oxide
sintered body
phase
film
atomic
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Expired - Fee Related
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JP2008110911A (ja
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能之 阿部
徳行 中山
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Sumitomo Metal Mining Co Ltd
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Sumitomo Metal Mining Co Ltd
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Priority to JP2007233826A priority Critical patent/JP4231967B2/ja
Priority to CN2007101638363A priority patent/CN101164966B/zh
Priority to DE102007047146A priority patent/DE102007047146A1/de
Priority to KR1020070099442A priority patent/KR101136953B1/ko
Priority to TW096137005A priority patent/TWI389869B/zh
Publication of JP2008110911A publication Critical patent/JP2008110911A/ja
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JP2007233826A 2006-10-06 2007-09-10 酸化物焼結体、その製造方法、透明導電膜、およびそれを用いて得られる太陽電池 Expired - Fee Related JP4231967B2 (ja)

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Application Number Priority Date Filing Date Title
JP2007233826A JP4231967B2 (ja) 2006-10-06 2007-09-10 酸化物焼結体、その製造方法、透明導電膜、およびそれを用いて得られる太陽電池
CN2007101638363A CN101164966B (zh) 2006-10-06 2007-09-30 氧化物烧结体、其制造方法、透明导电膜、以及采用它所得到的太阳能电池
DE102007047146A DE102007047146A1 (de) 2006-10-06 2007-10-02 Gesintertes Oxid, Verfahren zu dessen Herstellung, transparente elektrisch leitfähige Membran sowie Solarzelle, die unter deren Verwendung erhalten wird
KR1020070099442A KR101136953B1 (ko) 2006-10-06 2007-10-02 산화물 소결체, 그것의 제조 방법, 투명 도전막 및 이를이용한 태양전지
TW096137005A TWI389869B (zh) 2006-10-06 2007-10-03 氧化物燒結體、其製法、透明導電膜及使用它得到之太陽電池

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JP2006275313 2006-10-06
JP2007233826A JP4231967B2 (ja) 2006-10-06 2007-09-10 酸化物焼結体、その製造方法、透明導電膜、およびそれを用いて得られる太陽電池

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JP2008110911A JP2008110911A (ja) 2008-05-15
JP4231967B2 true JP4231967B2 (ja) 2009-03-04

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KR (1) KR101136953B1 (ko)
CN (1) CN101164966B (ko)
DE (1) DE102007047146A1 (ko)
TW (1) TWI389869B (ko)

Cited By (1)

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Publication number Priority date Publication date Assignee Title
WO2014148189A1 (ja) * 2013-03-19 2014-09-25 住友金属鉱山株式会社 酸化亜鉛系焼結体とその製造方法およびスパッタリングターゲットと透明導電膜

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JP5003600B2 (ja) * 2008-06-13 2012-08-15 住友金属鉱山株式会社 酸化物焼結体、ターゲット、およびそれを用いて得られる透明導電膜、導電性積層体
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