KR100479201B1 - 전력을분할하는전극 - Google Patents

전력을분할하는전극 Download PDF

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Publication number
KR100479201B1
KR100479201B1 KR1019970709778A KR19970709778A KR100479201B1 KR 100479201 B1 KR100479201 B1 KR 100479201B1 KR 1019970709778 A KR1019970709778 A KR 1019970709778A KR 19970709778 A KR19970709778 A KR 19970709778A KR 100479201 B1 KR100479201 B1 KR 100479201B1
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KR
South Korea
Prior art keywords
electrode
power
electrodes
radio frequency
capacitor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
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KR1019970709778A
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English (en)
Korean (ko)
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KR19990028462A (ko
Inventor
로버트 디. 디블
에릭 에이치. 렌쯔
앨버트 엠. 램슨
Original Assignee
램 리서치 코포레이션
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Publication of KR100479201B1 publication Critical patent/KR100479201B1/ko
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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32082—Radio frequency generated discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32532—Electrodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32917—Plasma diagnostics
    • H01J37/3299—Feedback systems
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/6831—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using electrostatic chucks

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Computer Hardware Design (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Drying Of Semiconductors (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Plasma Technology (AREA)
  • Primary Cells (AREA)
  • Surgical Instruments (AREA)
  • Cable Accessories (AREA)
  • Inert Electrodes (AREA)
KR1019970709778A 1995-06-30 1996-06-20 전력을분할하는전극 Expired - Lifetime KR100479201B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US08/491,349 US6042686A (en) 1995-06-30 1995-06-30 Power segmented electrode
US8/491,349 1995-06-30
US08/491,349 1995-06-30

Related Child Applications (1)

Application Number Title Priority Date Filing Date
KR10-2003-7009421A Division KR100447583B1 (ko) 1995-06-30 1996-06-20 플라즈마 처리 장치 및 그 장치를 이용한 기판 처리 방법

Publications (2)

Publication Number Publication Date
KR19990028462A KR19990028462A (ko) 1999-04-15
KR100479201B1 true KR100479201B1 (ko) 2005-07-11

Family

ID=23951816

Family Applications (3)

Application Number Title Priority Date Filing Date
KR1019970709778A Expired - Lifetime KR100479201B1 (ko) 1995-06-30 1996-06-20 전력을분할하는전극
KR10-2003-7009421A Expired - Lifetime KR100447583B1 (ko) 1995-06-30 1996-06-20 플라즈마 처리 장치 및 그 장치를 이용한 기판 처리 방법
KR10-2004-7003858A Expired - Lifetime KR100490781B1 (ko) 1995-06-30 1996-06-20 플라즈마 처리 장치

Family Applications After (2)

Application Number Title Priority Date Filing Date
KR10-2003-7009421A Expired - Lifetime KR100447583B1 (ko) 1995-06-30 1996-06-20 플라즈마 처리 장치 및 그 장치를 이용한 기판 처리 방법
KR10-2004-7003858A Expired - Lifetime KR100490781B1 (ko) 1995-06-30 1996-06-20 플라즈마 처리 장치

Country Status (8)

Country Link
US (2) US6042686A (enExample)
EP (1) EP0871975B1 (enExample)
JP (1) JP4026727B2 (enExample)
KR (3) KR100479201B1 (enExample)
AT (1) ATE247866T1 (enExample)
AU (1) AU6339196A (enExample)
DE (1) DE69629588T2 (enExample)
WO (1) WO1997002589A1 (enExample)

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EP0871975B1 (en) 2003-08-20
EP0871975A1 (en) 1998-10-21
KR20040033316A (ko) 2004-04-21
ATE247866T1 (de) 2003-09-15
AU6339196A (en) 1997-02-05
US6239403B1 (en) 2001-05-29
KR100490781B1 (ko) 2005-05-19
JP4026727B2 (ja) 2007-12-26
KR19990028462A (ko) 1999-04-15
DE69629588D1 (de) 2003-09-25
WO1997002589A1 (en) 1997-01-23
JPH11509358A (ja) 1999-08-17
DE69629588T2 (de) 2004-06-24
KR100447583B1 (ko) 2004-09-04
KR20040004493A (ko) 2004-01-13
US6042686A (en) 2000-03-28

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