JP4130801B2 - 半導体デバイス試験装置、及び半導体デバイス試験方法 - Google Patents

半導体デバイス試験装置、及び半導体デバイス試験方法 Download PDF

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Publication number
JP4130801B2
JP4130801B2 JP2003505643A JP2003505643A JP4130801B2 JP 4130801 B2 JP4130801 B2 JP 4130801B2 JP 2003505643 A JP2003505643 A JP 2003505643A JP 2003505643 A JP2003505643 A JP 2003505643A JP 4130801 B2 JP4130801 B2 JP 4130801B2
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Japan
Prior art keywords
strobe
change point
semiconductor device
value
output data
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Expired - Fee Related
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JP2003505643A
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Japanese (ja)
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JPWO2002103379A1 (ja
Inventor
優 土井
武雄 三浦
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Advantest Corp
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Advantest Corp
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/317—Testing of digital circuits
    • G01R31/31725—Timing aspects, e.g. clock distribution, skew, propagation delay
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/317—Testing of digital circuits
    • G01R31/3181—Functional testing
    • G01R31/319—Tester hardware, i.e. output processing circuits
    • G01R31/3193—Tester hardware, i.e. output processing circuits with comparison between actual response and known fault free response
    • G01R31/31937—Timing aspects, e.g. measuring propagation delay
JP2003505643A 2001-06-13 2002-06-13 半導体デバイス試験装置、及び半導体デバイス試験方法 Expired - Fee Related JP4130801B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2001179106 2001-06-13
JP2001179106 2001-06-13
PCT/JP2002/005924 WO2002103379A1 (fr) 2001-06-13 2002-06-13 Instrument destine a tester des dispositifs semi-conducteurs et procede destine a tester des dispositifs semi-conducteurs

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2008036502A Division JP4859854B2 (ja) 2001-06-13 2008-02-18 半導体デバイス試験装置、及び半導体デバイス試験方法

Publications (2)

Publication Number Publication Date
JPWO2002103379A1 JPWO2002103379A1 (ja) 2004-10-07
JP4130801B2 true JP4130801B2 (ja) 2008-08-06

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Family Applications (1)

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JP2003505643A Expired - Fee Related JP4130801B2 (ja) 2001-06-13 2002-06-13 半導体デバイス試験装置、及び半導体デバイス試験方法

Country Status (4)

Country Link
US (1) US7283920B2 (fr)
JP (1) JP4130801B2 (fr)
DE (1) DE10296952B4 (fr)
WO (1) WO2002103379A1 (fr)

Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4334285B2 (ja) * 2003-06-19 2009-09-30 株式会社アドバンテスト 半導体試験装置及びその制御方法
KR101080551B1 (ko) * 2003-07-31 2011-11-04 주식회사 아도반테스토 시험 장치
DE112005000311B4 (de) 2004-02-05 2011-04-07 Advantest Corp. Messgerät, Messverfahren und Testgerät
US7228248B2 (en) * 2005-09-09 2007-06-05 Advantest Corporation Test apparatus, timing generator and program therefor
JP4951534B2 (ja) * 2006-01-25 2012-06-13 株式会社アドバンテスト 試験装置および試験方法
JP2007265327A (ja) * 2006-03-30 2007-10-11 Fujitsu Ltd 電子装置のクロック発生回路の検査方法及び電子装置
WO2007129386A1 (fr) * 2006-05-01 2007-11-15 Advantest Corporation Dispositif d'essai et procédé d'essai
US7574633B2 (en) * 2006-07-12 2009-08-11 Advantest Corporation Test apparatus, adjustment method and recording medium
US7475310B2 (en) * 2006-08-09 2009-01-06 Advantest Corporation Signal output circuit, and test apparatus
WO2009001451A1 (fr) * 2007-06-27 2008-12-31 Advantest Corporation Détecteur et appareil d'essai
KR100892296B1 (ko) * 2007-10-24 2009-04-08 주식회사 아이티엔티 반도체 테스트 패턴신호의 체배 장치
CN101889402A (zh) * 2007-12-06 2010-11-17 拉姆伯斯公司 基于沿的信号损失检测
US20090158100A1 (en) * 2007-12-13 2009-06-18 Advantest Corporation Jitter applying circuit and test apparatus
US8139697B2 (en) * 2008-01-29 2012-03-20 United Microelectronics Corp. Sampling method and data recovery circuit using the same
WO2009116238A1 (fr) 2008-03-21 2009-09-24 株式会社アドバンテスト Dispositifs de test et de démodulation, procédés de test et de démodulation et composant électronique
KR101315462B1 (ko) * 2008-07-04 2013-10-04 삼성전자주식회사 메모리 컨트롤러, ｐｃｂ, 컴퓨터 시스템 및 메모리 조정방법
KR101213164B1 (ko) * 2008-09-04 2012-12-24 가부시키가이샤 어드밴티스트 시험 장치 및 시험 방법
WO2010125610A1 (fr) * 2009-04-30 2010-11-04 株式会社アドバンテスト Appareil de génération d'horloge, appareil de test et procédé de génération d'horloge
KR20130096493A (ko) * 2012-02-22 2013-08-30 삼성전자주식회사 반도체 장치의 안티퓨즈 회로 및 그 안티퓨즈 회로의 내부 회로블록 테스팅 방법
US9244126B2 (en) 2013-11-06 2016-01-26 Teradyne, Inc. Automated test system with event detection capability
US11164648B2 (en) * 2019-06-18 2021-11-02 Nxp Usa, Inc. Glitch profiling in an integrated circuit
KR20210109085A (ko) 2020-02-26 2021-09-06 삼성전자주식회사 메모리 장치에 대한 테스트 방법, 메모리 장치를 테스트하는 테스트 장치의 동작 방법, 및 셀프-테스트 기능을 구비한 메모리 장치

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02118474A (ja) * 1988-10-28 1990-05-02 Fujitsu Ltd 伝播遅延時間の試験装置
US5579251A (en) * 1992-03-31 1996-11-26 Advantest Corporation IC tester
JP2985056B2 (ja) * 1995-09-29 1999-11-29 日本プレシジョン・サーキッツ株式会社 Ｉｃ試験装置
TW343282B (en) * 1996-06-14 1998-10-21 Adoban Tesuto Kk Testing device for a semiconductor device
KR100336907B1 (ko) * 1998-07-17 2002-05-16 오우라 히로시 메모리 시험장치
JP4156105B2 (ja) * 1998-11-12 2008-09-24 株式会社アドバンテスト Ｉｃ試験装置
JP2000162290A (ja) * 1998-11-25 2000-06-16 Ando Electric Co Ltd 半導体試験装置
TWI238256B (en) * 2000-01-18 2005-08-21 Advantest Corp Testing method for semiconductor device and its equipment
JP4394789B2 (ja) * 2000-01-18 2010-01-06 株式会社アドバンテスト 半導体デバイス試験方法・半導体デバイス試験装置
JP4782271B2 (ja) * 2000-07-06 2011-09-28 株式会社アドバンテスト 半導体デバイス試験方法・半導体デバイス試験装置
JP2002196053A (ja) * 2000-12-25 2002-07-10 Ando Electric Co Ltd Ｉｃ測定装置

Also Published As

Publication number Publication date
US20040122620A1 (en) 2004-06-24
US7283920B2 (en) 2007-10-16
JPWO2002103379A1 (ja) 2004-10-07
WO2002103379A1 (fr) 2002-12-27
DE10296952B4 (de) 2007-07-19
DE10296952T5 (de) 2004-09-16

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