JPH11223638A5 - - Google Patents

Info

Publication number
JPH11223638A5
JPH11223638A5 JP1998024801A JP2480198A JPH11223638A5 JP H11223638 A5 JPH11223638 A5 JP H11223638A5 JP 1998024801 A JP1998024801 A JP 1998024801A JP 2480198 A JP2480198 A JP 2480198A JP H11223638 A5 JPH11223638 A5 JP H11223638A5
Authority
JP
Japan
Prior art keywords
mirror
microlens
light
transmitting material
zone plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1998024801A
Other languages
English (en)
Japanese (ja)
Other versions
JPH11223638A (ja
JP3862845B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority claimed from JP02480198A external-priority patent/JP3862845B2/ja
Priority to JP02480198A priority Critical patent/JP3862845B2/ja
Priority to PCT/JP1999/000514 priority patent/WO1999040445A1/ja
Priority to EP99902848A priority patent/EP0981051B1/en
Priority to US09/402,382 priority patent/US6528780B1/en
Priority to DE69928474T priority patent/DE69928474T2/de
Publication of JPH11223638A publication Critical patent/JPH11223638A/ja
Priority to US10/339,074 priority patent/US6881947B2/en
Priority to US11/093,618 priority patent/US7015455B2/en
Publication of JPH11223638A5 publication Critical patent/JPH11223638A5/ja
Publication of JP3862845B2 publication Critical patent/JP3862845B2/ja
Application granted granted Critical
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

JP02480198A 1998-02-05 1998-02-05 近接場用光プローブ Expired - Fee Related JP3862845B2 (ja)

Priority Applications (7)

Application Number Priority Date Filing Date Title
JP02480198A JP3862845B2 (ja) 1998-02-05 1998-02-05 近接場用光プローブ
DE69928474T DE69928474T2 (de) 1998-02-05 1999-02-05 Optiche sonde für nahfeld-messungen
EP99902848A EP0981051B1 (en) 1998-02-05 1999-02-05 Optical probe for proximity field measurements
US09/402,382 US6528780B1 (en) 1998-02-05 1999-02-05 Optical probe for proximity field
PCT/JP1999/000514 WO1999040445A1 (fr) 1998-02-05 1999-02-05 Sonde optique pour champ de proximite
US10/339,074 US6881947B2 (en) 1998-02-05 2003-01-09 Near-field optical probe
US11/093,618 US7015455B2 (en) 1998-02-05 2005-03-30 Near-field optical probe

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP02480198A JP3862845B2 (ja) 1998-02-05 1998-02-05 近接場用光プローブ

Publications (3)

Publication Number Publication Date
JPH11223638A JPH11223638A (ja) 1999-08-17
JPH11223638A5 true JPH11223638A5 (enExample) 2005-08-18
JP3862845B2 JP3862845B2 (ja) 2006-12-27

Family

ID=12148310

Family Applications (1)

Application Number Title Priority Date Filing Date
JP02480198A Expired - Fee Related JP3862845B2 (ja) 1998-02-05 1998-02-05 近接場用光プローブ

Country Status (5)

Country Link
US (3) US6528780B1 (enExample)
EP (1) EP0981051B1 (enExample)
JP (1) JP3862845B2 (enExample)
DE (1) DE69928474T2 (enExample)
WO (1) WO1999040445A1 (enExample)

Families Citing this family (82)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5345170A (en) 1992-06-11 1994-09-06 Cascade Microtech, Inc. Wafer probe station having integrated guarding, Kelvin connection and shielding systems
US6380751B2 (en) 1992-06-11 2002-04-30 Cascade Microtech, Inc. Wafer probe station having environment control enclosure
US5561377A (en) 1995-04-14 1996-10-01 Cascade Microtech, Inc. System for evaluating probing networks
US6232789B1 (en) 1997-05-28 2001-05-15 Cascade Microtech, Inc. Probe holder for low current measurements
US5729150A (en) * 1995-12-01 1998-03-17 Cascade Microtech, Inc. Low-current probe card with reduced triboelectric current generating cables
US5914613A (en) * 1996-08-08 1999-06-22 Cascade Microtech, Inc. Membrane probing system with local contact scrub
US6002263A (en) * 1997-06-06 1999-12-14 Cascade Microtech, Inc. Probe station having inner and outer shielding
US6034533A (en) * 1997-06-10 2000-03-07 Tervo; Paul A. Low-current pogo probe card
JP3862845B2 (ja) * 1998-02-05 2006-12-27 セイコーインスツル株式会社 近接場用光プローブ
US6256882B1 (en) 1998-07-14 2001-07-10 Cascade Microtech, Inc. Membrane probing system
EP1727138B1 (en) * 1998-11-09 2009-03-11 Seiko Instruments Inc. Near-field optical head and method for manufacturing same
JP2000329677A (ja) * 1999-03-17 2000-11-30 Seiko Instruments Inc 光マイクロカンチレバーとその製造方法および光マイクロカンチレバーホルダ
US6578264B1 (en) 1999-06-04 2003-06-17 Cascade Microtech, Inc. Method for constructing a membrane probe using a depression
US6445202B1 (en) 1999-06-30 2002-09-03 Cascade Microtech, Inc. Probe station thermal chuck with shielding for capacitive current
JP4020233B2 (ja) * 1999-08-25 2007-12-12 セイコーインスツル株式会社 近視野光ヘッドとその製造方法
US6835963B2 (en) * 1999-12-22 2004-12-28 Kabushiki Kaisha Toshiba Light-emitting element and method of fabrication thereof
US6838890B2 (en) * 2000-02-25 2005-01-04 Cascade Microtech, Inc. Membrane probing system
JP4648512B2 (ja) * 2000-03-07 2011-03-09 セイコーインスツル株式会社 近視野光発生素子の製造方法
JP3882456B2 (ja) * 2000-03-13 2007-02-14 株式会社日立製作所 近接場光プローブおよびそれを用いた近接場光学顕微鏡および光記録／再生装置
US6917726B2 (en) * 2001-09-27 2005-07-12 Cornell Research Foundation, Inc. Zero-mode clad waveguides for performing spectroscopy with confined effective observation volumes
JP2002005810A (ja) * 2000-06-16 2002-01-09 Canon Inc プローブ及びその製造方法、表面観察装置、露光装置、情報処理装置
WO2002010829A2 (en) * 2000-07-27 2002-02-07 Zetetic Institute Multiple-source arrays with optical transmission enhanced by resonant cavities
US6707026B2 (en) * 2000-08-04 2004-03-16 Minolta Co., Ltd. Solid immersion mirror and reproducing apparatus
US6965226B2 (en) 2000-09-05 2005-11-15 Cascade Microtech, Inc. Chuck for holding a device under test
US6914423B2 (en) 2000-09-05 2005-07-05 Cascade Microtech, Inc. Probe station
DE10143173A1 (de) 2000-12-04 2002-06-06 Cascade Microtech Inc Wafersonde
KR100672833B1 (ko) * 2001-08-09 2007-01-22 재단법인서울대학교산학협력재단 근접장 홀로그래픽 메모리 시스템 및 그 방법
WO2003052435A1 (en) * 2001-08-21 2003-06-26 Cascade Microtech, Inc. Membrane probing system
WO2003020467A1 (en) 2001-08-31 2003-03-13 Cascade Microtech, Inc. Optical testing device
US6777964B2 (en) 2002-01-25 2004-08-17 Cascade Microtech, Inc. Probe station
US6951846B2 (en) * 2002-03-07 2005-10-04 The United States Of America As Represented By The Secretary Of The Army Artemisinins with improved stability and bioavailability for therapeutic drug development and application
JP2003294857A (ja) * 2002-03-29 2003-10-15 Mitsubishi Electric Corp 乗員検出装置
AU2003233659A1 (en) 2002-05-23 2003-12-12 Cascade Microtech, Inc. Probe for testing a device under test
US6847219B1 (en) 2002-11-08 2005-01-25 Cascade Microtech, Inc. Probe station with low noise characteristics
US6724205B1 (en) * 2002-11-13 2004-04-20 Cascade Microtech, Inc. Probe for combined signals
US7250779B2 (en) 2002-11-25 2007-07-31 Cascade Microtech, Inc. Probe station with low inductance path
US6861856B2 (en) * 2002-12-13 2005-03-01 Cascade Microtech, Inc. Guarded tub enclosure
US7221172B2 (en) 2003-05-06 2007-05-22 Cascade Microtech, Inc. Switched suspended conductor and connection
US7492172B2 (en) 2003-05-23 2009-02-17 Cascade Microtech, Inc. Chuck for holding a device under test
US7057404B2 (en) 2003-05-23 2006-06-06 Sharp Laboratories Of America, Inc. Shielded probe for testing a device under test
US7250626B2 (en) 2003-10-22 2007-07-31 Cascade Microtech, Inc. Probe testing structure
JP2005144561A (ja) * 2003-11-11 2005-06-09 Seiko Epson Corp 近接場光プローブ、近接場光の取出し方法並びに近接場光を用いた加工方法
US7187188B2 (en) 2003-12-24 2007-03-06 Cascade Microtech, Inc. Chuck with integrated wafer support
DE202004021093U1 (de) 2003-12-24 2006-09-28 Cascade Microtech, Inc., Beaverton Aktiver Halbleiterscheibenmessfühler
JP3765314B2 (ja) * 2004-03-31 2006-04-12 セイコーエプソン株式会社 マスク、マスクの製造方法、電気光学装置の製造方法および電子機器
DE202005021434U1 (de) 2004-06-07 2008-03-20 Cascade Microtech, Inc., Beaverton Thermooptische Einspannvorrichtung
US7330041B2 (en) 2004-06-14 2008-02-12 Cascade Microtech, Inc. Localizing a temperature of a device for testing
CA2570886A1 (en) 2004-07-07 2006-02-16 Cascade Microtech, Inc. Probe head having a membrane suspended probe
US7420381B2 (en) 2004-09-13 2008-09-02 Cascade Microtech, Inc. Double sided probing structures
US7170050B2 (en) 2004-09-17 2007-01-30 Pacific Biosciences Of California, Inc. Apparatus and methods for optical analysis of molecules
EP1790202A4 (en) * 2004-09-17 2013-02-20 Pacific Biosciences California APPARATUS AND METHOD FOR ANALYZING MOLECULES
JP2006107584A (ja) * 2004-10-01 2006-04-20 Konica Minolta Opto Inc 光学素子及び光スポット位置調整方法
US7616987B2 (en) * 2004-10-05 2009-11-10 Agency For Science, Technology And Research Microprobe for 3D bio-imaging, method for fabricating the same and use thereof
US7535247B2 (en) 2005-01-31 2009-05-19 Cascade Microtech, Inc. Interface for testing semiconductors
US7656172B2 (en) 2005-01-31 2010-02-02 Cascade Microtech, Inc. System for testing semiconductors
WO2006106818A1 (ja) * 2005-03-31 2006-10-12 Japan Science And Technology Agency 走査型プローブ顕微鏡用カンチレバー及びそれを具備する走査型プローブ顕微鏡
US7449899B2 (en) 2005-06-08 2008-11-11 Cascade Microtech, Inc. Probe for high frequency signals
US20070294047A1 (en) * 2005-06-11 2007-12-20 Leonard Hayden Calibration system
US7619419B2 (en) 2005-06-13 2009-11-17 Cascade Microtech, Inc. Wideband active-passive differential signal probe
US8039814B2 (en) 2005-12-22 2011-10-18 Koninklijke Philips Electronics N.V. Luminescence sensor operating in reflection mode
DE102006002461B8 (de) * 2006-01-18 2008-07-24 Max Planck-Gesellschaft zur Förderung der Wissenschaften e.V. Spiegeloptik für nahfeldoptische Messungen
US7609077B2 (en) 2006-06-09 2009-10-27 Cascade Microtech, Inc. Differential signal probe with integral balun
US7764072B2 (en) 2006-06-12 2010-07-27 Cascade Microtech, Inc. Differential signal probing system
US7723999B2 (en) 2006-06-12 2010-05-25 Cascade Microtech, Inc. Calibration structures for differential signal probing
US7403028B2 (en) 2006-06-12 2008-07-22 Cascade Microtech, Inc. Test structure and probe for differential signals
US7443186B2 (en) 2006-06-12 2008-10-28 Cascade Microtech, Inc. On-wafer test structures for differential signals
US8609366B2 (en) * 2006-07-28 2013-12-17 Legacy Emanuel Hospital & Health Center Method and systems for tissue culture
EP1936340A1 (en) * 2006-12-21 2008-06-25 Koninklijke Philips Electronics N.V. Sub wavelength aperture
US8000010B2 (en) 2007-07-31 2011-08-16 Battelle Energy Alliance, Llc Sighting optics including an optical element having a first focal length and a second focal length and methods for sighting
US7876114B2 (en) 2007-08-08 2011-01-25 Cascade Microtech, Inc. Differential waveguide probe
MX2010010600A (es) 2008-03-28 2011-03-30 Pacific Biosciences California Inc Composiciones y metodos para secuenciacion de acidos nucleicos.
US7888957B2 (en) 2008-10-06 2011-02-15 Cascade Microtech, Inc. Probing apparatus with impedance optimized interface
US8410806B2 (en) 2008-11-21 2013-04-02 Cascade Microtech, Inc. Replaceable coupon for a probing apparatus
US8319503B2 (en) 2008-11-24 2012-11-27 Cascade Microtech, Inc. Test apparatus for measuring a characteristic of a device under test
US8675293B2 (en) * 2010-01-25 2014-03-18 Axsun Technologies, Inc. SOI lens structure for medical probe
JP5814942B2 (ja) * 2010-01-25 2015-11-17 アクサン・テクノロジーズ・インコーポレーテッドＡｘｓｕｎ Ｔｅｃｈｎｏｌｏｇｉｅｓ，Ｉｎｃ． 光プローブ、光プローブの製造方法、およびレンズ構造体の製造方法
DE202010013458U1 (de) 2010-09-23 2010-12-30 Eberhard-Karls-Universität Tübingen Sonde für aperturlose Nahfeldmikroskopie und/oder für Ramanspektroskopie
TWI427250B (zh) 2011-07-12 2014-02-21 國立屏東科技大學 浮力式太陽集熱動力裝置
JP6341634B2 (ja) * 2013-05-28 2018-06-13 新光電気工業株式会社 プローブガイド板及びその製造方法、半導体検査装置
US9696498B2 (en) * 2015-05-04 2017-07-04 Huawei Technologies Co., Ltd. Three-dimensional (3D) photonic chip-to-fiber interposer
JP6706076B2 (ja) * 2016-01-14 2020-06-03 新光電気工業株式会社 プローブガイド板及びその製造方法とプローブ装置
KR20230175045A (ko) 2022-06-22 2023-12-29 삼성전자주식회사 캔틸레버

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0534129A (ja) * 1991-07-31 1993-02-09 Satoshi Kawada 光学プローブ
JP3268797B2 (ja) 1991-10-09 2002-03-25 オリンパス光学工業株式会社 光導入装置
JP3213436B2 (ja) * 1993-05-24 2001-10-02 シャープ株式会社 光プローブ素子、光プローブ素子を用いた記録再生装置、および光プローブ素子の製造方法
US5354985A (en) * 1993-06-03 1994-10-11 Stanford University Near field scanning optical and force microscope including cantilever and optical waveguide
JPH10506457A (ja) * 1994-07-28 1998-06-23 ジェネラル ナノテクノロジー エルエルシー 走査型プローブ顕微鏡装置
JPH0954101A (ja) * 1995-08-14 1997-02-25 Nikon Corp 走査型近接場光学顕微鏡
JP3618896B2 (ja) * 1996-03-29 2005-02-09 キヤノン株式会社 微小開口を有するプローブの作製法とそれによるプローブ、並びに該プローブを用いた走査型近接場光顕微鏡と走査型トンネル顕微鏡との複合装置、および該プローブを用いた記録再生装置
JP3327112B2 (ja) * 1996-04-19 2002-09-24 松下電器産業株式会社 異方性黒鉛薄膜基板及びそれを利用した応用装置
JPH1186364A (ja) * 1997-09-11 1999-03-30 Canon Inc 微小開口の形成方法、微小開口を含んでなるメンブレンと該メンブレンによるプローブ、及び該プローブによる表面観察装置、露光装置、情報処理装置
JPH11166935A (ja) * 1997-09-25 1999-06-22 Canon Inc 光検出または照射用の光プローブと該プローブを備えた近視野光学顕微鏡、及該光プローブの製造方法とその製造に用いる基板
JP3862845B2 (ja) * 1998-02-05 2006-12-27 セイコーインスツル株式会社 近接場用光プローブ

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