DE102006002461B8 - Spiegeloptik für nahfeldoptische Messungen - Google Patents

Spiegeloptik für nahfeldoptische Messungen Download PDF

Info

Publication number
DE102006002461B8
DE102006002461B8 DE102006002461A DE102006002461A DE102006002461B8 DE 102006002461 B8 DE102006002461 B8 DE 102006002461B8 DE 102006002461 A DE102006002461 A DE 102006002461A DE 102006002461 A DE102006002461 A DE 102006002461A DE 102006002461 B8 DE102006002461 B8 DE 102006002461B8
Authority
DE
Germany
Prior art keywords
near field
field optical
optical measurements
mirror optics
optics
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
DE102006002461A
Other languages
English (en)
Other versions
DE102006002461A1 (de
DE102006002461B4 (de
Inventor
Fritz Dr. Keilmann
Rainer Dr. Hillenbrand
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Max Planck Gesellschaft zur Foerderung der Wissenschaften eV
Original Assignee
Max Planck Gesellschaft zur Foerderung der Wissenschaften eV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Max Planck Gesellschaft zur Foerderung der Wissenschaften eV filed Critical Max Planck Gesellschaft zur Foerderung der Wissenschaften eV
Priority to DE102006002461A priority Critical patent/DE102006002461B8/de
Priority to US11/653,601 priority patent/US7591858B2/en
Publication of DE102006002461A1 publication Critical patent/DE102006002461A1/de
Application granted granted Critical
Publication of DE102006002461B4 publication Critical patent/DE102006002461B4/de
Publication of DE102006002461B8 publication Critical patent/DE102006002461B8/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/18—SNOM [Scanning Near-Field Optical Microscopy] or apparatus therefor, e.g. SNOM probes
    • G01Q60/22—Probes, their manufacture, or their related instrumentation, e.g. holders
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/84—Manufacture, treatment, or detection of nanostructure
    • Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
    • Y10S977/86—Scanning probe structure
    • Y10S977/862—Near-field probe
DE102006002461A 2006-01-18 2006-01-18 Spiegeloptik für nahfeldoptische Messungen Active DE102006002461B8 (de)

Priority Applications (2)

Application Number Priority Date Filing Date Title
DE102006002461A DE102006002461B8 (de) 2006-01-18 2006-01-18 Spiegeloptik für nahfeldoptische Messungen
US11/653,601 US7591858B2 (en) 2006-01-18 2007-01-16 Mirror optic for near-field optical measurements

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102006002461A DE102006002461B8 (de) 2006-01-18 2006-01-18 Spiegeloptik für nahfeldoptische Messungen

Publications (3)

Publication Number Publication Date
DE102006002461A1 DE102006002461A1 (de) 2007-07-19
DE102006002461B4 DE102006002461B4 (de) 2008-04-10
DE102006002461B8 true DE102006002461B8 (de) 2008-07-24

Family

ID=38190127

Family Applications (1)

Application Number Title Priority Date Filing Date
DE102006002461A Active DE102006002461B8 (de) 2006-01-18 2006-01-18 Spiegeloptik für nahfeldoptische Messungen

Country Status (2)

Country Link
US (1) US7591858B2 (de)
DE (1) DE102006002461B8 (de)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102008057097A1 (de) * 2008-11-13 2010-05-27 Carl Zeiss Ag Objektivanordnung und Justageverfahren
US8832861B2 (en) 2009-03-23 2014-09-09 Neaspec Gmbh Near field optical microscope
EP2360481B1 (de) * 2010-02-23 2018-09-12 Neaspec GmbH Optisches Nahfeldmikroskop mit optischem Bildgebungssystem
KR20140009366A (ko) 2011-02-23 2014-01-22 알에이치케이 테크놀로지 인코포레이티드 통합형 현미경 및 이와 관련된 방법과 장치
FR3010194B1 (fr) * 2013-08-28 2017-10-27 Imagine Optic Systeme et methode de microscopie par eclairage par la tranche
EP3067701A1 (de) 2015-03-13 2016-09-14 Asociación-centro De Investigación Cooperativa En Nanociencias - CIC Nanogune Optisches Nahfeldmikroskop zur Erfassung von Spektren

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE599970C (de) * 1932-02-26 1934-07-12 Zeiss Carl Fa Vorrichtung zur Beleuchtung mikroskopischer Objekte mit auffallendem Lichte
DE10301633A1 (de) * 2003-01-17 2004-07-29 Daimlerchrysler Ag Katadioptrische Kamera
US20050117227A1 (en) * 2001-09-18 2005-06-02 Ehud Gal Panoramic imaging system with optical zoom capability
WO2005078502A1 (en) * 2004-02-06 2005-08-25 Interscience, Inc. Integrated panoramic and forward optical device, system and method for omnidirectional signal processing

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0225737A (ja) * 1988-07-15 1990-01-29 Hitachi Ltd 表面分析方法および装置
DE9414582U1 (de) * 1994-09-09 1994-11-10 Fischer Ulrich Dr Mikroskopischer Sender oder Detektor elektromagnetischer Strahlung
JP3862845B2 (ja) * 1998-02-05 2006-12-27 セイコーインスツル株式会社 近接場用光プローブ
US6833904B1 (en) * 1998-02-27 2004-12-21 Nikon Corporation Exposure apparatus and method of fabricating a micro-device using the exposure apparatus
TW531662B (en) * 2002-09-27 2003-05-11 Delta Electronics Inc Structure for reflection of light
JP2004264039A (ja) * 2003-01-30 2004-09-24 Hitachi Ltd 走査プローブ顕微鏡及びｃｄ・断面プロファイル計測方法並びに半導体デバイス製造方法
US7217913B2 (en) * 2003-12-18 2007-05-15 Micron Technology, Inc. Method and system for wavelength-dependent imaging and detection using a hybrid filter
JP4546326B2 (ja) * 2004-07-30 2010-09-15 キヤノン株式会社 センシング装置
JP2006107584A (ja) * 2004-10-01 2006-04-20 Konica Minolta Opto Inc 光学素子及び光スポット位置調整方法
JP4423168B2 (ja) * 2004-11-02 2010-03-03 株式会社ミツトヨ 表面性状測定装置

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE599970C (de) * 1932-02-26 1934-07-12 Zeiss Carl Fa Vorrichtung zur Beleuchtung mikroskopischer Objekte mit auffallendem Lichte
US20050117227A1 (en) * 2001-09-18 2005-06-02 Ehud Gal Panoramic imaging system with optical zoom capability
DE10301633A1 (de) * 2003-01-17 2004-07-29 Daimlerchrysler Ag Katadioptrische Kamera
WO2005078502A1 (en) * 2004-02-06 2005-08-25 Interscience, Inc. Integrated panoramic and forward optical device, system and method for omnidirectional signal processing

Also Published As

Publication number Publication date
DE102006002461A1 (de) 2007-07-19
US20070183060A1 (en) 2007-08-09
DE102006002461B4 (de) 2008-04-10
US7591858B2 (en) 2009-09-22

Similar Documents

Publication Publication Date Title
ATE489655T1 (de) Laser scanner-gerät für fluoreszenzmessungen
BRPI0920747A2 (pt) imageamento optico com base em focalizacao viscoelastica
FR2929717B1 (fr) Boitier optique
DE602007005710D1 (de) Optische Vorrichtung
DE602006018101D1 (de) Vorrichtung für optische Übertragung
FR2925181B1 (fr) Lentille optique electrochrome
FR2891370B1 (fr) Article optique
DE502005010766D1 (de) Optisches Instrument
DE602007001937D1 (de) Optischer Tomograph
DE602006001461D1 (de) Optischer parametrischer Verstärker
DE602007011125D1 (de) Optische Demultiplex-Vorrichtung
DK2348587T3 (da) Ytterbium-doteret optisk fiber
BRPI0922144A2 (pt) método para fabricar fibra óptica multímodo
DE602007002585D1 (de) Herstellungsverfahren für eine optische Wellenleitervorrichtung
DE102006002461B8 (de) Spiegeloptik für nahfeldoptische Messungen
FR2885703B1 (fr) Element optique unitaire
DE602008002853D1 (de) Optische Lesekopfvorrichtung
DE112009002521A5 (de) Optische Sensoranordnung
NL1035300A1 (nl) Optische interferometer.
DE602007008512D1 (de) Objektlinse für eine optische Aufnahmevorrichtung
FI20095063A0 (fi) Optinen mittauslaite
FR2937129B1 (fr) Codeur optique
DE602006003616D1 (de) Optisches System
DE602007000517D1 (de) Optisches Messgerät
DE602007010704D1 (de) Optische Lesekopfvorrichtung

Legal Events

Date Code Title Description
OP8 Request for examination as to paragraph 44 patent law
8396 Reprint of erroneous front page
8364 No opposition during term of opposition