DE69837060D1 - Verfahren zur Messung von physikalischen Phänomenen oder chemischen Phänomenen und Vorrichtung dafür - Google Patents

Verfahren zur Messung von physikalischen Phänomenen oder chemischen Phänomenen und Vorrichtung dafür

Info

Publication number
DE69837060D1
DE69837060D1 DE69837060T DE69837060T DE69837060D1 DE 69837060 D1 DE69837060 D1 DE 69837060D1 DE 69837060 T DE69837060 T DE 69837060T DE 69837060 T DE69837060 T DE 69837060T DE 69837060 D1 DE69837060 D1 DE 69837060D1
Authority
DE
Germany
Prior art keywords
phenomena
apparatus therefor
measuring physical
chemical
physical phenomena
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69837060T
Other languages
English (en)
Other versions
DE69837060T2 (de
Inventor
Kazuaki Sawada
Katsuhiko Tomita
Tsuyoshi Nakanishi
Hiroki Tanabe
Susumu Mimura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Horiba Ltd
Original Assignee
Horiba Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Horiba Ltd filed Critical Horiba Ltd
Application granted granted Critical
Publication of DE69837060D1 publication Critical patent/DE69837060D1/de
Publication of DE69837060T2 publication Critical patent/DE69837060T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K1/00—Details of thermometers not specially adapted for particular types of thermometer
    • G01K1/02—Means for indicating or recording specially adapted for thermometers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K1/00—Details of thermometers not specially adapted for particular types of thermometer
    • G01K1/02—Means for indicating or recording specially adapted for thermometers
    • G01K1/026—Means for indicating or recording specially adapted for thermometers arrangements for monitoring a plurality of temperatures, e.g. by multiplexing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/005—Measuring force or stress, in general by electrical means and not provided for in G01L1/06 - G01L1/22
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0098—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means using semiconductor body comprising at least one PN junction as detecting element
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
    • G01N27/403—Cells and electrode assemblies
    • G01N27/414—Ion-sensitive or chemical field-effect transistors, i.e. ISFETS or CHEMFETS
    • G01N27/4148—Integrated circuits therefor, e.g. fabricated by CMOS processing

Landscapes

  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Electrochemistry (AREA)
  • Immunology (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Computer Hardware Design (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Molecular Biology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
  • Measuring Magnetic Variables (AREA)
  • Radiation Pyrometers (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
DE69837060T 1997-05-29 1998-05-28 Verfahren zur Messung von physikalischen Phänomenen oder chemischen Phänomenen und Vorrichtung dafür Expired - Fee Related DE69837060T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP15771697 1997-05-29
JP15771697A JP4231560B2 (ja) 1997-05-29 1997-05-29 化学量の分布の電気化学的測定方法および装置

Publications (2)

Publication Number Publication Date
DE69837060D1 true DE69837060D1 (de) 2007-03-29
DE69837060T2 DE69837060T2 (de) 2007-11-22

Family

ID=15655821

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69837060T Expired - Fee Related DE69837060T2 (de) 1997-05-29 1998-05-28 Verfahren zur Messung von physikalischen Phänomenen oder chemischen Phänomenen und Vorrichtung dafür

Country Status (4)

Country Link
US (1) US6255678B1 (de)
EP (1) EP0881486B1 (de)
JP (1) JP4231560B2 (de)
DE (1) DE69837060T2 (de)

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US7012306B2 (en) * 2001-03-07 2006-03-14 Acreo Ab Electrochemical device
JP2003014691A (ja) 2001-06-29 2003-01-15 Horiba Ltd Ｃｃｄセンサ
US7049645B2 (en) * 2001-11-16 2006-05-23 Bio-X Inc. FET type sensor, ion density detecting method comprising this sensor, and base sequence detecting method
TW544752B (en) * 2002-05-20 2003-08-01 Univ Nat Yunlin Sci & Tech Method for producing SnO2 gate ion sensitive field effect transistor (ISFET), and method and device for measuring the temperature parameters, drift and hysteresis values thereof
US8536661B1 (en) 2004-06-25 2013-09-17 University Of Hawaii Biosensor chip sensor protection methods
US7785785B2 (en) 2004-11-12 2010-08-31 The Board Of Trustees Of The Leland Stanford Junior University Charge perturbation detection system for DNA and other molecules
JP4678676B2 (ja) 2004-12-10 2011-04-27 株式会社堀場製作所 物理現象または化学現象の測定方法または測定装置
JP4700335B2 (ja) * 2004-12-10 2011-06-15 株式会社堀場製作所 物理現象または化学現象の測定方法および測定装置
EP1870703B1 (de) * 2005-03-11 2014-04-02 National University Corporation Toyohashi University of Technology Kumulative Nachweisvorrichtung für chemische oder physikalische Phänomene
JP4641444B2 (ja) * 2005-03-31 2011-03-02 株式会社堀場製作所 物理現象または化学現象に係るポテンシャル測定装置
JP5335415B2 (ja) * 2006-03-20 2013-11-06 国立大学法人豊橋技術科学大学 累積型化学・物理現象検出方法及びその装置
JP4852752B2 (ja) * 2006-04-04 2012-01-11 国立大学法人豊橋技術科学大学 化学・物理現象検出装置
US11339430B2 (en) 2007-07-10 2022-05-24 Life Technologies Corporation Methods and apparatus for measuring analytes using large scale FET arrays
US8349167B2 (en) 2006-12-14 2013-01-08 Life Technologies Corporation Methods and apparatus for detecting molecular interactions using FET arrays
EP2653861B1 (de) 2006-12-14 2014-08-13 Life Technologies Corporation Verfahren zur Nukleinsäure-Sequenzierung mittels großer FET-Arrays
US8262900B2 (en) 2006-12-14 2012-09-11 Life Technologies Corporation Methods and apparatus for measuring analytes using large scale FET arrays
CN102203282B (zh) 2008-06-25 2014-04-30 生命技术公司 使用大规模fet阵列测量分析物的方法和装置
US20100301398A1 (en) 2009-05-29 2010-12-02 Ion Torrent Systems Incorporated Methods and apparatus for measuring analytes
US20100137143A1 (en) 2008-10-22 2010-06-03 Ion Torrent Systems Incorporated Methods and apparatus for measuring analytes
JP2010122090A (ja) * 2008-11-20 2010-06-03 Rohm Co Ltd イオンイメージセンサ及びダメージ計測装置
CN101592627B (zh) * 2009-03-19 2012-12-05 中国科学院苏州纳米技术与纳米仿生研究所 多通道高灵敏生物传感器的制作集成方法
US8776573B2 (en) 2009-05-29 2014-07-15 Life Technologies Corporation Methods and apparatus for measuring analytes
US8673627B2 (en) 2009-05-29 2014-03-18 Life Technologies Corporation Apparatus and methods for performing electrochemical reactions
US20120261274A1 (en) 2009-05-29 2012-10-18 Life Technologies Corporation Methods and apparatus for measuring analytes
US8574835B2 (en) 2009-05-29 2013-11-05 Life Technologies Corporation Scaffolded nucleic acid polymer particles and methods of making and using
TWI624665B (zh) 2010-06-30 2018-05-21 生命技術公司 離子感測電荷累積電路及方法
US9164070B2 (en) 2010-06-30 2015-10-20 Life Technologies Corporation Column adc
CN103080739B (zh) 2010-06-30 2016-12-21 生命科技公司 用于测试isfet阵列的方法和装置
US11307166B2 (en) 2010-07-01 2022-04-19 Life Technologies Corporation Column ADC
TWI527245B (zh) 2010-07-03 2016-03-21 生命技術公司 具有微摻雜汲極之化學感測器
EP2617061B1 (de) 2010-09-15 2021-06-30 Life Technologies Corporation Verfahren und vorrichtung zur analytmessung
EP2619564B1 (de) 2010-09-24 2016-03-16 Life Technologies Corporation Transistorschaltungen mit zusammengehörigen paaren
JP5773357B2 (ja) * 2011-07-01 2015-09-02 国立大学法人豊橋技術科学大学 化学・物理現象検出装置及び検出方法
JP2013050426A (ja) * 2011-08-31 2013-03-14 Chiba Univ Ｆｅｔ型センサを用いたインフルエンザウイルスｒｎａの検出方法
US9970984B2 (en) 2011-12-01 2018-05-15 Life Technologies Corporation Method and apparatus for identifying defects in a chemical sensor array
US8747748B2 (en) 2012-01-19 2014-06-10 Life Technologies Corporation Chemical sensor with conductive cup-shaped sensor surface
US8821798B2 (en) 2012-01-19 2014-09-02 Life Technologies Corporation Titanium nitride as sensing layer for microwell structure
US8786331B2 (en) 2012-05-29 2014-07-22 Life Technologies Corporation System for reducing noise in a chemical sensor array
WO2014025044A1 (ja) * 2012-08-10 2014-02-13 国立大学法人豊橋技術科学大学 酸化還元電位の測定装置及び測定方法
US9080968B2 (en) 2013-01-04 2015-07-14 Life Technologies Corporation Methods and systems for point of use removal of sacrificial material
US9841398B2 (en) 2013-01-08 2017-12-12 Life Technologies Corporation Methods for manufacturing well structures for low-noise chemical sensors
US8962366B2 (en) 2013-01-28 2015-02-24 Life Technologies Corporation Self-aligned well structures for low-noise chemical sensors
US8841217B1 (en) 2013-03-13 2014-09-23 Life Technologies Corporation Chemical sensor with protruded sensor surface
US8963216B2 (en) 2013-03-13 2015-02-24 Life Technologies Corporation Chemical sensor with sidewall spacer sensor surface
US9835585B2 (en) 2013-03-15 2017-12-05 Life Technologies Corporation Chemical sensor with protruded sensor surface
WO2014149780A1 (en) 2013-03-15 2014-09-25 Life Technologies Corporation Chemical sensor with consistent sensor surface areas
US20140264471A1 (en) 2013-03-15 2014-09-18 Life Technologies Corporation Chemical device with thin conductive element
US20140336063A1 (en) 2013-05-09 2014-11-13 Life Technologies Corporation Windowed Sequencing
US10458942B2 (en) 2013-06-10 2019-10-29 Life Technologies Corporation Chemical sensor array having multiple sensors per well
JP6493955B2 (ja) * 2014-10-09 2019-04-03 ラピスセミコンダクタ株式会社 半導体装置及び半導体装置の製造方法
JP6228098B2 (ja) * 2014-10-20 2017-11-08 シャープ株式会社 化学・物理現象検出装置及びその製造方法
EP3234575B1 (de) 2014-12-18 2023-01-25 Life Technologies Corporation Vorrichtung zur messung von analyten unter verwendung von grossflächigen fet-arrays
CN107250784B (zh) 2014-12-18 2020-10-23 生命科技公司 具有发送器配置的高数据率集成电路
US10077472B2 (en) 2014-12-18 2018-09-18 Life Technologies Corporation High data rate integrated circuit with power management
EP3246699B1 (de) * 2015-01-14 2019-04-17 National University Corporation TOYOHASHI UNIVERSITY OF TECHNOLOGY Vorrichtung zum nachweis chemischer/physikalischer phänomene
DE102015214387B4 (de) * 2015-07-29 2017-07-27 Robert Bosch Gmbh Sensorelement zur Erfassung mindestens einer Eigenschaft eines Messgases in einem Messgasraum und Verfahren zur Herstellung desselben
JP6307058B2 (ja) * 2015-12-03 2018-04-04 シャープ株式会社 イオン濃度センサ、およびイオン濃度測定方法
JP6447925B2 (ja) 2015-12-15 2019-01-09 シャープ株式会社 イオン濃度センサ
JP2017167064A (ja) * 2016-03-17 2017-09-21 株式会社東芝 電気化学センサ及び電気化学センサを用いた測定方法

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JP2877047B2 (ja) * 1995-10-25 1999-03-31 日本電気株式会社 固体撮像装置
US5789745A (en) * 1997-10-28 1998-08-04 Sandia Corporation Ion mobility spectrometer using frequency-domain separation

Also Published As

Publication number Publication date
EP0881486A3 (de) 1999-10-06
DE69837060T2 (de) 2007-11-22
JPH10332423A (ja) 1998-12-18
EP0881486A2 (de) 1998-12-02
US6255678B1 (en) 2001-07-03
EP0881486B1 (de) 2007-02-14
JP4231560B2 (ja) 2009-03-04

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Legal Events

Date Code Title Description
8381 Inventor (new situation)

Inventor name: SAWADA, KAZUAKI, HAMAMATSU-CITY, SHIZUOKA, JP

Inventor name: TOMITA, KATSUHIKO, KYOTO, JP

Inventor name: NAKANISHI, TSUYOSHI, KYOTO, JP

Inventor name: TANABE, HIROKI, KYOTO, JP

Inventor name: MIMURA, SUSUMU, KYOTO, JP

8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee