JP4149980B2 - 半導体製造装置の製造方法 - Google Patents
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- 239000004065 semiconductor Substances 0.000 title claims description 33
- 238000004519 manufacturing process Methods 0.000 title claims description 18
- 238000002513 implantation Methods 0.000 claims description 48
- 238000005468 ion implantation Methods 0.000 claims description 47
- 239000000758 substrate Substances 0.000 claims description 35
- 230000015572 biosynthetic process Effects 0.000 claims description 32
- 238000000034 method Methods 0.000 claims description 29
- 239000010410 layer Substances 0.000 description 22
- 150000002500 ions Chemical class 0.000 description 16
- 239000012535 impurity Substances 0.000 description 15
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 6
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 6
- 229910052814 silicon oxide Inorganic materials 0.000 description 6
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 4
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 4
- 229910052796 boron Inorganic materials 0.000 description 4
- 230000003647 oxidation Effects 0.000 description 4
- 238000007254 oxidation reaction Methods 0.000 description 4
- 229910052698 phosphorus Inorganic materials 0.000 description 4
- 239000011574 phosphorus Substances 0.000 description 4
- 238000002955 isolation Methods 0.000 description 3
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 2
- 229920005591 polysilicon Polymers 0.000 description 2
- 239000000243 solution Substances 0.000 description 2
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- -1 for example Substances 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 239000011229 interlayer Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000001020 plasma etching Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
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- H01L21/8238—Complementary field-effect transistors, e.g. CMOS
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- H01L21/8232—Field-effect technology
- H01L21/8234—MIS technology, i.e. integration processes of field effect transistors of the conductor-insulator-semiconductor type
- H01L21/823462—MIS technology, i.e. integration processes of field effect transistors of the conductor-insulator-semiconductor type with a particular manufacturing method of the gate insulating layers, e.g. different gate insulating layer thicknesses, particular gate insulator materials or particular gate insulator implants
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- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
- H01L21/82—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components
- H01L21/822—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components the substrate being a semiconductor, using silicon technology
- H01L21/8232—Field-effect technology
- H01L21/8234—MIS technology, i.e. integration processes of field effect transistors of the conductor-insulator-semiconductor type
- H01L21/823493—MIS technology, i.e. integration processes of field effect transistors of the conductor-insulator-semiconductor type with a particular manufacturing method of the wells or tubs, e.g. twin tubs, high energy well implants, buried implanted layers for lateral isolation [BILLI]
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- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
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- H01L21/8232—Field-effect technology
- H01L21/8234—MIS technology, i.e. integration processes of field effect transistors of the conductor-insulator-semiconductor type
- H01L21/8238—Complementary field-effect transistors, e.g. CMOS
- H01L21/823857—Complementary field-effect transistors, e.g. CMOS with a particular manufacturing method of the gate insulating layers, e.g. different gate insulating layer thicknesses, particular gate insulator materials or particular gate insulator implants
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- H01L29/66409—Unipolar field-effect transistors
- H01L29/66477—Unipolar field-effect transistors with an insulated gate, i.e. MISFET
- H01L29/66568—Lateral single gate silicon transistors
- H01L29/66575—Lateral single gate silicon transistors where the source and drain or source and drain extensions are self-aligned to the sides of the gate
- H01L29/6659—Lateral single gate silicon transistors where the source and drain or source and drain extensions are self-aligned to the sides of the gate with both lightly doped source and drain extensions and source and drain self-aligned to the sides of the gate, e.g. lightly doped drain [LDD] MOSFET, double diffused drain [DDD] MOSFET
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- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/7833—Field effect transistors with field effect produced by an insulated gate with lightly doped drain or source extension, e.g. LDD MOSFET's; DDD MOSFET's
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Description
「半導体基板」には、シリコンなどの元素半導体基板又はGaAsなどの化合物半導体基板などが含まれる。第1及び第3のMOSトランジスタ形成領域は、例えば、基板上に第1及び第3のMOSトランジスタ形成用の開口部を有するレジスト層を形成し、このレジスト層をマスクとして、イオン注入を行うことにより、形成することができる。MOSトランジスタは、NMOS又はPMOSトランジスタであり、第1〜第3のMOSトランジスタは、通常は、全て同じタイプのトランジスタである。イオン注入のエネルギー、注入量、又は角度などの注入条件は、用途に応じて適宜設定することができる。イオン注入は、1度の工程で行ってもよいが、注入条件を変えて複数回の工程で行うことが好ましい。図4に、ゲート絶縁膜の厚さの違う2種類のPMOSトランジスタについて、イオン注入量と閾値電圧の関係を示すグラフを示す。図4から明らかなように、注入量が大きくなるほど、又はゲート絶縁膜の厚さが厚くなるほど、閾値電圧は大きくなる。従って、イオン注入の条件を変えることによって、閾値電圧調整を行うことができることが分かる。なお、図4は、PMOSトランジスタについてのグラフであるが、NMOSトランジスタについても同様のことがいえる。
ゲート絶縁膜は、酸化シリコン膜又は酸化シリコン膜を形成後に窒化した膜などからなる。酸化シリコン膜は、基板の熱酸化又はCVD法などにより、形成することができる。上述のように、この工程は、第2のイオン注入の後に行ってもよい。
第2のMOSトランジスタ形成領域は、例えば、基板上に第2のMOSトランジスタ形成用の開口部を有するレジスト層を形成し、このレジスト層をマスクとして、イオン注入を行うことにより、形成することができる。第2のイオン注入は、第1のイオン注入とは注入条件が異なる。ここでいう「注入条件」とは、イオン注入のエネルギー、注入量、又は角度などを意味する。
この工程は、例えば、第1MOSトランジスタ形成領域上方部分にレジスト層を形成し、その状態でフッ酸などを用いて第1ゲート絶縁膜を除去することによって、行うことができる。
第2ゲート絶縁膜は、酸化シリコン膜又は酸化シリコン膜を形成後に窒化した膜などからなる。酸化シリコン膜は、基板の熱酸化又はCVD法などにより、形成することができる。第2ゲート絶縁膜を形成する際に、通常、第1ゲート絶縁膜の厚さも変化するが、第2ゲート絶縁膜を形成した後の第1のゲート絶縁膜厚が、好ましくは、10nmから16nmであり、第2のゲート絶縁膜厚が、好ましくは、3nmから6nmである。このように本発明によれば、簡易な方法で、2種類の厚さのゲート絶縁膜を有するMOSトランジスタを備える半導体装置を製造することができる。なお、ゲート絶縁膜の形成方法は、上記方法に限定されず、最終的に、2種類の厚さがゲート絶縁膜が得られ、第1ゲート絶縁膜の厚さが第2ゲート絶縁膜よりも厚くなる方法であれば、何れの方法であってもよい。
まず、図1(a)に示すように、P型の半導体基板1上に周知の技術により素子分離のためのSTI(Shallow Trench Isolation)5を形成し、第1の犠牲酸化膜3を、基板1の熱酸化により、10nm〜20nmの厚さで形成する。
Claims (5)
- 同一半導体基板上に、所定厚さの第1ゲート絶縁膜を有する第1のMOSトランジスタと、第1ゲート絶縁膜よりも薄い第2ゲート絶縁膜を共通に有する第2及び第3のMOSトランジスタとを備え、第3のMOSトランジスタは、その閾値電圧が第2のMOSトランジスタより低い半導体装置の製造方法において、
第1及び第3のMOSトランジスタの閾値電圧調整のために、第1のイオン注入を行う工程と、
第2のMOSトランジスタの閾値電圧調整のために、第1のイオン注入とは注入条件の異なる第2のイオン注入を行う工程を備え、
第1〜第3のMOSトランジスタは、全て同じ導電型であることを特徴とする半導体装置の製造方法。 - (1)第1のイオン注入を行うことにより、半導体基板上に第1及び第3のMOSトランジスタ形成領域を形成すると共に第1及び第3のMOSトランジスタの閾値電圧調整を行う工程と、
(2)基板全面に所定厚さの第1ゲート絶縁膜を形成する工程と、
(3)第1のイオン注入とは注入条件の異なる第2のイオン注入を行うことにより、半導体基板上に第2のMOSトランジスタ形成領域を形成すると共に第2のMOSトランジスタの閾値電圧調整を行う工程と、
(4)第1ゲート絶縁膜のうち第2及び第3のMOSトランジスタ形成領域上方部分を除去して基板を露出させる工程と、
(5)第1ゲート絶縁膜よりも膜厚が薄くなるように、基板露出部分に第2ゲート絶縁膜を形成する工程とを備え、
第1〜第3のMOSトランジスタは、全て同じ導電型であり、
工程(1)〜(3)が任意の順序で行われ、工程(1)〜(3)の後に工程(4)及び(5)がこの順序で行われることを特徴とする半導体装置の製造方法。 - 第1のMOSトランジスタの閾値電圧が0.5Vから0.8Vであり、第3のMOSトランジスタの閾値電圧が0.05Vから0.2Vであることを特徴とする請求項1又は2に記載の半導体装置の製造方法。
- 第2のMOSトランジスタのゲート長より、第3のMOSトランジスタのゲート長が長いことを特徴とする請求項1又は2に記載の半導体装置の製造方法。
- 第2ゲート絶縁膜を形成した後の第1のゲート絶縁膜厚が10nmから16nmであり、第2のゲート絶縁膜厚が3nmから6nmであることを特徴とする請求項1又は2に記載の半導体装置の製造方法。
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JP2004271639A JP4149980B2 (ja) | 2004-09-17 | 2004-09-17 | 半導体製造装置の製造方法 |
TW094131530A TWI263305B (en) | 2004-09-17 | 2005-09-13 | Method for fabricating semiconductor device |
KR1020050085917A KR100655679B1 (ko) | 2004-09-17 | 2005-09-14 | 반도체 제조 장치의 제조 방법 |
US11/227,224 US7276407B2 (en) | 2004-09-17 | 2005-09-16 | Method for fabricating semiconductor device |
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JP (1) | JP4149980B2 (ja) |
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CA2529494A1 (en) * | 2003-06-16 | 2004-12-23 | Nanyang Technological University | Polymeric stent and method of manufacture |
KR100690924B1 (ko) * | 2005-12-21 | 2007-03-09 | 삼성전자주식회사 | 반도체 집적 회로 장치와 그 제조 방법 |
WO2007140320A2 (en) * | 2006-05-26 | 2007-12-06 | Nanyang Technological University | Implantable article, method of forming same and method for reducing thrombogenicity |
JP5141028B2 (ja) * | 2007-02-07 | 2013-02-13 | 富士通セミコンダクター株式会社 | マスクレイアウトデータ作成方法、マスクレイアウトデータ作成装置及び半導体装置の製造方法 |
JP4898517B2 (ja) * | 2007-03-27 | 2012-03-14 | シャープ株式会社 | 半導体装置の製造方法 |
US10898620B2 (en) | 2008-06-20 | 2021-01-26 | Razmodics Llc | Composite stent having multi-axial flexibility and method of manufacture thereof |
US8206635B2 (en) | 2008-06-20 | 2012-06-26 | Amaranth Medical Pte. | Stent fabrication via tubular casting processes |
US8206636B2 (en) | 2008-06-20 | 2012-06-26 | Amaranth Medical Pte. | Stent fabrication via tubular casting processes |
US8298895B1 (en) | 2011-10-31 | 2012-10-30 | International Business Machines Corporation | Selective threshold voltage implants for long channel devices |
US9224814B2 (en) | 2014-01-16 | 2015-12-29 | Taiwan Semiconductor Manufacturing Co., Ltd. | Process design to improve transistor variations and performance |
US9184234B2 (en) | 2014-01-16 | 2015-11-10 | Taiwan Semiconductor Manufacturing Co., Ltd. | Transistor design |
US9425099B2 (en) * | 2014-01-16 | 2016-08-23 | Taiwan Semiconductor Manufacturing Co., Ltd. | Epitaxial channel with a counter-halo implant to improve analog gain |
US9236445B2 (en) | 2014-01-16 | 2016-01-12 | Taiwan Semiconductor Manufacturing Co., Ltd. | Transistor having replacement gate and epitaxially grown replacement channel region |
US9525031B2 (en) | 2014-03-13 | 2016-12-20 | Taiwan Semiconductor Manufacturing Co., Ltd. | Epitaxial channel |
US9419136B2 (en) | 2014-04-14 | 2016-08-16 | Taiwan Semiconductor Manufacturing Co., Ltd. | Dislocation stress memorization technique (DSMT) on epitaxial channel devices |
JP5854104B2 (ja) * | 2014-09-30 | 2016-02-09 | 富士通セミコンダクター株式会社 | 半導体装置 |
JP6513450B2 (ja) * | 2015-03-26 | 2019-05-15 | 三重富士通セミコンダクター株式会社 | 半導体装置 |
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JPH06283675A (ja) | 1993-03-25 | 1994-10-07 | Sony Corp | 半導体装置の製造方法 |
JP3110422B2 (ja) * | 1998-06-18 | 2000-11-20 | エイ・アイ・エル株式会社 | 論理ゲートセル |
JP2000077536A (ja) * | 1998-09-03 | 2000-03-14 | Hitachi Ltd | 半導体装置の製造方法 |
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- 2005-09-14 KR KR1020050085917A patent/KR100655679B1/ko not_active IP Right Cessation
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KR20060051306A (ko) | 2006-05-19 |
JP2006086443A (ja) | 2006-03-30 |
US20060063316A1 (en) | 2006-03-23 |
US7276407B2 (en) | 2007-10-02 |
TWI263305B (en) | 2006-10-01 |
KR100655679B1 (ko) | 2006-12-08 |
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