JP3929285B2 - 基板検査装置 - Google Patents

基板検査装置 Download PDF

Info

Publication number
JP3929285B2
JP3929285B2 JP2001339938A JP2001339938A JP3929285B2 JP 3929285 B2 JP3929285 B2 JP 3929285B2 JP 2001339938 A JP2001339938 A JP 2001339938A JP 2001339938 A JP2001339938 A JP 2001339938A JP 3929285 B2 JP3929285 B2 JP 3929285B2
Authority
JP
Japan
Prior art keywords
inspection
heads
stage
head
glass substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP2001339938A
Other languages
English (en)
Japanese (ja)
Other versions
JP2003139721A (ja
JP2003139721A5 (enExample
Inventor
暢夫 藤崎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Olympus Corp
Original Assignee
Olympus Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Olympus Corp filed Critical Olympus Corp
Priority to JP2001339938A priority Critical patent/JP3929285B2/ja
Priority to TW091132539A priority patent/TWI264532B/zh
Priority to PCT/JP2002/011507 priority patent/WO2003040711A1/ja
Priority to KR1020047006299A priority patent/KR100634652B1/ko
Priority to CNB028219295A priority patent/CN100368794C/zh
Publication of JP2003139721A publication Critical patent/JP2003139721A/ja
Publication of JP2003139721A5 publication Critical patent/JP2003139721A5/ja
Application granted granted Critical
Publication of JP3929285B2 publication Critical patent/JP3929285B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Images

Landscapes

  • Liquid Crystal (AREA)
  • Testing Of Short-Circuits, Discontinuities, Leakage, Or Incorrect Line Connections (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP2001339938A 2001-11-05 2001-11-05 基板検査装置 Expired - Lifetime JP3929285B2 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2001339938A JP3929285B2 (ja) 2001-11-05 2001-11-05 基板検査装置
TW091132539A TWI264532B (en) 2001-11-05 2002-11-04 Substrate inspection device
PCT/JP2002/011507 WO2003040711A1 (fr) 2001-11-05 2002-11-05 Dispositif de controle de substrat
KR1020047006299A KR100634652B1 (ko) 2001-11-05 2002-11-05 기판 검사 장치
CNB028219295A CN100368794C (zh) 2001-11-05 2002-11-05 基板检查装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2001339938A JP3929285B2 (ja) 2001-11-05 2001-11-05 基板検査装置

Publications (3)

Publication Number Publication Date
JP2003139721A JP2003139721A (ja) 2003-05-14
JP2003139721A5 JP2003139721A5 (enExample) 2005-07-07
JP3929285B2 true JP3929285B2 (ja) 2007-06-13

Family

ID=19154212

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2001339938A Expired - Lifetime JP3929285B2 (ja) 2001-11-05 2001-11-05 基板検査装置

Country Status (1)

Country Link
JP (1) JP3929285B2 (enExample)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006266722A (ja) * 2005-03-22 2006-10-05 Olympus Corp 基板検査システム及び基板検査方法
JP4704793B2 (ja) * 2005-04-06 2011-06-22 オリンパス株式会社 外観検査装置
JP4519705B2 (ja) * 2005-04-26 2010-08-04 株式会社堀場製作所 パネル部材検査装置及びそれに適用される位置情報補正プログラム
JP4578383B2 (ja) * 2005-10-25 2010-11-10 株式会社堀場製作所 パネル部材検査装置及びそれに適用されるパネル部材検査用プログラム
JP2007248714A (ja) * 2006-03-15 2007-09-27 Olympus Corp 複数ヘッド顕微鏡装置
JP2008014767A (ja) * 2006-07-05 2008-01-24 Olympus Corp 基板検査装置
JP2011099875A (ja) * 2011-02-18 2011-05-19 Olympus Corp 外観検査装置

Also Published As

Publication number Publication date
JP2003139721A (ja) 2003-05-14

Similar Documents

Publication Publication Date Title
KR100634652B1 (ko) 기판 검사 장치
KR20090004636A (ko) 기판 외관 검사 장치
JP5142315B2 (ja) 顕微鏡及びその観測方法
JP3333148B2 (ja) 外観検査装置
CN106405826A (zh) 一种双光路成像的振镜扫描系统及扫描方法
JP3929285B2 (ja) 基板検査装置
JPH08171057A (ja) 複数ヘッド顕微鏡装置
KR20140058636A (ko) 현미경, 대물광학계 및 화상취득장치
KR20050113602A (ko) 광학 디바이스 및 검사 모듈
KR101015807B1 (ko) 표면 검사 장치 및 표면 검사 방법
JP3944285B2 (ja) 基板検査装置
JP2000275594A (ja) 基板検査装置
JP3542114B2 (ja) 工業製品の目視検査支援装置
KR20040073306A (ko) 검사 장치
JPH01110243A (ja) 外観検査装置
JP2003139721A5 (enExample)
JP2000275183A (ja) 画像取込み装置
JPS62130305A (ja) 画像処理式測定装置
JP2008292494A (ja) 基板検査装置
JP4793851B2 (ja) カラーフィルタ基板のステージ装置及び検査装置
JP2007033372A (ja) 外観検査装置
JP3750259B2 (ja) 画像検査・測定装置
JP2001264266A (ja) 基板検査装置
JP2000009622A (ja) ブリネル硬さ値の計測装置
JPH0256516A (ja) 顕微鏡画像の視野内自動位置決め装置

Legal Events

Date Code Title Description
A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20041102

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20041102

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20060801

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20060929

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20070227

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20070306

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20110316

Year of fee payment: 4

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20110316

Year of fee payment: 4

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20120316

Year of fee payment: 5

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20120316

Year of fee payment: 5

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20130316

Year of fee payment: 6