DE69613607T2 - Informationsverarbeitungs-Apparat mit einer einer Kreisbewegung ausgesetzten Sonde - Google Patents

Informationsverarbeitungs-Apparat mit einer einer Kreisbewegung ausgesetzten Sonde

Info

Publication number
DE69613607T2
DE69613607T2 DE69613607T DE69613607T DE69613607T2 DE 69613607 T2 DE69613607 T2 DE 69613607T2 DE 69613607 T DE69613607 T DE 69613607T DE 69613607 T DE69613607 T DE 69613607T DE 69613607 T2 DE69613607 T2 DE 69613607T2
Authority
DE
Germany
Prior art keywords
processing apparatus
information processing
circular motion
motion probe
probe
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69613607T
Other languages
English (en)
Other versions
DE69613607D1 (de
Inventor
Kunihiro Sakai
Katsunori Hatanaka
Takahiro Oguchi
Akihiko Yamano
Shunichi Shido
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Publication of DE69613607D1 publication Critical patent/DE69613607D1/de
Application granted granted Critical
Publication of DE69613607T2 publication Critical patent/DE69613607T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B9/00—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor
    • G11B9/12—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor using near-field interactions; Record carriers therefor
    • G11B9/14—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor using near-field interactions; Record carriers therefor using microscopic probe means, i.e. recording or reproducing by means directly associated with the tip of a microscopic electrical probe as used in Scanning Tunneling Microscopy [STM] or Atomic Force Microscopy [AFM] for inducing physical or electrical perturbations in a recording medium; Record carriers or media specially adapted for such transducing of information
    • G11B9/1418—Disposition or mounting of heads or record carriers
    • G11B9/1427—Disposition or mounting of heads or record carriers with provision for moving the heads or record carriers relatively to each other or for access to indexed parts without effectively imparting a relative movement
    • G11B9/1436—Disposition or mounting of heads or record carriers with provision for moving the heads or record carriers relatively to each other or for access to indexed parts without effectively imparting a relative movement with provision for moving the heads or record carriers relatively to each other
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q80/00—Applications, other than SPM, of scanning-probe techniques
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B21/00—Head arrangements not specific to the method of recording or reproducing
    • G11B21/02—Driving or moving of heads
    • G11B21/04—Automatic feed mechanism producing a progressive transducing traverse of the head in a direction which cuts across the direction of travel of the recording medium, e.g. helical scan, e.g. by lead-screw
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/84—Manufacture, treatment, or detection of nanostructure
    • Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/84—Manufacture, treatment, or detection of nanostructure
    • Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
    • Y10S977/85—Scanning probe control process
    • Y10S977/851—Particular movement or positioning of scanning tip
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/84—Manufacture, treatment, or detection of nanostructure
    • Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
    • Y10S977/86—Scanning probe structure
    • Y10S977/868—Scanning probe structure with optical means
    • Y10S977/869—Optical microscope
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/84—Manufacture, treatment, or detection of nanostructure
    • Y10S977/88—Manufacture, treatment, or detection of nanostructure with arrangement, process, or apparatus for testing
    • Y10S977/881—Microscopy or spectroscopy, e.g. sem, tem
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/902—Specified use of nanostructure
    • Y10S977/932—Specified use of nanostructure for electronic or optoelectronic application
    • Y10S977/943—Information storage or retrieval using nanostructure
    • Y10S977/947—Information storage or retrieval using nanostructure with scanning probe instrument
DE69613607T 1995-02-23 1996-02-21 Informationsverarbeitungs-Apparat mit einer einer Kreisbewegung ausgesetzten Sonde Expired - Fee Related DE69613607T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP05971695A JP3581421B2 (ja) 1995-02-23 1995-02-23 情報処理装置

Publications (2)

Publication Number Publication Date
DE69613607D1 DE69613607D1 (de) 2001-08-09
DE69613607T2 true DE69613607T2 (de) 2002-05-29

Family

ID=13121214

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69613607T Expired - Fee Related DE69613607T2 (de) 1995-02-23 1996-02-21 Informationsverarbeitungs-Apparat mit einer einer Kreisbewegung ausgesetzten Sonde

Country Status (4)

Country Link
US (1) US5831961A (de)
EP (1) EP0729006B1 (de)
JP (1) JP3581421B2 (de)
DE (1) DE69613607T2 (de)

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US5744799A (en) * 1996-05-20 1998-04-28 Ohara; Tetsuo Apparatus for and method of real-time nanometer-scale position measurement of the sensor of a scanning tunneling microscope or other sensor scanning atomic or other undulating surfaces
JP3202646B2 (ja) * 1997-04-09 2001-08-27 セイコーインスツルメンツ株式会社 走査型プローブ顕微鏡
TW369603B (en) * 1997-04-10 1999-09-11 Sii Nanotechnology Inc Apparatus for machining, recording, and reproducing, using scanning probe microscope
JP3978818B2 (ja) * 1997-08-08 2007-09-19 ソニー株式会社 微小ヘッド素子の製造方法
US6459088B1 (en) 1998-01-16 2002-10-01 Canon Kabushiki Kaisha Drive stage and scanning probe microscope and information recording/reproducing apparatus using the same
US7304486B2 (en) * 1998-07-08 2007-12-04 Capres A/S Nano-drive for high resolution positioning and for positioning of a multi-point probe
EP1237161B1 (de) 2001-02-28 2014-05-14 Imec Verfahren und Vorrichtung zur Durchführung von Rasterkraftmikroskop-Messungen
JP2002310882A (ja) * 2001-04-17 2002-10-23 Canon Inc 走査型プローブによる信号検出装置、該装置によるプローブ顕微鏡、及び走査型プローブによる信号検出方法、該方法を用いてサンプル表面を観察する観察方法
CN100477067C (zh) * 2002-07-08 2009-04-08 马尔蒂普罗布公司 多个扫描探针的软件同步
US7315505B2 (en) * 2003-07-14 2008-01-01 Hewlett-Packard Development Company, L.P. Storage device having a probe with plural tips
KR100603244B1 (ko) * 2004-07-29 2006-07-20 전자부품연구원 탐침형 정보저장장치
KR100706310B1 (ko) * 2004-10-04 2007-04-13 엘지전자 주식회사 Ｐｚｔ를 이용한 주사탐침 현미경 내의 캔틸레버와 그제조방법 및 상기 캔틸레버를 이용한 탐침형 정보 저장 장치
JP4140598B2 (ja) * 2004-11-01 2008-08-27 株式会社日立製作所 記録再生装置
JP4498285B2 (ja) * 2006-02-01 2010-07-07 キヤノン株式会社 走査型プローブ装置
JP4448099B2 (ja) * 2006-02-01 2010-04-07 キヤノン株式会社 走査型プローブ装置
US8302456B2 (en) 2006-02-23 2012-11-06 Asylum Research Corporation Active damping of high speed scanning probe microscope components
US7486403B2 (en) * 2006-07-20 2009-02-03 Canon Kabushiki Kaisha Droplet shape measuring method and apparatus
JP4542620B2 (ja) 2007-03-30 2010-09-15 パイオニア株式会社 駆動装置
JP4542619B2 (ja) * 2007-03-30 2010-09-15 パイオニア株式会社 駆動装置
WO2008126236A1 (ja) 2007-03-30 2008-10-23 Pioneer Corporation 駆動装置
US9383388B2 (en) 2014-04-21 2016-07-05 Oxford Instruments Asylum Research, Inc Automated atomic force microscope and the operation thereof
WO2016166816A1 (ja) * 2015-04-14 2016-10-20 株式会社島津製作所 走査型プローブ顕微鏡
KR101607606B1 (ko) * 2015-08-17 2016-03-31 한국표준과학연구원 원자간력 현미경의 측정 방법

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JPS5547570A (en) * 1978-10-02 1980-04-04 Nippon Electric Ind Co Ltd Optical reading device
JPS6047958A (ja) * 1983-08-26 1985-03-15 Tokyo Keiki Co Ltd 水浸超音波探傷装置
EP0247219B1 (de) * 1986-05-27 1991-05-15 International Business Machines Corporation Speichereinheit mit direktem Zugriff
JP2556491B2 (ja) * 1986-12-24 1996-11-20 キヤノン株式会社 記録装置及び記録法
JPS63262553A (ja) * 1987-04-20 1988-10-28 Fuji Photo Film Co Ltd 電気泳動器具
JP2580183B2 (ja) * 1987-06-29 1997-02-12 株式会社 マックサイエンス 放射線画像読取装置
JP2686645B2 (ja) * 1989-05-08 1997-12-08 キヤノン株式会社 走査型トンネル電流検出装置
JP2909829B2 (ja) * 1989-07-05 1999-06-23 セイコーインスツルメンツ株式会社 位置合わせ機能付複合走査型トンネル顕微鏡
DE69125552T2 (de) * 1990-09-14 1997-10-09 Canon K.K., Tokio/Tokyo Nachführungsmethode für Speichergerät
JPH0575047A (ja) * 1991-03-08 1993-03-26 Hitachi Ltd 記憶装置
JP2930447B2 (ja) * 1991-05-15 1999-08-03 キヤノン株式会社 情報処理装置
JP3198355B2 (ja) * 1991-05-28 2001-08-13 キヤノン株式会社 微小変位素子及びこれを用いた走査型トンネル顕微鏡、情報処理装置
CA2076925C (en) * 1991-08-29 1999-08-31 Kunihiro Sakai Information processing apparatus and scanning tunnel microscope
US5150392A (en) * 1991-09-09 1992-09-22 International Business Machines Corporation X-ray mask containing a cantilevered tip for gap control and alignment
JP2994505B2 (ja) * 1991-10-04 1999-12-27 キヤノン株式会社 情報再生装置
ATE175515T1 (de) * 1991-10-15 1999-01-15 Canon Kk Informationsverarbeitungsgerät mit spurausrichtungsmechanismus
JP2889536B2 (ja) * 1996-06-24 1999-05-10 株式会社タチエス シート・ベルトの取付け構造

Also Published As

Publication number Publication date
EP0729006A2 (de) 1996-08-28
EP0729006A3 (de) 1996-09-04
DE69613607D1 (de) 2001-08-09
JP3581421B2 (ja) 2004-10-27
EP0729006B1 (de) 2001-07-04
US5831961A (en) 1998-11-03
JPH08235651A (ja) 1996-09-13

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee