JP3956630B2 - 電気光学装置及び投射型表示装置 - Google Patents
電気光学装置及び投射型表示装置 Download PDFInfo
- Publication number
- JP3956630B2 JP3956630B2 JP2001070366A JP2001070366A JP3956630B2 JP 3956630 B2 JP3956630 B2 JP 3956630B2 JP 2001070366 A JP2001070366 A JP 2001070366A JP 2001070366 A JP2001070366 A JP 2001070366A JP 3956630 B2 JP3956630 B2 JP 3956630B2
- Authority
- JP
- Japan
- Prior art keywords
- film
- light
- electro
- optical device
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000010408 film Substances 0.000 claims description 300
- 239000000758 substrate Substances 0.000 claims description 152
- 229910052782 aluminium Inorganic materials 0.000 claims description 15
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 15
- 239000010409 thin film Substances 0.000 claims description 14
- 238000000034 method Methods 0.000 claims description 10
- 230000008569 process Effects 0.000 claims description 10
- WGLPBDUCMAPZCE-UHFFFAOYSA-N Trioxochromium Chemical compound O=[Cr](=O)=O WGLPBDUCMAPZCE-UHFFFAOYSA-N 0.000 claims description 5
- 229910000423 chromium oxide Inorganic materials 0.000 claims description 5
- 229910017464 nitrogen compound Inorganic materials 0.000 claims description 4
- 150000002830 nitrogen compounds Chemical class 0.000 claims description 4
- 238000002310 reflectometry Methods 0.000 claims description 4
- 239000003870 refractory metal Substances 0.000 claims description 4
- 239000010410 layer Substances 0.000 description 21
- 239000004065 semiconductor Substances 0.000 description 13
- 239000003990 capacitor Substances 0.000 description 12
- 230000000694 effects Effects 0.000 description 12
- 239000004973 liquid crystal related substance Substances 0.000 description 10
- 239000000463 material Substances 0.000 description 10
- 239000011159 matrix material Substances 0.000 description 10
- 229910052804 chromium Inorganic materials 0.000 description 9
- 239000011651 chromium Substances 0.000 description 9
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 8
- 230000002411 adverse Effects 0.000 description 8
- 229910052751 metal Inorganic materials 0.000 description 7
- 239000002184 metal Substances 0.000 description 7
- 238000010438 heat treatment Methods 0.000 description 6
- 239000000382 optic material Substances 0.000 description 6
- 239000003566 sealing material Substances 0.000 description 6
- 230000006866 deterioration Effects 0.000 description 5
- 238000005530 etching Methods 0.000 description 5
- 238000003860 storage Methods 0.000 description 5
- 229910052719 titanium Inorganic materials 0.000 description 5
- 239000010936 titanium Substances 0.000 description 5
- 230000008859 change Effects 0.000 description 4
- 239000004020 conductor Substances 0.000 description 4
- 239000011229 interlayer Substances 0.000 description 4
- 230000003287 optical effect Effects 0.000 description 4
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 3
- 230000007547 defect Effects 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
- 238000010030 laminating Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 3
- 229920005591 polysilicon Polymers 0.000 description 3
- 239000010453 quartz Substances 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- 239000004983 Polymer Dispersed Liquid Crystal Substances 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 239000002131 composite material Substances 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- 230000005684 electric field Effects 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 229910052745 lead Inorganic materials 0.000 description 2
- 230000031700 light absorption Effects 0.000 description 2
- 230000007257 malfunction Effects 0.000 description 2
- 229910052750 molybdenum Inorganic materials 0.000 description 2
- 230000000149 penetrating effect Effects 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- 229910021332 silicide Inorganic materials 0.000 description 2
- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical compound [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 229910052715 tantalum Inorganic materials 0.000 description 2
- 229910052721 tungsten Inorganic materials 0.000 description 2
- 239000004988 Nematic liquid crystal Substances 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 239000011324 bead Substances 0.000 description 1
- 230000008094 contradictory effect Effects 0.000 description 1
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 description 1
- 238000005336 cracking Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000003365 glass fiber Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 238000005121 nitriding Methods 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 230000001443 photoexcitation Effects 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 125000006850 spacer group Chemical group 0.000 description 1
- 229920001187 thermosetting polymer Polymers 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
Images
Landscapes
- Liquid Crystal (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001070366A JP3956630B2 (ja) | 2000-03-13 | 2001-03-13 | 電気光学装置及び投射型表示装置 |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000069402 | 2000-03-13 | ||
| JP2000-69402 | 2000-03-13 | ||
| JP2001070366A JP3956630B2 (ja) | 2000-03-13 | 2001-03-13 | 電気光学装置及び投射型表示装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2001330821A JP2001330821A (ja) | 2001-11-30 |
| JP2001330821A5 JP2001330821A5 (enExample) | 2004-12-24 |
| JP3956630B2 true JP3956630B2 (ja) | 2007-08-08 |
Family
ID=26587368
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2001070366A Expired - Fee Related JP3956630B2 (ja) | 2000-03-13 | 2001-03-13 | 電気光学装置及び投射型表示装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3956630B2 (enExample) |
Families Citing this family (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003107459A (ja) * | 2001-09-28 | 2003-04-09 | Hoya Corp | 液晶表示パネル用対向基板、及び液晶表示パネル |
| JP2004037874A (ja) * | 2002-07-03 | 2004-02-05 | Seiko Epson Corp | 実装ケース入り電気光学装置及び投射型表示装置 |
| JP2005241910A (ja) * | 2004-02-26 | 2005-09-08 | Nec Corp | 薄膜トランジスタアレイ基板、それを用いた液晶パネルおよび液晶プロジェクタ |
| JP5016850B2 (ja) * | 2006-05-30 | 2012-09-05 | キヤノン株式会社 | 液晶表示装置及び液晶プロジェクター装置 |
| JP2008096966A (ja) | 2006-09-12 | 2008-04-24 | Seiko Epson Corp | 電気光学装置、電子機器 |
| JP5298627B2 (ja) * | 2008-05-12 | 2013-09-25 | ソニー株式会社 | 液晶表示素子及び投射型表示装置 |
| JP5392702B2 (ja) * | 2009-01-08 | 2014-01-22 | 株式会社ジャパンディスプレイ | 液晶表示装置および電子機器 |
| JP5278129B2 (ja) * | 2009-04-14 | 2013-09-04 | セイコーエプソン株式会社 | 電気光学装置及び電子機器 |
| JP2013251284A (ja) | 2010-09-21 | 2013-12-12 | Sharp Corp | 半導体装置およびその製造方法 |
| JP5808944B2 (ja) | 2011-05-11 | 2015-11-10 | ピクストロニクス，インコーポレイテッド | 表示装置及び表示装置の製造方法 |
| JP2017067999A (ja) | 2015-09-30 | 2017-04-06 | セイコーエプソン株式会社 | 電気光学装置用基板、電気光学装置、電子機器 |
-
2001
- 2001-03-13 JP JP2001070366A patent/JP3956630B2/ja not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JP2001330821A (ja) | 2001-11-30 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| KR100442217B1 (ko) | 전기 광학 장치, 전기 광학 장치용 기판 및 투사형 표시장치 | |
| KR100537250B1 (ko) | 전기 광학 장치 및 전자기기 | |
| JP2004004722A (ja) | 電気光学装置及び電子機器 | |
| JP4599655B2 (ja) | 電気光学装置及びプロジェクタ | |
| JP3821067B2 (ja) | 電気光学装置及び電子機器 | |
| JP3956630B2 (ja) | 電気光学装置及び投射型表示装置 | |
| JP3743291B2 (ja) | 電気光学装置及びプロジェクタ | |
| JP3608531B2 (ja) | 電気光学装置及び投射型表示装置 | |
| JP2002156653A (ja) | 電気光学装置 | |
| JP4049639B2 (ja) | 液晶表示装置用基板及びそれを備えた液晶表示装置 | |
| JP3931547B2 (ja) | 電気光学装置及びその製造方法 | |
| JP4023522B2 (ja) | 電気光学装置及びプロジェクタ | |
| JP4438312B2 (ja) | 電気光学装置及び電子機器 | |
| JP3849434B2 (ja) | 電気光学装置及び投射型表示装置 | |
| KR20060028536A (ko) | 색필터 표시판 및 그를 포함하는 액정 표시 장치 | |
| JP3965935B2 (ja) | 電気光学装置及び投射型表示装置 | |
| JP4496600B2 (ja) | 電気光学装置及びプロジェクタ | |
| JP3700679B2 (ja) | 電気光学装置及び電子機器 | |
| JP2004109988A (ja) | 電気光学装置及び電子機器 | |
| JP3731460B2 (ja) | 電気光学装置およびプロジェクタ | |
| JP4066607B2 (ja) | 電気光学装置及びプロジェクタ | |
| JP2002094072A (ja) | 電気光学装置用素子基板及びその製造方法、電気光学装置及びその製造方法、ならびに電子機器 | |
| JP4063260B2 (ja) | 電気光学装置及び投射型表示装置 | |
| JP4154965B2 (ja) | 電気光学基板、並びにこれを具備する電気光学装置及び電子機器 | |
| JP3800940B2 (ja) | アクティブマトリクス基板およびこれを用いた電気光学装置と電子機器 |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20040122 |
|
| A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20040122 |
|
| A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20051117 |
|
| A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20051122 |
|
| A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20051212 |
|
| A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20060411 |
|
| A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20060524 |
|
| A02 | Decision of refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A02 Effective date: 20060801 |
|
| A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20060928 |
|
| A911 | Transfer of reconsideration by examiner before appeal (zenchi) |
Free format text: JAPANESE INTERMEDIATE CODE: A911 Effective date: 20061006 |
|
| RD04 | Notification of resignation of power of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: A7424 Effective date: 20070410 |
|
| TRDD | Decision of grant or rejection written | ||
| A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20070417 |
|
| A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20070430 |
|
| R150 | Certificate of patent or registration of utility model |
Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20110518 Year of fee payment: 4 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20120518 Year of fee payment: 5 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20120518 Year of fee payment: 5 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20130518 Year of fee payment: 6 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20140518 Year of fee payment: 7 |
|
| S531 | Written request for registration of change of domicile |
Free format text: JAPANESE INTERMEDIATE CODE: R313531 |
|
| R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |
|
| LAPS | Cancellation because of no payment of annual fees |