JP2000007146A5 - - Google Patents
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- Publication number
- JP2000007146A5 JP2000007146A5 JP1998171570A JP17157098A JP2000007146A5 JP 2000007146 A5 JP2000007146 A5 JP 2000007146A5 JP 1998171570 A JP1998171570 A JP 1998171570A JP 17157098 A JP17157098 A JP 17157098A JP 2000007146 A5 JP2000007146 A5 JP 2000007146A5
- Authority
- JP
- Japan
- Prior art keywords
- glass substrate
- substrate holder
- holder according
- support pin
- support
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000011521 glass Substances 0.000 claims description 17
- 239000000758 substrate Substances 0.000 claims description 17
- 230000002093 peripheral effect Effects 0.000 claims description 2
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims 2
- 210000001015 abdomen Anatomy 0.000 claims 1
- 238000005286 illumination Methods 0.000 claims 1
- 125000006850 spacer group Chemical group 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17157098A JP4175697B2 (ja) | 1998-06-18 | 1998-06-18 | ガラス基板保持具 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17157098A JP4175697B2 (ja) | 1998-06-18 | 1998-06-18 | ガラス基板保持具 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2000007146A JP2000007146A (ja) | 2000-01-11 |
| JP2000007146A5 true JP2000007146A5 (enrdf_load_stackoverflow) | 2005-10-20 |
| JP4175697B2 JP4175697B2 (ja) | 2008-11-05 |
Family
ID=15925605
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17157098A Expired - Fee Related JP4175697B2 (ja) | 1998-06-18 | 1998-06-18 | ガラス基板保持具 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4175697B2 (enrdf_load_stackoverflow) |
Families Citing this family (25)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2003006971A1 (fr) * | 2001-07-02 | 2003-01-23 | Olympus Optical Co., Ltd. | Dispositif de support de substrat |
| US6917755B2 (en) * | 2003-02-27 | 2005-07-12 | Applied Materials, Inc. | Substrate support |
| JP4276867B2 (ja) | 2003-03-18 | 2009-06-10 | オリンパス株式会社 | 基板ホルダ及びこれを備えた表面検査装置 |
| JP2006038825A (ja) * | 2004-01-22 | 2006-02-09 | Ntn Corp | 微細パターン観察装置およびそれを用いた微細パターン修正装置 |
| TWI393875B (zh) * | 2004-09-27 | 2013-04-21 | Olympus Corp | 基板檢測裝置之固持器及基板檢測裝置 |
| KR100741289B1 (ko) * | 2005-05-16 | 2007-07-23 | 에버테크노 주식회사 | 편광필름 캐리어 |
| JP5192719B2 (ja) * | 2007-04-12 | 2013-05-08 | 株式会社アルバック | 加熱装置および基板処理装置 |
| KR101058187B1 (ko) * | 2008-12-05 | 2011-08-22 | 주식회사 에스에프에이 | 기판 보관용 카세트 시스템 |
| JP2011141127A (ja) * | 2010-01-05 | 2011-07-21 | Avanstrate Taiwan Inc | ガラス板の欠陥部分の目視検査方法及び目視検査装置 |
| JP5549441B2 (ja) * | 2010-01-14 | 2014-07-16 | 東京エレクトロン株式会社 | 保持体機構、ロードロック装置、処理装置及び搬送機構 |
| KR101253730B1 (ko) * | 2010-11-10 | 2013-04-12 | 주식회사 디엠케이 | 핀타입 패널 지지체 |
| KR101224578B1 (ko) * | 2010-11-10 | 2013-01-22 | 주식회사 디엠케이 | 패널 지지체 |
| JP6018755B2 (ja) * | 2012-01-10 | 2016-11-02 | ヤマハ発動機株式会社 | Ｘ線検査装置 |
| JP5939678B2 (ja) * | 2012-05-09 | 2016-06-22 | 大塚電子株式会社 | 光学特性測定装置及び光学特性測定方法 |
| CN104122710B (zh) * | 2013-04-27 | 2017-08-08 | 北京京东方光电科技有限公司 | 一种显示面板及其制造方法 |
| JP5724014B1 (ja) * | 2014-04-22 | 2015-05-27 | 株式会社幸和 | 基板支持装置及び基板処理装置 |
| US10892180B2 (en) * | 2014-06-02 | 2021-01-12 | Applied Materials, Inc. | Lift pin assembly |
| CN104391402A (zh) * | 2014-12-17 | 2015-03-04 | 合肥京东方光电科技有限公司 | 显示装置及其制造方法 |
| KR102517909B1 (ko) * | 2015-08-12 | 2023-04-05 | (주)선익시스템 | 리프트모듈 및 이를 이용한 기판이송로봇핸드 |
| US20190086697A1 (en) * | 2016-05-27 | 2019-03-21 | Sharp Kabushiki Kaisha | Method for manufacturing liquid crystal display device |
| EP3473975A1 (en) | 2017-10-19 | 2019-04-24 | Renishaw PLC | Fixturing apparatus |
| CN108106996B (zh) * | 2017-12-25 | 2024-05-28 | 通彩智能科技集团有限公司 | 一种玻璃检测盛放平台 |
| JP6979900B2 (ja) * | 2018-02-13 | 2021-12-15 | 株式会社荏原製作所 | 基板保持部材、基板処理装置、基板処理装置の制御方法、プログラムを格納した記憶媒体 |
| CN110294270B (zh) * | 2019-07-23 | 2020-09-29 | 哈尔滨理工大学 | 一种防止机加工切屑迸溅进入的机加工进料装置 |
| JP7462507B2 (ja) | 2020-07-31 | 2024-04-05 | 三菱電機株式会社 | 支持装置および組立装置 |
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1998
- 1998-06-18 JP JP17157098A patent/JP4175697B2/ja not_active Expired - Fee Related
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