JP4064436B2 - パワー素子 - Google Patents
パワー素子 Download PDFInfo
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- JP4064436B2 JP4064436B2 JP2006519596A JP2006519596A JP4064436B2 JP 4064436 B2 JP4064436 B2 JP 4064436B2 JP 2006519596 A JP2006519596 A JP 2006519596A JP 2006519596 A JP2006519596 A JP 2006519596A JP 4064436 B2 JP4064436 B2 JP 4064436B2
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- 229910010271 silicon carbide Inorganic materials 0.000 claims description 36
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical group [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims description 35
- 239000000758 substrate Substances 0.000 claims description 25
- 239000004065 semiconductor Substances 0.000 claims description 16
- 239000012535 impurity Substances 0.000 description 12
- 238000000034 method Methods 0.000 description 9
- 230000015572 biosynthetic process Effects 0.000 description 6
- 230000007423 decrease Effects 0.000 description 6
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- 238000013461 design Methods 0.000 description 3
- 230000005669 field effect Effects 0.000 description 3
- 229910004298 SiO 2 Inorganic materials 0.000 description 2
- 230000001419 dependent effect Effects 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- 238000004806 packaging method and process Methods 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 238000009825 accumulation Methods 0.000 description 1
- 239000008186 active pharmaceutical agent Substances 0.000 description 1
- 238000000137 annealing Methods 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 230000017525 heat dissipation Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000011835 investigation Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 230000003746 surface roughness Effects 0.000 description 1
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Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/7827—Vertical transistors
- H01L29/7828—Vertical transistors without inversion channel, e.g. vertical ACCUFETs, normally-on vertical MISFETs
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/0684—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by the shape, relative sizes or dispositions of the semiconductor regions or junctions between the regions
- H01L29/0692—Surface layout
- H01L29/0696—Surface layout of cellular field-effect devices, e.g. multicellular DMOS transistors or IGBTs
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/08—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions with semiconductor regions connected to an electrode carrying current to be rectified, amplified or switched and such electrode being part of a semiconductor device which comprises three or more electrodes
- H01L29/0843—Source or drain regions of field-effect devices
- H01L29/0847—Source or drain regions of field-effect devices of field-effect transistors with insulated gate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/10—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions with semiconductor regions connected to an electrode not carrying current to be rectified, amplified or switched and such electrode being part of a semiconductor device which comprises three or more electrodes
- H01L29/1025—Channel region of field-effect devices
- H01L29/1029—Channel region of field-effect devices of field-effect transistors
- H01L29/1033—Channel region of field-effect devices of field-effect transistors with insulated gate, e.g. characterised by the length, the width, the geometric contour or the doping structure
- H01L29/105—Channel region of field-effect devices of field-effect transistors with insulated gate, e.g. characterised by the length, the width, the geometric contour or the doping structure with vertical doping variation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/12—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/16—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed including, apart from doping materials or other impurities, only elements of Group IV of the Periodic Table
- H01L29/1608—Silicon carbide
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/36—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the concentration or distribution of impurities in the bulk material
- H01L29/365—Planar doping, e.g. atomic-plane doping, delta-doping
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Ceramic Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Insulated Gate Type Field-Effect Transistor (AREA)
Description
2 JFET(ジャンクション)領域
3 ドリフト領域
4 基板
5 チャネル層
8 ウェル領域
9 コンタクト領域
10 炭化珪素層
11 ドレイン電極
13 ソース電極
15 ゲート絶縁膜
17 ゲート電極
Claims (8)
- ソース電極と、
ドレイン電極と、
前記ソース領域と前記ドレイン電極との間で直列電流径路を形成するチャネル領域およびドリフト領域を含むワイドギャップ半導体と、
を備えたパワー素子であって、
前記直列電流径路のうち前記チャネル領域以外の領域は正の温度依存性を示すオン抵抗を有し、かつ、前記チャネル領域は負の温度依存性を示すオン抵抗を有しており、
前記パワー素子の温度を−30℃から100℃へ変化させた場合のパワー素子全体におけるオン抵抗の変化の、−30℃におけるパワー素子全体のオン抵抗に対する割合が50%以下であるパワー素子。 - 前記パワー素子全体におけるオン抵抗の温度変化は、前記電流経路のうちの前記チャネル領域以外の領域におけるオン抵抗の温度変化ΔRpと、前記チャネル領域におけるオン抵抗の温度変化ΔRnとを相殺させることによって得られる請求項1に記載パワー素子。
- 前記パワー素子の温度を−30℃から100℃へ変化させた場合において、前記温度変化ΔRpの絶対値は、前記温度変化ΔRnの1/2以上2倍以下である請求項2に記載のパワー素子。
- 電子の300Kにおけるチャネル移動度が10cm2/Vs以上であり、前記パワー素子の温度が−30℃以上100℃以下のとき、前記チャネル領域のオン抵抗が、前記電流径路のうちの前記チャネル領域以外の領域におけるオン抵抗の2倍以上20倍以下である請求項1に記載のパワー素子。
- 前記直列電流経路には、50A/cm2 以上の電流密度の電流が流れる請求項1に記載のパワー素子。
- 前記ワイドバンドギャップ半導体は炭化珪素である請求項1に記載のパワー素子。
- 前記パワー素子は、炭化珪素基板と、前記炭化珪素基板の主面上に形成された炭化珪素層とを備え、
前記ソース電極は前記炭化珪素層上に設けられ、前記ドレイン電極は前記炭化珪素基板の裏面に形成されている請求項1に記載のパワー素子。 - 前記炭化珪素基板の主面は(0001)面である、請求項7に記載のパワー素子。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004174037 | 2004-06-11 | ||
JP2004174037 | 2004-06-11 | ||
PCT/JP2005/010691 WO2005122273A1 (ja) | 2004-06-11 | 2005-06-10 | パワー素子 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP4064436B2 true JP4064436B2 (ja) | 2008-03-19 |
JPWO2005122273A1 JPWO2005122273A1 (ja) | 2008-04-10 |
Family
ID=35503383
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2006519596A Active JP4064436B2 (ja) | 2004-06-11 | 2005-06-10 | パワー素子 |
Country Status (4)
Country | Link |
---|---|
US (1) | US7671409B2 (ja) |
EP (1) | EP1775774A4 (ja) |
JP (1) | JP4064436B2 (ja) |
WO (1) | WO2005122273A1 (ja) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2010110253A1 (ja) * | 2009-03-27 | 2010-09-30 | 住友電気工業株式会社 | Mosfetおよびmosfetの製造方法 |
WO2010110252A1 (ja) * | 2009-03-27 | 2010-09-30 | 住友電気工業株式会社 | Mosfetおよびmosfetの製造方法 |
WO2010116886A1 (ja) * | 2009-04-10 | 2010-10-14 | 住友電気工業株式会社 | 絶縁ゲート型バイポーラトランジスタ |
WO2010116887A1 (ja) * | 2009-04-10 | 2010-10-14 | 住友電気工業株式会社 | 絶縁ゲート型電界効果トランジスタ |
Families Citing this family (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007013058A (ja) * | 2005-07-04 | 2007-01-18 | Toshiba Corp | 半導体装置 |
JP5225546B2 (ja) * | 2005-12-27 | 2013-07-03 | 株式会社豊田中央研究所 | 半導体装置 |
JP5018349B2 (ja) * | 2007-08-30 | 2012-09-05 | 住友電気工業株式会社 | 半導体装置 |
US7829402B2 (en) | 2009-02-10 | 2010-11-09 | General Electric Company | MOSFET devices and methods of making |
JP5563779B2 (ja) * | 2009-03-30 | 2014-07-30 | 日産自動車株式会社 | 半導体装置 |
DE112012002603B4 (de) * | 2011-06-23 | 2017-02-02 | Mitsubishi Electric Corp. | Halbleitervorrichtung und Verfahren zum Herstellen einer Halbleitervorrichtung |
US9029874B2 (en) | 2012-09-13 | 2015-05-12 | Panasonic Intellectual Property Management Co., Ltd. | Semiconductor device having a first silicon carbide semiconductor layer and a second silicon carbide semiconductor layer |
US9515145B2 (en) * | 2013-02-28 | 2016-12-06 | Mitsubishi Electric Corporation | Vertical MOSFET device with steady on-resistance |
EP2973720A4 (en) * | 2013-03-13 | 2016-11-02 | D3 Semiconductor LLC | DEVICE ARCHITECTURE AND METHOD FOR TEMPERATURE COMPENSATION OF VERTICAL FIELD EFFECT DEVICES |
US9397657B1 (en) | 2014-07-24 | 2016-07-19 | Eaton Corporation | Methods and systems for operating hybrid power devices using multiple current-dependent switching patterns |
US9722581B2 (en) | 2014-07-24 | 2017-08-01 | Eaton Corporation | Methods and systems for operating hybrid power devices using driver circuits that perform indirect instantaneous load current sensing |
WO2016071990A1 (ja) * | 2014-11-06 | 2016-05-12 | 三菱電機株式会社 | 炭化珪素半導体装置およびその製造方法 |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3404064B2 (ja) * | 1993-03-09 | 2003-05-06 | 株式会社日立製作所 | 半導体装置及びその製造方法 |
JP2910573B2 (ja) | 1993-09-10 | 1999-06-23 | 株式会社日立製作所 | 電界効果トランジスタ及びその製造方法 |
JP3397260B2 (ja) * | 1994-03-24 | 2003-04-14 | 株式会社日立製作所 | 絶縁ゲート形トランジスタの駆動方法と絶縁ゲート形トランジスタ |
US5736753A (en) | 1994-09-12 | 1998-04-07 | Hitachi, Ltd. | Semiconductor device for improved power conversion having a hexagonal-system single-crystal silicon carbide |
JPH09289312A (ja) * | 1996-04-23 | 1997-11-04 | Matsushita Electric Works Ltd | 半導体素子 |
WO2002043157A1 (fr) | 2000-11-21 | 2002-05-30 | Matsushita Electric Industrial Co.,Ltd. | Dispositif a semi-conducteur et procede de fabrication associe |
JP4843854B2 (ja) * | 2001-03-05 | 2011-12-21 | 住友電気工業株式会社 | Mosデバイス |
EP1306890A2 (en) | 2001-10-25 | 2003-05-02 | Matsushita Electric Industrial Co., Ltd. | Semiconductor substrate and device comprising SiC and method for fabricating the same |
US6734462B1 (en) * | 2001-12-07 | 2004-05-11 | The United States Of America As Represented By The Secretary Of The Army | Silicon carbide power devices having increased voltage blocking capabilities |
JP3679097B2 (ja) * | 2002-05-31 | 2005-08-03 | 株式会社光波 | 発光素子 |
US7608467B2 (en) * | 2004-01-13 | 2009-10-27 | Board of Regents University of Houston | Switchable resistive perovskite microelectronic device with multi-layer thin film structure |
DE102005046707B3 (de) * | 2005-09-29 | 2007-05-03 | Siced Electronics Development Gmbh & Co. Kg | SiC-PN-Leistungsdiode |
-
2005
- 2005-06-10 WO PCT/JP2005/010691 patent/WO2005122273A1/ja active Application Filing
- 2005-06-10 JP JP2006519596A patent/JP4064436B2/ja active Active
- 2005-06-10 US US11/570,269 patent/US7671409B2/en active Active
- 2005-06-10 EP EP05750446A patent/EP1775774A4/en not_active Withdrawn
Cited By (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2010110253A1 (ja) * | 2009-03-27 | 2010-09-30 | 住友電気工業株式会社 | Mosfetおよびmosfetの製造方法 |
WO2010110252A1 (ja) * | 2009-03-27 | 2010-09-30 | 住友電気工業株式会社 | Mosfetおよびmosfetの製造方法 |
JPWO2010110252A1 (ja) * | 2009-03-27 | 2012-09-27 | 住友電気工業株式会社 | Mosfetおよびmosfetの製造方法 |
US8513673B2 (en) | 2009-03-27 | 2013-08-20 | Sumitomo Electric Industries, Ltd. | MOSFET and method for manufacturing MOSFET |
US8536583B2 (en) | 2009-03-27 | 2013-09-17 | Sumitomo Electric Industries, Ltd. | MOSFET and method for manufacturing MOSFET |
WO2010116886A1 (ja) * | 2009-04-10 | 2010-10-14 | 住友電気工業株式会社 | 絶縁ゲート型バイポーラトランジスタ |
WO2010116887A1 (ja) * | 2009-04-10 | 2010-10-14 | 住友電気工業株式会社 | 絶縁ゲート型電界効果トランジスタ |
US8502236B2 (en) | 2009-04-10 | 2013-08-06 | Sumitomo Electric Industries, Ltd. | Insulated gate field effect transistor |
US8525187B2 (en) | 2009-04-10 | 2013-09-03 | Sumitomo Electric Industries, Ltd. | Insulated gate bipolar transistor |
Also Published As
Publication number | Publication date |
---|---|
US7671409B2 (en) | 2010-03-02 |
JPWO2005122273A1 (ja) | 2008-04-10 |
EP1775774A1 (en) | 2007-04-18 |
WO2005122273A1 (ja) | 2005-12-22 |
EP1775774A4 (en) | 2008-10-22 |
US20080265260A1 (en) | 2008-10-30 |
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