JP2003139721A5 - - Google Patents

Download PDF

Info

Publication number
JP2003139721A5
JP2003139721A5 JP2001339938A JP2001339938A JP2003139721A5 JP 2003139721 A5 JP2003139721 A5 JP 2003139721A5 JP 2001339938 A JP2001339938 A JP 2001339938A JP 2001339938 A JP2001339938 A JP 2001339938A JP 2003139721 A5 JP2003139721 A5 JP 2003139721A5
Authority
JP
Japan
Prior art keywords
inspection apparatus
substrate inspection
heads
inspected
inspection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2001339938A
Other languages
English (en)
Japanese (ja)
Other versions
JP2003139721A (ja
JP3929285B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority claimed from JP2001339938A external-priority patent/JP3929285B2/ja
Priority to JP2001339938A priority Critical patent/JP3929285B2/ja
Priority to TW091132539A priority patent/TWI264532B/zh
Priority to CNB028219295A priority patent/CN100368794C/zh
Priority to KR1020047006299A priority patent/KR100634652B1/ko
Priority to PCT/JP2002/011507 priority patent/WO2003040711A1/ja
Publication of JP2003139721A publication Critical patent/JP2003139721A/ja
Publication of JP2003139721A5 publication Critical patent/JP2003139721A5/ja
Publication of JP3929285B2 publication Critical patent/JP3929285B2/ja
Application granted granted Critical
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP2001339938A 2001-11-05 2001-11-05 基板検査装置 Expired - Lifetime JP3929285B2 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2001339938A JP3929285B2 (ja) 2001-11-05 2001-11-05 基板検査装置
TW091132539A TWI264532B (en) 2001-11-05 2002-11-04 Substrate inspection device
PCT/JP2002/011507 WO2003040711A1 (fr) 2001-11-05 2002-11-05 Dispositif de controle de substrat
KR1020047006299A KR100634652B1 (ko) 2001-11-05 2002-11-05 기판 검사 장치
CNB028219295A CN100368794C (zh) 2001-11-05 2002-11-05 基板检查装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2001339938A JP3929285B2 (ja) 2001-11-05 2001-11-05 基板検査装置

Publications (3)

Publication Number Publication Date
JP2003139721A JP2003139721A (ja) 2003-05-14
JP2003139721A5 true JP2003139721A5 (enExample) 2005-07-07
JP3929285B2 JP3929285B2 (ja) 2007-06-13

Family

ID=19154212

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2001339938A Expired - Lifetime JP3929285B2 (ja) 2001-11-05 2001-11-05 基板検査装置

Country Status (1)

Country Link
JP (1) JP3929285B2 (enExample)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006266722A (ja) * 2005-03-22 2006-10-05 Olympus Corp 基板検査システム及び基板検査方法
JP4704793B2 (ja) * 2005-04-06 2011-06-22 オリンパス株式会社 外観検査装置
JP4519705B2 (ja) * 2005-04-26 2010-08-04 株式会社堀場製作所 パネル部材検査装置及びそれに適用される位置情報補正プログラム
JP4578383B2 (ja) * 2005-10-25 2010-11-10 株式会社堀場製作所 パネル部材検査装置及びそれに適用されるパネル部材検査用プログラム
JP2007248714A (ja) * 2006-03-15 2007-09-27 Olympus Corp 複数ヘッド顕微鏡装置
JP2008014767A (ja) * 2006-07-05 2008-01-24 Olympus Corp 基板検査装置
JP2011099875A (ja) * 2011-02-18 2011-05-19 Olympus Corp 外観検査装置

Similar Documents

Publication Publication Date Title
US20240045042A1 (en) Methods and Systems for LIDAR Optics Alignment
CN104111524B (zh) 数码显微镜以及优化数码显微镜中工作流程的方法
JP3612068B2 (ja) ワークにおける座標測定法
TW200302345A (en) Substrate inspection device
US9706129B2 (en) Image recording method having adaptive marking light emission and such an image recording device
US20120307206A1 (en) Fundus imaging apparatus and method therefor
JP2007251143A (ja) 外観検査装置
KR20050113602A (ko) 광학 디바이스 및 검사 모듈
JP3333148B2 (ja) 外観検査装置
JP2003139721A5 (enExample)
JP5405419B2 (ja) レンズ検査装置
JP3929285B2 (ja) 基板検査装置
US10753725B2 (en) Measuring apparatus and method for controlling the illumination for a measuring apparatus
JP6330070B1 (ja) 観察装置、観察システム及び観察装置の制御方法
CN100529744C (zh) 光学检测装置和检测方法
JP2000275183A (ja) 画像取込み装置
CN207976139U (zh) 可变物距光学检测装置
JP2016205985A (ja) 測定装置
JPH0222505A (ja) レーザ干渉測定装置
JP3750259B2 (ja) 画像検査・測定装置
JP2004522936A5 (enExample)
JP5356187B2 (ja) レンズの球欠高さ測定方法および装置
JP5715554B2 (ja) 工業製品の目視検査支援装置
JPH10160682A (ja) 試料観察装置及びこの装置を用いた試料観察方法
TWM563547U (zh) 可變物距光學檢測裝置