JP2000007146A5 - - Google Patents

Download PDF

Info

Publication number
JP2000007146A5
JP2000007146A5 JP1998171570A JP17157098A JP2000007146A5 JP 2000007146 A5 JP2000007146 A5 JP 2000007146A5 JP 1998171570 A JP1998171570 A JP 1998171570A JP 17157098 A JP17157098 A JP 17157098A JP 2000007146 A5 JP2000007146 A5 JP 2000007146A5
Authority
JP
Japan
Prior art keywords
glass substrate
substrate holder
holder according
support pin
support
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1998171570A
Other languages
Japanese (ja)
Other versions
JP4175697B2 (en
JP2000007146A (en
Filing date
Publication date
Application filed filed Critical
Priority to JP17157098A priority Critical patent/JP4175697B2/en
Priority claimed from JP17157098A external-priority patent/JP4175697B2/en
Publication of JP2000007146A publication Critical patent/JP2000007146A/en
Publication of JP2000007146A5 publication Critical patent/JP2000007146A5/ja
Application granted granted Critical
Publication of JP4175697B2 publication Critical patent/JP4175697B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Description

【０００５】
【課題を解決するための手段】上記課題を解決するために、本願発明のガラス基板保持具は、矩形状のガラス基板の周縁部を載置する矩形状開口部を形成した保持枠と、前記保持枠の開口部の下部を閉塞する台部材と、前記台部材の上面に複数配置され前記ガラス基板を水平に支持する支持ピンとを備えた。 0005
[Means for Solving the Problems] In order to solve the above problems, the glass substrate holder of the present invention includes a holding frame having a rectangular opening on which a peripheral portion of the rectangular glass substrate is placed . A base member that closes the lower portion of the opening of the holding frame , and a plurality of support pins that are arranged on the upper surface of the base member and horizontally support the glass substrate are provided.

本願発明のガラス基板保持具は、保持枠の開口部を閉塞する台部材上に複数の支持ピンを配置してガラス基板を支持することにより、ガラス基板に平面度を保持し、撓みや振動の発生を抑えることができる。 Glass substrate holder of the present invention, by supporting the glass substrate by arranging a plurality of support pins on the base member for closing the opening in the holding frame, and retain the flatness of the glass substrate, deflection and vibration Can be suppressed.

Claims (7)

矩形状のガラス基板の周縁部を載置する矩形状開口部を形成した保持枠と、
前記保持枠の開口部の下部を閉塞する台部材と、
前記台部材の上面に複数配置され前記ガラス基板を水平に支持する支持ピンと、
を備えたことを特徴とするガラス基板保持具。 A holding frame having a rectangular opening on which the peripheral edge of the rectangular glass substrate is placed, and a holding frame.
A base member that closes the lower part of the opening of the holding frame, and
A plurality of support pins arranged on the upper surface of the base member to horizontally support the glass substrate, and
A glass substrate holder characterized by being equipped with. 前記台部材は、透過照明光を透過する剛性のある透明部材からなることを特徴とする請求項１記載のガラス基板保持具。The glass substrate holder according to claim 1 , wherein the base member is made of a rigid transparent member that transmits transmitted illumination light. 前記支持ピンは、前記ガラス基板の振動の腹部に対応させて配置されることを特徴とする請求項１記載のガラス基板保持具。The glass substrate holder according to claim 1, wherein the support pin is arranged so as to correspond to the abdomen of vibration of the glass substrate. 前記支持ピンは、前記ガラス基板と接触する部分に減摩部材が設けられることを特徴とする請求項１記載のガラス基板保持具。The glass substrate holder according to claim 1, wherein the support pin is provided with an anti-friction member at a portion in contact with the glass substrate. 前記減摩部材は、円柱状に形成され前記支持ピンに着脱可能に設けられることを特徴とする請求４記載のガラス基板保持具。The glass substrate holder according to claim 4, wherein the anti-friction member is formed in a columnar shape and is detachably provided on the support pin. 前記支持ピンは、前記円柱状の減摩部材を交換して前記支持ピンの高さを揃えることを特徴とする請求項５記載のガラス基板保持具。The glass substrate holder according to claim 5, wherein the support pin is characterized in that the columnar anti-friction member is replaced to make the heights of the support pin uniform. 前記各支持ピンは、下部に台座を有し、この台座との接合部に各支持ピンの先端の平面度を維持させるスペーサを介在させたことを特徴とする請求項１記載のガラス基板保持具。The glass substrate holder according to claim 1, wherein each of the support pins has a pedestal at a lower portion, and a spacer for maintaining the flatness of the tip of each support pin is interposed at a joint portion with the pedestal. ..
JP17157098A 1998-06-18 1998-06-18 Glass substrate holder Expired - Fee Related JP4175697B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17157098A JP4175697B2 (en) 1998-06-18 1998-06-18 Glass substrate holder

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17157098A JP4175697B2 (en) 1998-06-18 1998-06-18 Glass substrate holder

Publications (3)

Publication Number Publication Date
JP2000007146A JP2000007146A (en) 2000-01-11
JP2000007146A5 true JP2000007146A5 (en) 2005-10-20
JP4175697B2 JP4175697B2 (en) 2008-11-05

Family

ID=15925605

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17157098A Expired - Fee Related JP4175697B2 (en) 1998-06-18 1998-06-18 Glass substrate holder

Country Status (1)

Country Link
JP (1) JP4175697B2 (en)

Families Citing this family (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3752501B2 (en) * 2001-07-02 2006-03-08 オリンパス株式会社 Substrate holding device
US6917755B2 (en) * 2003-02-27 2005-07-12 Applied Materials, Inc. Substrate support
JP4276867B2 (en) 2003-03-18 2009-06-10 オリンパス株式会社 Substrate holder and surface inspection apparatus provided with the same
JP2006038825A (en) * 2004-01-22 2006-02-09 Ntn Corp Micropattern observation device and micropattern correction device using it
TWI393875B (en) * 2004-09-27 2013-04-21 Olympus Corp Panel holder of panel testing apparatus and panel testing apparatus
KR100741289B1 (en) * 2005-05-16 2007-07-23 에버테크노 주식회사 Carrier for Polarizing Film
JP5192719B2 (en) * 2007-04-12 2013-05-08 株式会社アルバック Heating apparatus and substrate processing apparatus
KR101058187B1 (en) * 2008-12-05 2011-08-22 주식회사 에스에프에이 Cassette system for substrate storage
JP2011141127A (en) * 2010-01-05 2011-07-21 Avanstrate Taiwan Inc Visual inspection method and visual inspection device for defect part of glass plate
JP5549441B2 (en) * 2010-01-14 2014-07-16 東京エレクトロン株式会社 Holder mechanism, load lock device, processing device, and transport mechanism
KR101253730B1 (en) * 2010-11-10 2013-04-12 주식회사 디엠케이 pin type panel supports
KR101224578B1 (en) * 2010-11-10 2013-01-22 주식회사 디엠케이 panel supports
JP6018755B2 (en) * 2012-01-10 2016-11-02 ヤマハ発動機株式会社 X-ray inspection equipment
JP5939678B2 (en) * 2012-05-09 2016-06-22 大塚電子株式会社 Optical characteristic measuring apparatus and optical characteristic measuring method
CN104122710B (en) * 2013-04-27 2017-08-08 北京京东方光电科技有限公司 A kind of display panel and its manufacture method
JP5724014B1 (en) * 2014-04-22 2015-05-27 株式会社幸和 Substrate support apparatus and substrate processing apparatus
US10892180B2 (en) * 2014-06-02 2021-01-12 Applied Materials, Inc. Lift pin assembly
CN104391402A (en) * 2014-12-17 2015-03-04 合肥京东方光电科技有限公司 Display device and manufacturing method thereof
KR102517909B1 (en) * 2015-08-12 2023-04-05 (주)선익시스템 Lift Module and Substrate Transfer Robot Hand Using Thereof
US20190086697A1 (en) * 2016-05-27 2019-03-21 Sharp Kabushiki Kaisha Method for manufacturing liquid crystal display device
EP3473975A1 (en) * 2017-10-19 2019-04-24 Renishaw PLC Fixturing apparatus
CN108106996A (en) * 2017-12-25 2018-06-01 通彩智能科技集团有限公司 A kind of glass detection holds platform
JP6979900B2 (en) * 2018-02-13 2021-12-15 株式会社荏原製作所 A storage medium that stores a board holding member, a board processing device, a control method for the board processing device, and a program.
CN110294270B (en) * 2019-07-23 2020-09-29 哈尔滨理工大学 Prevent that machining smear metal from splashing machining feed arrangement who gets into
JP7462507B2 (en) 2020-07-31 2024-04-05 三菱電機株式会社 Support and assembly equipment

Similar Documents

Publication Publication Date Title
JP2000007146A5 (en)
JP4175697B2 (en) Glass substrate holder
TW200606081A (en) Glass substrate cassette
ATE459269T1 (en) TABLE SEAT WITH ROTATING SEAT
JPH0362910U (en)
ES450103A1 (en) Supporting and positioning plate assembly for spectacle frames
KR200295459Y1 (en) study stands attaching magnifying glass
USD464677S1 (en) Interchangeable pedestal for a globe
JP3153349U (en) ornament
CN208740234U (en) A kind of desk with sleeping apparatus
CN211043866U (en) Liquid crystal display screen detection device
CN209782168U (en) Printing type OLED television convenient to fix
CN209360215U (en) A kind of souvenir display platform for assisting tourist to carry out selection
CN107746795A (en) A kind of education culture dish frame for being easy to observation of students
CN215963253U (en) Protein decoloration shaking table for cosmetics processing
CN214587705U (en) Frame structure of hanging water tablet
CN217429475U (en) Screen surface cover
JP3849016B2 (en) Glass flat adjustment table
CN208014253U (en) One kind being convenient for dentistry denture model sample display device
CN109171324A (en) A kind of adjustable exhibition cabinet
JP3033644U (en) Display stand
JPH0317273Y2 (en)
KR101583059B1 (en) Pot stand
CN2272702Y (en) Simple photograph stand
USD450148S1 (en) Lamp