JP4175697B2 - ガラス基板保持具 - Google Patents

ガラス基板保持具 Download PDF

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Publication number
JP4175697B2
JP4175697B2 JP17157098A JP17157098A JP4175697B2 JP 4175697 B2 JP4175697 B2 JP 4175697B2 JP 17157098 A JP17157098 A JP 17157098A JP 17157098 A JP17157098 A JP 17157098A JP 4175697 B2 JP4175697 B2 JP 4175697B2
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JP
Japan
Prior art keywords
glass substrate
support pin
support
substrate holder
holding frame
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP17157098A
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English (en)
Japanese (ja)
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JP2000007146A (ja
JP2000007146A5 (enrdf_load_stackoverflow
Inventor
治之 辻
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Olympus Corp
Original Assignee
Olympus Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Olympus Corp filed Critical Olympus Corp
Priority to JP17157098A priority Critical patent/JP4175697B2/ja
Publication of JP2000007146A publication Critical patent/JP2000007146A/ja
Publication of JP2000007146A5 publication Critical patent/JP2000007146A5/ja
Application granted granted Critical
Publication of JP4175697B2 publication Critical patent/JP4175697B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/061—Lifting, gripping, or carrying means, for one or more sheets forming independent means of transport, e.g. suction cups, transport frames
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/02—Controlled or contamination-free environments or clean space conditions
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/04—Arrangements of vacuum systems or suction cups

Landscapes

  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Liquid Crystal (AREA)
JP17157098A 1998-06-18 1998-06-18 ガラス基板保持具 Expired - Fee Related JP4175697B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17157098A JP4175697B2 (ja) 1998-06-18 1998-06-18 ガラス基板保持具

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17157098A JP4175697B2 (ja) 1998-06-18 1998-06-18 ガラス基板保持具

Publications (3)

Publication Number Publication Date
JP2000007146A JP2000007146A (ja) 2000-01-11
JP2000007146A5 JP2000007146A5 (enrdf_load_stackoverflow) 2005-10-20
JP4175697B2 true JP4175697B2 (ja) 2008-11-05

Family

ID=15925605

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17157098A Expired - Fee Related JP4175697B2 (ja) 1998-06-18 1998-06-18 ガラス基板保持具

Country Status (1)

Country Link
JP (1) JP4175697B2 (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110294270A (zh) * 2019-07-23 2019-10-01 哈尔滨理工大学 一种防止机加工切屑迸溅进入的机加工进料装置

Families Citing this family (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2003006971A1 (fr) * 2001-07-02 2003-01-23 Olympus Optical Co., Ltd. Dispositif de support de substrat
US6917755B2 (en) * 2003-02-27 2005-07-12 Applied Materials, Inc. Substrate support
JP4276867B2 (ja) 2003-03-18 2009-06-10 オリンパス株式会社 基板ホルダ及びこれを備えた表面検査装置
JP2006038825A (ja) * 2004-01-22 2006-02-09 Ntn Corp 微細パターン観察装置およびそれを用いた微細パターン修正装置
TWI393875B (zh) * 2004-09-27 2013-04-21 Olympus Corp 基板檢測裝置之固持器及基板檢測裝置
KR100741289B1 (ko) * 2005-05-16 2007-07-23 에버테크노 주식회사 편광필름 캐리어
JP5192719B2 (ja) * 2007-04-12 2013-05-08 株式会社アルバック 加熱装置および基板処理装置
KR101058187B1 (ko) * 2008-12-05 2011-08-22 주식회사 에스에프에이 기판 보관용 카세트 시스템
JP2011141127A (ja) * 2010-01-05 2011-07-21 Avanstrate Taiwan Inc ガラス板の欠陥部分の目視検査方法及び目視検査装置
JP5549441B2 (ja) * 2010-01-14 2014-07-16 東京エレクトロン株式会社 保持体機構、ロードロック装置、処理装置及び搬送機構
KR101253730B1 (ko) * 2010-11-10 2013-04-12 주식회사 디엠케이 핀타입 패널 지지체
KR101224578B1 (ko) * 2010-11-10 2013-01-22 주식회사 디엠케이 패널 지지체
JP6018755B2 (ja) * 2012-01-10 2016-11-02 ヤマハ発動機株式会社 Ｘ線検査装置
JP5939678B2 (ja) * 2012-05-09 2016-06-22 大塚電子株式会社 光学特性測定装置及び光学特性測定方法
CN104122710B (zh) * 2013-04-27 2017-08-08 北京京东方光电科技有限公司 一种显示面板及其制造方法
JP5724014B1 (ja) * 2014-04-22 2015-05-27 株式会社幸和 基板支持装置及び基板処理装置
US10892180B2 (en) * 2014-06-02 2021-01-12 Applied Materials, Inc. Lift pin assembly
CN104391402A (zh) * 2014-12-17 2015-03-04 合肥京东方光电科技有限公司 显示装置及其制造方法
KR102517909B1 (ko) * 2015-08-12 2023-04-05 (주)선익시스템 리프트모듈 및 이를 이용한 기판이송로봇핸드
US20190086697A1 (en) * 2016-05-27 2019-03-21 Sharp Kabushiki Kaisha Method for manufacturing liquid crystal display device
EP3473975A1 (en) 2017-10-19 2019-04-24 Renishaw PLC Fixturing apparatus
CN108106996B (zh) * 2017-12-25 2024-05-28 通彩智能科技集团有限公司 一种玻璃检测盛放平台
JP6979900B2 (ja) * 2018-02-13 2021-12-15 株式会社荏原製作所 基板保持部材、基板処理装置、基板処理装置の制御方法、プログラムを格納した記憶媒体
JP7462507B2 (ja) 2020-07-31 2024-04-05 三菱電機株式会社 支持装置および組立装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110294270A (zh) * 2019-07-23 2019-10-01 哈尔滨理工大学 一种防止机加工切屑迸溅进入的机加工进料装置

Also Published As

Publication number Publication date
JP2000007146A (ja) 2000-01-11

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