JPWO2022059070A5 - - Google Patents

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Publication number
JPWO2022059070A5
JPWO2022059070A5 JP2022550072A JP2022550072A JPWO2022059070A5 JP WO2022059070 A5 JPWO2022059070 A5 JP WO2022059070A5 JP 2022550072 A JP2022550072 A JP 2022550072A JP 2022550072 A JP2022550072 A JP 2022550072A JP WO2022059070 A5 JPWO2022059070 A5 JP WO2022059070A5
Authority
JP
Japan
Prior art keywords
probe
guide plate
respect
guide
probes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2022550072A
Other languages
English (en)
Japanese (ja)
Other versions
JPWO2022059070A1 (https=
Filing date
Publication date
Application filed filed Critical
Priority claimed from PCT/JP2020/034931 external-priority patent/WO2022059070A1/ja
Publication of JPWO2022059070A1 publication Critical patent/JPWO2022059070A1/ja
Publication of JPWO2022059070A5 publication Critical patent/JPWO2022059070A5/ja
Priority to JP2024173484A priority Critical patent/JP2024174199A/ja
Priority to JP2026008887A priority patent/JP2026063332A/ja
Pending legal-status Critical Current

Links

JP2022550072A 2020-09-15 2020-09-15 Pending JPWO2022059070A1 (https=)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2024173484A JP2024174199A (ja) 2020-09-15 2024-10-02 プローブカード
JP2026008887A JP2026063332A (ja) 2020-09-15 2026-01-22 プローブカード

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2020/034931 WO2022059070A1 (ja) 2020-09-15 2020-09-15 プローブカード

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2024173484A Division JP2024174199A (ja) 2020-09-15 2024-10-02 プローブカード

Publications (2)

Publication Number Publication Date
JPWO2022059070A1 JPWO2022059070A1 (https=) 2022-03-24
JPWO2022059070A5 true JPWO2022059070A5 (https=) 2023-04-21

Family

ID=80777301

Family Applications (3)

Application Number Title Priority Date Filing Date
JP2022550072A Pending JPWO2022059070A1 (https=) 2020-09-15 2020-09-15
JP2024173484A Pending JP2024174199A (ja) 2020-09-15 2024-10-02 プローブカード
JP2026008887A Pending JP2026063332A (ja) 2020-09-15 2026-01-22 プローブカード

Family Applications After (2)

Application Number Title Priority Date Filing Date
JP2024173484A Pending JP2024174199A (ja) 2020-09-15 2024-10-02 プローブカード
JP2026008887A Pending JP2026063332A (ja) 2020-09-15 2026-01-22 プローブカード

Country Status (6)

Country Link
US (1) US12332278B2 (https=)
JP (3) JPWO2022059070A1 (https=)
KR (1) KR102870178B1 (https=)
CN (2) CN116097104A (https=)
TW (1) TWI899329B (https=)
WO (1) WO2022059070A1 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115684677B (zh) * 2021-07-29 2025-08-01 芯卓科技(浙江)有限公司 探针及探针卡装置

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4750820B2 (ja) * 2008-04-21 2011-08-17 東京エレクトロン株式会社 プローブカード
US8222912B2 (en) * 2009-03-12 2012-07-17 Sv Probe Pte. Ltd. Probe head structure for probe test cards
US9702904B2 (en) * 2011-03-21 2017-07-11 Formfactor, Inc. Non-linear vertical leaf spring
US10006938B2 (en) * 2012-01-04 2018-06-26 Formfactor, Inc. Probes with programmable motion
JP5868239B2 (ja) * 2012-03-27 2016-02-24 株式会社日本マイクロニクス プローブ及びプローブカード
WO2014087906A1 (ja) * 2012-12-04 2014-06-12 日本電子材料株式会社 電気的接触子
JP2015072182A (ja) * 2013-10-03 2015-04-16 日本電子材料株式会社 プローブカード
SG11201704433TA (en) * 2014-12-30 2017-07-28 Technoprobe Spa Contact probe for testing head
WO2016146499A1 (en) * 2015-03-13 2016-09-22 Technoprobe S.P.A. Testing head with vertical probes having an improved sliding movement within respective guide holes and correct holding of the probes within the testing head under different operative conditions
JP6654061B2 (ja) * 2016-02-23 2020-02-26 日本電子材料株式会社 プローブガイド、プローブカード及びプローブガイドの製造方法
IT201600084921A1 (it) * 2016-08-11 2018-02-11 Technoprobe Spa Sonda di contatto e relativa testa di misura di un’apparecchiatura di test di dispositivi elettronici
JP6781598B2 (ja) * 2016-09-16 2020-11-04 日本電子材料株式会社 プローブカード
CN112424615B (zh) * 2018-07-13 2025-02-07 日本电产理德股份有限公司 检查治具以及检查装置
CN111403937A (zh) * 2020-03-24 2020-07-10 东莞立德精密工业有限公司 金属端子及其制作方法
CN113721051B (zh) * 2020-05-26 2023-12-01 旺矽科技股份有限公司 具有线型探针的探针头
CN115248338B (zh) * 2021-04-27 2025-09-23 芯卓科技(浙江)有限公司 探针结构及其探针卡装置

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