JP4026727B2 - 電力分割された電極 - Google Patents

電力分割された電極 Download PDF

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Publication number
JP4026727B2
JP4026727B2 JP50517297A JP50517297A JP4026727B2 JP 4026727 B2 JP4026727 B2 JP 4026727B2 JP 50517297 A JP50517297 A JP 50517297A JP 50517297 A JP50517297 A JP 50517297A JP 4026727 B2 JP4026727 B2 JP 4026727B2
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Japan
Prior art keywords
electrode
power
substrate
electrodes
capacitor
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Expired - Lifetime
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JP50517297A
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English (en)
Japanese (ja)
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JPH11509358A (ja
JPH11509358A5 (enExample
Inventor
ロバート， ディー． ディブル，
エリック， エイチ． レンツ，
アルバート， エム． ランムソン，
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ラム リサーチ コーポレイション
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32082—Radio frequency generated discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32532—Electrodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32917—Plasma diagnostics
    • H01J37/3299—Feedback systems
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/6831—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using electrostatic chucks

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Computer Hardware Design (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Drying Of Semiconductors (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Plasma Technology (AREA)
  • Primary Cells (AREA)
  • Surgical Instruments (AREA)
  • Cable Accessories (AREA)
  • Inert Electrodes (AREA)
JP50517297A 1995-06-30 1996-06-20 電力分割された電極 Expired - Lifetime JP4026727B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US08/491,349 US6042686A (en) 1995-06-30 1995-06-30 Power segmented electrode
US08/491,349 1995-06-30
PCT/US1996/010805 WO1997002589A1 (en) 1995-06-30 1996-06-20 Power segmented electrode

Publications (3)

Publication Number Publication Date
JPH11509358A JPH11509358A (ja) 1999-08-17
JPH11509358A5 JPH11509358A5 (enExample) 2004-08-19
JP4026727B2 true JP4026727B2 (ja) 2007-12-26

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ID=23951816

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50517297A Expired - Lifetime JP4026727B2 (ja) 1995-06-30 1996-06-20 電力分割された電極

Country Status (8)

Country Link
US (2) US6042686A (enExample)
EP (1) EP0871975B1 (enExample)
JP (1) JP4026727B2 (enExample)
KR (3) KR100479201B1 (enExample)
AT (1) ATE247866T1 (enExample)
AU (1) AU6339196A (enExample)
DE (1) DE69629588T2 (enExample)
WO (1) WO1997002589A1 (enExample)

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* Cited by examiner, † Cited by third party
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US6239403B1 (en) 2001-05-29
KR100490781B1 (ko) 2005-05-19
KR19990028462A (ko) 1999-04-15
DE69629588D1 (de) 2003-09-25
WO1997002589A1 (en) 1997-01-23
JPH11509358A (ja) 1999-08-17
DE69629588T2 (de) 2004-06-24
KR100479201B1 (ko) 2005-07-11
KR100447583B1 (ko) 2004-09-04
KR20040004493A (ko) 2004-01-13
US6042686A (en) 2000-03-28

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