JP2024040302A5 - - Google Patents

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Publication number
JP2024040302A5
JP2024040302A5 JP2024017225A JP2024017225A JP2024040302A5 JP 2024040302 A5 JP2024040302 A5 JP 2024040302A5 JP 2024017225 A JP2024017225 A JP 2024017225A JP 2024017225 A JP2024017225 A JP 2024017225A JP 2024040302 A5 JP2024040302 A5 JP 2024040302A5
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JP
Japan
Prior art keywords
sample holder
holder according
porous member
hole
dense layer
Prior art date
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Application number
JP2024017225A
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English (en)
Japanese (ja)
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JP2024040302A (ja
JP7802835B2 (ja
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Priority claimed from JP2019212440A external-priority patent/JP7433857B2/ja
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Priority to JP2024017225A priority Critical patent/JP7802835B2/ja
Publication of JP2024040302A publication Critical patent/JP2024040302A/ja
Publication of JP2024040302A5 publication Critical patent/JP2024040302A5/ja
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Publication of JP7802835B2 publication Critical patent/JP7802835B2/ja
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JP2024017225A 2019-11-25 2024-02-07 試料保持具 Active JP7802835B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2024017225A JP7802835B2 (ja) 2019-11-25 2024-02-07 試料保持具

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2019212440A JP7433857B2 (ja) 2019-11-25 2019-11-25 試料保持具
JP2024017225A JP7802835B2 (ja) 2019-11-25 2024-02-07 試料保持具

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP2019212440A Division JP7433857B2 (ja) 2019-11-25 2019-11-25 試料保持具

Publications (3)

Publication Number Publication Date
JP2024040302A JP2024040302A (ja) 2024-03-25
JP2024040302A5 true JP2024040302A5 (https=) 2024-04-02
JP7802835B2 JP7802835B2 (ja) 2026-01-20

Family

ID=76088123

Family Applications (2)

Application Number Title Priority Date Filing Date
JP2019212440A Active JP7433857B2 (ja) 2019-11-25 2019-11-25 試料保持具
JP2024017225A Active JP7802835B2 (ja) 2019-11-25 2024-02-07 試料保持具

Family Applications Before (1)

Application Number Title Priority Date Filing Date
JP2019212440A Active JP7433857B2 (ja) 2019-11-25 2019-11-25 試料保持具

Country Status (1)

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JP (2) JP7433857B2 (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2023006679A (ja) * 2021-06-30 2023-01-18 Toto株式会社 静電チャック
JP7514815B2 (ja) * 2021-12-22 2024-07-11 日本碍子株式会社 半導体製造装置用部材

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5633766B2 (ja) 2013-03-29 2014-12-03 Toto株式会社 静電チャック
US10770270B2 (en) 2016-06-07 2020-09-08 Applied Materials, Inc. High power electrostatic chuck with aperture-reducing plug in a gas hole
JP6865145B2 (ja) 2016-12-16 2021-04-28 日本特殊陶業株式会社 保持装置
KR102438888B1 (ko) 2017-07-06 2022-08-31 엔지케이 인슐레이터 엘티디 반도체 제조 장치용 부재 및 그 제조법
WO2019082875A1 (ja) 2017-10-26 2019-05-02 京セラ株式会社 試料保持具
JP6489277B1 (ja) 2018-03-14 2019-03-27 Toto株式会社 静電チャック
JP6504532B1 (ja) 2018-03-14 2019-04-24 Toto株式会社 静電チャック
JP7002014B2 (ja) 2018-10-30 2022-01-20 Toto株式会社 静電チャック
JP7441402B2 (ja) 2019-03-05 2024-03-01 Toto株式会社 静電チャック、および処理装置

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