JP3913067B2 - 電子写真用感光体、その製造方法、ならびに電子写真装置 - Google Patents

電子写真用感光体、その製造方法、ならびに電子写真装置 Download PDF

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Publication number
JP3913067B2
JP3913067B2 JP2002020492A JP2002020492A JP3913067B2 JP 3913067 B2 JP3913067 B2 JP 3913067B2 JP 2002020492 A JP2002020492 A JP 2002020492A JP 2002020492 A JP2002020492 A JP 2002020492A JP 3913067 B2 JP3913067 B2 JP 3913067B2
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JP
Japan
Prior art keywords
layer
deposited
cylindrical substrate
photoconductive layer
intermediate layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2002020492A
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English (en)
Japanese (ja)
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JP2003149841A (ja
JP2003149841A5 (enExample
Inventor
淳一郎 橋爪
竜次 岡村
俊幸 江原
一人 細井
将也 河田
哲也 唐木
邦正 河村
弘憲 大脇
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Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to JP2002020492A priority Critical patent/JP3913067B2/ja
Application filed by Canon Inc filed Critical Canon Inc
Priority to DE60218542T priority patent/DE60218542T2/de
Priority to DE60210525T priority patent/DE60210525T2/de
Priority to EP02002366A priority patent/EP1229394B1/en
Priority to US10/059,139 priority patent/US6846600B2/en
Priority to EP04026742A priority patent/EP1505446B1/en
Publication of JP2003149841A publication Critical patent/JP2003149841A/ja
Publication of JP2003149841A5 publication Critical patent/JP2003149841A5/ja
Application granted granted Critical
Publication of JP3913067B2 publication Critical patent/JP3913067B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03G—ELECTROGRAPHY; ELECTROPHOTOGRAPHY; MAGNETOGRAPHY
    • G03G5/00—Recording members for original recording by exposure, e.g. to light, to heat, to electrons; Manufacture thereof; Selection of materials therefor
    • G03G5/02—Charge-receiving layers
    • G03G5/04—Photoconductive layers; Charge-generation layers or charge-transporting layers; Additives therefor; Binders therefor
    • G03G5/08—Photoconductive layers; Charge-generation layers or charge-transporting layers; Additives therefor; Binders therefor characterised by the photoconductive material being inorganic
    • G03G5/082—Photoconductive layers; Charge-generation layers or charge-transporting layers; Additives therefor; Binders therefor characterised by the photoconductive material being inorganic and not being incorporated in a bonding material, e.g. vacuum deposited
    • G03G5/08214—Silicon-based
    • G03G5/08221—Silicon-based comprising one or two silicon based layers
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03G—ELECTROGRAPHY; ELECTROPHOTOGRAPHY; MAGNETOGRAPHY
    • G03G5/00—Recording members for original recording by exposure, e.g. to light, to heat, to electrons; Manufacture thereof; Selection of materials therefor
    • G03G5/02—Charge-receiving layers
    • G03G5/04—Photoconductive layers; Charge-generation layers or charge-transporting layers; Additives therefor; Binders therefor
    • G03G5/08—Photoconductive layers; Charge-generation layers or charge-transporting layers; Additives therefor; Binders therefor characterised by the photoconductive material being inorganic
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03G—ELECTROGRAPHY; ELECTROPHOTOGRAPHY; MAGNETOGRAPHY
    • G03G5/00—Recording members for original recording by exposure, e.g. to light, to heat, to electrons; Manufacture thereof; Selection of materials therefor
    • G03G5/02—Charge-receiving layers
    • G03G5/04—Photoconductive layers; Charge-generation layers or charge-transporting layers; Additives therefor; Binders therefor
    • G03G5/08—Photoconductive layers; Charge-generation layers or charge-transporting layers; Additives therefor; Binders therefor characterised by the photoconductive material being inorganic
    • G03G5/082—Photoconductive layers; Charge-generation layers or charge-transporting layers; Additives therefor; Binders therefor characterised by the photoconductive material being inorganic and not being incorporated in a bonding material, e.g. vacuum deposited
    • G03G5/08214—Silicon-based
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03G—ELECTROGRAPHY; ELECTROPHOTOGRAPHY; MAGNETOGRAPHY
    • G03G5/00—Recording members for original recording by exposure, e.g. to light, to heat, to electrons; Manufacture thereof; Selection of materials therefor
    • G03G5/02—Charge-receiving layers
    • G03G5/04—Photoconductive layers; Charge-generation layers or charge-transporting layers; Additives therefor; Binders therefor
    • G03G5/08—Photoconductive layers; Charge-generation layers or charge-transporting layers; Additives therefor; Binders therefor characterised by the photoconductive material being inorganic
    • G03G5/082—Photoconductive layers; Charge-generation layers or charge-transporting layers; Additives therefor; Binders therefor characterised by the photoconductive material being inorganic and not being incorporated in a bonding material, e.g. vacuum deposited
    • G03G5/08214—Silicon-based
    • G03G5/08235—Silicon-based comprising three or four silicon-based layers
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03G—ELECTROGRAPHY; ELECTROPHOTOGRAPHY; MAGNETOGRAPHY
    • G03G5/00—Recording members for original recording by exposure, e.g. to light, to heat, to electrons; Manufacture thereof; Selection of materials therefor
    • G03G5/02—Charge-receiving layers
    • G03G5/04—Photoconductive layers; Charge-generation layers or charge-transporting layers; Additives therefor; Binders therefor
    • G03G5/08—Photoconductive layers; Charge-generation layers or charge-transporting layers; Additives therefor; Binders therefor characterised by the photoconductive material being inorganic
    • G03G5/082—Photoconductive layers; Charge-generation layers or charge-transporting layers; Additives therefor; Binders therefor characterised by the photoconductive material being inorganic and not being incorporated in a bonding material, e.g. vacuum deposited
    • G03G5/08285—Carbon-based
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03G—ELECTROGRAPHY; ELECTROPHOTOGRAPHY; MAGNETOGRAPHY
    • G03G5/00—Recording members for original recording by exposure, e.g. to light, to heat, to electrons; Manufacture thereof; Selection of materials therefor
    • G03G5/14—Inert intermediate or cover layers for charge-receiving layers
    • G03G5/147—Cover layers
    • G03G5/14704—Cover layers comprising inorganic material

Landscapes

  • Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Photoreceptors In Electrophotography (AREA)
  • Chemical Vapour Deposition (AREA)
JP2002020492A 2001-01-31 2002-01-29 電子写真用感光体、その製造方法、ならびに電子写真装置 Expired - Fee Related JP3913067B2 (ja)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP2002020492A JP3913067B2 (ja) 2001-01-31 2002-01-29 電子写真用感光体、その製造方法、ならびに電子写真装置
DE60210525T DE60210525T2 (de) 2001-01-31 2002-01-31 Elektrophotographisches photoempfindliches Element, Herstellungsverfahren und elektrophotographisches Gerät
EP02002366A EP1229394B1 (en) 2001-01-31 2002-01-31 Electrophotographic photosensitive member, process for its production, and electrophotographic apparatus
US10/059,139 US6846600B2 (en) 2001-01-31 2002-01-31 Electrophotographic photosensitive member, process for its production, and electrophotographic apparatus
DE60218542T DE60218542T2 (de) 2001-01-31 2002-01-31 Elektrophotographisches photoempfindliches Element, Herstellungsverfahren und elektrophotographisches Gerät
EP04026742A EP1505446B1 (en) 2001-01-31 2002-01-31 Electrophotographic photosensitive member, process for its production, and electrophotographic apparatus

Applications Claiming Priority (7)

Application Number Priority Date Filing Date Title
JP2001023703 2001-01-31
JP2001-23703 2001-01-31
JP2001-38477 2001-02-15
JP2001038477 2001-02-15
JP2001259693 2001-08-29
JP2001-259693 2001-08-29
JP2002020492A JP3913067B2 (ja) 2001-01-31 2002-01-29 電子写真用感光体、その製造方法、ならびに電子写真装置

Publications (3)

Publication Number Publication Date
JP2003149841A JP2003149841A (ja) 2003-05-21
JP2003149841A5 JP2003149841A5 (enExample) 2005-08-18
JP3913067B2 true JP3913067B2 (ja) 2007-05-09

Family

ID=27482013

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2002020492A Expired - Fee Related JP3913067B2 (ja) 2001-01-31 2002-01-29 電子写真用感光体、その製造方法、ならびに電子写真装置

Country Status (4)

Country Link
US (1) US6846600B2 (enExample)
EP (2) EP1505446B1 (enExample)
JP (1) JP3913067B2 (enExample)
DE (2) DE60218542T2 (enExample)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3913123B2 (ja) * 2001-06-28 2007-05-09 キヤノン株式会社 電子写真感光体の製造方法
US7033717B2 (en) * 2002-08-02 2006-04-25 Canon Kabushiki Kaisha Process for producing electrophotographic photosensitive member, and electrophotographic photosensitive member and electrophotographic apparatus making use of the same
EP1394619B1 (en) 2002-08-02 2010-03-03 Canon Kabushiki Kaisha Method for producing electrophotographic photosensitive member, electrophotographic photosensitive member and electrophotographic apparatus using the same
DE60309253T2 (de) 2002-08-09 2007-05-24 Canon K.K. Elektrophotographisches lichtempfindliches element
EP1429192A3 (en) * 2002-12-12 2005-03-23 Canon Kabushiki Kaisha Electrophotographic photosensitive member and process for producing the same
JP4726209B2 (ja) * 2004-08-19 2011-07-20 キヤノン株式会社 負帯電用電子写真感光体の製造方法、及び負帯電用電子写真感光体、及びそれを用いた電子写真装置
WO2009142164A1 (ja) * 2008-05-21 2009-11-26 キヤノン株式会社 負帯電用電子写真感光体、画像形成方法および電子写真装置
JP4599468B1 (ja) 2009-04-20 2010-12-15 キヤノン株式会社 電子写真感光体および電子写真装置
SG176631A1 (en) * 2009-06-05 2012-01-30 Sumco Corp Method of polishing silicon wafer as well as silicon wafer
JP5607499B2 (ja) 2009-11-17 2014-10-15 キヤノン株式会社 電子写真感光体および電子写真装置
JP5544343B2 (ja) * 2010-10-29 2014-07-09 東京エレクトロン株式会社 成膜装置
WO2014084177A1 (ja) * 2012-11-30 2014-06-05 京セラ株式会社 電子写真感光体およびこれを備えた画像形成装置
KR102052075B1 (ko) * 2013-03-28 2020-01-09 삼성디스플레이 주식회사 증착 장치, 이를 이용한 박막 형성 방법, 유기 발광 표시 장치 및 유기 발광 표시 장치 제조 방법
KR20150144200A (ko) * 2014-06-16 2015-12-24 삼성전자주식회사 화상형성장치 및 그의 진단 방법
JP2019144476A (ja) * 2018-02-22 2019-08-29 京セラ株式会社 電子写真感光体およびこれを備える画像形成装置
US11415913B2 (en) * 2020-05-28 2022-08-16 Canon Kabushiki Kaisha Electrophotographic member and electrophotographic image forming apparatus

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2519414B2 (ja) 1986-01-30 1996-07-31 三田工業株式会社 電子写真装置
JPS62189477A (ja) 1986-02-15 1987-08-19 Canon Inc 電子写真用感光体の検査方法および該検査方法に使用する装置
US4954397A (en) 1986-10-27 1990-09-04 Canon Kabushiki Kaisha Light receiving member having a divided-functionally structured light receiving layer having CGL and CTL for use in electrophotography
JPS63210864A (ja) 1987-02-27 1988-09-01 Canon Inc 画像形成装置
JPS6486149A (en) 1987-09-29 1989-03-30 Toshiba Corp Photoconductor and its production
JPH04191748A (ja) * 1990-11-27 1992-07-10 Canon Inc 電子写真感光体及びその製造方法
JP3046087B2 (ja) 1991-03-04 2000-05-29 孝夫 河村 画像形成装置
JPH0764312A (ja) * 1993-08-31 1995-03-10 Kyocera Corp 電子写真感光体の表面処理方法
JP3530667B2 (ja) 1996-01-19 2004-05-24 キヤノン株式会社 電子写真感光体およびその製造方法
DE69832747T2 (de) 1997-03-05 2006-08-03 Canon K.K. Bilderzeugungsgerät
JP3715779B2 (ja) 1997-03-05 2005-11-16 キヤノン株式会社 画像形成装置
JP3833345B2 (ja) 1997-06-11 2006-10-11 京セラ株式会社 画像形成装置
JP3647264B2 (ja) 1997-10-20 2005-05-11 キヤノン株式会社 画像形成装置
JPH11133641A (ja) 1997-10-29 1999-05-21 Canon Inc 電子写真感光体
US6001521A (en) 1997-10-29 1999-12-14 Canon Kabushiki Kaisha Electrophotographic photosensitive member
JPH11133640A (ja) 1997-10-29 1999-05-21 Canon Inc 電子写真感光体
JP3566621B2 (ja) * 2000-03-30 2004-09-15 キヤノン株式会社 電子写真感光体及びそれを用いた装置
US6534228B2 (en) * 2000-05-18 2003-03-18 Canon Kabushiki Kaisha Electrophotographic photosensitive member and image forming apparatus

Also Published As

Publication number Publication date
EP1505446B1 (en) 2007-02-28
US6846600B2 (en) 2005-01-25
JP2003149841A (ja) 2003-05-21
DE60218542T2 (de) 2007-11-22
DE60210525T2 (de) 2006-09-21
DE60210525D1 (de) 2006-05-24
DE60218542D1 (de) 2007-04-12
EP1229394A3 (en) 2003-11-19
EP1505446A1 (en) 2005-02-09
EP1229394B1 (en) 2006-04-12
EP1229394A2 (en) 2002-08-07
US20020168859A1 (en) 2002-11-14

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