JP4082652B2 - 載置装置 - Google Patents

載置装置 Download PDF

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Publication number
JP4082652B2
JP4082652B2 JP2001338158A JP2001338158A JP4082652B2 JP 4082652 B2 JP4082652 B2 JP 4082652B2 JP 2001338158 A JP2001338158 A JP 2001338158A JP 2001338158 A JP2001338158 A JP 2001338158A JP 4082652 B2 JP4082652 B2 JP 4082652B2
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JP
Japan
Prior art keywords
adapter
mounting
foup
open
pushed down
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
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JP2001338158A
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English (en)
Japanese (ja)
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JP2003142551A (ja
JP2003142551A5 (enExample
Inventor
進二 横山
智朗 安部
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Hirata Corp
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Hirata Corp
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Priority to JP2001338158A priority Critical patent/JP4082652B2/ja
Publication of JP2003142551A publication Critical patent/JP2003142551A/ja
Publication of JP2003142551A5 publication Critical patent/JP2003142551A5/ja
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Publication of JP4082652B2 publication Critical patent/JP4082652B2/ja
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Expired - Lifetime legal-status Critical Current

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  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
JP2001338158A 2001-11-02 2001-11-02 載置装置 Expired - Lifetime JP4082652B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2001338158A JP4082652B2 (ja) 2001-11-02 2001-11-02 載置装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2001338158A JP4082652B2 (ja) 2001-11-02 2001-11-02 載置装置

Publications (3)

Publication Number Publication Date
JP2003142551A JP2003142551A (ja) 2003-05-16
JP2003142551A5 JP2003142551A5 (enExample) 2005-06-16
JP4082652B2 true JP4082652B2 (ja) 2008-04-30

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JP2001338158A Expired - Lifetime JP4082652B2 (ja) 2001-11-02 2001-11-02 載置装置

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JP (1) JP4082652B2 (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104854689A (zh) * 2012-12-10 2015-08-19 东京毅力科创株式会社 基板处理装置、基板处理系统以及输送容器的异常检测方法
KR20200043753A (ko) 2018-10-18 2020-04-28 주식회사 서플러스글로벌 로드포트 어댑터

Families Citing this family (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4299111B2 (ja) * 2003-11-18 2009-07-22 株式会社ディスコ 研削装置
JPWO2006051577A1 (ja) * 2004-11-09 2008-08-07 株式会社ライト製作所 ロードポート及びアダプタ
JP4848916B2 (ja) * 2006-10-02 2011-12-28 シンフォニアテクノロジー株式会社 クランプ機構
JP5211808B2 (ja) * 2008-04-01 2013-06-12 株式会社安川電機 ロードポートおよびそれを備えた半導体製造装置
JP5168329B2 (ja) * 2010-08-31 2013-03-21 Ｔｄｋ株式会社 ロードポート装置
JP5621450B2 (ja) * 2010-09-17 2014-11-12 シンフォニアテクノロジー株式会社 カセットアダプタ、及びアダプタ本体ロック装置
JP5621451B2 (ja) * 2010-09-17 2014-11-12 シンフォニアテクノロジー株式会社 カセットアダプタ、及び着座センサ機構
TWI538084B (zh) * 2010-09-17 2016-06-11 昕芙旎雅股份有限公司 卡匣轉接器
DE102011006765B4 (de) 2011-04-05 2023-10-26 Brooks Automation (Germany) Gmbh Adaptervorrichtung für Load Ports
KR101295152B1 (ko) * 2011-06-30 2013-08-09 (주)둔포기계 기판 반출입 시스템
JP6212292B2 (ja) * 2013-06-11 2017-10-11 リンテック株式会社 ロードポート
JP5920302B2 (ja) * 2013-09-24 2016-05-18 村田機械株式会社 自動倉庫
US9991144B2 (en) 2013-09-30 2018-06-05 Murata Machinery, Ltd. Storage warehouse
JP6052308B2 (ja) * 2015-01-06 2016-12-27 シンフォニアテクノロジー株式会社 カセットアダプタ及びロードポート
JP2018107312A (ja) * 2016-12-27 2018-07-05 株式会社ディスコ 加工装置
JP6792457B2 (ja) * 2017-01-06 2020-11-25 株式会社ディスコ カセットステージ
JP6686914B2 (ja) * 2017-01-12 2020-04-22 株式会社ダイフク 物品保管設備
US11769682B2 (en) * 2017-08-09 2023-09-26 Asm Ip Holding B.V. Storage apparatus for storing cassettes for substrates and processing apparatus equipped therewith
JP6853396B2 (ja) * 2019-03-29 2021-03-31 平田機工株式会社 ロードポート
US11094570B2 (en) * 2019-03-29 2021-08-17 Hirata Corporation Load port having movable member that abuts a pin
CN115298810A (zh) * 2020-03-17 2022-11-04 日本电产理德股份有限公司 晶圆装卸机用配接器
KR102200250B1 (ko) * 2020-05-29 2021-01-11 주식회사 싸이맥스 풉 로드락 도어가 구비된 로드포트모듈 및 로드포트모듈 도어와 풉 로드락 도어의 개폐방법
JP7594389B2 (ja) * 2020-09-03 2024-12-04 株式会社日立ハイテク 搬送システム
KR102707578B1 (ko) * 2022-05-26 2024-09-19 세메스 주식회사 물품 보관 장치 및 물품 보관 방법

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3662372B2 (ja) * 1996-11-07 2005-06-22 大日本スクリーン製造株式会社 キャリア載置台
JPH1167863A (ja) * 1997-08-22 1999-03-09 Dainippon Screen Mfg Co Ltd 基板収納容器搬送装置およびそれを備えた基板処理装置
TW460035U (en) * 2000-09-08 2001-10-11 Ind Tech Res Inst Automatic front-opening load-in device for wafer box

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104854689A (zh) * 2012-12-10 2015-08-19 东京毅力科创株式会社 基板处理装置、基板处理系统以及输送容器的异常检测方法
CN104854689B (zh) * 2012-12-10 2017-03-15 东京毅力科创株式会社 基板处理装置、基板处理系统以及输送容器的异常检测方法
KR20200043753A (ko) 2018-10-18 2020-04-28 주식회사 서플러스글로벌 로드포트 어댑터

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Publication number Publication date
JP2003142551A (ja) 2003-05-16

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