DE602007000517D1 - Optisches Messgerät - Google Patents

Optisches Messgerät

Info

Publication number
DE602007000517D1
DE602007000517D1 DE602007000517T DE602007000517T DE602007000517D1 DE 602007000517 D1 DE602007000517 D1 DE 602007000517D1 DE 602007000517 T DE602007000517 T DE 602007000517T DE 602007000517 T DE602007000517 T DE 602007000517T DE 602007000517 D1 DE602007000517 D1 DE 602007000517D1
Authority
DE
Germany
Prior art keywords
measuring device
optical measuring
optical
measuring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
DE602007000517T
Other languages
English (en)
Inventor
Kenji Ochi
Naoya Kikuchi
Shinji Takahashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitutoyo Corp
Original Assignee
Mitutoyo Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitutoyo Corp filed Critical Mitutoyo Corp
Publication of DE602007000517D1 publication Critical patent/DE602007000517D1/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/002—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
    • G01B21/02—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness
    • G01B21/04—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness by measuring coordinates of points
    • G01B21/045—Correction of measurements
DE602007000517T 2006-07-27 2007-07-26 Optisches Messgerät Active DE602007000517D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006205243A JP4778855B2 (ja) 2006-07-27 2006-07-27 光学式測定装置

Publications (1)

Publication Number Publication Date
DE602007000517D1 true DE602007000517D1 (de) 2009-03-19

Family

ID=38370432

Family Applications (1)

Application Number Title Priority Date Filing Date
DE602007000517T Active DE602007000517D1 (de) 2006-07-27 2007-07-26 Optisches Messgerät

Country Status (5)

Country Link
US (1) US7646492B2 (de)
EP (1) EP1882894B1 (de)
JP (1) JP4778855B2 (de)
CN (1) CN101113891B (de)
DE (1) DE602007000517D1 (de)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7777962B2 (en) * 2008-05-30 2010-08-17 The Invention Science Fund I, Llc Negatively-refractive focusing and sensing apparatus, methods, and systems
KR101158323B1 (ko) * 2010-10-14 2012-06-26 주식회사 고영테크놀러지 기판 검사방법
EP3488179A4 (de) * 2016-07-20 2020-08-12 Arun Kumar Digitaler schneller mehrzweck-profilprojektor
CN107084697B (zh) * 2017-04-20 2019-06-28 武汉新芯集成电路制造有限公司 存储单元扭曲测量方法

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0335106A (ja) 1989-06-30 1991-02-15 Y S Denshi Kogyo Kk 光学式測定装置
US5590060A (en) 1992-03-20 1996-12-31 Metronics, Inc. Apparatus and method for an object measurement system
JP2678127B2 (ja) 1992-07-15 1997-11-17 株式会社ミツトヨ 光学式測定装置
JP3035106B2 (ja) * 1993-03-11 2000-04-17 株式会社東芝 大規模情報認識回路
JP4652717B2 (ja) * 2004-04-26 2011-03-16 株式会社ミツトヨ 画像処理装置及び方法並びにプログラム

Also Published As

Publication number Publication date
JP2008032496A (ja) 2008-02-14
CN101113891A (zh) 2008-01-30
JP4778855B2 (ja) 2011-09-21
US7646492B2 (en) 2010-01-12
EP1882894B1 (de) 2009-02-04
CN101113891B (zh) 2011-06-29
EP1882894A1 (de) 2008-01-30
US20080024791A1 (en) 2008-01-31

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition