JP3581421B2 - 情報処理装置 - Google Patents

情報処理装置 Download PDF

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Publication number
JP3581421B2
JP3581421B2 JP05971695A JP5971695A JP3581421B2 JP 3581421 B2 JP3581421 B2 JP 3581421B2 JP 05971695 A JP05971695 A JP 05971695A JP 5971695 A JP5971695 A JP 5971695A JP 3581421 B2 JP3581421 B2 JP 3581421B2
Authority
JP
Japan
Prior art keywords
probe
scanning
recording
information processing
recording medium
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP05971695A
Other languages
English (en)
Japanese (ja)
Other versions
JPH08235651A (ja
Inventor
邦裕 酒井
高弘 小口
明彦 山野
俊一 紫藤
勝則 畑中
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP05971695A priority Critical patent/JP3581421B2/ja
Priority to DE69613607T priority patent/DE69613607T2/de
Priority to EP96102606A priority patent/EP0729006B1/en
Priority to US08/603,890 priority patent/US5831961A/en
Publication of JPH08235651A publication Critical patent/JPH08235651A/ja
Application granted granted Critical
Publication of JP3581421B2 publication Critical patent/JP3581421B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B9/00—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor
    • G11B9/12—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor using near-field interactions; Record carriers therefor
    • G11B9/14—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor using near-field interactions; Record carriers therefor using microscopic probe means, i.e. recording or reproducing by means directly associated with the tip of a microscopic electrical probe as used in Scanning Tunneling Microscopy [STM] or Atomic Force Microscopy [AFM] for inducing physical or electrical perturbations in a recording medium; Record carriers or media specially adapted for such transducing of information
    • G11B9/1418—Disposition or mounting of heads or record carriers
    • G11B9/1427—Disposition or mounting of heads or record carriers with provision for moving the heads or record carriers relatively to each other or for access to indexed parts without effectively imparting a relative movement
    • G11B9/1436—Disposition or mounting of heads or record carriers with provision for moving the heads or record carriers relatively to each other or for access to indexed parts without effectively imparting a relative movement with provision for moving the heads or record carriers relatively to each other
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q80/00—Applications, other than SPM, of scanning-probe techniques
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B21/00—Head arrangements not specific to the method of recording or reproducing
    • G11B21/02—Driving or moving of heads
    • G11B21/04—Automatic feed mechanism producing a progressive transducing traverse of the head in a direction which cuts across the direction of travel of the recording medium, e.g. helical scan, e.g. by lead-screw
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/84—Manufacture, treatment, or detection of nanostructure
    • Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/84—Manufacture, treatment, or detection of nanostructure
    • Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
    • Y10S977/85—Scanning probe control process
    • Y10S977/851—Particular movement or positioning of scanning tip
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/84—Manufacture, treatment, or detection of nanostructure
    • Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
    • Y10S977/86—Scanning probe structure
    • Y10S977/868—Scanning probe structure with optical means
    • Y10S977/869—Optical microscope
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/84—Manufacture, treatment, or detection of nanostructure
    • Y10S977/88—Manufacture, treatment, or detection of nanostructure with arrangement, process, or apparatus for testing
    • Y10S977/881—Microscopy or spectroscopy, e.g. sem, tem
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/902—Specified use of nanostructure
    • Y10S977/932—Specified use of nanostructure for electronic or optoelectronic application
    • Y10S977/943—Information storage or retrieval using nanostructure
    • Y10S977/947—Information storage or retrieval using nanostructure with scanning probe instrument

Landscapes

  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Measuring Leads Or Probes (AREA)
JP05971695A 1995-02-23 1995-02-23 情報処理装置 Expired - Fee Related JP3581421B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP05971695A JP3581421B2 (ja) 1995-02-23 1995-02-23 情報処理装置
DE69613607T DE69613607T2 (de) 1995-02-23 1996-02-21 Informationsverarbeitungs-Apparat mit einer einer Kreisbewegung ausgesetzten Sonde
EP96102606A EP0729006B1 (en) 1995-02-23 1996-02-21 Information processing apparatus with probe undergoing circular motion
US08/603,890 US5831961A (en) 1995-02-23 1996-02-22 Information processing apparatus with probe undergoing circular motion

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP05971695A JP3581421B2 (ja) 1995-02-23 1995-02-23 情報処理装置

Publications (2)

Publication Number Publication Date
JPH08235651A JPH08235651A (ja) 1996-09-13
JP3581421B2 true JP3581421B2 (ja) 2004-10-27

Family

ID=13121214

Family Applications (1)

Application Number Title Priority Date Filing Date
JP05971695A Expired - Fee Related JP3581421B2 (ja) 1995-02-23 1995-02-23 情報処理装置

Country Status (4)

Country Link
US (1) US5831961A (enExample)
EP (1) EP0729006B1 (enExample)
JP (1) JP3581421B2 (enExample)
DE (1) DE69613607T2 (enExample)

Families Citing this family (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5744799A (en) * 1996-05-20 1998-04-28 Ohara; Tetsuo Apparatus for and method of real-time nanometer-scale position measurement of the sensor of a scanning tunneling microscope or other sensor scanning atomic or other undulating surfaces
JP3202646B2 (ja) * 1997-04-09 2001-08-27 セイコーインスツルメンツ株式会社 走査型プローブ顕微鏡
TW369603B (en) * 1997-04-10 1999-09-11 Sii Nanotechnology Inc Apparatus for machining, recording, and reproducing, using scanning probe microscope
JP3978818B2 (ja) * 1997-08-08 2007-09-19 ソニー株式会社 微小ヘッド素子の製造方法
US6459088B1 (en) 1998-01-16 2002-10-01 Canon Kabushiki Kaisha Drive stage and scanning probe microscope and information recording/reproducing apparatus using the same
US7304486B2 (en) * 1998-07-08 2007-12-04 Capres A/S Nano-drive for high resolution positioning and for positioning of a multi-point probe
EP1237161B1 (en) 2001-02-28 2014-05-14 Imec Method and apparatus for performing atomic force microscopy measurements
JP2002310882A (ja) * 2001-04-17 2002-10-23 Canon Inc 走査型プローブによる信号検出装置、該装置によるプローブ顕微鏡、及び走査型プローブによる信号検出方法、該方法を用いてサンプル表面を観察する観察方法
WO2004006302A2 (en) * 2002-07-08 2004-01-15 Multiprobe, Inc. Software synchronization of multiple scanning probes
US7315505B2 (en) * 2003-07-14 2008-01-01 Hewlett-Packard Development Company, L.P. Storage device having a probe with plural tips
KR100603244B1 (ko) * 2004-07-29 2006-07-20 전자부품연구원 탐침형 정보저장장치
KR100706310B1 (ko) * 2004-10-04 2007-04-13 엘지전자 주식회사 Ｐｚｔ를 이용한 주사탐침 현미경 내의 캔틸레버와 그제조방법 및 상기 캔틸레버를 이용한 탐침형 정보 저장 장치
JP4140598B2 (ja) * 2004-11-01 2008-08-27 株式会社日立製作所 記録再生装置
JP4448099B2 (ja) * 2006-02-01 2010-04-07 キヤノン株式会社 走査型プローブ装置
JP4498285B2 (ja) * 2006-02-01 2010-07-07 キヤノン株式会社 走査型プローブ装置
US8302456B2 (en) 2006-02-23 2012-11-06 Asylum Research Corporation Active damping of high speed scanning probe microscope components
US7486403B2 (en) * 2006-07-20 2009-02-03 Canon Kabushiki Kaisha Droplet shape measuring method and apparatus
JP4542620B2 (ja) 2007-03-30 2010-09-15 パイオニア株式会社 駆動装置
US8330329B2 (en) 2007-03-30 2012-12-11 Pioneer Corporation Scanning probe driver
JP4542619B2 (ja) 2007-03-30 2010-09-15 パイオニア株式会社 駆動装置
US9383388B2 (en) 2014-04-21 2016-07-05 Oxford Instruments Asylum Research, Inc Automated atomic force microscope and the operation thereof
WO2016166816A1 (ja) * 2015-04-14 2016-10-20 株式会社島津製作所 走査型プローブ顕微鏡
KR101607606B1 (ko) * 2015-08-17 2016-03-31 한국표준과학연구원 원자간력 현미경의 측정 방법

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5547570A (en) * 1978-10-02 1980-04-04 Nippon Electric Ind Co Ltd Optical reading device
JPS6047958A (ja) * 1983-08-26 1985-03-15 Tokyo Keiki Co Ltd 水浸超音波探傷装置
EP0247219B1 (en) * 1986-05-27 1991-05-15 International Business Machines Corporation Direct access storage unit
JP2556491B2 (ja) * 1986-12-24 1996-11-20 キヤノン株式会社 記録装置及び記録法
JPS63262553A (ja) * 1987-04-20 1988-10-28 Fuji Photo Film Co Ltd 電気泳動器具
JP2580183B2 (ja) * 1987-06-29 1997-02-12 株式会社 マックサイエンス 放射線画像読取装置
JP2686645B2 (ja) * 1989-05-08 1997-12-08 キヤノン株式会社 走査型トンネル電流検出装置
JP2909829B2 (ja) * 1989-07-05 1999-06-23 セイコーインスツルメンツ株式会社 位置合わせ機能付複合走査型トンネル顕微鏡
EP0475365B1 (en) * 1990-09-14 1997-04-09 Canon Kabushiki Kaisha Tracking method for memory apparatus
JPH0575047A (ja) * 1991-03-08 1993-03-26 Hitachi Ltd 記憶装置
JP2930447B2 (ja) * 1991-05-15 1999-08-03 キヤノン株式会社 情報処理装置
JP3198355B2 (ja) * 1991-05-28 2001-08-13 キヤノン株式会社 微小変位素子及びこれを用いた走査型トンネル顕微鏡、情報処理装置
CA2076925C (en) * 1991-08-29 1999-08-31 Kunihiro Sakai Information processing apparatus and scanning tunnel microscope
US5150392A (en) * 1991-09-09 1992-09-22 International Business Machines Corporation X-ray mask containing a cantilevered tip for gap control and alignment
JP2994505B2 (ja) * 1991-10-04 1999-12-27 キヤノン株式会社 情報再生装置
EP0537642B1 (en) * 1991-10-15 1999-01-07 Canon Kabushiki Kaisha Information processing apparatus with tracking mechanism
JP2889536B2 (ja) * 1996-06-24 1999-05-10 株式会社タチエス シート・ベルトの取付け構造

Also Published As

Publication number Publication date
DE69613607D1 (de) 2001-08-09
US5831961A (en) 1998-11-03
EP0729006A3 (enExample) 1996-09-04
EP0729006B1 (en) 2001-07-04
DE69613607T2 (de) 2002-05-29
JPH08235651A (ja) 1996-09-13
EP0729006A2 (en) 1996-08-28

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