JP2024174199A5 - - Google Patents

Download PDF

Info

Publication number
JP2024174199A5
JP2024174199A5 JP2024173484A JP2024173484A JP2024174199A5 JP 2024174199 A5 JP2024174199 A5 JP 2024174199A5 JP 2024173484 A JP2024173484 A JP 2024173484A JP 2024173484 A JP2024173484 A JP 2024173484A JP 2024174199 A5 JP2024174199 A5 JP 2024174199A5
Authority
JP
Japan
Prior art keywords
probe
guide plate
locking portion
recess
probes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2024173484A
Other languages
English (en)
Japanese (ja)
Other versions
JP2024174199A (ja
Filing date
Publication date
Priority claimed from PCT/JP2020/034931 external-priority patent/WO2022059070A1/ja
Application filed filed Critical
Priority to JP2024173484A priority Critical patent/JP2024174199A/ja
Publication of JP2024174199A publication Critical patent/JP2024174199A/ja
Publication of JP2024174199A5 publication Critical patent/JP2024174199A5/ja
Priority to JP2026008887A priority patent/JP2026063332A/ja
Pending legal-status Critical Current

Links

JP2024173484A 2020-09-15 2024-10-02 プローブカード Pending JP2024174199A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2024173484A JP2024174199A (ja) 2020-09-15 2024-10-02 プローブカード
JP2026008887A JP2026063332A (ja) 2020-09-15 2026-01-22 プローブカード

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
PCT/JP2020/034931 WO2022059070A1 (ja) 2020-09-15 2020-09-15 プローブカード
JP2022550072A JPWO2022059070A1 (https=) 2020-09-15 2020-09-15
JP2024173484A JP2024174199A (ja) 2020-09-15 2024-10-02 プローブカード

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP2022550072A Division JPWO2022059070A1 (https=) 2020-09-15 2020-09-15

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2026008887A Division JP2026063332A (ja) 2020-09-15 2026-01-22 プローブカード

Publications (2)

Publication Number Publication Date
JP2024174199A JP2024174199A (ja) 2024-12-13
JP2024174199A5 true JP2024174199A5 (https=) 2025-06-02

Family

ID=80777301

Family Applications (3)

Application Number Title Priority Date Filing Date
JP2022550072A Pending JPWO2022059070A1 (https=) 2020-09-15 2020-09-15
JP2024173484A Pending JP2024174199A (ja) 2020-09-15 2024-10-02 プローブカード
JP2026008887A Pending JP2026063332A (ja) 2020-09-15 2026-01-22 プローブカード

Family Applications Before (1)

Application Number Title Priority Date Filing Date
JP2022550072A Pending JPWO2022059070A1 (https=) 2020-09-15 2020-09-15

Family Applications After (1)

Application Number Title Priority Date Filing Date
JP2026008887A Pending JP2026063332A (ja) 2020-09-15 2026-01-22 プローブカード

Country Status (6)

Country Link
US (1) US12332278B2 (https=)
JP (3) JPWO2022059070A1 (https=)
KR (1) KR102870178B1 (https=)
CN (2) CN116097104A (https=)
TW (1) TWI899329B (https=)
WO (1) WO2022059070A1 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115684677B (zh) * 2021-07-29 2025-08-01 芯卓科技(浙江)有限公司 探针及探针卡装置

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4750820B2 (ja) * 2008-04-21 2011-08-17 東京エレクトロン株式会社 プローブカード
US8222912B2 (en) * 2009-03-12 2012-07-17 Sv Probe Pte. Ltd. Probe head structure for probe test cards
US9702904B2 (en) * 2011-03-21 2017-07-11 Formfactor, Inc. Non-linear vertical leaf spring
US10006938B2 (en) * 2012-01-04 2018-06-26 Formfactor, Inc. Probes with programmable motion
JP5868239B2 (ja) * 2012-03-27 2016-02-24 株式会社日本マイクロニクス プローブ及びプローブカード
WO2014087906A1 (ja) * 2012-12-04 2014-06-12 日本電子材料株式会社 電気的接触子
JP2015072182A (ja) * 2013-10-03 2015-04-16 日本電子材料株式会社 プローブカード
SG11201704433TA (en) * 2014-12-30 2017-07-28 Technoprobe Spa Contact probe for testing head
WO2016146499A1 (en) * 2015-03-13 2016-09-22 Technoprobe S.P.A. Testing head with vertical probes having an improved sliding movement within respective guide holes and correct holding of the probes within the testing head under different operative conditions
JP6654061B2 (ja) * 2016-02-23 2020-02-26 日本電子材料株式会社 プローブガイド、プローブカード及びプローブガイドの製造方法
IT201600084921A1 (it) * 2016-08-11 2018-02-11 Technoprobe Spa Sonda di contatto e relativa testa di misura di un’apparecchiatura di test di dispositivi elettronici
JP6781598B2 (ja) * 2016-09-16 2020-11-04 日本電子材料株式会社 プローブカード
CN112424615B (zh) * 2018-07-13 2025-02-07 日本电产理德股份有限公司 检查治具以及检查装置
CN111403937A (zh) * 2020-03-24 2020-07-10 东莞立德精密工业有限公司 金属端子及其制作方法
CN113721051B (zh) * 2020-05-26 2023-12-01 旺矽科技股份有限公司 具有线型探针的探针头
CN115248338B (zh) * 2021-04-27 2025-09-23 芯卓科技(浙江)有限公司 探针结构及其探针卡装置

Similar Documents

Publication Publication Date Title
JP2024174199A5 (https=)
CN113721051B (zh) 具有线型探针的探针头
JP7116936B1 (ja) ダイヘッド
KR20230041982A (ko) 증착용마스크
CN115248338B (zh) 探针结构及其探针卡装置
TWM588248U (zh) 探針頭及其導電探針
JP5711455B2 (ja) 半導体装置及び該半導体装置のレイアウト方法
JP2010091349A (ja) 垂直型プローブカード
CN113540191A (zh) 柔性显示面板及显示装置
CN101802424B (zh) 导轨以及具备该导轨的运动引导装置
KR20070107041A (ko) 열 교환기
CN210514407U (zh) 探针头及其导电探针
JP2024040302A5 (https=)
JP7094519B2 (ja) トレー
CN210487828U (zh) 探针头及探针头的导电探针
CN112730925B (zh) 交错式探针卡
JPWO2022059070A5 (https=)
JPWO2021239635A5 (https=)
JP2024174199A (ja) プローブカード
WO2024122419A1 (ja) カッププレート積層型熱交換器
CN210514406U (zh) 探针头及其导电探针
TWI709752B (zh) 交錯式探針卡
JPWO2021233280A5 (https=)
KR102549551B1 (ko) 전기 전도성 접촉핀, 이를 구비하는 검사장치 및 전기 전도성 접촉핀의 제조방법
TWM586799U (zh) 探針頭及其導電探針