JP2537712B2 - スクリュ―形真空ポンプ - Google Patents

スクリュ―形真空ポンプ

Info

Publication number
JP2537712B2
JP2537712B2 JP3195943A JP19594391A JP2537712B2 JP 2537712 B2 JP2537712 B2 JP 2537712B2 JP 3195943 A JP3195943 A JP 3195943A JP 19594391 A JP19594391 A JP 19594391A JP 2537712 B2 JP2537712 B2 JP 2537712B2
Authority
JP
Japan
Prior art keywords
vacuum pump
type vacuum
screw type
tooth
casing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP3195943A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0518380A (ja
Inventor
展 清水
清司 柳澤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ebara Corp
Original Assignee
Ebara Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ebara Corp filed Critical Ebara Corp
Priority to JP3195943A priority Critical patent/JP2537712B2/ja
Priority to US07/907,033 priority patent/US5314320A/en
Priority to KR1019920012131A priority patent/KR100221674B1/ko
Priority to EP92111697A priority patent/EP0523550B1/de
Priority to DE69216699T priority patent/DE69216699T2/de
Publication of JPH0518380A publication Critical patent/JPH0518380A/ja
Application granted granted Critical
Publication of JP2537712B2 publication Critical patent/JP2537712B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/12—Arrangements for admission or discharge of the working fluid, e.g. constructional features of the inlet or outlet
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/14—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons
    • F04C18/16—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons with helical teeth, e.g. chevron-shaped, screw type

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
JP3195943A 1991-07-10 1991-07-10 スクリュ―形真空ポンプ Expired - Fee Related JP2537712B2 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP3195943A JP2537712B2 (ja) 1991-07-10 1991-07-10 スクリュ―形真空ポンプ
US07/907,033 US5314320A (en) 1991-07-10 1992-07-01 Screw vacuum pump with a reduced starting load
KR1019920012131A KR100221674B1 (ko) 1991-07-10 1992-07-08 스크루 진공펌프
EP92111697A EP0523550B1 (de) 1991-07-10 1992-07-09 Schraubenkolben-Vakuumpumpe
DE69216699T DE69216699T2 (de) 1991-07-10 1992-07-09 Schraubenkolben-Vakuumpumpe

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3195943A JP2537712B2 (ja) 1991-07-10 1991-07-10 スクリュ―形真空ポンプ

Publications (2)

Publication Number Publication Date
JPH0518380A JPH0518380A (ja) 1993-01-26
JP2537712B2 true JP2537712B2 (ja) 1996-09-25

Family

ID=16349554

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3195943A Expired - Fee Related JP2537712B2 (ja) 1991-07-10 1991-07-10 スクリュ―形真空ポンプ

Country Status (5)

Country Link
US (1) US5314320A (de)
EP (1) EP0523550B1 (de)
JP (1) JP2537712B2 (de)
KR (1) KR100221674B1 (de)
DE (1) DE69216699T2 (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11225787B2 (en) 2018-06-06 2022-01-18 Simpson Strong-Tie Company, Inc. Drywall spacing joist hanger

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0952351A1 (de) * 1998-04-21 1999-10-27 Ateliers Busch S.A. Verdrängermaschine
DE10040020A1 (de) * 2000-08-16 2002-03-07 Bitzer Kuehlmaschinenbau Gmbh Schraubenverdichter
JP4853168B2 (ja) * 2006-08-10 2012-01-11 株式会社豊田自動織機 スクリューポンプ
DE102013102031B4 (de) * 2013-03-01 2016-05-12 Netzsch Pumpen & Systeme Gmbh Aus wenigstens zwei Teilen gebildete Schraubenspindelpumpe
DE102013102030B3 (de) 2013-03-01 2014-07-03 Netzsch Pumpen & Systeme Gmbh Schraubenspindelpumpe
DE202018000178U1 (de) * 2018-01-12 2019-04-15 Leybold Gmbh Kompressor

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB747058A (en) * 1953-04-21 1956-03-28 Worthington Corp Multi-stage rotary compressor of the outwardly sliding vane type
US3151806A (en) * 1962-09-24 1964-10-06 Joseph E Whitfield Screw type compressor having variable volume and adjustable compression
US4068984A (en) * 1974-12-03 1978-01-17 H & H Licensing Corporation Multi-stage screw-compressor with different tooth profiles
US4220197A (en) * 1979-01-02 1980-09-02 Dunham-Bush, Inc. High speed variable delivery helical screw compressor/expander automotive air conditioning and waste heat energy _recovery system
JPS61152990A (ja) * 1984-12-26 1986-07-11 Hitachi Ltd スクリユ−真空ポンプ
JPH079239B2 (ja) * 1984-04-11 1995-02-01 株式会社日立製作所 スクリュー真空ポンプ
JPS61223295A (ja) * 1985-03-27 1986-10-03 Hitachi Ltd オイルフリ−スクリユ−真空ポンプ
JPS61234290A (ja) * 1985-04-10 1986-10-18 Hitachi Ltd 多段スクリユ−真空ポンプ装置
US4667646A (en) * 1986-01-02 1987-05-26 Shaw David N Expansion compression system for efficient power output regulation of internal combustion engines
JPS62243982A (ja) * 1986-04-14 1987-10-24 Hitachi Ltd ２段型真空ポンプ装置およびその運転方法
JPS62284994A (ja) * 1986-06-04 1987-12-10 Hitachi Ltd 多段スクリユ−真空ポンプ起動法
GB8617612D0 (en) * 1986-07-18 1986-08-28 Peabody Holmes Ltd Gas moving device
JPH022948A (ja) * 1988-06-14 1990-01-08 Mitsubishi Electric Corp コネクタ装着検出回路
JPH027268A (ja) * 1988-06-27 1990-01-11 Hitachi Ltd Ｐｃｍ記録再生装置
JPH0278783A (ja) * 1988-09-14 1990-03-19 Hitachi Ltd スクリユー真空ポンプ
JPH02146288A (ja) * 1988-11-25 1990-06-05 Ebara Corp 内部圧縮を持つ容積型圧縮機
JPH07111184B2 (ja) * 1988-12-05 1995-11-29 株式会社荏原製作所 スクリュ−圧縮機

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11225787B2 (en) 2018-06-06 2022-01-18 Simpson Strong-Tie Company, Inc. Drywall spacing joist hanger

Also Published As

Publication number Publication date
KR100221674B1 (ko) 1999-09-15
JPH0518380A (ja) 1993-01-26
US5314320A (en) 1994-05-24
KR930002683A (ko) 1993-02-23
DE69216699T2 (de) 1997-06-19
EP0523550B1 (de) 1997-01-15
EP0523550A1 (de) 1993-01-20
DE69216699D1 (de) 1997-02-27

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees