CN117203428A - 致动器、泵、致动器的制造方法 - Google Patents

致动器、泵、致动器的制造方法 Download PDF

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Publication number
CN117203428A
CN117203428A CN202280031127.2A CN202280031127A CN117203428A CN 117203428 A CN117203428 A CN 117203428A CN 202280031127 A CN202280031127 A CN 202280031127A CN 117203428 A CN117203428 A CN 117203428A
Authority
CN
China
Prior art keywords
outer edge
frame
shape
actuator
plan
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202280031127.2A
Other languages
English (en)
Chinese (zh)
Inventor
田中伸拓
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Publication of CN117203428A publication Critical patent/CN117203428A/zh
Pending legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F04B43/043—Micropumps
    • F04B43/046—Micropumps with piezoelectric drive
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B45/00—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids
    • F04B45/04—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having plate-like flexible members, e.g. diaphragms
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B45/00—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids
    • F04B45/04—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having plate-like flexible members, e.g. diaphragms
    • F04B45/047—Pumps having electric drive
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/02—Forming enclosures or casings
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H10N30/2047—Membrane type
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/88—Mounts; Supports; Enclosures; Casings

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Reciprocating Pumps (AREA)
CN202280031127.2A 2021-04-27 2022-04-14 致动器、泵、致动器的制造方法 Pending CN117203428A (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2021074741 2021-04-27
JP2021-074741 2021-04-27
PCT/JP2022/017808 WO2022230677A1 (ja) 2021-04-27 2022-04-14 アクチュエータ、ポンプ、アクチュエータの製造方法

Publications (1)

Publication Number Publication Date
CN117203428A true CN117203428A (zh) 2023-12-08

Family

ID=83847451

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202280031127.2A Pending CN117203428A (zh) 2021-04-27 2022-04-14 致动器、泵、致动器的制造方法

Country Status (4)

Country Link
US (1) US12595788B2 (https=)
JP (1) JP7485212B2 (https=)
CN (1) CN117203428A (https=)
WO (1) WO2022230677A1 (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2025197618A1 (ja) * 2024-03-19 2025-09-25 株式会社村田製作所 アクチュエータおよび流体制御装置
WO2026070336A1 (ja) * 2024-09-26 2026-04-02 株式会社村田製作所 アクチュエータ

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006207436A (ja) * 2005-01-26 2006-08-10 Matsushita Electric Works Ltd 圧電ダイヤフラムポンプ
CN102597520A (zh) * 2010-05-21 2012-07-18 株式会社村田制作所 流体泵
JP2013100746A (ja) * 2011-11-08 2013-05-23 Murata Mfg Co Ltd 流体制御装置
JP2014186653A (ja) * 2013-03-25 2014-10-02 Kyocera Corp 入力装置および電子機器

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10201027C1 (de) * 2002-01-11 2003-08-07 Eads Deutschland Gmbh Flüssigkeitspumpe
KR100891245B1 (ko) * 2005-01-26 2009-04-01 파나소닉 전공 주식회사 압전구동 격막펌프
JP2008180161A (ja) * 2007-01-25 2008-08-07 Star Micronics Co Ltd ダイヤフラムポンプ
CN103140674B (zh) * 2011-04-11 2016-06-08 株式会社村田制作所 致动器支承结构及泵装置
JP5682513B2 (ja) * 2011-09-06 2015-03-11 株式会社村田製作所 流体制御装置
WO2015125843A1 (ja) * 2014-02-21 2015-08-27 株式会社村田製作所 流体制御装置およびポンプ
US10284986B2 (en) * 2015-04-29 2019-05-07 Goertek Inc. Piezoelectric speaker and method for forming the same
JP2017052135A (ja) * 2015-09-08 2017-03-16 セイコーエプソン株式会社 Ｍｅｍｓデバイス、液体噴射ヘッド、液体噴射装置、ｍｅｍｓデバイスの製造方法、及び液体噴射ヘッドの製造方法
TWI683959B (zh) * 2016-09-05 2020-02-01 研能科技股份有限公司 壓電致動器及其所適用之微型流體控制裝置

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006207436A (ja) * 2005-01-26 2006-08-10 Matsushita Electric Works Ltd 圧電ダイヤフラムポンプ
CN102597520A (zh) * 2010-05-21 2012-07-18 株式会社村田制作所 流体泵
JP2013100746A (ja) * 2011-11-08 2013-05-23 Murata Mfg Co Ltd 流体制御装置
JP2014186653A (ja) * 2013-03-25 2014-10-02 Kyocera Corp 入力装置および電子機器

Also Published As

Publication number Publication date
WO2022230677A1 (ja) 2022-11-03
JPWO2022230677A1 (https=) 2022-11-03
JP7485212B2 (ja) 2024-05-16
US20240044323A1 (en) 2024-02-08
US12595788B2 (en) 2026-04-07

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