JP4138891B2 - エチレンジアミン四酢酸またはそのアンモニウム塩である半導体プロセス残渣除去組成物および方法 - Google Patents

エチレンジアミン四酢酸またはそのアンモニウム塩である半導体プロセス残渣除去組成物および方法 Download PDF

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JP4138891B2
JP4138891B2 JP54278298A JP54278298A JP4138891B2 JP 4138891 B2 JP4138891 B2 JP 4138891B2 JP 54278298 A JP54278298 A JP 54278298A JP 54278298 A JP54278298 A JP 54278298A JP 4138891 B2 JP4138891 B2 JP 4138891B2
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ammonium
weight
substrate
ammonium salt
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JP2001526836A5 (enExample
JP2001526836A (ja
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ムン リー，ウェイ
ジェシー チェン，ツェフェイ
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イーケーシー テクノロジー，インコーポレイティド
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    • C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
    • C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
    • C11D2111/00—Cleaning compositions characterised by the objects to be cleaned; Cleaning compositions characterised by non-standard cleaning or washing processes
    • C11D2111/10—Objects to be cleaned
    • C11D2111/14—Hard surfaces
    • C11D2111/22—Electronic devices, e.g. PCBs or semiconductors
    • C—CHEMISTRY; METALLURGY
    • C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
    • C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
    • C11D2111/00—Cleaning compositions characterised by the objects to be cleaned; Cleaning compositions characterised by non-standard cleaning or washing processes
    • C11D2111/10—Objects to be cleaned
    • C11D2111/14—Hard surfaces
    • C11D2111/24—Mineral surfaces, e.g. stones, frescoes, plasters, walls or concretes

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  • Cleaning Or Drying Semiconductors (AREA)
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JP54278298A 1997-04-04 1998-03-17 エチレンジアミン四酢酸またはそのアンモニウム塩である半導体プロセス残渣除去組成物および方法 Expired - Fee Related JP4138891B2 (ja)

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EP0975731B1 (en) 2006-09-20
TW416984B (en) 2001-01-01
SG120055A1 (en) 2006-03-28
DE69835951D1 (de) 2006-11-02
EP0975731A1 (en) 2000-02-02
WO1998045399A1 (en) 1998-10-15
KR100386137B1 (ko) 2003-06-09
KR20010006024A (ko) 2001-01-15
EP0975731A4 (en) 2001-02-07
DE69835951T2 (de) 2007-06-14
ATE340243T1 (de) 2006-10-15
US20010006936A1 (en) 2001-07-05
JP2001526836A (ja) 2001-12-18
US6367486B1 (en) 2002-04-09

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