TW369603B - Apparatus for machining, recording, and reproducing, using scanning probe microscope - Google Patents
Apparatus for machining, recording, and reproducing, using scanning probe microscopeInfo
- Publication number
- TW369603B TW369603B TW087105151A TW87105151A TW369603B TW 369603 B TW369603 B TW 369603B TW 087105151 A TW087105151 A TW 087105151A TW 87105151 A TW87105151 A TW 87105151A TW 369603 B TW369603 B TW 369603B
- Authority
- TW
- Taiwan
- Prior art keywords
- probe
- machining
- recording
- scanning
- sample
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
- G01Q60/10—STM [Scanning Tunnelling Microscopy] or apparatus therefor, e.g. STM probes
- G01Q60/16—Probes, their manufacture, or their related instrumentation, e.g. holders
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q10/00—Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
- G01Q10/04—Fine scanning or positioning
- G01Q10/045—Self-actuating probes, i.e. wherein the actuating means for driving are part of the probe itself, e.g. piezoelectric means on a cantilever probe
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q30/00—Auxiliary means serving to assist or improve the scanning probe techniques or apparatus, e.g. display or data processing devices
- G01Q30/08—Means for establishing or regulating a desired environmental condition within a sample chamber
- G01Q30/16—Vacuum environment
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B9/00—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor
- G11B9/12—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor using near-field interactions; Record carriers therefor
- G11B9/14—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor using near-field interactions; Record carriers therefor using microscopic probe means, i.e. recording or reproducing by means directly associated with the tip of a microscopic electrical probe as used in Scanning Tunneling Microscopy [STM] or Atomic Force Microscopy [AFM] for inducing physical or electrical perturbations in a recording medium; Record carriers or media specially adapted for such transducing of information
- G11B9/1463—Record carriers for recording or reproduction involving the use of microscopic probe means
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S977/00—Nanotechnology
- Y10S977/84—Manufacture, treatment, or detection of nanostructure
- Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
- Y10S977/86—Scanning probe structure
- Y10S977/861—Scanning tunneling probe
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S977/00—Nanotechnology
- Y10S977/84—Manufacture, treatment, or detection of nanostructure
- Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
- Y10S977/86—Scanning probe structure
- Y10S977/865—Magnetic force probe
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S977/00—Nanotechnology
- Y10S977/84—Manufacture, treatment, or detection of nanostructure
- Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
- Y10S977/86—Scanning probe structure
- Y10S977/868—Scanning probe structure with optical means
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S977/00—Nanotechnology
- Y10S977/84—Manufacture, treatment, or detection of nanostructure
- Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
- Y10S977/86—Scanning probe structure
- Y10S977/872—Positioner
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
- Radiology & Medical Imaging (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
Abstract
A machining, recording, and reproducing apparatus using a scanning probe microscope comprising: a probe 1 equipped with a probe tip at its front end, a vibration application portion consisting of a piezoelectric vibrating body 2 and an AC voltage-generating portion 3, a vibration-detecting portion consisting of a quartz oscillator 4 and a current/voltage amplifier circuit 5, a coarse displacement means 6 for bringing the probe close to a surface of a sample, a sample-to-probe distance control means consisting of a Z fine displacement element 11 and a Z servo circuit 12, a two-dimensional scanning means consisting of an XY fine displacement element 13 and an XY scanning circuit 14, and a data-processing means 15 for converting a measurement signal into a three-dimensional image. The probe 1 is held to the quartz oscillator 4 by spring pressure of a resilient body 16.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9092635A JPH10283972A (en) | 1997-04-10 | 1997-04-10 | Machining, recording, and reproducing device using scanning probe microscope |
Publications (1)
Publication Number | Publication Date |
---|---|
TW369603B true TW369603B (en) | 1999-09-11 |
Family
ID=57941417
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW087105151A TW369603B (en) | 1997-04-10 | 1998-04-04 | Apparatus for machining, recording, and reproducing, using scanning probe microscope |
Country Status (2)
Country | Link |
---|---|
KR (1) | KR100526217B1 (en) |
TW (1) | TW369603B (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI673498B (en) * | 2017-04-19 | 2019-10-01 | 東南科技大學 | Micromachining head structure |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101218177B1 (en) | 2010-04-05 | 2013-01-18 | (주)나노포커스 | atomic force microscope |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH05180616A (en) * | 1992-01-08 | 1993-07-23 | Canon Inc | Holding mechanism of probe |
JP3131517B2 (en) * | 1992-12-25 | 2001-02-05 | オリンパス光学工業株式会社 | Scanning probe microscope equipment |
JPH07167933A (en) * | 1993-12-15 | 1995-07-04 | Nikon Corp | Magnetic polarization microscope |
JP3581421B2 (en) * | 1995-02-23 | 2004-10-27 | キヤノン株式会社 | Information processing equipment |
JPH08248082A (en) * | 1995-03-08 | 1996-09-27 | Nippon Telegr & Teleph Corp <Ntt> | Potential distribution measuring method and scanning microscope |
JPH0982771A (en) * | 1995-09-19 | 1997-03-28 | Toshiba Corp | Method and apparatus for evaluating semiconductor material |
-
1998
- 1998-04-04 TW TW087105151A patent/TW369603B/en active
- 1998-04-09 KR KR1019980012644A patent/KR100526217B1/en not_active IP Right Cessation
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI673498B (en) * | 2017-04-19 | 2019-10-01 | 東南科技大學 | Micromachining head structure |
Also Published As
Publication number | Publication date |
---|---|
KR19980081248A (en) | 1998-11-25 |
KR100526217B1 (en) | 2006-01-12 |
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