JPWO2022230677A5 - - Google Patents
Download PDFInfo
- Publication number
- JPWO2022230677A5 JPWO2022230677A5 JP2023517437A JP2023517437A JPWO2022230677A5 JP WO2022230677 A5 JPWO2022230677 A5 JP WO2022230677A5 JP 2023517437 A JP2023517437 A JP 2023517437A JP 2023517437 A JP2023517437 A JP 2023517437A JP WO2022230677 A5 JPWO2022230677 A5 JP WO2022230677A5
- Authority
- JP
- Japan
- Prior art keywords
- outer edge
- convex portion
- shape
- frame
- actuator according
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004519 manufacturing process Methods 0.000 claims 2
- 239000000853 adhesive Substances 0.000 claims 1
- 230000001070 adhesive effect Effects 0.000 claims 1
- 239000002184 metal Substances 0.000 claims 1
- 238000000034 method Methods 0.000 claims 1
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2021074741 | 2021-04-27 | ||
| JP2021074741 | 2021-04-27 | ||
| PCT/JP2022/017808 WO2022230677A1 (ja) | 2021-04-27 | 2022-04-14 | アクチュエータ、ポンプ、アクチュエータの製造方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JPWO2022230677A1 JPWO2022230677A1 (https=) | 2022-11-03 |
| JPWO2022230677A5 true JPWO2022230677A5 (https=) | 2023-10-19 |
| JP7485212B2 JP7485212B2 (ja) | 2024-05-16 |
Family
ID=83847451
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2023517437A Active JP7485212B2 (ja) | 2021-04-27 | 2022-04-14 | アクチュエータ、ポンプ、アクチュエータの製造方法 |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US12595788B2 (https=) |
| JP (1) | JP7485212B2 (https=) |
| CN (1) | CN117203428A (https=) |
| WO (1) | WO2022230677A1 (https=) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2025197618A1 (ja) * | 2024-03-19 | 2025-09-25 | 株式会社村田製作所 | アクチュエータおよび流体制御装置 |
| WO2026070336A1 (ja) * | 2024-09-26 | 2026-04-02 | 株式会社村田製作所 | アクチュエータ |
Family Cites Families (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE10201027C1 (de) * | 2002-01-11 | 2003-08-07 | Eads Deutschland Gmbh | Flüssigkeitspumpe |
| JP2006207436A (ja) * | 2005-01-26 | 2006-08-10 | Matsushita Electric Works Ltd | 圧電ダイヤフラムポンプ |
| KR100891245B1 (ko) * | 2005-01-26 | 2009-04-01 | 파나소닉 전공 주식회사 | 압전구동 격막펌프 |
| JP2008180161A (ja) * | 2007-01-25 | 2008-08-07 | Star Micronics Co Ltd | ダイヤフラムポンプ |
| KR101333542B1 (ko) | 2010-05-21 | 2013-11-28 | 가부시키가이샤 무라타 세이사쿠쇼 | 유체 펌프 |
| CN103140674B (zh) * | 2011-04-11 | 2016-06-08 | 株式会社村田制作所 | 致动器支承结构及泵装置 |
| JP5682513B2 (ja) * | 2011-09-06 | 2015-03-11 | 株式会社村田製作所 | 流体制御装置 |
| JP6127361B2 (ja) | 2011-11-08 | 2017-05-17 | 株式会社村田製作所 | 流体制御装置 |
| JP6001482B2 (ja) * | 2013-03-25 | 2016-10-05 | 京セラ株式会社 | 入力装置および電子機器 |
| WO2015125843A1 (ja) * | 2014-02-21 | 2015-08-27 | 株式会社村田製作所 | 流体制御装置およびポンプ |
| US10284986B2 (en) * | 2015-04-29 | 2019-05-07 | Goertek Inc. | Piezoelectric speaker and method for forming the same |
| JP2017052135A (ja) * | 2015-09-08 | 2017-03-16 | セイコーエプソン株式会社 | Memsデバイス、液体噴射ヘッド、液体噴射装置、memsデバイスの製造方法、及び液体噴射ヘッドの製造方法 |
| TWI683959B (zh) * | 2016-09-05 | 2020-02-01 | 研能科技股份有限公司 | 壓電致動器及其所適用之微型流體控制裝置 |
-
2022
- 2022-04-14 WO PCT/JP2022/017808 patent/WO2022230677A1/ja not_active Ceased
- 2022-04-14 JP JP2023517437A patent/JP7485212B2/ja active Active
- 2022-04-14 CN CN202280031127.2A patent/CN117203428A/zh active Pending
-
2023
- 2023-10-12 US US18/485,450 patent/US12595788B2/en active Active
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP4553043B2 (ja) | 音響的トランスデューサユニット | |
| US6653762B2 (en) | Piezoelectric type electric acoustic converter | |
| JPWO2022230677A5 (https=) | ||
| JP7609780B2 (ja) | 圧電素子 | |
| JP2009293566A (ja) | 圧電駆動体及び圧電ブロア | |
| US10972840B2 (en) | Speaker | |
| WO2002007234A9 (en) | Piezoelectric device and acousto-electric transducer and method for manufacturing the same | |
| EP1473777A3 (en) | Solid-state imaging device and method for producing the same | |
| JPH08335844A (ja) | 圧電共振部品及びその製造方法 | |
| CN114157269B (zh) | 谐振器组件及柔性滤波器 | |
| US11091829B2 (en) | Metal mask, metal mask plate and method of manufacturing the same | |
| JP7485212B2 (ja) | アクチュエータ、ポンプ、アクチュエータの製造方法 | |
| JP2016175274A5 (https=) | ||
| JPH06273439A (ja) | 加速度センサ | |
| JP2022119126A5 (https=) | ||
| JP2008205888A5 (https=) | ||
| KR101612456B1 (ko) | 압전 파이버 컴포지트 구조체 및 이를 이용한 압전 스피커 | |
| KR20130072104A (ko) | 전극 기체 | |
| JPWO2022230676A5 (https=) | ||
| JPH05291467A (ja) | リードフレームおよび半導体装置 | |
| TW201521156A (zh) | 蓋體部、使用此蓋體部之電子裝置用之封裝體及電子裝置 | |
| JP3994758B2 (ja) | チップ型電子部品の製造方法 | |
| JP2014072883A (ja) | 圧電デバイス | |
| JPWO2022130670A5 (https=) | ||
| KR101832566B1 (ko) | 압전 충격 센서 및 그 제조 방법 |