JP3862845B2 - 近接場用光プローブ - Google Patents

近接場用光プローブ Download PDF

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Publication number
JP3862845B2
JP3862845B2 JP02480198A JP2480198A JP3862845B2 JP 3862845 B2 JP3862845 B2 JP 3862845B2 JP 02480198 A JP02480198 A JP 02480198A JP 2480198 A JP2480198 A JP 2480198A JP 3862845 B2 JP3862845 B2 JP 3862845B2
Authority
JP
Japan
Prior art keywords
lens
optical probe
light
flat
minute
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP02480198A
Other languages
English (en)
Japanese (ja)
Other versions
JPH11223638A (ja
JPH11223638A5 (enExample
Inventor
靖幸 光岡
徳男 千葉
宣行 笠間
隆 新輪
邦雄 中島
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Instruments Inc
Original Assignee
Seiko Instruments Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to JP02480198A priority Critical patent/JP3862845B2/ja
Application filed by Seiko Instruments Inc filed Critical Seiko Instruments Inc
Priority to PCT/JP1999/000514 priority patent/WO1999040445A1/ja
Priority to DE69928474T priority patent/DE69928474T2/de
Priority to EP99902848A priority patent/EP0981051B1/en
Priority to US09/402,382 priority patent/US6528780B1/en
Publication of JPH11223638A publication Critical patent/JPH11223638A/ja
Priority to US10/339,074 priority patent/US6881947B2/en
Priority to US11/093,618 priority patent/US7015455B2/en
Publication of JPH11223638A5 publication Critical patent/JPH11223638A5/ja
Application granted granted Critical
Publication of JP3862845B2 publication Critical patent/JP3862845B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/18—SNOM [Scanning Near-Field Optical Microscopy] or apparatus therefor, e.g. SNOM probes
    • G01Q60/22—Probes, their manufacture, or their related instrumentation, e.g. holders
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y20/00—Nanooptics, e.g. quantum optics or photonic crystals
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y35/00—Methods or apparatus for measurement or analysis of nanostructures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q70/00—General aspects of SPM probes, their manufacture or their related instrumentation, insofar as they are not specially adapted to a single SPM technique covered by group G01Q60/00
    • G01Q70/06—Probe tip arrays
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/12—Heads, e.g. forming of the optical beam spot or modulation of the optical beam
    • G11B7/125—Optical beam sources therefor, e.g. laser control circuitry specially adapted for optical storage devices; Modulators, e.g. means for controlling the size or intensity of optical spots or optical traces
    • G11B7/128—Modulators
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/12—Heads, e.g. forming of the optical beam spot or modulation of the optical beam
    • G11B7/135—Means for guiding the beam from the source to the record carrier or from the record carrier to the detector
    • G11B7/1353—Diffractive elements, e.g. holograms or gratings
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/12—Heads, e.g. forming of the optical beam spot or modulation of the optical beam
    • G11B7/135—Means for guiding the beam from the source to the record carrier or from the record carrier to the detector
    • G11B7/1362—Mirrors
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/12—Heads, e.g. forming of the optical beam spot or modulation of the optical beam
    • G11B7/135—Means for guiding the beam from the source to the record carrier or from the record carrier to the detector
    • G11B7/1372—Lenses
    • G11B7/1374—Objective lenses
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/12—Heads, e.g. forming of the optical beam spot or modulation of the optical beam
    • G11B7/135—Means for guiding the beam from the source to the record carrier or from the record carrier to the detector
    • G11B7/1387—Means for guiding the beam from the source to the record carrier or from the record carrier to the detector using the near-field effect
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/12—Heads, e.g. forming of the optical beam spot or modulation of the optical beam
    • G11B7/135—Means for guiding the beam from the source to the record carrier or from the record carrier to the detector
    • G11B7/1372—Lenses
    • G11B2007/13727—Compound lenses, i.e. two or more lenses co-operating to perform a function, e.g. compound objective lens including a solid immersion lens, positive and negative lenses either bonded together or with adjustable spacing
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/12—Heads, e.g. forming of the optical beam spot or modulation of the optical beam
    • G11B7/22—Apparatus or processes for the manufacture of optical heads, e.g. assembly
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/84—Manufacture, treatment, or detection of nanostructure
    • Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
    • Y10S977/86—Scanning probe structure
    • Y10S977/862—Near-field probe

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Chemical & Material Sciences (AREA)
  • Nanotechnology (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Analytical Chemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Biophysics (AREA)
  • Optical Head (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP02480198A 1998-02-05 1998-02-05 近接場用光プローブ Expired - Fee Related JP3862845B2 (ja)

Priority Applications (7)

Application Number Priority Date Filing Date Title
JP02480198A JP3862845B2 (ja) 1998-02-05 1998-02-05 近接場用光プローブ
DE69928474T DE69928474T2 (de) 1998-02-05 1999-02-05 Optiche sonde für nahfeld-messungen
EP99902848A EP0981051B1 (en) 1998-02-05 1999-02-05 Optical probe for proximity field measurements
US09/402,382 US6528780B1 (en) 1998-02-05 1999-02-05 Optical probe for proximity field
PCT/JP1999/000514 WO1999040445A1 (fr) 1998-02-05 1999-02-05 Sonde optique pour champ de proximite
US10/339,074 US6881947B2 (en) 1998-02-05 2003-01-09 Near-field optical probe
US11/093,618 US7015455B2 (en) 1998-02-05 2005-03-30 Near-field optical probe

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP02480198A JP3862845B2 (ja) 1998-02-05 1998-02-05 近接場用光プローブ

Publications (3)

Publication Number Publication Date
JPH11223638A JPH11223638A (ja) 1999-08-17
JPH11223638A5 JPH11223638A5 (enExample) 2005-08-18
JP3862845B2 true JP3862845B2 (ja) 2006-12-27

Family

ID=12148310

Family Applications (1)

Application Number Title Priority Date Filing Date
JP02480198A Expired - Fee Related JP3862845B2 (ja) 1998-02-05 1998-02-05 近接場用光プローブ

Country Status (5)

Country Link
US (3) US6528780B1 (enExample)
EP (1) EP0981051B1 (enExample)
JP (1) JP3862845B2 (enExample)
DE (1) DE69928474T2 (enExample)
WO (1) WO1999040445A1 (enExample)

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JPH11166935A (ja) * 1997-09-25 1999-06-22 Canon Inc 光検出または照射用の光プローブと該プローブを備えた近視野光学顕微鏡、及該光プローブの製造方法とその製造に用いる基板
JP3862845B2 (ja) * 1998-02-05 2006-12-27 セイコーインスツル株式会社 近接場用光プローブ

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WO1999040445A1 (fr) 1999-08-12
US6528780B1 (en) 2003-03-04
US6881947B2 (en) 2005-04-19
US7015455B2 (en) 2006-03-21
EP0981051A4 (en) 2001-05-02
DE69928474T2 (de) 2006-07-20
EP0981051B1 (en) 2005-11-23
US20030141444A1 (en) 2003-07-31
DE69928474D1 (de) 2005-12-29
EP0981051A1 (en) 2000-02-23
US20050167576A1 (en) 2005-08-04

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