KR102870178B1 - 프로브 카드 - Google Patents

프로브 카드

Info

Publication number
KR102870178B1
KR102870178B1 KR1020237006038A KR20237006038A KR102870178B1 KR 102870178 B1 KR102870178 B1 KR 102870178B1 KR 1020237006038 A KR1020237006038 A KR 1020237006038A KR 20237006038 A KR20237006038 A KR 20237006038A KR 102870178 B1 KR102870178 B1 KR 102870178B1
Authority
KR
South Korea
Prior art keywords
probe
guide plate
offset
guide
probes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
KR1020237006038A
Other languages
English (en)
Korean (ko)
Other versions
KR20230038795A (ko
Inventor
치카오미 모리
Original Assignee
재팬 일렉트로닉 메트리얼스 코오포레이숀
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 재팬 일렉트로닉 메트리얼스 코오포레이숀 filed Critical 재팬 일렉트로닉 메트리얼스 코오포레이숀
Publication of KR20230038795A publication Critical patent/KR20230038795A/ko
Application granted granted Critical
Publication of KR102870178B1 publication Critical patent/KR102870178B1/ko
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G01R1/07314—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card the body of the probe being perpendicular to test object, e.g. bed of nails or probe with bump contacts on a rigid support
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G01R1/07364—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card with provisions for altering position, number or connection of probe tips; Adapting to differences in pitch
    • G01R1/07371—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card with provisions for altering position, number or connection of probe tips; Adapting to differences in pitch using an intermediate card or back card with apertures through which the probes pass
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06705—Apparatus for holding or moving single probes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • G01R1/06733—Geometry aspects
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G01R1/07314—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card the body of the probe being perpendicular to test object, e.g. bed of nails or probe with bump contacts on a rigid support
    • G01R1/07328—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card the body of the probe being perpendicular to test object, e.g. bed of nails or probe with bump contacts on a rigid support for testing printed circuit boards
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
    • G01R31/2889—Interfaces, e.g. between probe and tester
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G01R1/07357—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card with flexible bodies, e.g. buckling beams

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Engineering & Computer Science (AREA)
  • Measuring Leads Or Probes (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Geometry (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
KR1020237006038A 2020-09-15 2020-09-15 프로브 카드 Active KR102870178B1 (ko)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2020/034931 WO2022059070A1 (ja) 2020-09-15 2020-09-15 プローブカード

Publications (2)

Publication Number Publication Date
KR20230038795A KR20230038795A (ko) 2023-03-21
KR102870178B1 true KR102870178B1 (ko) 2025-10-14

Family

ID=80777301

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020237006038A Active KR102870178B1 (ko) 2020-09-15 2020-09-15 프로브 카드

Country Status (6)

Country Link
US (1) US12332278B2 (https=)
JP (3) JPWO2022059070A1 (https=)
KR (1) KR102870178B1 (https=)
CN (2) CN116097104A (https=)
TW (1) TWI899329B (https=)
WO (1) WO2022059070A1 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115684677B (zh) * 2021-07-29 2025-08-01 芯卓科技(浙江)有限公司 探针及探针卡装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2019525204A (ja) * 2016-08-11 2019-09-05 テクノプローべ ソシエタ ペル アチオニ 接触プローブ、および電子機器を検査するための装置の対応するテストヘッド
WO2020012799A1 (ja) * 2018-07-13 2020-01-16 日本電産リード株式会社 検査治具、及び検査装置

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4750820B2 (ja) * 2008-04-21 2011-08-17 東京エレクトロン株式会社 プローブカード
US8222912B2 (en) * 2009-03-12 2012-07-17 Sv Probe Pte. Ltd. Probe head structure for probe test cards
US9702904B2 (en) * 2011-03-21 2017-07-11 Formfactor, Inc. Non-linear vertical leaf spring
US10006938B2 (en) * 2012-01-04 2018-06-26 Formfactor, Inc. Probes with programmable motion
JP5868239B2 (ja) * 2012-03-27 2016-02-24 株式会社日本マイクロニクス プローブ及びプローブカード
WO2014087906A1 (ja) * 2012-12-04 2014-06-12 日本電子材料株式会社 電気的接触子
JP2015072182A (ja) * 2013-10-03 2015-04-16 日本電子材料株式会社 プローブカード
SG11201704433TA (en) * 2014-12-30 2017-07-28 Technoprobe Spa Contact probe for testing head
WO2016146499A1 (en) * 2015-03-13 2016-09-22 Technoprobe S.P.A. Testing head with vertical probes having an improved sliding movement within respective guide holes and correct holding of the probes within the testing head under different operative conditions
JP6654061B2 (ja) * 2016-02-23 2020-02-26 日本電子材料株式会社 プローブガイド、プローブカード及びプローブガイドの製造方法
JP6781598B2 (ja) * 2016-09-16 2020-11-04 日本電子材料株式会社 プローブカード
CN111403937A (zh) * 2020-03-24 2020-07-10 东莞立德精密工业有限公司 金属端子及其制作方法
CN113721051B (zh) * 2020-05-26 2023-12-01 旺矽科技股份有限公司 具有线型探针的探针头
CN115248338B (zh) * 2021-04-27 2025-09-23 芯卓科技(浙江)有限公司 探针结构及其探针卡装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2019525204A (ja) * 2016-08-11 2019-09-05 テクノプローべ ソシエタ ペル アチオニ 接触プローブ、および電子機器を検査するための装置の対応するテストヘッド
WO2020012799A1 (ja) * 2018-07-13 2020-01-16 日本電産リード株式会社 検査治具、及び検査装置

Also Published As

Publication number Publication date
US12332278B2 (en) 2025-06-17
TW202215058A (zh) 2022-04-16
US20230266365A1 (en) 2023-08-24
TWI899329B (zh) 2025-10-01
JP2024174199A (ja) 2024-12-13
WO2022059070A1 (ja) 2022-03-24
JP2026063332A (ja) 2026-04-10
CN116097104A (zh) 2023-05-09
KR20230038795A (ko) 2023-03-21
CN121831221A (zh) 2026-04-10
JPWO2022059070A1 (https=) 2022-03-24

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