JP2024051478A5 - - Google Patents
Info
- Publication number
- JP2024051478A5 JP2024051478A5 JP2022157666A JP2022157666A JP2024051478A5 JP 2024051478 A5 JP2024051478 A5 JP 2024051478A5 JP 2022157666 A JP2022157666 A JP 2022157666A JP 2022157666 A JP2022157666 A JP 2022157666A JP 2024051478 A5 JP2024051478 A5 JP 2024051478A5
- Authority
- JP
- Japan
- Prior art keywords
- metal film
- vibration
- disposed
- support portion
- pad electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2022157666A JP2024051478A (ja) | 2022-09-30 | 2022-09-30 | 振動素子 |
| US18/476,700 US20240113689A1 (en) | 2022-09-30 | 2023-09-28 | Vibrator Element |
| CN202311272102.4A CN117811535A (zh) | 2022-09-30 | 2023-09-28 | 振动元件 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2022157666A JP2024051478A (ja) | 2022-09-30 | 2022-09-30 | 振動素子 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2024051478A JP2024051478A (ja) | 2024-04-11 |
| JP2024051478A5 true JP2024051478A5 (https=) | 2025-08-28 |
Family
ID=90418780
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2022157666A Pending JP2024051478A (ja) | 2022-09-30 | 2022-09-30 | 振動素子 |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | US20240113689A1 (https=) |
| JP (1) | JP2024051478A (https=) |
| CN (1) | CN117811535A (https=) |
-
2022
- 2022-09-30 JP JP2022157666A patent/JP2024051478A/ja active Pending
-
2023
- 2023-09-28 US US18/476,700 patent/US20240113689A1/en active Pending
- 2023-09-28 CN CN202311272102.4A patent/CN117811535A/zh active Pending
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