JP4231560B2 - 化学量の分布の電気化学的測定方法および装置 - Google Patents

化学量の分布の電気化学的測定方法および装置 Download PDF

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Publication number
JP4231560B2
JP4231560B2 JP15771697A JP15771697A JP4231560B2 JP 4231560 B2 JP4231560 B2 JP 4231560B2 JP 15771697 A JP15771697 A JP 15771697A JP 15771697 A JP15771697 A JP 15771697A JP 4231560 B2 JP4231560 B2 JP 4231560B2
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charge
potential
sample
distribution
floating diffusion
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JPH10332423A5 (enExample
JPH10332423A (ja
Inventor
和明 澤田
勝彦 冨田
剛 中西
裕貴 田邉
享 三村
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Horiba Ltd
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Horiba Ltd
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Priority to JP15771697A priority Critical patent/JP4231560B2/ja
Priority to US09/085,693 priority patent/US6255678B1/en
Priority to EP98109769A priority patent/EP0881486B1/en
Priority to DE69837060T priority patent/DE69837060T2/de
Publication of JPH10332423A publication Critical patent/JPH10332423A/ja
Publication of JPH10332423A5 publication Critical patent/JPH10332423A5/ja
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K1/00—Details of thermometers not specially adapted for particular types of thermometer
    • G01K1/02—Means for indicating or recording specially adapted for thermometers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K1/00—Details of thermometers not specially adapted for particular types of thermometer
    • G01K1/02—Means for indicating or recording specially adapted for thermometers
    • G01K1/026—Means for indicating or recording specially adapted for thermometers arrangements for monitoring a plurality of temperatures, e.g. by multiplexing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/005—Measuring force or stress, in general by electrical means and not provided for in G01L1/06 - G01L1/22
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0098—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means using semiconductor body comprising at least one PN junction as detecting element
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
    • G01N27/403—Cells and electrode assemblies
    • G01N27/414—Ion-sensitive or chemical field-effect transistors, i.e. ISFETS or CHEMFETS
    • G01N27/4148—Integrated circuits therefor, e.g. fabricated by CMOS processing

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  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Electrochemistry (AREA)
  • Immunology (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Computer Hardware Design (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Molecular Biology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
  • Measuring Magnetic Variables (AREA)
  • Radiation Pyrometers (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP15771697A 1997-05-29 1997-05-29 化学量の分布の電気化学的測定方法および装置 Expired - Lifetime JP4231560B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP15771697A JP4231560B2 (ja) 1997-05-29 1997-05-29 化学量の分布の電気化学的測定方法および装置
US09/085,693 US6255678B1 (en) 1997-05-29 1998-05-27 Apparatus for measuring physical and chemical phenomena
EP98109769A EP0881486B1 (en) 1997-05-29 1998-05-28 Method for measuring physical phenomena or chemical phenomena and equipment thereof
DE69837060T DE69837060T2 (de) 1997-05-29 1998-05-28 Verfahren zur Messung von physikalischen Phänomenen oder chemischen Phänomenen und Vorrichtung dafür

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JP15771697A JP4231560B2 (ja) 1997-05-29 1997-05-29 化学量の分布の電気化学的測定方法および装置

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JPH10332423A JPH10332423A (ja) 1998-12-18
JPH10332423A5 JPH10332423A5 (enExample) 2005-04-07
JP4231560B2 true JP4231560B2 (ja) 2009-03-04

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US (1) US6255678B1 (enExample)
EP (1) EP0881486B1 (enExample)
JP (1) JP4231560B2 (enExample)
DE (1) DE69837060T2 (enExample)

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TW544752B (en) * 2002-05-20 2003-08-01 Univ Nat Yunlin Sci & Tech Method for producing SnO2 gate ion sensitive field effect transistor (ISFET), and method and device for measuring the temperature parameters, drift and hysteresis values thereof
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US7785785B2 (en) 2004-11-12 2010-08-31 The Board Of Trustees Of The Leland Stanford Junior University Charge perturbation detection system for DNA and other molecules
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KR101343044B1 (ko) * 2005-03-11 2013-12-18 고꾸리쯔 다이가꾸 호우징 도요하시 기쥬쯔 가가꾸 다이가꾸 누적형 화학·물리현상 검출장치
JP4641444B2 (ja) * 2005-03-31 2011-03-02 株式会社堀場製作所 物理現象または化学現象に係るポテンシャル測定装置
JP5335415B2 (ja) * 2006-03-20 2013-11-06 国立大学法人豊橋技術科学大学 累積型化学・物理現象検出方法及びその装置
JP4852752B2 (ja) * 2006-04-04 2012-01-11 国立大学法人豊橋技術科学大学 化学・物理現象検出装置
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US10031101B2 (en) 2014-10-20 2018-07-24 Sharp Kabushiki Kaisha Chemical/physical phenomenon detecting device and method of producing the same
US10073052B2 (en) 2015-12-15 2018-09-11 Sharp Kabushiki Kaisha Ion concentration sensor

Also Published As

Publication number Publication date
DE69837060D1 (de) 2007-03-29
DE69837060T2 (de) 2007-11-22
US6255678B1 (en) 2001-07-03
JPH10332423A (ja) 1998-12-18
EP0881486A2 (en) 1998-12-02
EP0881486B1 (en) 2007-02-14
EP0881486A3 (en) 1999-10-06

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