JP3950156B1 - 蛍光x線分析装置 - Google Patents
蛍光x線分析装置 Download PDFInfo
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- JP3950156B1 JP3950156B1 JP2006108491A JP2006108491A JP3950156B1 JP 3950156 B1 JP3950156 B1 JP 3950156B1 JP 2006108491 A JP2006108491 A JP 2006108491A JP 2006108491 A JP2006108491 A JP 2006108491A JP 3950156 B1 JP3950156 B1 JP 3950156B1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
- G01N23/223—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material by irradiating the sample with X-rays or gamma-rays and by measuring X-ray fluorescence
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2223/00—Investigating materials by wave or particle radiation
- G01N2223/07—Investigating materials by wave or particle radiation secondary emission
- G01N2223/076—X-ray fluorescence
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Abstract
【解決手段】X線管からの一次X線を試料Sに照射し、試料Sから発生する蛍光X線を分光素子で分光しX線検出器で検出することにより、試料Sを分析する蛍光X線分析装置であって、クロムを含むターゲットを有するX線管11と、X線管11と試料Sとの間のX線通路に配置され、X線管11からのCr−Kα線に対し所定の透過率を有し、S−Kα線とCr−Kα線のエネルギ間に吸収端が存在しない元素の材質によるX線フィルタ13と、ネオンガスまたはヘリウムガスを含む検出器ガスを有する比例計数管18とを備え、試料Sに含まれる硫黄を分析する蛍光X線分析装置1。
【選択図】図1
Description
11 クロムターゲットを有するX線管
12、14、32、34、42、44、52、54 一次X線
13 アルミニウム製X線フィルタ
15、17、35、37、45、47、55、57 蛍光X線
16 分光素子(グラファイト)
18 封入型比例計数管(X線検出器)
31 チタンターゲットを有するX線管
33 チタン製X線フィルタ
41 スカンジウムターゲットを有するX線管
43 チタン製X線フィルタ
51 バナジウムターゲットを有するX線管
53 バナジウム製X線フィルタ
S 試料
Claims (4)
- X線管からの一次X線を試料に照射し、前記試料から発生する蛍光X線を分光素子で分光しX線検出器で検出することにより、前記試料を分析する蛍光X線分析装置であって、
クロムを含むターゲットを有するX線管と、
前記X線管と前記試料との間のX線通路に配置され、前記X線管からのCr−Kα線に対し所定の透過率を有し、S−Kα線とCr−Kα線のエネルギ間に吸収端が存在しない元素の材質によるX線フィルタと、
ネオンガスを含む検出器ガスを有する比例計数管とを備え、
前記試料に含まれる硫黄を分析する蛍光X線分析装置。 - X線管からの一次X線を試料に照射し、前記試料から発生する蛍光X線を分光素子で分光しX線検出器で検出することにより、前記試料を分析する蛍光X線分析装置であって、
チタンを含むターゲットを有するX線管と、
前記X線管と前記試料との間のX線通路に配置され、前記X線管からのTi−Kα線に対し所定の透過率を有し、S−Kα線とTi−Kα線のエネルギ間に吸収端が存在しない元素の材質によるX線フィルタと、
ネオンガスを含む検出器ガスを有する比例計数管とを備え、
前記試料に含まれる硫黄を分析する蛍光X線分析装置。 - X線管からの一次X線を試料に照射し、前記試料から発生する蛍光X線を分光素子で分光しX線検出器で検出することにより、前記試料を分析する蛍光X線分析装置であって、
スカンジウムを含むターゲットを有するX線管と、
前記X線管と前記試料との間のX線通路に配置され、前記X線管からのSc−Kα線に対し所定の透過率を有し、S−Kα線とSc−Kα線のエネルギ間に吸収端が存在しない元素の材質によるX線フィルタと、
ネオンガスを含む検出器ガスを有する比例計数管とを備え、
前記試料に含まれる硫黄を分析する蛍光X線分析装置。 - X線管からの一次X線を試料に照射し、前記試料から発生する蛍光X線を分光素子で分光しX線検出器で検出することにより、前記試料を分析する蛍光X線分析装置であって、
バナジウムを含むターゲットを有するX線管と、
前記X線管と前記試料との間のX線通路に配置され、前記X線管からのV−Kα線に対し所定の透過率を有し、S−Kα線とV−Kα線のエネルギ間に吸収端が存在しない元素の材質によるX線フィルタと、
ネオンガスを含む検出器ガスを有する比例計数管とを備え、
前記試料に含まれる硫黄を分析する蛍光X線分析装置。
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006108491A JP3950156B1 (ja) | 2006-04-11 | 2006-04-11 | 蛍光x線分析装置 |
KR1020087027449A KR101058634B1 (ko) | 2006-04-11 | 2006-11-24 | 형광 x선 분석 장치 |
PCT/JP2006/323407 WO2007116559A1 (ja) | 2006-04-11 | 2006-11-24 | 蛍光x線分析装置 |
EP06833211.3A EP2012113B1 (en) | 2006-04-11 | 2006-11-24 | X-ray fluorescence spectrometer |
CN2006800541769A CN101416047B (zh) | 2006-04-11 | 2006-11-24 | 荧光x射线分析装置 |
US12/296,383 US7949093B2 (en) | 2006-04-11 | 2006-11-24 | X-ray fluorescence spectrometer |
Applications Claiming Priority (1)
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JP2006108491A JP3950156B1 (ja) | 2006-04-11 | 2006-04-11 | 蛍光x線分析装置 |
Publications (2)
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JP3950156B1 true JP3950156B1 (ja) | 2007-07-25 |
JP2007278965A JP2007278965A (ja) | 2007-10-25 |
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JP2006108491A Expired - Fee Related JP3950156B1 (ja) | 2006-04-11 | 2006-04-11 | 蛍光x線分析装置 |
Country Status (6)
Country | Link |
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US (1) | US7949093B2 (ja) |
EP (1) | EP2012113B1 (ja) |
JP (1) | JP3950156B1 (ja) |
KR (1) | KR101058634B1 (ja) |
CN (1) | CN101416047B (ja) |
WO (1) | WO2007116559A1 (ja) |
Families Citing this family (14)
Publication number | Priority date | Publication date | Assignee | Title |
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JP5294653B2 (ja) * | 2008-02-28 | 2013-09-18 | キヤノン株式会社 | マルチx線発生装置及びx線撮影装置 |
JP2010019584A (ja) * | 2008-07-08 | 2010-01-28 | Central Japan Railway Co | 蛍光x線分析装置 |
KR101049180B1 (ko) * | 2008-09-11 | 2011-07-15 | 한화엘앤씨 주식회사 | 준단색 엑스선 촬영장치 |
US8433035B2 (en) | 2009-09-07 | 2013-04-30 | Rigaku Corporation | X-ray fluorescence analyzing method |
JP5076012B1 (ja) | 2011-05-20 | 2012-11-21 | 株式会社リガク | 波長分散型蛍光x線分析装置 |
JP5907375B2 (ja) * | 2011-12-28 | 2016-04-26 | 株式会社テクノエックス | 蛍光x線分析装置及び蛍光x線分析方法 |
US9952165B2 (en) * | 2012-04-19 | 2018-04-24 | University Of Leicester | Methods and apparatus for X-ray diffraction |
JP5372304B1 (ja) * | 2013-02-28 | 2013-12-18 | 一般社団法人ミネラル研究会 | 生体内元素検査方法 |
KR101417635B1 (ko) * | 2013-04-30 | 2014-07-21 | 전북대학교산학협력단 | 엑스선을 이용하는 형광분석의 최대값 검출 방법 및 이를 이용한 엑스선 형광분석장치 |
CN107238621A (zh) * | 2017-08-05 | 2017-10-10 | 深圳市华唯计量技术开发有限公司 | 一种利用全聚焦技术测全元素含量的装置 |
KR20190071111A (ko) | 2017-12-14 | 2019-06-24 | 삼성전자주식회사 | 엑스선 검사 장비 및 이를 이용하는 반도체 장치 제조 방법 |
US11199513B2 (en) * | 2018-04-20 | 2021-12-14 | Outotec (Finland) Oy | X-ray fluorescence analyzer with a plurality of measurement channels, and a method for performing x-ray fluorescence analysis |
JP7342629B2 (ja) * | 2019-11-06 | 2023-09-12 | 株式会社島津製作所 | 試料成分推定方法、試料成分推定装置、試料成分推定プログラム、学習方法および学習プログラム |
JP7380421B2 (ja) * | 2020-05-27 | 2023-11-15 | 株式会社島津製作所 | X線分析装置およびx線分析方法 |
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NL217744A (ja) * | 1956-06-01 | |||
US4134012A (en) | 1977-10-17 | 1979-01-09 | Bausch & Lomb, Inc. | X-ray analytical system |
NL8700346A (nl) * | 1987-02-13 | 1988-09-01 | Philips Nv | Gasgevulde roentgendetector. |
GB8926998D0 (en) * | 1989-11-29 | 1990-01-17 | Fisons Plc | Analysis crystal |
DE9212265U1 (de) * | 1992-09-11 | 1993-03-04 | Siemens AG, 8000 München | Röntgenspektrometer |
JPH08136480A (ja) * | 1994-11-11 | 1996-05-31 | Dkk Corp | 油中硫黄分測定装置 |
RU2339974C2 (ru) * | 2001-06-19 | 2008-11-27 | Икс-Рэй Оптикал Системз, Инк. | Волновая дисперсивная рентгенофлуоресцентная система с использованием фокусирующей оптики для возбуждения и фокусирующий монохроматор для собирания |
DE10159828B4 (de) * | 2001-12-06 | 2007-09-20 | Rigaku Industrial Corporation, Takatsuki | Röntgenfluoreszenzspektrometer |
JP2003344544A (ja) | 2002-05-22 | 2003-12-03 | Shimadzu Corp | 蛍光x線用検出器、蛍光x線検出器、及び蛍光x線分析装置 |
EP1644723B1 (en) * | 2003-06-17 | 2019-11-06 | X-Ray Optical Systems, Inc. | Moveable transparent barrier for x-ray analysis of a pressurized sample |
US7298817B2 (en) * | 2003-12-01 | 2007-11-20 | X-Ray Optical Systems, Inc. | Portable and on-line arsenic analyzer for drinking water |
JP2006030018A (ja) | 2004-07-16 | 2006-02-02 | Nyuurii Kk | 蛍光x線分析装置 |
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2006
- 2006-04-11 JP JP2006108491A patent/JP3950156B1/ja not_active Expired - Fee Related
- 2006-11-24 US US12/296,383 patent/US7949093B2/en not_active Expired - Fee Related
- 2006-11-24 CN CN2006800541769A patent/CN101416047B/zh not_active Expired - Fee Related
- 2006-11-24 WO PCT/JP2006/323407 patent/WO2007116559A1/ja active Application Filing
- 2006-11-24 KR KR1020087027449A patent/KR101058634B1/ko active IP Right Grant
- 2006-11-24 EP EP06833211.3A patent/EP2012113B1/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
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KR20090016455A (ko) | 2009-02-13 |
JP2007278965A (ja) | 2007-10-25 |
EP2012113B1 (en) | 2015-06-24 |
US7949093B2 (en) | 2011-05-24 |
EP2012113A1 (en) | 2009-01-07 |
EP2012113A4 (en) | 2014-01-15 |
WO2007116559A1 (ja) | 2007-10-18 |
US20090116613A1 (en) | 2009-05-07 |
CN101416047B (zh) | 2012-05-30 |
CN101416047A (zh) | 2009-04-22 |
KR101058634B1 (ko) | 2011-08-22 |
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