JP3148946B2 - 探針駆動機構並びに該機構を用いたトンネル電流検出装置、情報処理装置、圧電式アクチュエータ - Google Patents

探針駆動機構並びに該機構を用いたトンネル電流検出装置、情報処理装置、圧電式アクチュエータ

Info

Publication number
JP3148946B2
JP3148946B2 JP15125792A JP15125792A JP3148946B2 JP 3148946 B2 JP3148946 B2 JP 3148946B2 JP 15125792 A JP15125792 A JP 15125792A JP 15125792 A JP15125792 A JP 15125792A JP 3148946 B2 JP3148946 B2 JP 3148946B2
Authority
JP
Japan
Prior art keywords
probe
support
insulating layer
cantilever
driving mechanism
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP15125792A
Other languages
English (en)
Japanese (ja)
Other versions
JPH05187867A (ja
Inventor
優 中山
隆行 八木
康弘 島田
敬介 山本
有二 笠貫
義勇 鈴木
裕 平井
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP15125792A priority Critical patent/JP3148946B2/ja
Priority to CA002069708A priority patent/CA2069708C/en
Priority to EP92304846A priority patent/EP0516418B1/de
Priority to AT92304846T priority patent/ATE148582T1/de
Priority to DE69217120T priority patent/DE69217120T2/de
Publication of JPH05187867A publication Critical patent/JPH05187867A/ja
Priority to US08/646,551 priority patent/US5966787A/en
Application granted granted Critical
Publication of JP3148946B2 publication Critical patent/JP3148946B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/10—STM [Scanning Tunnelling Microscopy] or apparatus therefor, e.g. STM probes
    • G01Q60/16—Probes, their manufacture, or their related instrumentation, e.g. holders
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y35/00—Methods or apparatus for measurement or analysis of nanostructures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q10/00—Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
    • G01Q10/04—Fine scanning or positioning
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q10/00—Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
    • G01Q10/04—Fine scanning or positioning
    • G01Q10/045—Self-actuating probes, i.e. wherein the actuating means for driving are part of the probe itself, e.g. piezoelectric means on a cantilever probe
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q70/00—General aspects of SPM probes, their manufacture or their related instrumentation, insofar as they are not specially adapted to a single SPM technique covered by group G01Q60/00
    • G01Q70/06—Probe tip arrays
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B9/00—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor
    • G11B9/12—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor using near-field interactions; Record carriers therefor
    • G11B9/14—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor using near-field interactions; Record carriers therefor using microscopic probe means, i.e. recording or reproducing by means directly associated with the tip of a microscopic electrical probe as used in Scanning Tunneling Microscopy [STM] or Atomic Force Microscopy [AFM] for inducing physical or electrical perturbations in a recording medium; Record carriers or media specially adapted for such transducing of information
    • G11B9/1418—Disposition or mounting of heads or record carriers
    • G11B9/1427—Disposition or mounting of heads or record carriers with provision for moving the heads or record carriers relatively to each other or for access to indexed parts without effectively imparting a relative movement
    • G11B9/1436—Disposition or mounting of heads or record carriers with provision for moving the heads or record carriers relatively to each other or for access to indexed parts without effectively imparting a relative movement with provision for moving the heads or record carriers relatively to each other
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H10N30/2041—Beam type
    • H10N30/2042—Cantilevers, i.e. having one fixed end
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q80/00—Applications, other than SPM, of scanning-probe techniques
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/42—Piezoelectric device making

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Nanotechnology (AREA)
  • Analytical Chemistry (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Micromachines (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
JP15125792A 1991-05-30 1992-05-20 探針駆動機構並びに該機構を用いたトンネル電流検出装置、情報処理装置、圧電式アクチュエータ Expired - Fee Related JP3148946B2 (ja)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP15125792A JP3148946B2 (ja) 1991-05-30 1992-05-20 探針駆動機構並びに該機構を用いたトンネル電流検出装置、情報処理装置、圧電式アクチュエータ
CA002069708A CA2069708C (en) 1991-05-30 1992-05-27 Probe-driving mechanism, production thereof, and apparatus and piezoelectric actuator employing the same
EP92304846A EP0516418B1 (de) 1991-05-30 1992-05-28 Antriebsvorrichtung eines Wandlers, seine Herstellung und Apparatur und Antrieb mit solcher Vorrichtung
AT92304846T ATE148582T1 (de) 1991-05-30 1992-05-28 Antriebsvorrichtung eines wandlers, seine herstellung und apparatur und antrieb mit solcher vorrichtung
DE69217120T DE69217120T2 (de) 1991-05-30 1992-05-28 Antriebsvorrichtung eines Wandlers, seine Herstellung und Apparatur und Antrieb mit solcher Vorrichtung
US08/646,551 US5966787A (en) 1991-05-30 1996-05-08 Process for producing a probe-driving mechanism

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP3-153775 1991-05-30
JP15377591 1991-05-30
JP15125792A JP3148946B2 (ja) 1991-05-30 1992-05-20 探針駆動機構並びに該機構を用いたトンネル電流検出装置、情報処理装置、圧電式アクチュエータ

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2000314763A Division JP3305304B2 (ja) 1991-05-30 2000-10-16 探針駆動機構並びに該機構を用いた圧電式アクチュエータの製造方法

Publications (2)

Publication Number Publication Date
JPH05187867A JPH05187867A (ja) 1993-07-27
JP3148946B2 true JP3148946B2 (ja) 2001-03-26

Family

ID=26480559

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15125792A Expired - Fee Related JP3148946B2 (ja) 1991-05-30 1992-05-20 探針駆動機構並びに該機構を用いたトンネル電流検出装置、情報処理装置、圧電式アクチュエータ

Country Status (6)

Country Link
US (1) US5966787A (de)
EP (1) EP0516418B1 (de)
JP (1) JP3148946B2 (de)
AT (1) ATE148582T1 (de)
CA (1) CA2069708C (de)
DE (1) DE69217120T2 (de)

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US5796152A (en) * 1997-01-24 1998-08-18 Roxburgh Ltd. Cantilevered microstructure
US7104134B2 (en) * 2004-03-05 2006-09-12 Agilent Technologies, Inc. Piezoelectric cantilever pressure sensor
US7497133B2 (en) 2004-05-24 2009-03-03 Drexel University All electric piezoelectric finger sensor (PEFS) for soft material stiffness measurement
KR100595523B1 (ko) * 2004-07-20 2006-07-03 엘지전자 주식회사 캔틸레버 전사를 이용한 나노 정보 저장장치 및 그 제조방법
US7447140B2 (en) * 2004-07-30 2008-11-04 Seagate Technology Llc Ferroelectric probe storage apparatus
KR101061846B1 (ko) * 2004-08-19 2011-09-02 삼성전자주식회사 표시 장치용 구동 장치
JP4670495B2 (ja) * 2004-09-06 2011-04-13 Ｔｄｋ株式会社 電子デバイス及びその製造方法
JP2007335399A (ja) * 2006-05-19 2007-12-27 Canon Inc 画像表示装置及び画像表示装置の駆動方法
US8481335B2 (en) * 2006-11-27 2013-07-09 Drexel University Specificity and sensitivity enhancement in cantilever sensing
US7992431B2 (en) * 2006-11-28 2011-08-09 Drexel University Piezoelectric microcantilevers and uses in atomic force microscopy
US8927259B2 (en) * 2006-11-28 2015-01-06 Drexel University Piezoelectric microcantilever sensors for biosensing
EP2115448A4 (de) * 2007-02-01 2013-01-30 Univ Drexel Tragbarer phasenverschiebungsdetektor für sensoranwendungen
US7732991B2 (en) * 2007-09-28 2010-06-08 Freescale Semiconductor, Inc. Self-poling piezoelectric MEMs device
US8241569B2 (en) 2007-11-23 2012-08-14 Drexel University Lead-free piezoelectric ceramic films and a method for making thereof
WO2009126378A2 (en) 2008-03-11 2009-10-15 Drexel University Enhanced detection sensitivity with piezoelectric microcantilever sensors
EP2104111A1 (de) * 2008-03-20 2009-09-23 Nanoworld AG SPM-Sonde mit verkürztem Federbalken
KR20110049748A (ko) * 2008-05-16 2011-05-12 드렉셀유니버시티 조직을 평가하는 시스템과 방법
GB2467848B (en) * 2009-02-13 2011-01-12 Wolfson Microelectronics Plc MEMS device and process
CN101580223B (zh) * 2009-06-18 2011-04-27 大连理工大学 一种压电微悬臂梁探针的制作方法
US20110086368A1 (en) * 2009-10-08 2011-04-14 Drexel University Method for immune response detection
US8722427B2 (en) * 2009-10-08 2014-05-13 Drexel University Determination of dissociation constants using piezoelectric microcantilevers
JPWO2011132532A1 (ja) * 2010-04-23 2013-07-18 株式会社村田製作所 圧電アクチュエータおよび圧電アクチュエータの製造方法
JP4962663B2 (ja) 2010-08-23 2012-06-27 パナソニック株式会社 アクチュエータ、及びアクチュエータを駆動する方法
EP2502876B1 (de) * 2011-03-24 2014-11-19 NanoWorld AG Mikromechanisches Bauelement mit Federbalken und integriertem elektrischen Funktionselement
TWI509259B (zh) * 2014-03-18 2015-11-21 Nat Applied Res Laboratories 傳導式電流探頭
US9761787B2 (en) * 2015-06-02 2017-09-12 The Board Of Trustees Of The University Of Alabama Consensus-based multi-piezoelectric microcantilever sensor
CN112198412B (zh) * 2019-06-21 2023-02-28 成都辰显光电有限公司 一种测试结构及测试结构的制备方法

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Also Published As

Publication number Publication date
JPH05187867A (ja) 1993-07-27
EP0516418A1 (de) 1992-12-02
CA2069708C (en) 1997-10-14
DE69217120T2 (de) 1997-06-12
CA2069708A1 (en) 1992-12-01
ATE148582T1 (de) 1997-02-15
US5966787A (en) 1999-10-19
DE69217120D1 (de) 1997-03-13
EP0516418B1 (de) 1997-01-29

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