JP3621928B2 - カーボンナノ微粒子の製造方法，カーボンナノ微粒子の製造装置 - Google Patents

カーボンナノ微粒子の製造方法，カーボンナノ微粒子の製造装置 Download PDF

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Publication number
JP3621928B2
JP3621928B2 JP2002103825A JP2002103825A JP3621928B2 JP 3621928 B2 JP3621928 B2 JP 3621928B2 JP 2002103825 A JP2002103825 A JP 2002103825A JP 2002103825 A JP2002103825 A JP 2002103825A JP 3621928 B2 JP3621928 B2 JP 3621928B2
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Japan
Prior art keywords
electrode
carbon
arc
gas
arc discharge
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Expired - Fee Related
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JP2002103825A
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Japanese (ja)
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JP2003300713A (ja
JP2003300713A5 (enExample
Inventor
浩史 滝川
光邦 池田
茂生 伊藤
智徳 田原
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Tokai Carbon Co Ltd
Futaba Corp
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Tokai Carbon Co Ltd
Futaba Corp
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Priority to JP2002103825A priority Critical patent/JP3621928B2/ja
Priority to TW092107357A priority patent/TWI271381B/zh
Priority to KR1020030021329A priority patent/KR100840500B1/ko
Priority to US10/407,666 priority patent/US6989083B2/en
Priority to CNB031429092A priority patent/CN100503430C/zh
Publication of JP2003300713A publication Critical patent/JP2003300713A/ja
Publication of JP2003300713A5 publication Critical patent/JP2003300713A5/ja
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82B—NANOSTRUCTURES FORMED BY MANIPULATION OF INDIVIDUAL ATOMS, MOLECULES, OR LIMITED COLLECTIONS OF ATOMS OR MOLECULES AS DISCRETE UNITS; MANUFACTURE OR TREATMENT THEREOF
    • B82B3/00—Manufacture or treatment of nanostructures by manipulation of individual atoms or molecules, or limited collections of atoms or molecules as discrete units
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J19/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
    • B01J19/087—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy
    • B01J19/088—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy giving rise to electric discharges
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y30/00—Nanotechnology for materials or surface science, e.g. nanocomposites
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y40/00—Manufacture or treatment of nanostructures
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B32/00—Carbon; Compounds thereof
    • C01B32/05—Preparation or purification of carbon not covered by groups C01B32/15, C01B32/20, C01B32/25, C01B32/30
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B32/00—Carbon; Compounds thereof
    • C01B32/15—Nano-sized carbon materials
    • C01B32/158—Carbon nanotubes
    • C01B32/16—Preparation
    • C01B32/162—Preparation characterised by catalysts
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/00049—Controlling or regulating processes
    • B01J2219/00051—Controlling the temperature
    • B01J2219/0015—Controlling the temperature by thermal insulation means
    • B01J2219/00155—Controlling the temperature by thermal insulation means using insulating materials or refractories
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
    • B01J2219/0803—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy
    • B01J2219/0805—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy giving rise to electric discharges
    • B01J2219/0807—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy giving rise to electric discharges involving electrodes
    • B01J2219/0809—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy giving rise to electric discharges involving electrodes employing two or more electrodes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
    • B01J2219/0803—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy
    • B01J2219/0805—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy giving rise to electric discharges
    • B01J2219/0807—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy giving rise to electric discharges involving electrodes
    • B01J2219/0822—The electrode being consumed
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
    • B01J2219/0803—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy
    • B01J2219/0805—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy giving rise to electric discharges
    • B01J2219/0807—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy giving rise to electric discharges involving electrodes
    • B01J2219/0824—Details relating to the shape of the electrodes
    • B01J2219/0835—Details relating to the shape of the electrodes substantially flat
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
    • B01J2219/0803—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy
    • B01J2219/0805—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy giving rise to electric discharges
    • B01J2219/0807—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy giving rise to electric discharges involving electrodes
    • B01J2219/0837—Details relating to the material of the electrodes
    • B01J2219/0839—Carbon
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
    • B01J2219/0871—Heating or cooling of the reactor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
    • B01J2219/0873—Materials to be treated
    • B01J2219/0881—Two or more materials
    • B01J2219/0886—Gas-solid
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
    • B01J2219/0873—Materials to be treated
    • B01J2219/0892—Materials to be treated involving catalytically active material
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B2202/00—Structure or properties of carbon nanotubes
    • C01B2202/20—Nanotubes characterized by their properties
    • C01B2202/34—Length
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B2202/00—Structure or properties of carbon nanotubes
    • C01B2202/20—Nanotubes characterized by their properties
    • C01B2202/36—Diameter

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Nanotechnology (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Inorganic Chemistry (AREA)
  • Composite Materials (AREA)
  • Toxicology (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Carbon And Carbon Compounds (AREA)
JP2002103825A 2002-04-05 2002-04-05 カーボンナノ微粒子の製造方法，カーボンナノ微粒子の製造装置 Expired - Fee Related JP3621928B2 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2002103825A JP3621928B2 (ja) 2002-04-05 2002-04-05 カーボンナノ微粒子の製造方法，カーボンナノ微粒子の製造装置
TW092107357A TWI271381B (en) 2002-04-05 2003-04-01 Method for preparing carbon nano-fine particle, apparatus for preparing the same, and mono layer carbon nanotube
KR1020030021329A KR100840500B1 (ko) 2002-04-05 2003-04-04 카본나노 미립자의 제조방법, 카본나노 미립자의 제조장치및 단층 카본나노튜브
US10/407,666 US6989083B2 (en) 2002-04-05 2003-04-04 Method for preparing carbon nano-fine particle, apparatus for preparing the same and mono-layer carbon nanotube
CNB031429092A CN100503430C (zh) 2002-04-05 2003-04-05 制备碳纳米细颗粒的方法和装置及单层碳纳米管

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2002103825A JP3621928B2 (ja) 2002-04-05 2002-04-05 カーボンナノ微粒子の製造方法，カーボンナノ微粒子の製造装置

Publications (3)

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JP2003300713A JP2003300713A (ja) 2003-10-21
JP2003300713A5 JP2003300713A5 (enExample) 2004-09-02
JP3621928B2 true JP3621928B2 (ja) 2005-02-23

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JP2002103825A Expired - Fee Related JP3621928B2 (ja) 2002-04-05 2002-04-05 カーボンナノ微粒子の製造方法，カーボンナノ微粒子の製造装置

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US (1) US6989083B2 (enExample)
JP (1) JP3621928B2 (enExample)
KR (1) KR100840500B1 (enExample)
CN (1) CN100503430C (enExample)
TW (1) TWI271381B (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103101902A (zh) * 2013-01-28 2013-05-15 深圳青铜剑电力电子科技有限公司 一种纳米材料的制备设备

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JP3826108B2 (ja) * 2002-04-24 2006-09-27 キヤノン株式会社 成膜装置及び成膜方法
TWI251580B (en) * 2002-08-02 2006-03-21 Ind Tech Res Inst Preparation of magnetic metal filled carbon nanocapsules
JPWO2004069743A1 (ja) * 2003-02-10 2006-05-25 日本電気株式会社 ナノカーボンの製造装置およびナノカーボンの製造方法
JPWO2004103902A1 (ja) * 2003-05-20 2006-07-20 日本電気株式会社 カーボンナノホーン製造装置およびカーボンナノホーンの製造方法
WO2005061382A1 (en) * 2003-12-24 2005-07-07 Nanometrix Inc. Continuous production of carbon nanotubes
JP4012516B2 (ja) * 2004-03-30 2007-11-21 浩史 滝川 カーボンナノバルーン構造体の製造方法
FR2872826B1 (fr) * 2004-07-07 2006-09-15 Commissariat Energie Atomique Croissance a basse temperature de nanotubes de carbone orientes
KR100707199B1 (ko) * 2005-07-12 2007-04-13 삼성전자주식회사 Ｈ２ｏ 플라즈마를 이용한 단일벽 탄소나노튜브의 저온성장방법
CN100482582C (zh) * 2005-08-05 2009-04-29 鸿富锦精密工业（深圳）有限公司 碳纳米管制备方法及装置
JP5330035B2 (ja) * 2008-03-21 2013-10-30 国立大学法人東北大学 カーボンナノチューブおよびその製造方法
US8211100B2 (en) * 2009-01-12 2012-07-03 Tyco Healthcare Group Lp Energy delivery algorithm for medical devices based on maintaining a fixed position on a tissue electrical conductivity v. temperature curve
KR20140038411A (ko) * 2011-04-15 2014-03-28 가부시키가이샤 간쿄우 에네루기 나노 기쥬츠 겡큐쇼 카본 나노 재료 제조 장치 및 그 이용
RU2476620C1 (ru) * 2011-09-12 2013-02-27 Федеральное государственное унитарное предприятие "Научно-исследовательский институт физических проблем им. Ф.В. Лукина" Устройство и способ получения наночастиц
JP6414404B2 (ja) * 2014-07-18 2018-10-31 日新電機株式会社 陰極部材及びこれを用いたプラズマ装置
CN104609390A (zh) * 2015-01-20 2015-05-13 北京清大际光科技发展有限公司 一种电弧法制备碳纳米角的方法
US10813257B2 (en) * 2016-09-05 2020-10-20 Nec Corporation Electromagnetic wave absorbing material
CN108383105A (zh) * 2018-04-28 2018-08-10 青岛科技大学 一种滚筒式电弧法分散碳纳米管的装置
JP2020191164A (ja) * 2019-05-20 2020-11-26 東芝ライテック株式会社 ヒータ
CN112744805B (zh) * 2021-01-21 2022-07-26 宁波埃氪新材料科技有限公司 一种电极喷射装置、碳纳米管反应器及碳纳米管制备方法
KR102768387B1 (ko) * 2021-12-07 2025-02-19 한국생산기술연구원 연속식 송연 탄소입자 제조장치, 및 그 제조방법

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4234812B2 (ja) 1998-07-25 2009-03-04 独立行政法人科学技術振興機構 単層カーボンナノホーン構造体とその製造方法
JP3606232B2 (ja) * 2001-06-01 2005-01-05 富士ゼロックス株式会社 炭素構造体の製造装置および製造方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103101902A (zh) * 2013-01-28 2013-05-15 深圳青铜剑电力电子科技有限公司 一种纳米材料的制备设备

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Publication number Publication date
US6989083B2 (en) 2006-01-24
TW200400919A (en) 2004-01-16
KR20030079801A (ko) 2003-10-10
KR100840500B1 (ko) 2008-06-23
JP2003300713A (ja) 2003-10-21
TWI271381B (en) 2007-01-21
CN100503430C (zh) 2009-06-24
US20030188963A1 (en) 2003-10-09
CN1456497A (zh) 2003-11-19

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