JP3483537B2 - 画像表示装置の製造方法 - Google Patents

画像表示装置の製造方法

Info

Publication number
JP3483537B2
JP3483537B2 JP2001048989A JP2001048989A JP3483537B2 JP 3483537 B2 JP3483537 B2 JP 3483537B2 JP 2001048989 A JP2001048989 A JP 2001048989A JP 2001048989 A JP2001048989 A JP 2001048989A JP 3483537 B2 JP3483537 B2 JP 3483537B2
Authority
JP
Japan
Prior art keywords
substrate
electron source
manufacturing
container
gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2001048989A
Other languages
English (en)
Japanese (ja)
Other versions
JP2001325879A5 (https=
JP2001325879A (ja
Inventor
俊通 大内
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP2001048989A priority Critical patent/JP3483537B2/ja
Priority to US09/797,570 priority patent/US6780074B2/en
Publication of JP2001325879A publication Critical patent/JP2001325879A/ja
Application granted granted Critical
Publication of JP3483537B2 publication Critical patent/JP3483537B2/ja
Publication of JP2001325879A5 publication Critical patent/JP2001325879A5/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J31/00—Cathode ray tubes; Electron beam tubes
    • H01J31/08—Cathode ray tubes; Electron beam tubes having a screen on or from which an image or pattern is formed, picked up, converted, or stored
    • H01J31/10—Image or pattern display tubes, i.e. having electrical input and optical output; Flying-spot tubes for scanning purposes
    • H01J31/12—Image or pattern display tubes, i.e. having electrical input and optical output; Flying-spot tubes for scanning purposes with luminescent screen
    • H01J31/123—Flat display tubes
    • H01J31/125—Flat display tubes provided with control means permitting the electron beam to reach selected parts of the screen, e.g. digital selection
    • H01J31/127—Flat display tubes provided with control means permitting the electron beam to reach selected parts of the screen, e.g. digital selection using large area or array sources, i.e. essentially a source for each pixel group
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/24—Manufacture or joining of vessels, leading-in conductors or bases
    • H01J9/26—Sealing together parts of vessels
    • H01J9/261—Sealing together parts of vessels the vessel being for a flat panel display
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/38—Exhausting, degassing, filling, or cleaning vessels
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/40—Closing vessels

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Cold Cathode And The Manufacture (AREA)
  • Manufacture Of Electron Tubes, Discharge Lamp Vessels, Lead-In Wires, And The Like (AREA)
  • Cathode-Ray Tubes And Fluorescent Screens For Display (AREA)
JP2001048989A 2000-03-06 2001-02-23 画像表示装置の製造方法 Expired - Fee Related JP3483537B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2001048989A JP3483537B2 (ja) 2000-03-06 2001-02-23 画像表示装置の製造方法
US09/797,570 US6780074B2 (en) 2000-03-06 2001-03-05 Method for manufacturing an image display device

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2000061127 2000-03-06
JP2000-61127 2000-03-06
JP2001048989A JP3483537B2 (ja) 2000-03-06 2001-02-23 画像表示装置の製造方法

Publications (3)

Publication Number Publication Date
JP2001325879A JP2001325879A (ja) 2001-11-22
JP3483537B2 true JP3483537B2 (ja) 2004-01-06
JP2001325879A5 JP2001325879A5 (https=) 2004-09-16

Family

ID=26586873

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2001048989A Expired - Fee Related JP3483537B2 (ja) 2000-03-06 2001-02-23 画像表示装置の製造方法

Country Status (2)

Country Link
US (1) US6780074B2 (https=)
JP (1) JP3483537B2 (https=)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AT408157B (de) * 1999-10-15 2001-09-25 Electrovac Verfahren zur herstellung eines feldemissions-displays
US6848961B2 (en) * 2000-03-16 2005-02-01 Canon Kabushiki Kaisha Method and apparatus for manufacturing image displaying apparatus
JP2004165152A (ja) * 2002-10-21 2004-06-10 Canon Inc 気密容器の製造方法及び画像表示装置の製造方法及び接合方法
US20050088092A1 (en) * 2003-10-17 2005-04-28 Myoung-Kon Kim Plasma display apparatus
US7508673B2 (en) * 2004-03-04 2009-03-24 Samsung Sdi Co., Ltd. Heat dissipating apparatus for plasma display device
US7993457B1 (en) * 2007-01-23 2011-08-09 Novellus Systems, Inc. Deposition sub-chamber with variable flow
US9353439B2 (en) 2013-04-05 2016-05-31 Lam Research Corporation Cascade design showerhead for transient uniformity
JP6271380B2 (ja) * 2014-09-12 2018-01-31 アルパッド株式会社 半導体装置の製造装置と半導体装置の製造方法
US10023959B2 (en) 2015-05-26 2018-07-17 Lam Research Corporation Anti-transient showerhead
US10358721B2 (en) * 2015-10-22 2019-07-23 Asm Ip Holding B.V. Semiconductor manufacturing system including deposition apparatus

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3320387B2 (ja) 1998-09-07 2002-09-03 キヤノン株式会社 電子源の製造装置及び製造方法

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
ATE194727T1 (de) 1993-12-17 2000-07-15 Canon Kk Herstellungsverfahren einer elektronen emittierenden vorrichtung, einer elektronenquelle und eine bilderzeugungsvorrichtung
JP2733452B2 (ja) 1994-12-16 1998-03-30 キヤノン株式会社 電子放出素子、電子源、画像形成装置の製造方法
CA2418595C (en) 1993-12-27 2006-11-28 Canon Kabushiki Kaisha Electron-emitting device and method of manufacturing the same as well as electron source and image-forming apparatus
JP3416266B2 (ja) 1993-12-28 2003-06-16 キヤノン株式会社 電子放出素子とその製造方法、及び該電子放出素子を用いた電子源及び画像形成装置
JPH09104113A (ja) 1995-10-12 1997-04-22 Canon Inc 記録装置及びその記録方法
EP0908916B1 (en) 1997-09-16 2004-01-07 Canon Kabushiki Kaisha Electron source manufacture method and electron source manufacture apparatus
JP3619024B2 (ja) 1997-09-16 2005-02-09 キヤノン株式会社 電子源の製造方法及び画像形成装置の製造方法

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3320387B2 (ja) 1998-09-07 2002-09-03 キヤノン株式会社 電子源の製造装置及び製造方法

Also Published As

Publication number Publication date
US20020009944A1 (en) 2002-01-24
US6780074B2 (en) 2004-08-24
JP2001325879A (ja) 2001-11-22

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